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8182589 |
Acetylene process gas purification methods and systems
Methods and systems of purifying an acetylene process gas are described. The methods may include the steps of providing an acetylene vessel containing source acetylene mixed with a solvent...
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8163070 |
Method and system for extracting carbon dioxide by anti-sublimation at raised pressure
A method for removal of CO2 from a gas stream by anti-sublimation, comprising the steps of: a) introducing a gas stream containing CO2 into a frosting vessel; b) reducing the temperature of at...
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8157898 |
Condenser
A condenser having improved condensation performance is provided. The condenser includes a plurality of cooling pipes, being disposed in a chassis to which the steam is introduced, through the...
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8147786 |
Gas exhaust system of film-forming apparatus, film-forming apparatus, and method for processing exhaust gas
A film-forming apparatus includes a processing chamber, and TiCl4 gas and NH3 gas are supplied into the processing chamber for forming a TiN film on a substrate W in the processing chamber by CVD....
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8092580 |
Condensation process and containment vessel
A condenser and a containment vessel adapted to efficiently condense a gas out of a mixture of condensing and non-condensing gases. In condensers, the fraction of gas within a condenser made up of...
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8082741 |
Integral facet cryopump, water vapor pump, or high vacuum pump
A cluster tool has a transfer chamber, and a load lock chamber. An adaptor is configured to be coupled between the transfer chamber and the load lock chamber. The adaptor has an adaptor housing...
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8079224 |
Field integrated pulse tube cryocooler with SADA II compatibility
A unitary pulse tube expander for removable attachment to a SADA II coldfinger and insertion within a Dewar assembly. The regenerator of the pulse tube expander is encased in a regenerator sleeve...
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8061056 |
Apparatus and method for drying a solid or liquid sample
This disclosure describes a sample drying system and method that provides a high rates of evaporation and sublimation that is commonly employed in compound processing procedures. The drying...
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8048208 |
Method and apparatus for depositing chalcogens
A method and device for separation of chalcogens from waste gases in process installations are provided so that complete and reliable removal of chalcogens occurs continuously during nonstop...
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7997089 |
Method and apparatus for regeneration water
Ice condensed in a portion in a case in which a cryogenic refrigerator is installed, which is cooled by the cryogenic refrigerator, is melted by increasing a temperature of the ice to a melting...
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7992394 |
Cold trap and cold trap regeneration method
A cold trap is provided with a cold panel provided in a pumping path such that the panel is exposed, a refrigerator thermally coupled to the cold panel and operative to cool the cold panel; and a...
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7988755 |
Byproduct collecting apparatus of semiconductor apparatus
Provided is a byproduct collecting apparatus for efficiently collecting reaction-byproducts contained in an exhaust gas exhausted from a process chamber during a semiconductor manufacturing...
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7854128 |
Vacuum pump damping adapter
The invention concerns a damping adapter (3) insertable in a suction duct between a service chamber (2) and a vacuum pump (1). The adapter (3) consists of a tubular duct wall (6) in the form of a...
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7837770 |
Apparatus and method for collecting residual products for FPD and semiconductor
An apparatus for efficiently collecting reaction by-products in exhaust gases of a semiconductor processing or flat panel display processing device is provided. The collection apparatus includes a...
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7797950 |
Active thermal insulation system utilizing phase change material and a cool air source
An active thermal insulation system is disclosed. The system utilizes a cool air source in conjunction with a phase change material and/or conventional insulation. In a controlled manner, the cool...
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7788942 |
Helium management control system
A helium management control system for controlling the helium refrigerant supply from a common manifold supplies a plurality of cryogenic refrigerators with an appropriate helium supply. The system...
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7780767 |
Condensation process and condenser
A condenser and a containment vessel adapted to efficiently condense a gas out of a mixture of condensing and non-condensing gases. In condensers, the fraction of gas within a condenser made up of...
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7565809 |
Circulation-type liquid helium reliquefaction apparatus with contaminant discharge function, method of discharging contaminant from the apparatus, and refiner and transfer tube both of which are used for the apparatus
This invention relates to a circulation type liquid helium recondensation device with a contaminant-purging function capable of vaporizing and removing contaminants deposited on the refiner in the...
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7523618 |
Cryo pump
In a cryo pump 20 that is used in a process chamber 10 into which a process gas is introduced and that includes a first-stage panel, a heat shield plate 24, and a second-stage panel 28, a notch for...
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7488374 |
Trapping device, processing system, and method removing impurities
A trapping device is disclosed which is arranged in a vacuum exhaust system (6) for removing gaseous impurities contained in the exhaust gas flowing through the vacuum exhaust system (6) which has...
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7481066 |
Vacuum device
A vacuum device comprises a plurality of cryopumps (10) connected with one or a plurality of vacuum chambers. The cryopumps (10) are connected via media supply conduits (12) and media return...
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7455720 |
Method and apparatus for preventing products of TiCL4 and NH3 or other feed gas reactions from damaging vacuum pumps in TiN or other deposition systems
In a deposition system, such as a TiN deposition system where TiCl4 and NH3 are reacted in a process chamber to produce TiN thin film coatings, a second reactor is included between the process...
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7425224 |
High pressure chemical vapor trapping method
A high pressure trapping system is provided to collect chemical vapor by-products in successive stages through chemical reasons conducted at progressively colder temperatures. A hot trap receives...
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7415831 |
Integration of automated cryopump safety purge
A system and method is provided to control a purge valve during an unsafe condition associated with a cryopump. An electronic controller may be used to control the opening and closing of one or...
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7413411 |
Electronically controlled vacuum pump
A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular...
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7389645 |
Radiation shield for cryogenic pump for high temperature physical vapor deposition
A method and apparatus to shield a cryogenic pump in a physical vapor deposition chamber comprising a physical vapor deposition chamber, a gasket in thermal contact with the physical vapor...
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7370482 |
Rapidly regenerating cryogenic trap
The cryogenic trap of the invention comprises, in a hollow body (3) having an access valve (2) and an outlet valve (6), a cold core (11) associated with a plate (13) having low thermal inertia and...
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7320224 |
Method and apparatus for detecting and measuring state of fullness in cryopumps
The present system and method provides a mechanism for monitoring the level of fullness of a cryopump by measuring the cryopump adsorption capacity. An ion gauge or other total pressure gauge is in...
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7313922 |
High conductance cryopump for type III gas pumping
A cryopump provides for high pumping speed of Type III gases. An open configuration of a frontal array provides high conductance of gases into a radiation shield which is shaped to focus gases...
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7300261 |
Vibration damper with nested turbo molecular pump
A gas turbo pump assembly for connection to a port of a vacuum chamber and having high throughput with low vibration. The assembly comprises a turbo pump and a vibration damper. The pump has a pump...
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7297055 |
Vacuum-insulating system and method for generating a high-level vacuum
A method of generating a high-level vacuum comprises evacuating a chamber having a substantially-pure gas therein to a medium-level vacuum, and freezing the residual gas to generate the high-level...
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7287390 |
Optical pumping modules, polarized gas blending and dispensing systems, and automated polarized gas distribution systems and related devices and methods
Hyperpolarizers for producing polarized noble gases can include: (a) a control module configured to direct the operation of a hyperpolarizer to produce polarized noble gas via spin-exchange...
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7287391 |
Automated modular hyperpolarizers and related devices and methods
Modular expandable hyperpolarizers include a central control module and at least one optical pumping module that can be expandable to a plurality of optical pumping modules that can be separately...
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7228687 |
Valve device
A valve device, according to the invention, for connecting to a cryopump, wherein the valve device comprises a body with a through-channel and a connection flange at one end of the through-channel...
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7217306 |
Trap apparatus
A continuous processing trap apparatus is capable of increasing the trapping efficiency while maintaining conductance required by a vacuum chamber. The trap apparatus includes an exhaust passage...
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7201004 |
Panels for pulse tube cryopump
The pulse tubes (165, 175) and regenerators (160, 170) contained within a cryopump housing (210) are arranged in a way that facilitates the fabrication and installation of the cryopanels (265). The...
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7194867 |
Integrated rough/purge/vent (RPV) valve
A single ducted valve assembly provides an integrated cryopump valve having a purge valve port connecting the assembly to a cryopump with a coaxial connection having an inner duct and an outer...
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7165406 |
Integral pulse tube refrigerator and cryopump
An integrated cryopump and 2 stage pulse tube refrigeration system (100) comprising a cryopump, a compressor for a pulse tube refrigerator, a pulse tube refrigerator located within the vacuum...
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7155919 |
Cryopump temperature control of arrays
An electronic controller maintains the operating temperature of a cryopump by controlling a heater coupled to the cryopump. The heater is coupled to a cryopumping surface of the cryopump. The...
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7114341 |
Cryopump with two-stage pulse tube refrigerator
Disclosed is a two-stage pulse tube cryopump cooling system in which the pulse tubes and valves are inline, with the hot ends of the pulse tubes at the top and the valve mechanism is at the bottom...
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7044997 |
Process byproduct trap, methods of use, and system including same
A trap device including at least one substance delivery element for introducing a substance therein is disclosed. The delivered substance may influence the nature of deposits that have formed...
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7037083 |
Radiation shielding coating
A vacuum conduit connected to a vacuum pump has a shield surface which absorbs radiation to reduce the total radiation falling on the vacuum pump. The vacuum system includes the vacuum conduit...
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6907740 |
Gas charging system for fill of gas storage and dispensing vessels
An apparatus and method for charging a gas storage and dispensing vessel with gas to a predetermined pressure level, e.g., a gas to be employed in a semiconductor manufacturing operation such as a...
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6895766 |
Fail-safe cryopump safety purge delay
An electronic controller is integral with a cryopump and provides an offline solution for purging a cryopump and an exhaust line during unsafe conditions. The electronic controller is responsible...
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6835221 |
Exhaust gas filtration device and auxiliary filtration device
The present invention has an object to improve the efficiency of collection of solidification constituents and solids in exhaust gas and to prevent early blockage of the filter without damaging the...
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6830600 |
Cold traps for vapor lubrication processes
A method for preventing migration of lubrication molecules into adjacent process chambers while coating a thin layer of lubricant over a storage surface of a disc using a vapor lubrication process....
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6831022 |
Method and apparatus for removing water vapor as a byproduct of chemical reaction in a wafer processing chamber
A system, apparatus and/or method is provided for removing water vapor from a wafer processing chamber generated as a byproduct of wafer processing. A water vapor trap is used to collect the water...
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6814812 |
Double acting cold trap
A double acting cold trap equipped with a set of exhaust gas condensing fins and a set of exhaust gas condensing plates is disclosed. The invention also discloses a double acting cold trap that...
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6755028 |
Electronically controlled cryopump
In a cryogenic vacuum pump, after determining that a power fail recovery mode is on, and that the temperature is below a setpoint, the cryopump is automatically cooled. If the power fail recovery...
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6746516 |
Method and apparatus for treating air emissions and recovering products therefrom
An air treatment system including an exhaust including an exhaust annulus defined by an inner exhaust wall, an outer exhaust wall circumscribing the inner wall, and a pressurized annulus between...
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