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7579071 |
Polishing pad containing embedded liquid microelements and method of manufacturing the same
A polishing pad is provided. The polishing pad includes a polishing layer composed of a polymeric matrix and liquid microelements embedded in the polymeric matrix. Open pores defined by the...
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7524475 |
Cerium oxide powder for one-component CMP slurry, preparation method thereof, one-component CMP slurry composition comprising the same, and method of shallow trench isolation using the slurry
A cerium oxide powder for one-component CMP slurry, which has a specific surface area of 5 m 2 /g or more, and a ratio of volume fraction of pores with a diameter of 3 nm or more to that of pores...
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7311862 |
Method for manufacturing microporous CMP materials having controlled pore size
A method of manufacturing a chemical-mechanical polishing (CMP) pad comprises the steps of (a) forming a layer of a polymer resin liquid solution (i.e., a polymer resin dissolved in a solvent); (b)...
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7037179 |
Methods and apparatuses for making and using planarizing pads for mechanical and chemical-mechanical planarization of microelectronic substrates
Methods and apparatuses for planarizing a microelectronic substrate. In one embodiment, a planarizing pad for mechanical or chemical-mechanical planarization includes a base section and a plurality...
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7029747 |
Integral polishing pad and manufacturing method thereof
An integral polishing pad includes an elastic support layer and a polishing layer, which is formed on the elastic support layer and has a higher hardness than the elastic support layer. The elastic...
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6998166 |
Polishing pad with oriented pore structure
The invention provides a polishing pad for chemical-mechanical polishing comprising a body, a polishing surface, and a plurality of elongated pores, wherein about 10% or more of the elongated pores...
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6887288 |
Superfinishing grindstone
A superfinishing grindstone suitable for precision grinding, that contains either RB (rice bran) ceramic fine grains or CRB (carbonized rice bran) ceramic fine grains or a combination of both, for...
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6887287 |
Vitrified superabrasive tool and method of manufacture
An abrasive tool includes a superabrasive grain component, a filler component that comprises hollow bodies and a vitreous bond. Natural and synthetic diamond, cubic boron nitride and combinations...
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6860959 |
Nonwoven abrasive material
An abrasive material comprises an integral mass of discrete lengths, not bonded to each other, of abrasive-coated non-woven synthetic fibres. In particular, the entanglement force between the said...
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6790126 |
Agglomerate abrasive grain and a method of making the same
Agglomerate abrasive grain is disclosed. The agglomerate abrasive grain can be incorporated into abrasive products such as coated abrasives, bonded abrasives, nonwoven abrasives, and abrasive...
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6773473 |
Supercritical fluid extraction
A method is provided for fabricating an abrasive article having porosity. The method includes blending a mixture of abrasive grain, bond material, and pore inducer, in which the pore inducer is...
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6749485 |
Hydrolytically stable grooved polishing pads for chemical mechanical planarization
An improved pad and process for polishing metal damascene structures on a semiconductor wafer. The process includes the steps of pressing the wafer against the surface of a polymer sheet in...
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6733876 |
Flexible abrasive article
The present invention provides a flexible abrasive article containing minimal releaseable amounts of physical and chemical contaminants that may be used to clean surfaces. The abrasive article is...
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6645263 |
Cellular abrasive article
Abrasive articles abrasive articles (e.g., abrasive wheels) comprised of abrasive agglomerate particles dispersed within cellular polymeric material, and methods of making and using the abrasive...
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6641627 |
Abrasive articles
Abrasive articles (e.g., abrasive wheels) comprised of abrasive particles and polymeric material such as a polymeric reaction product of components comprising saturated polyol, saturated...
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6514301 |
Foam semiconductor polishing belts and pads
A method for making high density foam semiconductor polishing pads and belts with controlled, reproducible microcellular structure by mechanical frothing. The method involves agitating a liquid...
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6500220 |
Impregnated grinding wheel
A vitreous bonded abrasive article, more particularly a grinding wheel, having improved grinding performance is provided wherein the open pores of the abrasive article contain an impregnant which...
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6485533 |
Porous grinding stone and method of production thereof
An abrasive-particle grinder and a method of manufacturing the grinder, in which the bonding force between super-abrasive particles and a binder is enhanced, attrition of the binder during a...
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6485822 |
Multi-layer combination sponge
A multi-layer combination sponge includes a scrubbing layer and a cleaning layer that are each laminated to an intermediate layer. The intermediate layer is more compressible than the cleaning...
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6477926 |
Polishing pad
A polishing pad is described as comprising, (a) particulate polymer selected from particulate thermoplastic polymer (e.g., particulate thermoplastic polyurethane), particulate crosslinked polymer...
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6450870 |
Vitrified grindstone having pores partially filled with resin, and method of manufacturing the same
A vitrified grindstone having a vitrified abrasive structure which has pores and which includes abrasive grains and an inorganic bonding agent that holds the abrasive grains together, wherein...
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6440185 |
Resinoid grinding wheel
A resinoid grinding wheel of the present invention has low grinding resistance and is capable of providing a ground workpiece excellent in ground surface quality without burn mark while maintaining...
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6428586 |
Method of manufacturing a polymer or polymer/composite polishing pad
Manufacture of a polishing pad for polishing a semiconductor substrate, involves, transporting a backing layer to successive manufacturing stations, supplying a fluid phase polymer composition onto...
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6428587 |
Vitrified abrasive solid mass having pores filled with resin, and solid lubricant agent
An abrasive vitreous bonded solid mass having a vitrified abrasive structure comprising abrasive grains which are held together by an inorganic bonding agent, the abrasive structure is impregnated...
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6422926 |
Foam buffing pad and method of manufacturing thereof
A rotary foam buffing pad is provided with a concave working face which allows the operator to provide true graduated surface contact in applying polish, buffing or glazing compounds, while...
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6406504 |
Resilient abrasive article with hard anti-loading size coating
A resilient abrasive article includes a resilient elongatable substrate, abrasive particles adhesively bonded to the substrate with a flexible make coat, and a hard size coat applied over the...
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6391072 |
Abrasive grain
Alpha alumina abrasive grits which are particularly well-suited to medium to low pressure grinding applications wherein the grits comprise uniformly dispersed microvoids.
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6383238 |
Resin bonded abrasive tool
The abrasive particle layer of resin bonded abrasive tool is constructed by resin binder phase consisting of heat hardening resin, for example, phenol resin etc. and super abrasive particle of...
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6375692 |
Method for making microabrasive tools
A microabrasive tool is formed from a slurry including liquid, abrasive grains, a bonding material, and a polymer—for example, gellan gum. The slurry is cast in a mold, and the polymer is...
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6187069 |
Composite bond wheel and wheel having resin bonding phase
The present invention provides a composite bond wheel that has both excellent wear resistance and self-edging properties. The composite bond wheel of the invention includes: a grain layer...
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6039631 |
Polishing method, abrasive material, and polishing apparatus
Disclosed is a polishing method including the step of: polishing a surface of a member to be polished by rotating and sliding an abrasive wheel holding fixed abrasive grains on the surface of the...
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6007590 |
Method of making a foraminous abrasive article
A method for manufacturing a foraminous abrasive article whereby abrasive particles are concentrated in an external surface region of a foraminous substrate. The method includes the steps of:...
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5928773 |
Foamed glass articles and methods of making same and methods of controlling the pH of same within specific limits
A neutral pH foamed glass article is produced from a mixture of pulverized glass particles, foaming agent, binder, and water, wherein the glass article is heated to remove excess moisture and...
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5885312 |
Grinding composition using abrasive particles on bubbles
The instant invention relates generally to abrasive stones for use in processing workpiece surfaces. The abrasive stones generally are produced by combining an epoxy novalac resin mixture with...
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5849051 |
Abrasive foam article and method of making same
Abrasive foam articles and a method of manufacture of such articles are described. The articles of the invention comprise a flexible and resilient foam substrate having first and second major...
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5821184 |
Foamed glass article for preparing surfaces, use therefor, and method of making same
A foamed glass article for preparing surfaces, the use therefor, and a method of making same are provided. The foamed glass article is in the form of a block, disk or similar product, and is used...
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5738696 |
Method for making high permeability grinding wheels
An efficient method for manufacturing bonded abrasive articles comprises the use of elongated abrasive grain having a length to cross-sectional width aspect ratio of at least 5:1 to yield abrasive...
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5738697 |
High permeability grinding wheels
An abrasive article having certain minimum levels of permeability to fluids comprises about 40 to 80%, by volume interconnected porosity and effective amounts of abrasive grain and bond to carry...
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5713968 |
Abrasive foam grinding composition
The present invention relates generally to abrasive stone pads for use in processing workpiece surfaces. The abrasive stones generally are produced by combining a phenolic resin mixture with a...
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5711774 |
Silicon carbide abrasive wheel
A vitreous bonded abrasive grinding wheel comprises silicon carbide abrasive grain, hollow ceramic spheres and a low temperature, high strength bond. The wheel has improved corner or profile...
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5685935 |
Method of preparing melt bonded nonwoven articles
A nonwoven abrasive or scouring article having at least one major surface and an interior region comprises an open, lofty web of first and second crimped, staple organic thermoplastic fibers,...
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5647879 |
Grinding media and a production method thereof
A new grinding medium consisting essentially of a synthetic resin matrix in which small-sized foam, coarse powdery abrasives and fine powdery abrasives are dispersed is provided. A powder having a...
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5637123 |
Porous metal bond grinder and method of manufacturing the same
A porous iron system metal bond diamond grinder using diamond as grinding particles and iron system metal powder as binder so as to have a large number of pores in the binder. The grinding...
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5595579 |
Soap absorbing, soap dispensing ceramic stone for skin ex-foliant treatment
A liquid soap absorbent, liquid soap dispensing synthetic ceramic stone of specified porosity with interconnecting voids throughout the body of the stone. The surface of the stone is mildly...
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5578362 |
Polymeric polishing pad containing hollow polymeric microelements
The present invention relates to an article of manufacture or polishing pad for altering a surface of a workpiece, such as polishing or planarizing a semiconductor device. The article includes a...
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5514192 |
Plastic stonewashing stone and method
A porous and abrasive plastic stone is disclosed for use in a stonewashing process to commercially age garments or fabric. The plastic stone replaces the pumice stone that is typically used in the...
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5472459 |
Soap absorbing, soap dispensing ceramic stone for skin ex-foliant treatment
A liquid soap absorbent, liquid soap dispensing synthetic ceramic stone of specified porosity with interconnecting voids throughout the body of the stone. The surface of the stone is mildly...
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5472461 |
Vitrified abrasive bodies
Improved hot-pressed vitrified bodies are described, which comprise an abrasive material, a vitreous bond; and at least one extender agent. The extender agent may be formed of hollow ceramic bodies...
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5443603 |
Light weight ceramic abrasive media
A method for manufacturing abrasive tumbling media comprising discrete abrasive particles having a preselected size and shape made by firing a formed mixture primarily comprising a particulate...
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5429648 |
Process for inducing porosity in an abrasive article
The invention is a process of manufacturing an abrasive article with the steps of forming an abrasive article in the unfired state comprising an abrasive, a vitreous bond and a polymer resin...
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