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7601049 |
Double side wafer grinder and methods for assessing workpiece nanotopology
A double side grinder comprises a pair of grinding wheels and a pair of hydrostatic pads operable to hold a flat workpiece (e.g., semiconductor wafer) so that part of the workpiece is positioned...
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7585205 |
Substrate polishing apparatus and method
A substrate polishing apparatus includes a substrate holding mechanism having a head for holding a substrate to be polished, and a polishing mechanism including a polishing table with a polishing...
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7544587 |
Wafer dividing method and wafer dividing apparatus
A method of dividing, along lattice pattern-like dividing lines, a wafer which has the lattice pattern-like dividing lines and a polymer film on the front surface of a substrate and is processed to...
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7541767 |
Decentralized error response in cam disk axes
The invention relates to a method for error response when an error occurs in response to a motion, particularly of a drive mechanism in a machine, the motion taking place while using at least one...
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7530879 |
Apparatus for reworking a steel edge of a ski
An apparatus is described for reworking a steel edge of a ski ( 1 ), comprising at least one grinding apparatus ( 16 ) made of a cup-like grinding wheel ( 18 ) which is driven by a motor ( 17 ) and...
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7527544 |
System of using offset gage for CMP polishing pad alignment and adjustment
A method and system are provided using an offset dial gage for alignment and adjustment of a polishing pad that has been attached to a turntable of a chemical mechanical polishing (CMP) device. In...
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7524232 |
Workpiece centering apparatus and method of centering workpiece
The workpiece centering apparatus is capable of highly reducing damage of a workpiece. The workpiece centering apparatus comprises: a guide plate being provided in a tray and covering a water inlet...
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7507143 |
Truing method for grinding wheel
In a grinding machine comprising conductive grinding wheels, the invention presents a truing technique capable of truing grindstone surfaces of grinding wheels at high precision in a short time. ...
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7452262 |
Knife sharpeners with improved knife guides
Various forms of knife guides are provided for knife sharpeners to minimize damage to the knife blade. One of the forms of knife guides comprises non-contact optical arrangements which includes a...
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7438775 |
Lens layout block device
A lens layout block device comprising a seal feeding device that supplies an elastic seal to a seal sticking position (A 5 ). The elastic seal is loaded in a tape loading part in the form of a seal...
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7438628 |
Device and control unit for belt sanding systems
A belt sanding system comprising a segmented sanding block including a plurality of individually controllable segments and one or more sanding belt deflecting rollers, a plurality of sensing...
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7435158 |
Initial position setting method of grinding wheel in vertical double disc surface grinding machine
The present invention provides an initial position setting method of grinding wheels, before starting a grinding operation, in a vertical double disc surface grinding machine for surface grinding...
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7431632 |
Control system and method for processing jewelry and the like
A control system for controlling processing of workpieces such as jewelry has gantry and gimbal units having x, y, z translational and x, y, z rotational degrees of freedom, the units carrying a...
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7422511 |
Element for detecting the amount of lapping having a resistive film electrically connected to the substrate
An element for detecting an amount of lapping of a stacked structure that includes a substrate and a magnetic field detecting sensor is provided. The element comprises: a resistive film that is...
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7416474 |
Planarization apparatus
The present invention is a planarization apparatus for planarizing a coating film applied on a substrate before the coating film is hardened, including a contact body such as a brush or sponge...
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7413499 |
Grinding process and apparatus with arrangement for grinding with constant grinding load
A process of grinding a surface of a workpiece, by a grinding tool rotated about its axis. The process includes a grinding step of grinding the workpiece surface, by pressing at least one of the...
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7412999 |
Label remover
The present invention relates to a hand held label removal apparatus, which provides a safe and easy removal of otherwise hard to remove labels that are affixed to various types of containers such...
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7377836 |
Versatile wafer refining
Methods of refining using a plurality of refining elements are discussed. A refining apparatus having refining elements that can be smaller than the workpiece being refined are disclosed. New...
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7354332 |
Technique for process-qualifying a semiconductor manufacturing tool using metrology data
A technique of the present invention utilizes qualification characteristics from a single wafer for qualifying a semiconductor manufacturing tool. Generally speaking, the technique commences with...
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7347765 |
Honing installation with several work stations
A honing installation for honing workpieces comprises a plurality of work stations, each work station being configured for performing at least one working step on a workpiece and at least part of...
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7331842 |
Contour follower for tool
A contour follower includes a plurality of sensors spaced around a waterjet nozzle, each of the sensors being configured to measure a distance between a working surface and a first plane,...
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7318767 |
Device and method for machine control
A data set (D) is provided for machine control of a grinding machine to determine time-efficient, collision-free travel paths. The data set has a collision parameter of “0” or “1” in each...
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7306849 |
Method and device to clean probes
A probe cleaning system automatically detects a surface of a probe cleaning device during a cleaning process by providing a predetermined finish on the surface of the probe cleaning device. The...
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7278902 |
Enabling location specific burnishing of a disk
Various embodiments of the present invention pertain to enabling location specific burnishing of a disk. According to one embodiment, the smoothness of a disk is evaluated by gliding over a disk to...
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7278901 |
Method and apparatus for measuring abrasion amount and pad friction force of polishing pad using thickness change of slurry film
A method and apparatus for measuring an abrasion amount and a friction force of a polishing pad using a thickness change of a slurry film in a chemical mechanical polishing operation are provided....
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7273406 |
Glass treatment system and method
A system for abrading and scoring glass. An abrading/scoring station includes a table for supporting a large sheet of glass on a generally flat support. A first tool support moves an abrading tool...
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7270593 |
Light beam targeting and positioning system for a paint or coating removal blasting system
A blasting system for the removal of coatings or paint from an underlying surface uses an optical device to position the blasting nozzle an appropriate stand-off distance from the surface. The...
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7258595 |
Polishing apparatus
A polishing apparatus comprises a polishing table having a polishing surface and a top ring for holding a substrate to be polished, in which the substrate when held by the top ring is pressed...
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7258594 |
Method and device for centerless cylindrical grinding
During centerless cylindrical grinding, attention must be paid to the fact that the workpiece ( 3 ) is placed in a very specific position between the grinding wheel ( 1 ), the regulating wheel ( 2...
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7246424 |
Magnetic devices having magnetic features with CMP stop layers
A magnetic device having a magnetic feature, the magnetic feature including a magnetic portion comprising a magnetic material, a region of non-magnetic material adjacent to the magnetic portion,...
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7238082 |
Workpiece headstock
Workpiece headstock for a machine tool, especially for a grinding machine,
with a spindle ( 6 ); with a clamping device ( 7 ), which is connected to the spindle ( 6 ) and which is used to...
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7226340 |
Grinding machine
The grinding machine ( 10 ) according to the invention serves in particular for the machining or production of tools. It comprises a machine bed 11 and a workpiece spindle ( 14 ) arranged...
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7207865 |
Apparatus for machining workpieces, in particular workpieces provided with cutting teeth
In an apparatus for machining workpieces, in particular workpieces provided with cutting teeth, such as bandsaw blades or circular-saw blades for example, comprising a base ( 12 ), a machining...
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7195543 |
Machine tool with 5 machining axes with a continuous grinding tool profilling system
A machine tool for machining a part by on-head and continuous grinding tool profiling includes a part holder support driven into rotation by first driving means around a first axis in a vertical...
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7182668 |
Methods for analyzing and controlling performance parameters in mechanical and chemical-mechanical planarization of microelectronic substrates
Methods and apparatuses for analyzing and controlling performance parameters in planarization of microelectronic substrates. In one embodiment, a planarizing machine for mechanical or...
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7175504 |
Vacuum suction holding apparatus and holding method, polishing apparatus using this holding apparatus, and device manufacturing method using this polishing apparatus
The vacuum suction holding apparatus of the present invention has a vacuum duct which is disposed inside a polishing head, with one end of this vacuum duct being opened in the attachment surface...
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7153185 |
Substrate edge detection
A chemical mechanical polishing apparatus and method can use an eddy current monitoring system and an optical monitoring system. Signals from the monitoring systems can be combined on an output...
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7150674 |
Both-side grinding method and both-side grinding machine for thin disc work
Detecting the deviation of the grinding wheel position from the amount of work deformation after grinding, and correctly adjusting the grinding wheel position, it provides both-side grinding...
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7121922 |
Method and apparatus for polishing a workpiece surface
The invention relates to a method for machining a workpiece surface, wherein an area to be machined of the workpiece surface is machined under the influence of a polishing operation and wherein,...
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7118448 |
Truing method for grinding wheel, its truing device and grinding machine
A method and apparatus are used for truing grindstones. Grinding wheels are arranged in a manner such that the respective grindstone surfaces are disposed apart from each other to define a space...
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7108582 |
Polishing machine
A polishing machine uses a polishing head having a movable pad to press a polishing tape for polishing beveled and edge parts of a disk-shaped object. A rotary shaft is connected to the polishing...
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7108579 |
Method and device for polishing
The present invention relates to a polishing method for polishing a workpiece by pressing the workpiece, to be polished, against a fixed abrasive and bringing the workpiece into sliding contact...
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7104870 |
Modified radial motion (MRM) method for modifying lengthwise curvature of face-milling spiral bevel and hypoid gears
The present invention relates to a modified radial motion method for modifying lengthwise curvature of face-milling spiral bevel and hypoid gears, which is capable of modifying a locus of a cutter...
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7101257 |
Substrate polishing apparatus
A substrate polishing apparatus polishes a substrate such as a semiconductor wafer to a flat mirror finish. The substrate polishing apparatus has a polishing table against which a substrate is...
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7097537 |
Determination of position of sensor measurements during polishing
A chemical mechanical polishing apparatus and method can use an in-situ monitoring system. A measurement of a position of a carrier head and a sinusoidal first function can be used to define a...
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7090560 |
System and method for detecting abrasive article orientation
Systems and methods control abrading operations of an abrading machine by sensing characteristics of an abrading article installed on the abrading machine. When a problem is discovered by sensing...
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7090559 |
Ophthalmic lens manufacturing system
A tool for gripping ophthalmic lenses including a vacuum gripper, a shaft associated with said vacuum gripper, the shaft having two ends and being slidably attached at one end thereof to a support...
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7086930 |
Coherent jet nozzles for grinding application
A nozzle assembly and method is configured to apply coherent jets of coolant in a tangential direction to the grinding wheel in a grinding process, at a desired temperature, pressure and flowrate,...
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7081039 |
Grinder system and method for creating a contoured cutting face with a variable axial rake angle
Both a grinder system and a corresponding grinding method are based on a module, embodied preferably as a program or program segment, which, preferably automatically, defines the geometry of the...
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7070478 |
Systems and methods for monitoring characteristics of a polishing pad used in polishing micro-device workpieces
Systems and methods for monitoring characteristics of a polishing pad used in polishing a micro-device workpiece are disclosed herein. In one embodiment, a method for monitoring a characteristic of...
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