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7614934 |
Double-side polishing apparatus
The double-side polishing apparatus for polishing both faces of a wafer is capable of reliably measuring not only a thickness of an outer part of the wafer but also a thickness of a center part...
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7607968 |
Apparatus on a flat card or roller card for grinding a fibre processing clothing disposed on a rotating cylinder or a card flat
In an apparatus on a carding machine for grinding a fiber processing clothing on a roller or a card flat, grinding equipment includes at least one grinding element and an infeed device serving to...
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7602985 |
Multi-scale enveloping spectrogram signal processing for condition monitoring and the like
A signal processing technique that decomposes complex, dynamically changing non-stationary signals from machine components such as bearings into different scales by means of a continuous wavelet...
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7592104 |
Mask blank substrate, mask blank, exposure mask, mask blank substrate manufacturing method, and semiconductor manufacturing method
In a mask blank substrate to be chucked by a mask stage of an exposure system, the flatness of a rectangular flatness measurement area excluding an area of 2 mm inward from an outer peripheral end...
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7591709 |
Blasting device
The present invention provides a blasting device, comprising: a container in which a blast medium is stored; a suction pipe which is inserted in the container to be rotatably supported, and is...
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7588674 |
Method and apparatus for maintaining parallelism of layers and/or achieving desired thicknesses of layers during the electrochemical fabrication of structures
Some embodiments of the present invention provide processes and apparatus for electrochemically fabricating multilayer structures (e.g. mesoscale or microscale structures) with improved endpoint...
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7585202 |
Computer-implemented method for process control in chemical mechanical polishing
A computer-implemented method for process control in chemical mechanical polishing in which an initial pre-polishing thickness of a substrate is measured at a metrology station, a parameter of an...
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7584532 |
Apparatus for processing a magnetic head slider
An apparatus for processing a magnetic head slider used for a magnetic disk apparatus for performing a magnetic recording/reproducing process in a discoid recording medium. The apparatus for...
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7581305 |
Method of manufacturing an optical component
A method of manufacturing an optical component comprising a substrate and a mounting frame with plural contact portions disposed at predetermined distances from each other is provided. The method...
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7578723 |
Polishing tape and polishing device using same
A polishing device has a reel core around which a polishing tape is wound and a reel plate with flanges that engage with the polishing tape and sandwich it from both sides. A memory element with...
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7575503 |
Vacuum-assisted pad conditioning system
A method and apparatus for conditioning polishing pads that utilize an apertured conditioning disk for introducing operation-specific slurries, without the need for additional tooling, platens, and...
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7575501 |
Advanced workpiece finishing
An apparatus for processing, finishing, and planarizing is disclosed. A methods of processing are disclosed. New methods of control for processing are disclosed. The methods and apparatus, can help...
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7564363 |
Method and measuring arrangement for monitoring the condition of a grinder stone of a pulp grinder
A method and a measuring arrangement for monitoring the condition of a grinder stone of a pulp grinder. A temperature profile for a grinding surface of the grinder stone is determined substantially...
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7563153 |
Method of preparing eyeglass lenses for mounting on the frame selected by the wearer
The method comprises the following steps:
a centering step during which the optical frame of reference of the lens is acquired and a blocking accessory is fastened thereto; and a step of...
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7556554 |
Apparatus and method for manufacturing optical objects
The invention relates to an apparatus for forming or working optical elements and/or optical forming elements ( 1 ) comprising a working apparatus ( 18 ) for forming surfaces of form parts by...
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7549909 |
Methods for optical endpoint detection during semiconductor wafer polishing
A method of measuring a change in thickness of a layer of material disposed on a wafer while polishing the layer. Light is directed at the surface of the wafer from an optical sensor disposed...
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7547244 |
Sonic razor blade sharpener
An apparatus for sharpening one or more razor blades secured within a holder is disclosed. The holder includes a head for retaining the one or more razor blades in a cutting position and a handle...
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7544113 |
Apparatus for controlling the forces applied to a vacuum-assisted pad conditioning system
An apparatus for conditioning polishing pads that utilizes an apertured conditioning disk for introducing operation-specific slurries, without the need for additional tooling, platens, and...
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7541767 |
Decentralized error response in cam disk axes
The invention relates to a method for error response when an error occurs in response to a motion, particularly of a drive mechanism in a machine, the motion taking place while using at least one...
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7540800 |
Rough polishing method of semiconductor wafer and polishing apparatus of semiconductor wafer
A rough-polishing method for conducting a rough polishing before mirror-finish polishing on a semiconductor wafer (W) using a polishing apparatus ( 1 ) includes a first polishing step for polishing...
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7540799 |
System for adjusting an end effector relative to a workpiece
A system ( 46 ) for adjusting an end effector ( 48 ) of an apparatus ( 44 ) includes a linear actuator ( 58 ) attachable with an arm ( 52 ) of the apparatus ( 44 ). The system ( 46 ) further...
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7536773 |
Method of configuring a sensor for a hard disk drive
A nano-sized CPP aperture is precisely positioned to within a few nanometers of a slider ABS surface to maximize a signal from the disk and to prevent lapping damage to the aperture itself. A...
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7534162 |
Grooved platen with channels or pathway to ambient air
A polish pad ( 120 ) and platen ( 130 ) assembly for use in chemical mechanical polishing of semiconductor devices includes a platen ( 130 ) having a grooved or channeled surface ( 136 ) which is...
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7530877 |
Semiconductor processor systems, a system configured to provide a semiconductor workpiece process fluid
Semiconductor processor systems, systems configured to provide a semiconductor workpiece process fluid, semiconductor workpiece processing methods, methods of preparing semiconductor workpiece...
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7513818 |
Polishing endpoint detection system and method using friction sensor
A system, method and apparatus to monitor a frictional coefficient of a substrate undergoing polishing is described. A polishing pad assembly includes a polishing layer including a polishing...
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7507145 |
Automated sectioning tomographic measurement system
A tomographic system includes a reporting device colocated and juxtaposed an object so that both are ground through grinding to various sectioning depths as the reporting device is ground down...
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7503831 |
System and method for cutting soluble scintillator material
A system and method for cutting soluble scintillator material are disclosed. The system includes a scintillator cutting apparatus including a filament rotated around a plurality of pulleys in at...
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7500902 |
Thickness-measuring method during grinding process
In a thickness-measuring method during a grinding process, which suppresses wear of a probe coming into contact with a chuck table subjected to self-grind and accurately grinds a workpiece,...
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7500901 |
Data processing for monitoring chemical mechanical polishing
Methods and apparatus to implement techniques for monitoring polishing a substrate. Two or more data points are acquired, where each data point has a value affected by features inside a sensing...
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7489856 |
Electrical device for automatically adjusting operating speed of a tool
Electrically powered devices are provided that are generally capable of automatically adjusting an operating speed of a tool removably connected to the device. The device includes circuitry that...
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7485026 |
Sander
A sander can include a housing, an indicator coupled to the housing, and a motor assembly in the housing. The motor assembly can include an output member. A platen can be driven by the output...
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7479056 |
Automated drill bit re-sharpening and verification system
An automated drill bit sharpening and verification system employing one or more electronic optical assemblies for gathering orientation data of a drill bit to be sharpened. The drill bit is rotated...
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7476144 |
Sander
A sander can include housing, and a motor assembly in the housing. The motor assembly can include an output member. A platen can be driven by the output member. A user feedback assembly can be...
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7476143 |
Eyeglass lens processing system
An eyeglass lens processing system includes a main processing apparatus having a first lens chuck, a roughing tool, a first bevel-finishing tool, a lens edge measuring unit, and a first computing...
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7473161 |
Lapping machine and head device manufacturing method
A lapping machine that polishes a head block in which plural head devices are connected in a row includes a jig that has a bottom surface that opposes to a grinding plane, and fixes the head block...
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7473159 |
Detection of diamond contamination in polishing pad and reconditioning system therefor
A reconditioning system for reconditioning a damaged polishing pad is disclosed. The reconditioning system includes a reconditioning disk including a plurality of diamonds for reconditioning the...
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7467460 |
Method of manufacturing slider
A slider manufacturing method includes: providing a row bar constructed from multiple slider bodies having a surface for forming an air bearing surface (ABS); forming multiple cutting lines on the...
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7465214 |
Substrate holding apparatus and polishing apparatus
A substrate holding apparatus holds a substrate such as a semiconductor and presses the substrate against a polishing surface. The substrate holding apparatus includes a top ring body ( 2 ) for...
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7458879 |
Dressing apparatus and substrate holding apparatus
A polishing apparatus for polishing a substrate comprises a polishing table having a polishing surface, and a substrate holding apparatus for holding a substrate to be polished and pressing the...
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7458878 |
Grinding apparatus and method
The present embodiments provide methods, systems and apparatuses for use in grinding work pieces, such as wafers. Some embodiments provide methods that position a grind spindle to contact a first...
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7455568 |
Water jet-processing machine
A water jet-processing machine comprising a workpiece holding table having a holding surface for holding a workpiece, a nozzle for emitting a jet of processing water to the workpiece held on the...
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7448940 |
Polishing apparatus and polishing method
A polishing apparatus comprises a first polishing table having a first polishing surface, a substrate carrier for holding a substrate and positioning the substrate so as to bring a surface of the...
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7442112 |
Nozzle for spraying sublimable solid particles entrained in gas for cleaning surface
A nozzle for spraying sublimable solid particles and preventing frost from forming at surfaces of the nozzle. The nozzle includes: a cleaning agent block for phase-changing a cleaning agent into a...
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7438627 |
Polishing state monitoring method
A polishing state monitoring apparatus measures characteristic values of a surface, being polished, of a workpiece to determine the timing of a polishing end point. The polishing state monitoring...
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7438626 |
Apparatus and method for removing material from microfeature workpieces
Machines and systems for removing materials from microfeature workpieces using fixed-abrasive mediums. One embodiment of a method for removing material from a microfeature workpiece comprises...
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7431633 |
Plating removing apparatus for three-piece wheel
To provide a plating removing apparatus for 3-piece wheels, which can easily and neatly remove plating at the welding planned portion of the superimposed part of the inner rim and the outer rim. A...
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7429207 |
System for endpoint detection with polishing pad
A method of forming a polishing pad with a polishing layer having a polishing surface and a back surface. A plurality of grooves are formed on the polishing surface, and an indentation is formed in...
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7428064 |
Substrate film thickness measurement method, substrate film thickness measurement apparatus and substrate processing apparatus
A jet of water in a cylindrical form is supplied from a jet nozzle onto a measurement surface of a substrate to form a column of the water extending between the nozzle and the measurement surface....
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7427227 |
Method and apparatus for fluid polishing
In a fluid polishing method for processing a fine aperture by slurry 7, the slurry is supplied from a cylinder 2 a in a slurry flow rate target process until the flow rate increases to a target...
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7425172 |
Customized polish pads for chemical mechanical planarization
A polishing pad for chemical mechanical planarization of a film on a substrate is customized by obtaining one or more characteristics of a structure on a substrate. For example, when the structure...
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