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7614938 |
Reconditioned medical devices
A method of reconditioning a medical device may include removing a portion of the medical device, and attaching to the medical device a replacement piece formed from nickel carbide and sized,...
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7604527 |
Methods and systems for planarizing workpieces, e.g., microelectronic workpieces
Planarizing workpieces, e.g., microelectronic workpieces, can employ a process indicator which is adapted to change an optical property in response to a planarizing condition. This process...
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7568968 |
Coolant nozzle positioning for machining work-pieces
A method of determining a position of a coolant nozzle relative to a rotating grinding wheel removing material from a work-piece and an apparatus for practicing the method are disclosed. The method...
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7563154 |
Grinding apparatus having sludge-removing device and method of removing sludge
A work having a portion to be ground, such as a tapered surface, is ground by a grinder driven by a driving device. During grinding operation, coolant is supplied to a grinding surface of the...
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7562435 |
Method to improve crown sigma control of the slider in a hard disk drive
The sensitivity of the ABS shape of a suspension mounted slider to temperature variations can be greatly reduced if the backside of the slider is lapped to a smooth convex contour that is similar...
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7481696 |
Grinding machine and coolant supplying method therefor
In a rough grinding step the large quantity of coolant supplied to cool the grinding point enables the flow to pass through a wheel-following air layer and reach the grinding point while the supply...
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7473160 |
Method and apparatus for grinding a workpiece
A method and apparatus for cutting a profile in a workpiece, such as a turbine disk, without cracking the parent material which includes providing a grinding wheel having a ceramic grinding surface...
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7465219 |
Brut polishing of superhard materials
Brut polishing of superhard materials to remove positive asperities by use of pressure and heat.
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7442112 |
Nozzle for spraying sublimable solid particles entrained in gas for cleaning surface
A nozzle for spraying sublimable solid particles and preventing frost from forming at surfaces of the nozzle. The nozzle includes: a cleaning agent block for phase-changing a cleaning agent into a...
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7335088 |
CMP system with temperature-controlled polishing head
A chemical mechanical polish system for polishing a wafer includes a polishing head; an inner tube connected to the polishing head, wherein the inner tube is filled with a heat media; a media...
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7297286 |
Methods for resist stripping and other processes for cleaning surfaces substantially free of contaminants
A method for manufacturing an article having polymeric residue that is to be removed during the manufacture of the article is disclosed. The article is introduced into a controlled environment of a...
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7238084 |
Chemical mechanical polishing apparatus and chemical mechanical polishing method using the same
Polishing uniformity in a CMP process may be improved due to an improvement in the temperature uniformity of a polishing surface, when a wafer is polished by a CMP apparatus including a polishing...
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7214123 |
Retainer ring, Polishing head, and chemical mechanical polishing apparatus
A retainer ring configured to reduce heat generated during a polishing process may include a heat absorbing element, a thermoelectric element, and a heat dissipating element. A polishing head...
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7201642 |
Process for producing improved membranes
The present invention relates generally to the field of chemical/mechanical polishing of substrates. In particular the invention relates to methods of producing improved membranes for use in...
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7201634 |
Polishing methods and apparatus
Apparatus for and methods of chemical mechanical polishing (CMP) of semiconductor wafers are disclosed. A preferred embodiment comprises an apparatus for polishing a semiconductor workpiece that...
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RE39547 |
Method and apparatus for endpointing mechanical and chemical-mechanical polishing of substrates
An apparatus and method for stopping mechanical and chemical-mechanical polishing of a substrate at a desired endpoint. In one embodiment, a polishing machine has a platen, a polishing pad...
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7182674 |
Coolant delivery apparatus for machine tool
A coolant delivery apparatus for a machine tool wherein the position of the coolant delivery apparatus is controllable such that coolant may be delivered to the machining contact zone of a tool...
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7163447 |
Apparatus and method for conditioning a contact surface of a processing pad used in processing microelectronic workpieces
Conditioning devices, systems and methods for conditioning a contact surface of a processing pad used in processing microelectronic workpieces. One embodiment of a conditioning device comprises an...
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7156720 |
Substrate holding apparatus
A substrate holding apparatus can accurately control temperature of a substrate in a direct manner with a relatively simple arrangement. The substrate holding apparatus has a top ring configured to...
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7153188 |
Temperature control in a chemical mechanical polishing system
The carrier head has a base and a substrate backing structure for holding a substrate against a polishing surface during polishing. The substrate backing structure is connected to the base and...
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7140950 |
Fiber polishing apparatus and method for field terminable optical connectors
A method of polishing a remote grip optical connector comprises providing an optical fiber having a stripped terminal end. The fiber is inserted through a connector body and ferrule, where the...
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7134944 |
Apparatus and method for conditioning a contact surface of a processing pad used in processing microelectronic workpieces
Conditioning devices, systems and methods for conditioning a contact surface of a processing pad used in processing microelectronic workpieces. One embodiment of a conditioning device comprises an...
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7086931 |
Magnetic head bar holding unit, lapping device, and method of lapping medium-opposing surface of thin-film magnetic head
The heaters in the respective thin-film magnetic head in the bar are electrically connected to its neighbors, and a variable resistor is connected to each of the heaters in parallel. The resistance...
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7086930 |
Coherent jet nozzles for grinding application
A nozzle assembly and method is configured to apply coherent jets of coolant in a tangential direction to the grinding wheel in a grinding process, at a desired temperature, pressure and flowrate,...
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7066789 |
Methods for resist stripping and other processes for cleaning surfaces substantially free of contaminants
A method for manufacturing an article having polymeric residue that is to be removed during the manufacture of the article is disclosed. The article is introduced into a controlled environment of a...
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7044840 |
Grinding method and grinding machine
In a grinding machine grinding a workpiece W by a grinding wheel G to supply coolant to one of a grinding point P or the workpiece W by way of a relative movement between the grinding wheel W...
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7040962 |
Ice blasting apparatus and trimming method for film insert molding
An ice blasting apparatus comprises: an ice making device operating a cutting blade to shave off ice freezing on an inner wall of the freezing casing and continuously discharges the shaved ice as...
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7040961 |
Methods for resist stripping and cleaning surfaces substantially free of contaminants
A plasma assisted cryogenic cleaner for and a method of performing cleaning of a surface that must be substantially free of contaminants has a resiliently mounted nozzle for spraying a cryogenic...
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7033249 |
Dry ice blasting cleaning apparatus
The invention is an apparatus used for cleaning equipment including extremely high voltage energized electrical equipment using a dry ice blasting stream as the cleaning agent. The apparatus...
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7029368 |
Apparatus for controlling wafer temperature in chemical mechanical polishing
Apparatus controls the temperature of a wafer for chemical mechanical polishing operations. A wafer carrier wafer mounting surface positions a wafer adjacent to a thermal energy transfer unit for...
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7021994 |
Method and apparatus for metalworking using a coolant fluid
A metal machining apparatus for removal of metal from a workpiece, that employs a laser-targeted coolant nozzle to apply coolant fluid to a machining tool, such as a grinding wheel, to remove metal...
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7014529 |
Substrate processing method and substrate processing apparatus
A substrate processing apparatus polishes a to-be-polished portion of a semiconductor substrate with a polishing tape. Part of the polishing tape is heated in advance. Part of the polishing tape is...
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7014528 |
Grinding machine and grinding fluid supply-nozzle therefor
It is one object of a grinding machine and a grinding fluid supply-nozzle therefor according to the present invention to supply grinding fluid to a moving grinding point reliably, even if the...
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6997786 |
Method of preparing a sanding block to repair a damaged surface profile
A method of preparing a sanding block to repair a damaged surface profile. A first step involves finding an undamaged surface profile that matches the damaged surface profile. A second step...
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6991523 |
Coolant nozzle
A coolant nozzle is used on a machine tool having a rotating bit of convoluted longitudinal profile for cutting a number of slots in a disk. The nozzle includes at least one coolant inlet and at...
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6984162 |
Apparatus methods for controlling wafer temperature in chemical mechanical polishing
Apparatus controls the temperature of a wafer for chemical mechanical polishing operations. A wafer carrier wafer mounting surface positions a wafer adjacent to a thermal energy transfer unit for...
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6976902 |
Chemical mechanical polishing apparatus
There is provided a chemical mechanical polishing apparatus, which may include a polishing table rotated by a polishing table motor and having a pad thereon, a carrier head located above the...
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6966819 |
Injecting an air stream with sublimable particles
Apparatus and method to inject an air stream with dry ice or other sublimable particles to be blasted against a surface to be cleaned. An air lock assembly ( 20 ) with an air stream passage ( 21 )...
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6942544 |
Method of achieving very high crown-to-camber ratios on magnetic sliders
A method of precisely controlling the amount of flatness or curvature in a lapping plate is disclosed. The lapping plate is formed from two layers of metal alloys, such as tin-antimony and steel. A...
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6932673 |
Grinding method and device for the same
The present invention supplies coolant to a grinding wheel surface and reliably guides the coolant to a grinding point on the grinding wheel surface, thereby significantly reducing the amount of...
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6926592 |
Surface treatment of mechanically abraded glass
A method of treating the surface of mechanically abraded glass includes a first step of providing a glass substrate having opposing first and second surfaces. The glass substrate having a recess in...
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6913515 |
System and apparatus for achieving very high crown-to-camber ratios on magnetic sliders
A system and apparatus precisely controls the amount of flatness or curvature in a lapping plate. The lapping plate is formed from two layers of metal alloys, such as tin-antimony and steel. A...
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6910945 |
Honing method and honing apparatus
In a coarse honing step in a section ( 101 ), a honing head ( 15 ) provided with coarse honing hones ( 17 ) is inserted into a cylinder bore ( 13 ) of a cylinder block ( 11 ), the honing head 15 ...
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6910473 |
Method of cutting ceramic green block
In order to enable cutting of a soft ceramic green block by a dicing saw having excellent cutting accuracy, heat treatment is performed on the ceramic green block to dissociate a plasticizer,...
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6905397 |
Apparatus for enhanced rate chemical mechanical polishing with adjustable selectivity
A chemical mechanical polishing apparatus is described, which includes a platen, a polishing pad that is attached to the platen, and a means for adjusting the temperature of the polishing pad.
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6896586 |
Method and apparatus for heating polishing pad
A temperature controlling system for use in a chemical mechanical planarization (CMP) system having a linear polishing belt, a carrier capable of applying a substrate over a preparation location...
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6887128 |
Method of reducing thermal distortion in grinding machines
The invention provides a method of reducing thermal distortion in grinding machines. Such machines each comprise a machine base ( 60 ) and a grinding wheel ( 50 ) for grinding components in the...
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6884149 |
Method and system for in-situ monitoring of mixing ratio of high selectivity slurry
A method and system for monitoring the quality of a slurry utilized in a chemical mechanical polishing operation. A slurry is generally delivered through a tubular path during a chemical mechanical...
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6881131 |
Method and apparatus for diamond wire cutting of metal structures
A method and apparatus for diamond wire cutting of metal structures, such as nuclear reactor vessels, is provided. A diamond wire saw having a plurality of diamond beads with beveled or chamfered...
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6878041 |
Method for removing a metallic layer of a layer-system
A metallic layer is cooled below room temperature, leading to an embrittlement. Subsequently, the metallic layer is stripped by performing a blasting process having a high efficiency because of the...
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