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7617588 |
Method for making a device
Methods for making devices comprise forming a plurality of transducers on a major surface of a wafer, including forming a plurality of solid layers each having a thickness that is less than one...
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7614936 |
Spectrum based endpointing for chemical mechanical polishing
Methods and apparatus for providing a flushing system for flushing a top surface of an optical head. The flushing system includes a source of gas configured to provide a flow of gas, a delivery...
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7607215 |
Method of manufacturing magnetic head slider
To provide a method of manufacturing magnetic head slider which is capable of improving the product quality, simplifying the manufacturing process, and reducing the manufacturing time. This method...
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7604527 |
Methods and systems for planarizing workpieces, e.g., microelectronic workpieces
Planarizing workpieces, e.g., microelectronic workpieces, can employ a process indicator which is adapted to change an optical property in response to a planarizing condition. This process...
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7601051 |
Grinding machine having grinder head and method of manufacturing semiconductor device by using the grinding machine
A grinding machine for grinding a workpiece, including a chucking table having a chucking area and a grinder head. The grinder head includes a spinning disk rotating about a rotation axis and a...
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7601050 |
Polishing apparatus with grooved subpad
A polishing apparatus is described. The polishing apparatus includes a rotatable platen, a drive mechanism to incrementally advance a polishing sheet having a polishing surface in a linear...
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7601049 |
Double side wafer grinder and methods for assessing workpiece nanotopology
A double side grinder comprises a pair of grinding wheels and a pair of hydrostatic pads operable to hold a flat workpiece (e.g., semiconductor wafer) so that part of the workpiece is positioned...
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7596854 |
Method of fabrication for read head having shaped read sensor-biasing layer junctions using partial milling
A method is disclosed for fabricating a read head for a magnetic disk drive having a read head sensor and a hard bias layer, where the read head has a shaped junction between the read head sensor...
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7594845 |
Abrasive article and method of modifying the surface of a workpiece
Provided is an abrasive article for lapping or polishing a workpiece comprising a three-dimensional, textured, flexible, fixed abrasive construction having a first surface and a working surface,...
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7592266 |
Removing solution, cleaning method for semiconductor substrate, and process for production of semiconductor device
The removing solution containing a cerium (IV) nitrate salt, periodic acid or a hypochlorite can be applied to metals containing copper, silver or palladium and also to metals containing other...
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7591713 |
Polishing pad, method for processing polishing pad, and method for producing substrate using it
The present invention is a polishing pad used for polishing a semiconductor substrate, wherein, at least, grooves having a radial pattern are formed on a surface of the polishing pad, and (an...
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7591712 |
Method of producing silicon blocks and silicon wafers
A method of producing silicon blocks by cutting a silicon ingot is provided. The method uses a silicon ingot cutting slurry containing abrasive grains and an alkaline substance so as to provide the...
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7588483 |
Method of dry grinding, coloring and polishing concrete surfaces
A method of polishing and coloring concrete surfaces using a dry concrete grinding process which includes locking in dye colors by applying the dye to the cementicious surface mid way during a...
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7588482 |
Apparatus and method for manufacturing liquid crystal display device
An apparatus for manufacturing a liquid crystal display (LCD) device includes a table receiving an LCD panel thereon, a first grinding part grinding a surface of the LCD panel to a first surface...
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7588481 |
Wafer polishing method and polished wafer
A wafer substrate is polished by disposing the wafer substrate between an abrasive cloth on a polishing platen and a plate, and relatively rotating the polishing platen and the plate for mirror...
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7588480 |
Polishing head for a polishing machine
A polishing head for polishing machines, in particular for polishing optical surfaces, has a polishing plate that is connected to a rotationally drivable drive shaft. The polishing plate is...
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7587811 |
Method for manufacturing a magnetic write head for perpendicular magnetic data recording
A method for manufacturing a magnetic write head for perpendicular magnetic recording having a write pole with a very narrow track width and well controlled critical dimensions. The write pole is...
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7585340 |
Polishing composition containing polyether amine
The inventive chemical-mechanical polishing system comprises a polishing component, a liquid carrier, and a polyether amine. The inventive method comprises chemically-mechanically polishing a...
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7585204 |
Substrate polishing apparatus
A substrate polishing apparatus for polishing a polishing surface of a substrate has a film thickness monitoring device for monitoring a state of a film thickness of a thin film on the polishing...
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7585202 |
Computer-implemented method for process control in chemical mechanical polishing
A computer-implemented method for process control in chemical mechanical polishing in which an initial pre-polishing thickness of a substrate is measured at a metrology station, a parameter of an...
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7580759 |
Systems and methods for in-situ recording head burnishing
Systems and methods are provided for burnishing a recording head in-situ in a magnetic recording disk drive. The burnishing process generates a tribocurrent, which is electricity generated by the...
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7579120 |
Substrate for reticle and method of manufacturing the substrate, and mask blank and method of manufacturing the mask blank
In a reticle substrate is used for forming a reticle held on a stepper and has main surfaces opposing each other, side faces, and chamfered surfaces formed between main surfaces and side faces, a...
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7578725 |
Lens layout block device
This apparatus includes a unit for adhering an elastic seal to a lens holder, a unit for causing the lens holder, to which the elastic seal is adhered, to hold a lens, a pivotal arm, an arm driving...
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7578049 |
Method for constructing a magnetic write pole for a perpendicular magnetic recording head
A method for manufacturing a write pole for a perpendicular magnetic write head. The method includes forming a mask structure over a full film layer of magnetic write pole material. A layer of hard...
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7575501 |
Advanced workpiece finishing
An apparatus for processing, finishing, and planarizing is disclosed. A methods of processing are disclosed. New methods of control for processing are disclosed. The methods and apparatus, can help...
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7572354 |
Electrochemical processing of conductive surface
The present invention relates to methods and apparatus for plating a conductive material on a semiconductor substrate by rotating pad or blade type objects in close proximity to the substrate,...
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7571535 |
Method of fabricating a suspension load beam with a composite damping core
A suspension load beam used for attachment to a slider assembly and an actuation arm in a disc drive for data storage has a rigid middle beam section comprising a rigid bottom layer, a rigid top...
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7571060 |
System and method for gemstone cut grading
A system for grading the cut of a diamond utilizes a number of appearance metrics to generate scores for a number of cut components that affect cut quality. These cut components include brightness,...
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7566259 |
Method of manufacturing ferrule assemblies
A method of manufacturing a ferrule assembly. The method including first and second polishing operations. The first polishing operation including polishing only the end face of a ferrule of an...
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7564363 |
Method and measuring arrangement for monitoring the condition of a grinder stone of a pulp grinder
A method and a measuring arrangement for monitoring the condition of a grinder stone of a pulp grinder. A temperature profile for a grinding surface of the grinder stone is determined substantially...
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7562437 |
Method of manufacturing a wrap around shield for a perpendicular write pole using a laminated mask
A method for constructing a magnetic write head for use in perpendicular magnetic recording, the write head having a write pole with a trailing shield that wraps around the write pole. The method...
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7562435 |
Method to improve crown sigma control of the slider in a hard disk drive
The sensitivity of the ABS shape of a suspension mounted slider to temperature variations can be greatly reduced if the backside of the slider is lapped to a smooth convex contour that is similar...
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7559826 |
Processing method and grinding apparatus of wafer
To facilitate handling of a wafer in processing or carrying of the wafer after the wafer has been reduced in thickness by grinding, the whole back of a wafer is ground to provide the wafer with a...
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7559825 |
Method of polishing a semiconductor wafer
Semiconductor wafers have a front surface, a back surface, a notch, and an edge. A method of polishing a wafer includes polishing at least one of the surfaces and the notch of the wafer using a...
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7559823 |
Substrate processing apparatus and substrate processing method
The substrate processing apparatus relating to the present invention comprises a polishing section where wafers are sequentially arranged, and that has multiple polishing platens for polishing a...
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7556555 |
Polishing pad, use thereof and method for manufacturing the same
The present invention mainly relates to a polishing pad comprising a base material comprising fibers; a membrane with low permeability; and a buffer layer formed between the base material and an...
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7553215 |
Process of forming a deflection mirror in a light waveguide
A process of forming a deflection mirror in a light waveguide with a use of a dicing blade having a cutting end with a flat top cutting face and at least one slanted side cutting face. The process...
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7552523 |
Method for manufacturing a perpendicular magnetic recording transducer
A method and system for manufacturing a perpendicular magnetic recording transducer by a process that includes plating is described. The method and system include forming a chemical mechanical...
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7549909 |
Methods for optical endpoint detection during semiconductor wafer polishing
A method of measuring a change in thickness of a layer of material disposed on a wafer while polishing the layer. Light is directed at the surface of the wafer from an optical sensor disposed...
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7547245 |
Substrate production apparatus for producing a substrate for a display device
A substrate production apparatus for producing a substrate for a display device is disclosed. The substrate production apparatus includes a first production apparatus including a first scriber to...
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7541287 |
Method for machining a semiconductor wafer on both sides in a carrier, carrier, and a semiconductor wafer produced by the method
A semiconductor wafer is guided in a cutout in a carrier while a thickness of the semiconductor wafer is reduced to a target thickness by material removal from the front and back surfaces...
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7540800 |
Rough polishing method of semiconductor wafer and polishing apparatus of semiconductor wafer
A rough-polishing method for conducting a rough polishing before mirror-finish polishing on a semiconductor wafer (W) using a polishing apparatus ( 1 ) includes a first polishing step for polishing...
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7540077 |
Method for bonding slider row bars for photolithography process
A method for bonding slider row bars for photolithography process, includes steps of: providing a first carrier plate having a sticky surface; providing slider row bars each having a first surface...
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7537512 |
Multiple fluid supplying apparatus for carrier of semiconductor wafer polishing system
The present invention related to a multiple fluid supplying apparatus for carrier of semiconductor wafer polishing system which comprises a rotary union at a driving side and a rotary union at a...
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7537511 |
Embedded fiber acoustic sensor for CMP process endpoint
Devices, systems and methods for monitoring characteristics of semiconductor substrates and workpieces during planarization and for endpointing planarization processes are provided. The invention...
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7536778 |
Method of fabrication for slider with underpass leads
A method of fabrication is disclosed for a slider having sites for fabrication of a continuous coil having a set of front coils and a set of back coils and a center tab, where the slider includes...
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7536777 |
Use of metal capped seed layers for the fabrication of perpendicular thin film heads
Methods and structures for the fabrication of perpendicular thin film heads are disclosed. Prior to the deposition of shield structures, capped seed layers having a dual layer structure are...
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7536776 |
Fabrication method for thin film magnetic heads
A fabrication method for thin film magnetic heads, comprises, forming a Current Perpendicular to a Plane (CPP) sensor film over a lower shield and a first chemical mechanical polishing (CMP) stop...
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7536775 |
Method for sample preparation for exposing a main pole of a recording head
A method for sample preparation. The method includes mechanically polishing portions of an insulating layer over a main pole of a recording head embedded within a sample structure. The insulating...
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7534163 |
Polishing pad
An improved polishing pad for polishing semi-conductors and other planar substrates in the presence of a slurry which optionally may contain abrasive particles is disclosed. The polishing pad...
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