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8136379 Helical part manufacturing apparatus and control method thereof  
This invention provides an apparatus for manufacturing a helical part by feeding a wire W toward a pointing tool 21 and pushing the wire W against the pointing tool 21 to forcibly wind the wire....
8123593 Configuring of lapping and polishing machines  
A lapping or polishing machine includes a material having a first finishing surface to process a surface of a work item, a measuring tool to measure a contour of the first finishing surface, and a...
8096853 Pre- and post-process bore gaging using a honing feed system equipped with feed force sensing  
The method of the invention provides a capability for accurately and uniformly determining the sizes of bores of workpieces, both pre- and post-process, to improve process control, particularly...
8070556 Grinding wheel for roll grinding and method of roll grinding  
A method of grinding a ferrous roll may include: rotating a grinding wheel on a machine spindle to form a rotating grinding wheel; rotating a ferrous roll to form a rotating roll surface; bringing...
8065031 Polishing end point detection method utilizing torque change and device thereof  
Change in a torque waveform is monitored while removing continuously-varied periodic noise in real time, and the change in the torque waveform caused purely by the wafer state is detected by...
8043870 CMP pad thickness and profile monitoring system  
In one embodiment a method is provided for maintaining a substrate processing surface. The method generally includes performing a set of measurements on the substrate processing surface, wherein...
8025555 System for measuring and controlling the level of vacuum applied to a conditioning holder within a CMP system  
A method and apparatus for conditioning polishing pads that utilizes an apertured conditioning disk for introducing operation-specific slurries, without the need for additional tooling, platens,...
7997955 Method and apparatus for circumferential interior treatment of pipe elbows  
A method for the circumferential interior treatment of pipe elbows, including a step of positioning a working member within a pipe elbow and moving the working member along a portion of a length of...
7988533 Scratch removal device and method  
A polishing wheel including a lower polishing surface and defining a different color from a secondary portion of the polishing wheel, so as to indicate wear of the polishing surface. The polishing...
7927186 Method for producing glass substrate for magnetic disk  
In the production of a glass substrate for magnetic disk, the present invention provides a method for producing a glass substrate for magnetic disk including a step of polishing a main surface of a...
7901267 Method for controlling the forces applied to a vacuum-assisted pad conditioning system  
A method and apparatus for conditioning polishing pads that utilizes an apertured conditioning disk for introducing operation-specific slurries, without the need for additional tooling, platens,...
7846006 Dressing a wafer polishing pad  
A dressing apparatus for dressing a polishing pad includes a dressing member engageable with the polishing pad. The dressing apparatus is adapted to change the amount of force exerted by the...
7846007 System and method for dressing a wafer polishing pad  
A system for polishing a semiconductor wafer. The system includes a polishing apparatus having a rotatable polishing pad for polishing the wafer. A dressing apparatus is mounted adjacent the...
7828626 Apparatus for conditioning processing pads  
Embodiments of an apparatus for conditioning a processing pad are provided. In one embodiment, an apparatus for conditioning a processing pad includes a member having a bottom surface selectively...
7749050 Pad conditioner dresser  
Methods for extending the service life of a CMP pad dresser having a substrate and a plurality of superabrasive particles disposed thereon which is used to dress a CMP pad are disclosed and...
7747336 Apparatus for creating a turning program  
One element is taken from a machined shape. When the element is a straight line element, whether or not the distance D between the start point and the end point of the element in a direction...
7722437 Manufacturing method of semiconductor integrated circuit device  
A polishing pad used in a CMP step in the manufacture of a semiconductor integrated circuit device is relatively expensive; thus, it is necessary to avoid a wasteful exchange of the pad....
7666064 Method for grinding semiconductor wafers  
Semiconductor wafers are processed so as to remove material on one or both sides by means of at least one grinding tool, with coolant supplied into a contact region between the semiconductor wafer...
7544113 Apparatus for controlling the forces applied to a vacuum-assisted pad conditioning system  
An apparatus for conditioning polishing pads that utilizes an apertured conditioning disk for introducing operation-specific slurries, without the need for additional tooling, platens, and...
7507143 Truing method for grinding wheel  
In a grinding machine comprising conductive grinding wheels, the invention presents a truing technique capable of truing grindstone surfaces of grinding wheels at high precision in a short time....
7473159 Detection of diamond contamination in polishing pad and reconditioning system therefor  
A reconditioning system for reconditioning a damaged polishing pad is disclosed. The reconditioning system includes a reconditioning disk including a plurality of diamonds for reconditioning the...
7473162 Pad conditioner dresser with varying pressure  
Methods for extending the service life of a CMP pad dresser having a substrate and a plurality of superabrasive particles disposed thereon which is used to dress a CMP pad are disclosed and...
7458879 Dressing apparatus and substrate holding apparatus  
A polishing apparatus for polishing a substrate comprises a polishing table having a polishing surface, and a substrate holding apparatus for holding a substrate to be polished and pressing the...
7413986 Feedforward and feedback control for conditioning of chemical mechanical polishing pad  
A method, apparatus and medium of conditioning a planarizing surface includes installing a wafer to be polished in a chemical mechanical polishing (CMP) apparatus having a polishing pad and a...
7407433 Pad characterization tool  
Tools and methods for in-situ characterizing of a surface of a polishing pad are described. A characterization tool is integrated with polishing tool so that the polishing pad can be monitored...
7404754 CNC tungsten steel cutting machine  
A CNC tungsten steel cutting machine suitably used to cut a metal material, such as tungsten carbide steel, includes an operational platform, a cutting mechanism, a feeding mechanism, a delivering...
7357695 Systems and methods for mechanical and/or chemical-mechanical polishing of microfeature workpieces  
Systems and methods for polishing microfeature workpieces. In one embodiment, a method includes determining a status of a characteristic of a microfeature workpiece and moving a carrier head and/or...
7326103 Vertically adjustable chemical mechanical polishing head and method for use thereof  
The invention provides a vertically adjustable chemical mechanical polishing head having a pivot mechanism and method for use thereof.
7306506 In-situ chemical-mechanical planarization pad metrology using ultrasonic imaging  
Chemical-mechanical planarization (CMP) apparatus and methods for detecting polishing pad properties using ultrasonic imaging is presented. An ultrasonic probe assembly transmits ultrasonic signals...
7300342 Scratch removal device and method  
A polishing wheel including a lower polishing surface and defining a different color from a secondary portion of the polishing wheel, so as to indicate wear of the polishing surface. The polishing...
7278901 Method and apparatus for measuring abrasion amount and pad friction force of polishing pad using thickness change of slurry film  
A method and apparatus for measuring an abrasion amount and a friction force of a polishing pad using a thickness change of a slurry film in a chemical mechanical polishing operation are provided....
7198542 Method and system for controlling the chemical mechanical polishing by using a seismic signal of a seismic sensor  
In a system and a method according to the present invention, a seismic signal from a seismic sensor coupled to a drive assembly of a pad conditioning system is used to estimate the status of one or...
7198543 Gear grinding machine  
A gear grinding machine comprises: a moving mechanism rotatably mounted with a threaded grinding wheel, and arranged to move the threaded grinding wheel along directions of X, Z, and Y, and to turn...
7195543 Machine tool with 5 machining axes with a continuous grinding tool profilling system  
A machine tool for machining a part by on-head and continuous grinding tool profiling includes a part holder support driven into rotation by first driving means around a first axis in a vertical...
7172495 Method and apparatus using a sensor for finish-machining teeth  
Teeth of a workpiece of a workpiece are finish-machined by first gauging shapes of the workpiece teeth and generating actual-value signals corresponding thereto. These actual-value signals are...
7125316 Method and device for producing molds for toothed belts  
The invention relates to a method and to a device for producing molds for toothed belts. A grinding wheel (9) that has a profiled periphery is used instead of a milling cutter to provide the...
7125312 Rotor-grinding machine comprising a rotary head with two grinding wheels  
The invention relates to a machine (1) for grinding the blades of a turbine rotor (2) or a compressor. The inventive machine consists of a rotary head (6) which is provided with two different...
7118448 Truing method for grinding wheel, its truing device and grinding machine  
A method and apparatus are used for truing grindstones. Grinding wheels are arranged in a manner such that the respective grindstone surfaces are disposed apart from each other to define a space...
7108581 Polishing apparatus  
A polishing apparatus for polishing a substrate comprises a polishing table having a polishing surface, and a substrate holding apparatus for holding a substrate to be polished and pressing the...
7089081 Modeling an abrasive process to achieve controlled material removal  
In general, techniques are described that allow an abrasive manufacturing process to achieve a controlled performance parameter, e.g., an amount of material removal, without requiring the use of...
7077722 Systems and methods for actuating end effectors to condition polishing pads used for polishing microfeature workpieces  
Systems and methods for activating end effectors used to condition microfeature workpiece polishing pads are disclosed. A system in accordance with one embodiment of the invention includes a...
7070479 Arrangement and method for conditioning a polishing pad  
An in-situ measurement of thickness profiles of polishing pads (1) used in chemical mechanical polishing (CMP) is enabled by arranging sensors (7) for measuring distances together with a...
7059939 Polishing pad conditioner and monitoring method therefor  
A polishing pad conditioner for a chemical mechanical polishing apparatus and real-time monitoring method thereof. A conditioning head is supported for rotation at one end of a transverse beam. A...
7040956 Control of chemical mechanical polishing pad conditioner directional velocity to improve pad life  
A method, apparatus and medium of conditioning a planarizing surface includes installing a wafer to be polished in a chemical mechanical polishing (CMP) apparatus having a polishing pad and a...
7037178 Methods for conditioning surfaces of polishing pads after chemical-mechanical polishing  
The invention includes a method for conditioning a surface of a polishing pad after chemical-mechanical polishing of a semiconductor substrate with the pad surface. The method includes exposing the...
7011568 Grinder with adjustable tool rest  
A grinding tool with a toll rest includes an adjustment mechanism to adjust the position of the tool rest responsive to wear of the grinding wheel.
7000607 Gemstone and corresponding method of cutting  
A gemstone having a crown, a girdle and a pavilion, wherein the girdle is shaped such that, when viewed in plan view, it is primarily bounded by four pairs of parallel straight edges. Three of the...
7001249 Methods and systems for finishing edges of glass sheets  
Methods and systems are disclosed whereby the edges of a glass sheet may be beveled with minimal equipment down time. Preferably such methods and systems bevel the upper and lower edges along...
6991519 Angle head grinding method  
A computer controlled grinding machine grinds a cylindrical region and an annular shoulder of a rotatable workpiece. Relative movement is effected between the workpiece and a grinding wheel along a...
6988933 Truing method and apparatus  
In a truing method and apparatus, an analyzing method is employed to calculate a truing shape from which a grinding surface having been trued with a grinding wheel being rotated at a low rotational...
Matches 1 - 50 out of 331 1 2 3 4 5 6 7 >