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7674650 |
Semiconductor device and manufacturing method thereof
An object is to provide a semiconductor device of which a manufacturing process is not complicated and by which cost can be suppressed, by forming a thin film transistor using an oxide...
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7670966 |
Method of processing a semiconductor substrate by thermal activation of light elements
Method of processing a substrate containing at least one semiconductor of the Si X A Y type and comprising at least four separate types of light elements, comprising at least the following steps:
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7608853 |
Semiconductor light emitting diode that uses silicon nano dot and method of manufacturing the same
Provided is a semiconductor light emitting diode that uses a silicon nano dot and a method of manufacturing the same. The semiconductor light emitting diode includes a light emitting layer that...
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7588803 |
Multi step ebeam process for modifying dielectric materials
According to one embodiment of the invention, a method of modifying a mechanical, physical and/or electrical property of a dielectric layer comprises exposing the dielectric layer to a first dose...
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7569693 |
Naphthalene-based semiconductor materials and methods of preparing and use thereof
Provided are mono- and diimide naphthalene compounds for use in the fabrication of various device structures. In some embodiments, the naphthalene core of these compounds are mono-, di-, or...
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7517776 |
Method for controlling dislocation positions in silicon germanium buffer layers
A method for controlling dislocation position in a silicon germanium buffer layer located on a substrate includes irradiating one or more regions of the silicon germanium layer with a dislocation...
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7510986 |
Production method for semiconductor device
In a production process for a semiconductor device employing an SiC semiconductor substrate ( 1 ), the SiC semiconductor substrate ( 1 ) is mounted on a susceptor ( 23 ), and a C heating member ( 3...
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7504345 |
Method for eliminating defects from semiconductor materials
Using a helium cryostat, the temperature for a substrate wafer(s) is reduced to 2.2 Kelvin over a period of twenty-four hours. Next, a soak segment will hold the temperature of the substrate wafer...
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7459406 |
Laser processing unit, laser processing method, and method for manufacturing semiconductor device
Objects of the present invention is to reduce a number of scanning a linear laser, to shorten the amount of time for laser annealing, and to reduce a manufacturing process, a manufacturing time,...
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7256147 |
Porous body and manufacturing method therefor
It is an object of the present invention to provide a porous body containing an oxide semiconductor in which more efficient photocatalytic reactions and photoelectrode reactions occur. The present...
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7227172 |
Group-III-element nitride crystal semiconductor device
In a Group-III-element nitride semiconductor device including a Group-III-element nitride crystal layer stacked on a Group-III-element nitride crystal substrate, the substrate is produced by...
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7205033 |
Method for forming polycrystalline silicon film of polycrystalline silicon TFT
Disclosed is a method for forming a polycrystalline silicon film of a polycrystalline silicon thin film transistor. The method includes a step of crystallizing an amorphous silicon film deposited...
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7179678 |
EBIC response enhancement in type III-VI semiconductor material on silicon
A method of processing a type III–VI semiconductor material on a silicon substrate to improve minority carrier diffusion length and EBIC response is provided. The semiconductor material is heated...
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7151060 |
Device and method for thermally treating semiconductor wafers
A device for thermally treating semiconductor wafers having at least one silicon layer to be oxidized and a metal layer, preferably a tungsten layer, which is not to be oxidized. The inventive...
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7122734 |
Isoelectronic surfactant suppression of threading dislocations in metamorphic epitaxial layers
A method of reducing propagation of threading dislocations into active areas of an optoelectronic device having a III–V material system includes growing a metamorphic buffer region in the...
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7078329 |
Method of manufacturing silicon carbide semiconductor device
An insulating film ( 2 ) is formed on a semiconductor substrate ( 1 ) formed of silicon carbide. A contact hole ( 3 ) is formed in the insulating film ( 2 ) to expose a part of the upper surface of...
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7071042 |
Method of fabricating silicon integrated circuit on glass
A method of fabricating a silicon integrated circuit on a glass substrate includes preparing a glass substrate; fabricating a silicon layer on the glass substrate; implanting ions into the active...
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7041577 |
Process for manufacturing a substrate and associated substrate
A process for producing a substrate is described. The process includes providing an assembly having a first layer weakly bonded to a temporary support at an interface therebetween. At least a...
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7033961 |
Epitaxy/substrate release layer
The present invention relates to an epitaxial structure having one or more structural epitaxial layers, including a gallium nitride (GaN) layer, which is deposited on a substrate, and a method of...
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7026258 |
Method for making thin-film semiconductors based on I-III-VI2 compounds, for photovoltaic applications
The invention concerns a method for making thin-film CIGS which consists in: electrochemically depositing on a substrate a layer of stoichiometry close to CuInSe 2 ; then rapidly annealing said...
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7018941 |
Post treatment of low k dielectric films
A method of depositing a low dielectric constant film on a substrate and post-treating the low dielectric constant film is provided. The post-treatment includes rapidly heating the low dielectric...
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6962884 |
Monitoring low temperature rapid thermal anneal process using implanted wafers
A method for processing integrated circuit devices. The method includes providing a monitor wafer, which comprising a silicon material. The method introduces a plurality of particles within a depth...
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6960486 |
Mid-IR microchip laser: ZnS:Cr2+ laser with saturable absorber material
A method of fabrication of laser gain material and utilization of such media includes the steps of introducing a transitional metal, preferably Cr 2+ thin film of controllable thickness on the ZnS...
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6946368 |
Reduction of native oxide at germanium interface using hydrogen-based plasma
A germanium substrate is positioned in a process chamber. A plasma is generated from a treatment gas that includes a flow of a hydrogen-containing gas. The plasma is provided to the process chamber...
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6905983 |
Apparatus and method for manufacturing semiconductor devices, and semiconductor device
An apparatus of manufacturing a semiconductor device is disclosed which comprises at least one heat/light source opposing at least one major surface of a to-be-processed substrate, the heat/light...
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6903032 |
Method for preparing a semiconductor wafer surface
A method for preparing a semiconductor wafer wherein rapid thermal annealing is conducted to smooth a free surface of a superficial zone that is supported by the wafer. The improvement includes...
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6893894 |
Method of manufacturing a compound semiconductor by heating a layered structure including rare earth transition metal
A method of manufacturing a compound semiconductor includes the steps of forming a layered structure of dielectric layers including oxygen or sulfur, and an inter layer formed between the...
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6881658 |
Process of and apparatus for heat-treating II-VI compound semiconductors and semiconductor heat-treated by the process
A process of heat-treating II-VI compound semiconductors reduces the electrical resistivity without the decrease in crystallinity resulting from the increase in dislocation density. The process...
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6861335 |
Method for fabricating a semiconductor device that includes light beam irradiation to separate a semiconductor layer from a single crystal substrate
A spacer layer is formed on a single-crystal substrate and an epitaxially grown layer composed of a group III-V compound semiconductor layer containing a nitride or the like is further formed on...
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6861340 |
Method of heat-treating nitride compound semiconductor layer and method of producing semiconductor device
A method of heat-treating a nitride compound semiconductor layer, comprising heating a nitride compound semiconductor layer doped with a p-type impurity at a temperature that is at least 200° C....
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6833332 |
Method for fabrication of relaxed SiGe buffer layers on silicon-on-insulators and structures containing the same
A method of fabricating relaxed SiGe buffer layers with low threading dislocation densities on silicon-on-insulator (SOI) substrates is provided. The relaxed SiGe buffer layers are fabricated by...
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6818569 |
Method of fabricating annealed wafer
A method of fabricating an annealed wafer of high quality by forming a defect-free active region of a device and controlling an irregular resistivity characteristic. The method includes a first...
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6812039 |
Method for producing a magnetic tunnel contact and magnetic tunnel contact
Disclosed is a method for producing a magnetic tunnel contact. A metal layer is disposed on a first ferromagnetic layer ( 1 ) and is oxidised for producing an insulation layer ( 3 ). A second...
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6780796 |
Method of forming relaxed SiGe layer
A method of forming a SiGe layer having a relatively high Ge content includes preparing a silicon substrate; depositing a layer of strained SiGe to a thickness of between about 100 nm to 500 nm,...
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6750158 |
Method for producing a semiconductor device
A first semiconductor layer is formed on a mother substrate, and the mother substrate is irradiated with irradiation light from a surface opposite to the first semiconductor layer, so that a...
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6737288 |
Method for fabricating a semiconductor device
A heterojunction structure has an Al x Ga 1−x As layer (0<x≦1), on which an Al y Ga 1−y As layer (0≦y≦1 and y<x) is provided and having a band gap energy smaller than that of the Al...
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6737367 |
UV-supported thermal treatment of compound semiconductors in RTP systems
A method of formally treating at least one layer for activating foreign atoms passivated in the layer by hydrogen is provided. The at least one layer is heated, in a first time interval of less...
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6683198 |
Group(III)-metal-hydrides with a guanidino-type ligand
A compound of formula (I) wherein X is aluminium, gallium or indium; each Y, which may be the same or different, is nitrogen or phosphorus; R 1 and R 2 , which may be the same or different, are...
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6667252 |
Method of manufacturing compound semiconductor substrate
A compound semiconductor substrate is manufactured by forming a higher-quality compound semiconductor layer having a smaller number of crystalline defects on a single-crystal substrate, and...
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6620643 |
Light-emitting device using group III nitride compound semiconductor
A group III nitride compound semiconductor light-emitting device provides a multiple quantum well (MQW) active layer formed on an intermediate layer. The MQW active layer may include, for example,...
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6586328 |
Method to metallize ohmic electrodes to P-type group III nitrides
The metallization method of the invention uses an oxide-forming metal layer to improve adhesion and getter surface contamination or oxides. A high work function metal is then formed on the...
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6573117 |
GaN related compound semiconductor and process for producing the same
A layer comprising cobalt (Co) is formed on a p + layer by vapor deposition, and a layer comprising gold (Au) is formed thereon. The two layers are alloyed by a heat treatment to form a...
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6563145 |
Methods and apparatus for a composite collector double heterojunction bipolar transistor
A compound collector double heterojunction bipolar transistor (CCHBT) incorporates a collector comprising two layers: a wide bandgap collector region (e.g., GaAs), and a narrow bandgap collector...
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6534421 |
Method to fabricate thin insulating film
The invention grows SiO 2 films over silicon at temperatures as low as room temperature and at pressures as high as 1 atmosphere. The lower temperature oxidation is made possible by creation of...
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6506692 |
Method of making a semiconductor device using a silicon carbide hard mask
A method of converting a hydrophobic surface of a silicon carbide layer to a hydrophilic surface is described. That method comprises forming a silicon carbide containing layer on a substrate, then...
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6465374 |
Method of surface preparation
A semiconductor substrate is heated via exposure to ultraviolet radiation substantially in the absence of a halogen containing chemical and subsequently exposed to a halogen-containing gas in the...
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6432847 |
Method of activating P-type compound semiconductor by using lasers for reducing the resistivity thereof
A novel method of using lasers for generating driving energy for activating P-type compound semiconductor films and reducing the resistivity thereof. The P-type compound semiconductor films are...
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6420283 |
methods for producing compound semiconductor substrates and light emitting elements
Methods are provided for producing a compound semiconductor substrate including: a mica substrate; and a III-V group compound semiconductor layer containing nitrogen as its main component grown on...
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6313016 |
Method for producing epitaxial silicon germanium layers
A method for producing relaxed epitaxy layers on a semiconductor substrate by an epitaxy process, particularly molecular beam epitaxy, with a hydrogen source, wherein the following steps occur...
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6303404 |
Method for fabricating white light emitting diode using InGaN phase separation
Disclosed is a method for fabricating a white LED which comprises, as a single active layer, an InGaN thin film which enables emission of white light. The InGaN thin film is constructed by taking...
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