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7615868 |
Electrode, method for producing same and semiconductor device using same
There is provided a technology for obtaining an electrode having a low contact resistance and less surface roughness. There is provided an electrode comprising a semiconductor film 101 , and a...
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7611979 |
Metal gates with low charge trapping and enhanced dielectric reliability characteristics for high-k gate dielectric stacks
A multilayered gate stack having improved reliability (i.e., low charge trapping and gate leakage degradation) is provided. The inventive multilayered gate stack includes, from bottom to top, a...
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7576706 |
Image display device including two display panels and method of manufacturing the same
An image display device includes a driving unit to provide first and second image signals and first and second control signals to display images, a first display unit to display first images in...
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7550374 |
Thin film electrode for forming ohmic contact in light emitting diodes and laser diodes using nickel-based solid solution for manufacturing high performance gallium nitride-based optical devices, and method for fabricating the same
Disclosed herein is a technique for forming a high quality ohmic contact utilizable in the fabrication of short-wavelength light emitting diodes (LEDs) emitting blue and green visible light and...
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7544603 |
Method of fabricating silicon nitride layer and method of fabricating semiconductor device
A method of fabricating a silicon nitride layer is described. First, a substrate is provided. Then, a silicon nitride layer is formed on the substrate. The silicon nitride layer is UV-cured in an...
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7514349 |
Semiconductor optical device and manufacturing method thereof
The object of the invention is to reduce the deterioration of crystallinity in the vicinity of an active layer when C, which is a p-type dopant, is doped and to suppress the diffusion of Zn, which...
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7476606 |
Eutectic bonding of ultrathin semiconductors
Ultra-high speed semiconductors that are usually very thin and therefore very fragile still require connection to a circuit board and a heat transfer pathway. Ultra-high speed circuits and...
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7303933 |
Process of manufacturing a semiconductor device
A process of manufacturing a semiconductor device includes the steps of forming a stacked structure of a first III-V compound semiconductor layer containing In and having a composition different...
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7101780 |
Method for manufacturing Group-III nitride compound semiconductor device
After a p-seat electrode-forming layer is laminated onto a light-transmissive electrode-forming layer, a first heating step and a second heating step are carried out for alloying the two layers. In...
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7081401 |
Method of fabricating a p-type ohmic electrode in gallium nitride based optical device
A p-type ohmic electrode in a gallium nitride based(GaN based) optical device and a fabrication method thereof. The p-type ohmic electrode in a GaN based optical device is fabricated using a rutile...
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7071508 |
Capacitor constructions, semiconductor constructions, and methods of forming electrical contacts and semiconductor constructions
The invention includes a method of forming a semiconductor construction. A semiconductor substrate is provided, and a conductive node is formed to be supported by the semiconductor substrate. A...
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7033949 |
Structure and manufacturing method for nitride-based light-emitting diodes
A method for manufacturing a GaN-based light-emitting diode (LED) is provided with the following steps of: providing a substrate; forming a GaN semiconductor epitaxy layer on the substrate, the GaN...
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6998331 |
Methods for fabricating three dimensional anisotropic thin films and products produced thereby
A three dimensional structure comprising at least two materials capable of being deposited by vapor deposition. The structure is fabricated by the controlled vapor deposition of the materials onto...
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6946313 |
Method of making an aligned electrode on a semiconductor structure
A method of making an electrode on a semiconductor device including depositing metal on a top surface of a semiconductor structure, and defining a first region of the semiconductor structure for a...
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6933220 |
Thyristor switch for microwave signals
A thyristor for switching microwave signals includes semiconductor layers disposed on a substrate. A first surface of the thyristor defines an anode, and a second surface of the thyristor defines a...
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6920167 |
Semiconductor laser device and method for fabricating thereof
A semiconductor laser device has on a compound semiconductor substrate at least a lower cladding layer, an active layer, an upper cladding layer and a contact layer. An upper part of the upper...
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6897137 |
Process for fabricating ultra-low contact resistances in GaN-based devices
A process for fabricating ohmic contacts in a field-effect transistor includes the steps of: thinning a semiconductor layer forming recessed portions in the semiconductor layer; depositing ohmic...
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6867120 |
Method of fabricating a semiconductor device with a gold conductive layer and organic insulating layer
In a semiconductor device, particles are removed from the surface of a gold conductive layer before an intermediate insulating layer of an amino silane compound is formed. An organic insulating...
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6835636 |
Method for fabricating source/drain devices
A method for fabricating source/drain devices. A semiconductor substrate is provided with a gate formed on the semiconductor substrate, and a hard mask layer formed on the gate. A first doped area...
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6828599 |
Semiconductor light-emitting diode
The present invention relates to a semiconductor LED device comprising a pumping layer with high light emitting efficiency and an active layer with smaller bandgap converting the absorbed light...
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6774025 |
Method for producing group III nitride compound semiconductor light-emitting element
After a p seat electrode is laminated on a light-transmissive electrode, the two electrodes are heated at a relatively low temperature to thereby remove gas (degassing) from between the two...
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6734033 |
Ultraviolet light emitting diode
A light emitting diode is disclosed. The diode includes a silicon carbide substrate having a first conductivity type, a first gallium nitride layer above the SiC substrate having the same...
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6734091 |
Electrode for p-type gallium nitride-based semiconductors
An improved electrode for a p-type gallium nitride based semiconductor material is disclosed that includes a layer of an oxidized metal and a first and a second layer of a metallic material. The...
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6653215 |
Contact to n-GaN with Au termination
A contact for n-type III-V semiconductor such as GaN and related nitride-based semiconductors is formed by depositing Al,Ti,Pt and Au in that order on the n-type semiconductor and annealing the...
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6610589 |
Semiconductor light emitting device and method of manufacturing the same
A semiconductor lamination including an n-type layer and a p-type layer composed of a gallium nitride based compound semiconductor and forming a light emitting region is formed on the surface of a...
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6589850 |
Method and system for fabricating a bipolar transistor and related structure
One embodiment is a method for fabricating the base of a bipolar transistor where the method comprises placing a first wafer in an undoped epi chamber. Next a first undoped base layer is grown over...
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6555456 |
Method of forming iridium conductive electrode/barrier structure
A conductive barrier, useful as a ferroelectric capacitor electrode, having high temperature stability has been provided. This conductive barrier permits the use of iridium (Ir) metal in IC...
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6555457 |
Method of forming a laser circuit having low penetration ohmic contact providing impurity gettering and the resultant laser circuit
A novel contact structure and method for a multilayer gettering contact metallization is provided utilizing a thin layer of a pure metal as the initial layer formed on a semiconductor cap layer....
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6429111 |
Methods for fabricating an electrode structure
The electrode structure of the invention includes a p-type Al x Ga y In 1−x−y N (0≦x≦1, 0≦y≦1, x+y≦1) semiconductor layer and an electrode layer formed on the semiconductor layer. In...
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6380064 |
Semiconductor devices and process for producing the same
A semiconductor device having a semiconductor substrate and a wiring layer, which is doped with an impurity, located on the substrate. The semiconductor device has upper and lower wiring layers...
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6326294 |
Method of fabricating an ohmic metal electrode for use in nitride compound semiconductor devices
A method of fabricating on ohmic metal electrode. The p-type ohmic metal electrode according to the present invention employs Ru and RuO x as the cover layer in lieu of conventional Au, in order...
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6319809 |
Method to reduce via poison in low-k Cu dual damascene by UV-treatment
A method to reduce via poisoning in low-k copper dual damascene interconnects through ultraviolet (UV) irradiation of the damascene structure is disclosed. This is accomplished by irradiating the...
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6294446 |
Methods of manufacturing a high electron mobility transistor with a T-shaped gate electrode
A high electron mobility transistor includes a channel layer for developing therein an electron gas layer having a substantially uniform electron gas density, and upper and lower high-resistance...
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6287947 |
Method of forming transparent contacts to a p-type GaN layer
A method of forming a light-transmissive contact on a p-type Gallium nitride (GaN) layer of an optoelectronic device includes in one embodiment, introducing a selected metal in an oxidized...
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6255671 |
Metal embedded passivation layer structure for microelectronic interconnect formation, customization and repair
A structure includes a metal nitride film of the form MN, where M is selected from the group consisting of Ga, In, AlGa, AlIn, and AlGaIn. The structure has at least one electrically conductive...
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6228673 |
Method of fabricating a surface coupled InGaAs photodetector
A photodetector is fabricated in a multilayer structure having a semi-insulating InP substrate, an n+ InP contact layer overlying the InP substrate, an undoped InGaAs absorbing layer overlying the...
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6197675 |
Manufacturing method for semiconductor device having contact holes of different structure
A semiconductor memory device comprises a semiconductor substrate, a first conducting layer formed above the main surface of the semiconductor substrate, a second conducting layer formed above the...
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6165859 |
Method for making InP heterostructure devices
The specification describes a metal contact material optimized for diffused contacts to the buried emitter-base junction in DHBT devices. The metal contact material is a multilayer structure of...
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6110813 |
Method for forming an ohmic electrode
A first metal film and a second metal film, both of which are made of Ni or the like, are deposited on the upper surface of a substrate made of SiC. In such a state, the interface between the first...
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6100174 |
GaN group compound semiconductor device and method for producing the same
A GaN group compound semiconductor device includes an electrode structure provided on a p-GaN group compound semiconductor layer, the electrode structure including: a first layer formed on the...
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6033976 |
Ohmic electrode, its fabricating method and semiconductor device
It is intended to realize an ohmic electrode for III-V compound semiconductors such as GaAs semiconductors which has practically satisfactory characteristics. Provided on an n + -type GaAs...
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6001716 |
Fabricating method of a metal gate
A method of fabricating a metal gate includes forming a gate insulating layer on a provided substrate, forming a PVD titanium nitride layer on the gate insulating layer, forming a CVD titanium...
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5966629 |
Method for fabricating an electrode structure
The electrode structure of the invention includes a p-type Al x Ga y In 1 -x-y N (0≤x≤1, 0≤y≤1, x+y≤1) semiconductor layer and an electrode layer formed on the semiconductor layer. In...
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5956604 |
Ohmic contact to Gallium Arsenide using epitaxially deposited Cobalt Digermanide
A partially ionized beam (PIB) deposition technique is used to heteroepitally deposit a thin film of CoGe 2 (001) on GaAs (100) substrates 14. The resulting epitaxial arrangement is CoGe 2 (001)...
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5904554 |
Method for fabricating ohmic electrode and multi-layered structure for ohmic fabricating electrode
An ohmic electrode for III-V compound semiconductors such as GaAs semiconductors which has practically satisfactory characteristics is disclosed. A non-single crystal InAs layer, Ni film, WSi film...
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5863835 |
Methods of forming electrical interconnects on semiconductor substrates
Methods of forming electrical interconnects on semiconductor substrates include the steps of forming a first electrically insulating layer (e.g., silicon dioxide) and then forming a contact hole in...
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5770489 |
Method of making a compound semiconductor field-effect transistor
A fabrication method of a compound semiconductor FET that enables to produce source/drain electrodes and a gate electrode at any positions flexibly without increase of the number of necessary...
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5731224 |
Method for manufacturing ohmic contacts for compound semiconductors
A method for manufacturing ohmic contacts on an n-doped semiconductor layer of a III-V compound semiconductor. An AuGeNi layer is formed on the n-type III-V compound semiconductor, where the...
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5683937 |
Method of making a semiconductor device
A semiconductor device includes a rectangular semiconductor chip having a main surface, a stripe-form semiconductor element forming portion formed in parallel to one of sides of the semiconductor...
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5670385 |
Method for fabricating an optical controlled resonant tunneling oscillator
An optical controlled resonant tunneling oscillator utilizing variation of a resonant tunneling oscillator in accordance with a negative differential resistance, a series resistance and a static...
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