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7629240 |
Controlling dopant diffusion in a semiconductor region
Dopant diffusion into semiconductor material is controlled during fabrication of a semiconductor structure by depositing a nucleation layer over a first layer of the semiconductor structure and...
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7625812 |
Silicon nano wires, semiconductor device including the same, and method of manufacturing the silicon nano wires
A method of manufacturing silicon nano wires including forming microgrooves on a surface of a silicon substrate, forming a first doping layer doped with a first dopant on the silicon substrate and...
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7615393 |
Methods of forming multi-doped junctions on a substrate
A method of forming a multi-doped junction on a substrate is disclosed. The method includes providing the substrate doped with boron, the substrate including a first substrate surface with a first...
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7611977 |
Process of phosphorus diffusion for manufacturing solar cell
This invention discloses a process of phosphorus diffusion for manufacturing solar cell, comprising annealing a mono-crystalline silicon wafer in a nitrogen atmosphere at 900-950° C. for twenty to...
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7608524 |
Method of and system for forming SiC crystals having spatially uniform doping impurities
In a physical vapor transport method and system, a growth chamber charged with source material and a seed crystal in spaced relation is provided. At least one capsule having at least one capillary...
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7605064 |
Selective laser annealing of semiconductor material
A method of manufacture for semiconductor electronic products and a circuit structure. A semiconductor material has a surface region and dopant is provided to a portion of the surface region. The...
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7605052 |
Method of forming an integrated circuit having a device wafer with a diffused doped backside layer
A method for forming a diffused, doped backside layer on a device wafer oxide bonded to a handle wafer in an integrated circuit is provided. The method comprises forming a thermal bond oxide layer...
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7564078 |
Tunable semiconductor component provided with a current barrier
Semiconductor component or device is provided which includes a current barrier element and for which the impedance may be tuned (i.e. modified, changed, etc.) using a focused heating source.
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7557023 |
Implantation of gate regions in semiconductor device fabrication
A semiconductor fabrication method. The method includes providing a semiconductor structure which includes (i) a semiconductor layer, (ii) a gate dielectric layer on the semiconductor layer, and...
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7550358 |
MEMS device including a laterally movable portion with piezo-resistive sensing elements and electrostatic actuating elements on trench side walls, and methods for producing the same
A method to create piezoresistive sensing elements and electrostatic actuator elements on trench sidewalls is disclosed. P-type doped regions are formed in the upper surface of an n-type substrate....
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7547618 |
System and method for providing a deep connection to a substrate or buried layer of a semiconductor device
A system and method is disclosed for providing a deep connection to a substrate or buried layer of a semiconductor device. Three shallow trenches are etched halfway through a layer of epitaxial...
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7524745 |
Method and device for doping, diffusion and oxidation of silicon wafers under reduced pressure
Method and device for doping or diffusion, or oxidation of silicon wafers ( 4 ), the wafers being introduced into the chamber ( 2 ) of an oven ( 1 ) wherein is introduced at least a gas for...
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7514345 |
Electroactive polymers for lithography
Systems and methods for lithography include actuating an electroactive polymer member to position mask and/or substrate.
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7485555 |
Methods for forming a P-type polysilicon layer in a semiconductor device
A P-type polysilicon layer having a stable and desired resistivity is formed by alternately depositing a plurality of silicon atom layers and a plurality of group IIIA element atom layers on a...
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7452785 |
Method of fabrication of highly heat dissipative substrates
The invention relates to a method for fabricating a composite structure having heat dissipation properties greater than a bulk single crystal silicon structure having the same dimensions. The...
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7439159 |
Fusion bonding process and structure for fabricating silicon-on-insulator (SOI) semiconductor devices
A method of fabricating a semiconductor-on-insulator device including: providing a first semiconductor wafer having an about 200 angstrom thick oxide layer thereover; etching the first...
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7435514 |
Active mask lithography
An active mask emits a patterned energy flux in response to an energy input.
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7368356 |
Transistor with doped gate dielectric
A transistor and method of manufacture thereof. A semiconductor workpiece is doped before depositing a gate dielectric material. Using a separate anneal process or during subsequent anneal...
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7338876 |
Method for manufacturing a semiconductor device
A method for forming a semiconductor memory device includes the steps of: implanting a dopant in a semiconductor substrate; heat treating the semiconductor substrate in an oxidizing ambient to...
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7338829 |
Semiconductor structures having through-holes sealed with feed through metalization
The invention relates to a method for producing a detector for determining the energy of photons and charged particles; to be precise, a so-called ΔE detector or transmission detector. The...
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7262111 |
Method for providing a deep connection to a substrate or buried layer in a semiconductor device
A system and method is disclosed for providing a deep connection to a substrate or buried layer of a semiconductor device. Three shallow trenches are etched halfway through a layer of epitaxial...
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7247548 |
Doping method and semiconductor device using the same
The present invention achieves a shallow junction of a source and a drain, and provides a doping method which makes device properties reproducible and a semiconductor device fabricated using the...
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7235468 |
FinFET device with reduced DIBL
FinFET devices formed with a Silicon On Insulator (SOI) technology with reduced Drain Induced Barrier Lowering (DIBL) characteristics and methods for producing the same. The methods involve dopant...
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7220674 |
Copper alloys for interconnections having improved electromigration characteristics and methods of making same
Formation of copper alloy interconnect lines on integrated circuits includes introducing dopant elements into a copper layer. Copper alloy interconnect lines may be formed by providing a doping...
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7202164 |
Method of forming ultra thin silicon oxynitride for gate dielectric applications
A method of forming a gate dielectric layer is disclosed. The method comprises the following steps. A substrate is provided having silicon regions containing surfaces upon which gate dielectrics...
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7170084 |
Strained silicon MOSFET having improved source/drain extension dopant diffusion resistance and method for its fabrication
An n-type MOSFET (NMOS) is implemented on a substrate having an epitaxial layer of strained silicon formed on a layer of silicon germanium. The MOSFET includes first halo regions formed in the...
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7166232 |
Method for producing a solid body including a microstructure
According to a method for producing a solid body ( 1 ) including a microstructure ( 2 ), the surface of a substrate ( 3 ) is provided with a masking layer ( 6 ) that is impermeable to a substance...
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7122454 |
Method for improving nitrogen profile in plasma nitrided gate dielectric layers
A method is provided wherein a gate dielectric film that is plasma nitrided in a chamber of one system is subsequently heated or “annealed” in another chamber of the same system. Processing...
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7118997 |
Implantation of gate regions in semiconductor device fabrication
A method for implanting gate regions essentially without implanting regions of the semiconductor layer where source/drain regions will be later formed. The method includes the steps of (a)...
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7118998 |
Method of forming a conductive structure
A conductive structure provides a conductive path from a first region in a semiconductor material to a second spaced apart region in the semiconductor material by forming a plurality of trenches...
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7115437 |
Micromachined device having electrically isolated components and a method for making the same
A micromachined structure having electrically isolated components is formed by thermomigrating a dopant through a substrate to form a doped region within the substrate. The doped region separates...
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7112500 |
Thin film transistor, liquid crystal display and manufacturing method thereof
The present invention provides a thin film transistor comprising a drain electrode and a source electrode separated by a channel region formed over a contact portion with an amorphous silicon layer...
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7112484 |
Thin film diode integrated with chalcogenide memory cell
An integrated programmable conductor memory cell and diode device in an integrated circuit comprises a diode and a glass electrolyte element, the glass electrolyte element having metal ions mixed...
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7109087 |
Absorber layer for DSA processing
A method of processing a substrate comprising depositing a layer comprising amorphous carbon on the substrate and then laser annealing the substrate is provided. Optionally, the layer further...
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7109100 |
Semiconductor device and method for manufacturing semiconductor device
To provide a semiconductor device able to be made uniform in diffusion depth of the impurity in a diffusion layer by a single diffusion and to give the desired threshold voltage and improved in...
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7078315 |
Method for eliminating inverse narrow width effects in the fabrication of DRAM device
The present invention provides a method for eliminating inverse narrow width effects in the fabrication of DRAM devices. A semiconductor substrate is provided having thereon a shallow trench. The...
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7078325 |
Process for producing a doped semiconductor substrate
A process is described which allows a buried, retrograde doping profile or a delta doping to be produced in a relatively simple and inexpensive way. The process uses individual process steps that...
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7037815 |
Method for forming an ultra-shallow junction in a semiconductor substrate using a nuclear stopping layer
A method for forming an ultra-shallow junction in a semiconductor substrate is provided. A semiconductor substrate having a top surface is prepared. A dielectric layer is then formed on the top...
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7037814 |
Single mask control of doping levels
In an integrated circuit, dopant concentration levels are adjusted by making use of a perforated mask. Doping levels for different regions across an integrated circuit can be differently defined by...
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7029939 |
P-type semiconductor manufacturing method and semiconductor device
A p-GaN layer 5 comprising materials such as a Group III nitride compound semiconductor is formed on a sapphire substrate 1 through MOVPE treatment, and a first metal layer 6 made of Co/Au is...
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7026172 |
Reduced thickness variation in a material layer deposited in narrow and wide integrated circuit trenches
A high density plasma chemical vapor deposition (HDP-CVD) process is used to deposit silicon dioxide in trenches of various widths. The thickness of the silicon dioxide filling both narrow and wide...
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7026230 |
Method for fabricating a memory device
The present invention is a method for fabricating a memory device. In one embodiment, an impurity concentration is created in a semiconductor substrate of a memory device. An annealing process is...
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7005364 |
Method for manufacturing semiconductor device
The invention provides a method for manufacturing a semiconductor device with which an impurity introduction region and a positioning mark region can be formed aligned, based on a common insulating...
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6987054 |
Method of fabricating a semiconductor device having a groove formed in a resin layer
A semiconductor device has a resin package layer on a principal surface of a semiconductor chip, on which a number of bump electrodes are formed, wherein the semiconductor device has a chamfer...
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6974750 |
Process for forming a trench power MOS device suitable for large diameter wafers
A process for fabricating power semiconductor devices involving preparation of a silicon wafer by epitaxial formation of an intrinsic silicon layer on a silicon substrate and high energy...
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6936527 |
Low voltage non-volatile memory cell
A memory cell comprises a multilayer gate heating structure formed over a channel region between source and drain regions. The multilayer gate heating structure comprises polysilicon and metal...
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6908803 |
Methods for forming wordlines, transistor gates, and conductive interconnects, and wordline, transistor gate, and conductive interconnect structures
The invention encompasses stacked semiconductor devices including gate stacks, wordlines, PROMs, conductive interconnecting lines, and methods for forming such structures. The invention also...
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6897132 |
Method of reducing the conductivity of a semiconductor and devices made thereby
Disclosed is a method of reducing the conductivity/charge of a layer of group III-V semiconductor doped with Sn. The method includes the steps of: forming an region of SiO 2 on the semiconductor...
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6872640 |
SOI CMOS device with reduced DIBL
CMOS devices formed with a Silicon On Insulator (SOI) technology with reduced Drain Induced Barrier Lowering (DIBL) characteristics and a method for producing the same. The method involves a high...
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6852623 |
Method for manufacturing zinc oxide semiconductors
Disclosed herein is a method for manufacturing a zinc oxide semiconductor. The method comprises the steps of forming a zinc oxide thin film including a group V element as a dopant on a substrate by...
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