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6673702 |
Method for producing a semiconductor device
A method for producing a semiconductor device of the present invention includes: heating a first semiconductor layer made of a Group III nitride-based compound semiconductor in gas containing...
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6673701 |
Atomic layer deposition methods
An atomic layer deposition method includes positioning a semiconductor substrate within an atomic layer deposition chamber. A first precursor gas is flowed to the substrate within the atomic layer...
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6649494 |
Manufacturing method of compound semiconductor wafer
A protector film is formed on the surface of a substrate to cover at least the side surface thereof. Then, a compound semiconductor film including nitrogen is grown through epitaxial growth on the...
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6650023 |
Apparatus for depositing thin film
Disclosed is a thin film deposition apparatus for depositing a thin film on a display panel including a deposition source having a groove in one surface wherein the groove is filed with a thin film...
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6602767 |
Method for transferring porous layer, method for making semiconductor devices, and method for making solar battery
A method for transferring a porous layer includes forming a porous layer on one side of a crystalline silicon member by anodization, fixing a supporting substrate onto the surface of the porous...
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6586785 |
Aerosol silicon nanoparticles for use in semiconductor device fabrication
A stratum or discontinuous monolayer of dielectric-coated semiconductor particles includes a high density of semiconductor nanoparticles with a tightly controlled range of particle sizes in the...
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6583034 |
Semiconductor structure including a compliant substrate having a graded monocrystalline layer and methods for fabricating the structure and semiconductor devices including the structure
High quality epitaxial layers of monocrystalline materials can be grown overlying monocrystalline substrates such as large silicon wafers by forming a compliant substrate for growing the...
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6576535 |
Carbon doped epitaxial layer for high speed CB-CMOS
A method for fabricating a high speed complementary bipolar/CMOS device is disclosed which enables the forming of a silicon epitaxial layer in a PNP transistor having carbon incorporated therein to...
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6544870 |
Silicon nitride film comprising amorphous silicon quantum dots embedded therein, its fabrication method and light-emitting device using the same
The present invention relates to a light-emitting device utilizing amorphous silicon quantum dot nanostructures, wherein the light-emitting device can be fabricated using the existing silicon...
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6524935 |
Preparation of strained Si/SiGe on insulator by hydrogen induced layer transfer technique
A method for forming strained Si or SiGe on relaxed SiGe on insulator (SGOI) is described incorporating growing epitaxial Si 1−y Ge y layers on a semiconductor substrate, implanting hydrogen...
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6521470 |
Method of measuring thickness of epitaxial layer
A method of measuring the thickness of an epitaxial layer is disclosed. The method is particularly useful in measuring the epitaxial layer with a doping concentration lower than or similar to the...
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6518082 |
Method for fabricating nitride semiconductor device
First, the substrate temperature is set to 1020° C., and an n-type cladding layer ( 14 ) made of n-type Al 0.1 Ga 0.9 N, an n-type optical guide layer ( 15 ) made of n-type GaN, and a flatness...
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6458675 |
Semiconductor device having a plasma-processed layer and method of manufacturing the same
A semiconductor device includes: a semiconductor substrate; an active layer; and a plasma-processed layer provided between the semiconductor substrate and the active layer. The plasma-processed...
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6444547 |
Method for manufacturing semiconductor device
The present invention is characterized by providing epitaxial growth of a semiconductor layer on the surface of a wafer not provided with mirror finishing and having irregularity, introducing...
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6444546 |
Single electron device using ultra-thin metal film and method for fabricating the same
There is provided a single electron device. The device has weak links with bottle-neck figure in place of the tunnel junction of the prior device. The weak links are easily formed on the same...
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6440765 |
Method for fabricating an infrared-emitting light-emitting diode
A method for fabricating an infrared-emitting light-emitting diode in which a layer sequence is applied onto a semiconductor substrate, preferably composed of GaAs. The layer sequence has,...
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6441392 |
Device based on quantic islands and method for making same
A quantic effect device which functions using a Coulomb blockade phenomenon. The device includes two electron reservoirs, two sets of islands that are separated by a dielectric layer, a protective...
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6429102 |
Method of manufacturing low resistivity p-type compound semiconductor material
The present invention provides a method of manufacturing a low resistivity p-type compound semiconductor material over a substrate. The method of the present invention comprises the steps of...
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6406982 |
Method of improving epitaxially-filled trench by smoothing trench prior to filling
A trench is formed in a semiconductor substrate through a mask composed of a silicon oxide film formed on the semiconductor substrate. Then, an edge portion at an opening portion of the mask is...
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6380038 |
Transistor with electrically induced source/drain extensions
A method of fabricating an integrated circuit provides a transistor having less susceptibility to short channel effects. The transistor utilizes a U-shaped gate conductor and a main gate conductor....
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6368935 |
Method for upgrading quality of DRAM capacitor and wafer-to-wafer uniformity
A method for upgrading qualities of DRAM capacitors and wafer-to-wafer uniformity is disclosed. In order to effectively prevent wafers from contaminations, the invention uses an additional silane...
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6344403 |
Memory device and method for manufacture
A semiconductor memory device with a floating gate that includes a plurality of nanoclusters ( 21 ) and techniques useful in the manufacturing of such a device are presented. The device is formed...
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6337239 |
Layer configuration with a material layer and a diffusion barrier which blocks diffusing material components and process for producing a diffusion barrier
A layer configuration includes a material layer and a diffusion barrier which blocks diffusing material components. The barrier is disposed in the vicinity of a layer boundary of the material layer...
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6306739 |
Method and apparatus for depositing thin films of group III nitrides and other films and devices made therefrom
In this invention, one or more metal-containing sources and one or more ammonium halides are heated such that they evaporate into a vacuum environment (except that, in MOMBE, a beam of the...
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6281099 |
Method for synthesizing single crystal AIN thin films of low resistivity n-type and low resistivity p-type
In growing single AlN thin films on a semiconductor substrate by rapidly cooling a beam of atomic Al and atomic or molecular N obtained by exciting or decomposing N 2 with an electromagnetic wave...
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6274464 |
Epitaxial cleaning process using HCL and N-type dopant gas to reduce defect density and auto doping effects
An epitaxial layer is formed on a P type silicon substrate in which a plurality of P+ buried layer regions, a plurality of N+ buried layer regions, and a P+ field layer region occupying most of the...
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6242327 |
Compound semiconductor device having a reduced source resistance
A compound semiconductor device includes a low resistance source and drain region covered by a protective layer of a compound semiconductor device carrying thereon a source electrode or a drain...
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6242325 |
Method for optimising the etch rate of polycrystalline layer
The present invention concerns a method for optimising the etching rate of a polycrystalline layer having a predetermined composition comprising at least two chemical species arranged in the form...
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6239045 |
Semiconductor producing apparatus and producing method for epitaxial wafer using same
By perfectly preventing a particle from being attached on a silicon wafer or a silicon epitaxial wafer before and after the silicon epitaxial growth, pit formation on the silicon epitaxial layer in...
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6140209 |
Process for forming an SOI substrate
A process for producing an SOI substrate is disclosed which is useful for saving resources and lowering production cost. Further, a process for producing a photoelectric conversion device such as a...
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6136626 |
Semiconductor light-emitting device and production method thereof
A semiconductor light-emitting device with a double hetero structure, including: an active layer made of Ga 1 -x In x N (0≤x≤0.3) doped with a p-type impurity and an n-type impurity; and first...
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6103600 |
Method for forming ultrafine particles and/or ultrafine wire, and semiconductor device using ultrafine particles and/or ultrafine wire formed by the forming method
A quantum dot and quantum fine wire forming method is provided which can allow control of the position for crystalline particle growth and enables formation of particles with high uniformity in...
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6103543 |
Fabrication of device electrodes in gan and related materials
A base layer of electode made of at least a metal selected from V, Nb, and Zr, or an alloy containing such metal on an n-type GaN compound semiconductor layer. Further, a main electrode layer made...
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6083833 |
Method for forming conductive film for semiconductor device
A method for forming a conductive film for a semiconductor device wherein a conductive film is formed on each wafer loaded in a boat of a vertical furnace of a low pressure chemical vapor...
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6043141 |
Method for in situ growth of p-type doped group II-VI semiconductor films
A method of growing a p-type doped Group II-VI semiconductor film includes the steps of forming a lattice comprising a Group II material and a Group VI material wherein a cation-rich condition is...
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6040236 |
Method for manufacturing silicon thin film conductive element
In a silicon conductor doped with an impurity of 100 nm or less thick, a method is provided for manufacturing a silicon thin film conductive element which can prevent the increase of resistance...
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6033490 |
Growth of GaN layers on quartz substrates
In a method of manufacturing a semiconductor device which includes a quartz substrate having a z-cut plane of (0001) plane on a surface, a GaN film is first deposited on the surface. Finally, the...
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6033972 |
Growing method of GaAs quantum dots using chemical beam epitaxy
The formation of self-assembled GaAs quantum dots on (100) GaAs via chemical beam epitaxy (CBE) technique using triethylgallium (TEGa) and arsine (AsH 3 ) is disclosed. GaAs quantum dots are easy...
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6030887 |
Flattening process for epitaxial semiconductor wafers
Process for the preparation of an epitaxial wafer having a total thickness variation and/or site total indicated reading of less than about 1.0 μms. The distance between the front and back...
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6030848 |
Method for manufacturing a GaN-based compound semiconductor light emitting device
A manufacturing method for high quality GaN-based light emitting devices. The method enable effective growth of an Al y Ga 1 -y N (0≤y≤1) layer on an In x Ga 1 - N (0≤x≤1) layer by CVD....
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5989985 |
Semiconductor single crystalline substrate and method for production thereof
In a semiconductor single crystalline substrate provided with a protecting film to prevent autodoping on the reverse surface thereof, for growing a vapor-phase epitaxial layer on the main obverse...
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5970314 |
Process for vapor phase epitaxy of compound semiconductor
A process for forming a high quality epitaxial compound semiconductor layer of indium gallium nitride In x Ga 1 -x N, (where 0<x<1) on a substrate. A first gas including indium trichloride...
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5966625 |
Method for making a slant-surface silicon wafer having a reconstructed atomic-level stepped surface structure
A single crystal silicon wafer is sliced off so as to have a slant surface that is inclined from plane (001) such that the normal of the slant surface is inclined by 0.01° to 0.2° from direction...
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5956602 |
Deposition of polycrystal Si film
The present invention provides a method for depositing polycrystal Si films, including n-type and p-type polycrystal Si films, using a material gas, a doping gas, and hydrogen gas. This method...
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5937313 |
Method of forming quantum wire for compound semiconductor
Disclosed is a method of forming quantum wires for compound semiconductors capable of forming a large number of quantum wires. Quantum wires for compound semiconductors according to the present...
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5930656 |
Method of fabricating a compound semiconductor device
A substrate for forming a compound semiconductor device is placed in a reaction chamber. An MOCVD method or a GS-MBE method is used to grow compound semiconductor layers on the substrate. The grown...
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5926726 |
In-situ acceptor activation in group III-v nitride compound semiconductors
A method of manufacturing a p-type III-V nitride compound semiconductor utilizing vapor phase epitaxy is carried out in a MOCVD reactor by growing a III-V nitride compound semiconductor in the...
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5908305 |
Electro-optic device
The device comprises a layer of silicon separated from a substrate by a layer of insulating material. A rib having an upper surface and two side surfaces is formed in the layer of silicon to...
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5895260 |
Method of fabricating semiconductor devices and the devices
Fabricating a device including a Schottky diode by growing a dielectric film on a SiC substrate structure and forming an ohmic contact on the opposite surface of the substrate structure by...
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5891790 |
Method for the growth of P-type gallium nitride and its alloys
Growth of doped gallium nitride, especially p-type gallium nitride, without using post-growth processing is achieved by eliminating hydrogen containing molecules from the growth process before...
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