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8138035 |
Method for forming integrated circuits with aligned (100) NMOS and (110) PMOS FinFET sidewall channels
A method of forming an integrated circuit device that includes a plurality of multiple gate FinFETs (MuGFETs) is disclosed. Fins of different crystal orientations for PMOS and NMOS MuGFETs are...
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8017426 |
Color filter array alignment mark formation in backside illuminated image sensors
A backside illuminated image sensor includes a sensor layer comprising photosensitive elements of the pixel array, an epitaxial layer formed on a frontside surface of the sensor layer, and a color...
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7998846 |
3-D integrated circuit system and method
A semiconductor fabrication system and method are presented. A three dimensional multilayer integrated circuit fabrication method can include forming a first device layer and forming a second...
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7989306 |
Method of forming alternating regions of Si and SiGe or SiGeC on a buried oxide layer on a substrate
Semiconductor structures and methods of forming semiconductor structures, and more particularly to structures and methods of forming SiGe and/or SiGeC buried layers for SOI/SiGe devices. An...
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7951659 |
Method for simultaneously tensile and compressive straining the channels of NMOS and PMOS transistors respectively
A method of forming a microelectronic device comprising, on a same support: at least one semi-conductor zone strained according to a first strain, and at least one semi-conductor zone strained...
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7951639 |
Method of zinc oxide film grown on the epitaxial lateral overgrowth gallium nitride template
A growth method is proposed for high quality zinc oxide comprising the following steps: (1) growing a gallium nitride layer on a sapphire substrate around a temperature of 1000° C.; (2) patterning ...
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7906413 |
Abrupt “delta-like” doping in Si and SiGe films by UHV-CVD
A structure and method of forming an abrupt doping profile is described incorporating a substrate, a first epitaxial layer of Ge less than the critical thickness having a P or As concentration...
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7879697 |
Growth of low dislocation density Group-III nitrides and related thin-film structures
Methods of growing Group-III nitride thin-film structures having reduced dislocation density are provided. Methods in accordance with the present invention comprise growing a Group-III nitride...
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7875884 |
Hetero-crystalline structure and method of making same
A hetero-crystalline device structure and a method of making the same include a first layer and a nanostructure integral to a crystallite in the first layer. The first layer is a non-single...
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7863621 |
Thin film transistor
A thin film transistor includes a semiconductor layer formed on a polycrystalline silicon layer crystallized by a super grain silicon (SGS) crystallization method. The thin film transistor is...
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7842595 |
Fabricating electronic-photonic devices having an active layer with spherical quantum dots
A method for manufacturing an electronic-photonic device. Epitaxially depositing an n-doped III-V composite semiconductor alloy buffer layer on a crystalline surface of a substrate at a first...
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7820501 |
Decoder for a stationary switch machine
Accordingly, in one embodiment of the invention, a method is provided for reducing stacking faults in an epitaxial semiconductor layer. In accordance with such method, a substrate is provided which...
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7807523 |
Sequential selective epitaxial growth
By forming MOSFETs on a substrate having pre-existing ridges of semiconductor material (i.e., a “corrugated substrate”), the resolution limitations associated with conventional semiconductor man...
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7791103 |
Group III nitride semiconductor substrate
A Group III nitride semiconductor substrate is formed of a Group III nitride single crystal, and has a diameter of not less than 25.4 mm and a thickness of not less than 150 μm. The substrate ...
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7790581 |
Semiconductor substrate with multiple crystallographic orientations
A pair of semiconductor structures and a method for fabricating a semiconductor structure each utilize a semiconductor substrate having a first crystallographic orientation, and a dielectric layer...
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7754587 |
Silicon deposition over dual surface orientation substrates to promote uniform polishing
A semiconductor process and apparatus provide a planarized hybrid substrate (16) by selectively depositing an epitaxial silicon layer (70) to fill a trench (96), and then blanket depositing silicon...
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7696032 |
Semiconductor device including a crystal semiconductor layer, its fabrication and its operation
In one embodiment, a method of fabricating a semiconductor device having a crystalline semiconductor layer includes preparing a semiconductor substrate and forming a preliminary active pattern on...
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7662704 |
Electro-optical device, method of manufacturing the same, electronic apparatus, and semiconductor device
An electro-optical device includes: a substrate; a plurality of pixel units provided in a display region on the substrate; and a driving circuit that is provided in a peripheral region surrounding...
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7648853 |
Dual channel heterostructure
Dual channel heterostructures comprising strained Si and strained Ge-containing layers are disclosed, along with methods for producing such structures. In preferred embodiments, a strain-relaxed...
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7648889 |
Production method for device
A production method for devices includes: a bonding process for placing circuit surfaces of other divided plural semiconductor chips onto circuit surfaces of semiconductor chips of a wafer and...
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7642177 |
Method of manufacturing nanowire
A method of manufacturing a nanowire, a method of manufacturing a semiconductor apparatus including a nanowire and a semiconductor apparatus formed from the same are provided. The method of...
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7642179 |
Semiconductor substrate and manufacturing method for the same
A method of manufacturing a semiconductor substrate includes a growing step of growing a second single crystalline semiconductor on a first single crystalline semiconductor, a blocking layer...
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7608530 |
Hetero-crystalline structure and method of making same
A hetero-crystalline device structure and a method of making the same include a first layer and a nanostructure integral to a crystallite in the first layer. The first layer is a non-single...
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7589002 |
Method of forming an oxygen- or nitrogen-terminated silicon nanocrystalline structure and an oxygen- or nitrogen-terminated silicon nanocrystalline structure formed by the method
An oxygen- or nitrogen-terminated silicon nanocrystalline structure is formed on a silicon substrate by forming a silicon film of fine silicon crystals and amorphous silicon on a substrate, and...
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7572715 |
Selective epitaxy process with alternating gas supply
In one example, a method of epitaxially forming a silicon-containing material on a substrate surface is presented which includes positioning a substrate into a process chamber. The substrate has a...
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7560352 |
Selective deposition
A method for epitaxially forming a silicon-containing material on a substrate surface utilizes a halogen containing gas as both an etching gas as well as a carrier gas through adjustments of the...
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7413967 |
Yield improvement in silicon-germanium epitaxial growth
A method for determining a SiGe deposition condition so as to improve yield of a semiconductor structure. Fabrication of the semiconductor structure starts with a single-crystal silicon (Si) layer....
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7413939 |
Method of growing a germanium epitaxial film on insulator for use in fabrication of CMOS integrated circuit
A method of fabricating a silicon-germanium CMOS includes preparing a silicon substrate wafer; depositing an insulating layer on the silicon substrate wafer; patterning and etching the insulating...
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7396744 |
Method of forming a semiconductor thin film
A method of fabricating a semiconductor thin film is provided, comprising: forming an insulation layer on a semiconductor substrate; etching the insulation layer to form a plurality of openings...
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7364976 |
Selective etch for patterning a semiconductor film deposited non-selectively
A method to selectively etch, and hence pattern, a semiconductor film deposited non-selectively is described. In one embodiment, a carbon-doped silicon film is deposited non-selectively such that...
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7364990 |
Epitaxial crystal growth process in the manufacturing of a semiconductor device
First and second preliminary epitaxial layers are grown from single-crystalline seeds in openings in an insulation layer until the first and second epitaxial layers are connected to each other....
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7303968 |
Semiconductor device and method having multiple subcollectors formed on a common wafer
A semiconductor device and a method of fabricating a semiconductor device having multiple subcollectors which are formed in a common wafer, in order to provide multiple structures having different...
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7300854 |
Method for producing a semiconductor component having a movable mass in particular, and semiconductor component produced according to this method
A method of producing a semiconductor component, e.g., a multilayer semiconductor component, and a semiconductor component produced by this method, where the semiconductor component has, e.g., a...
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7247528 |
Methods of fabricating semiconductor integrated circuits using selective epitaxial growth and partial planarization techniques
Methods of fabricating a semiconductor integrated circuit having thin film transistors using an SEG technique are provided. The methods include forming an inter-layer insulating layer on a...
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7230301 |
Single-crystal silicon semiconductor structure
A resistor, a transistor, and a capacitor can be fabricated on a semiconductor wafer in a process that forms an isolated single-crystal region with precise dimensions. The isolated single-crystal...
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7226825 |
Method of fabricating micro-chips
A method of fabricating micro-chips, including: (a) providing a substrate; (b) forming a first single-crystal layer on a top surface of the substrate; (c) forming a second single-crystal layer on a...
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7223802 |
High order silane composition, and method of forming silicon film using the composition
It is an object of the present invention to provide a high order silane composition that contains a polysilane having a higher molecular weight than conventionally, this being from the viewpoints...
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7186630 |
Deposition of amorphous silicon-containing films
Chemical vapor deposition methods are used to deposit amorphous silicon-containing films over various substrates. Such methods are useful in semiconductor manufacturing to provide a variety of...
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7087506 |
Method of forming freestanding semiconductor layer
A method of providing a freestanding semiconductor layer on a conventional SOI or bulk-substrate silicon device includes forming an amorphous or polycrystalline mandrel on a monocrystalline base...
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7074685 |
Method of fabrication SiGe heterojunction bipolar transistor
A method of fabricating a semiconductor device includes a SiGe(C) heterojunction bipolar transistor using a non-selective epitaxial growth where an insulating layer is formed on a substrate and a...
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7067404 |
Thin film semiconductor device having a gate electrode insulator formed through high-heat oxidization
A thin film semiconductor device includes a gate electrode insulator formed through high-heat oxidization of a semiconductor film. The high-heat oxidization of semiconductor film is carried out, in...
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6989230 |
Producing low k inter-layer dielectric films using Si-containing resists
In a process of producing low k inter-layer dielectric film in an interconnect structure on a semiconductor body, the improvement of preventing resist poisoning effects, comprising: a) providing an...
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6989316 |
Semiconductor device and method for manufacturing
In using an epitaxial growth method to selectively grow on a silicon substrate an epitaxial layer on which an element is to be formed, the epitaxial layer is formed so as to extend upward above a...
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6982212 |
Method of manufacturing a semiconductor device
In the method of manufacturing a semiconductor device (1) with a semiconductor body (2), a doped zone (3) is formed in the semiconductor body (2). The semiconductor body (2) has a crystalline...
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6946370 |
Semiconductor crystal producing method
In a separation layer removing process α, temperature in a reaction chamber (heat treatment temperature TX) is raised to about 1000° C. and a separation layer A is evaporated through thermal d...
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6884699 |
Process and unit for production of polycrystalline silicon film
A process for making a polycrystalline silicon film includes forming, on a glass substrate, an amorphous silicon film having a first region and a second region that contacts the first region,...
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6881635 |
Strained silicon NMOS devices with embedded source/drain
A planar NFET on a strained silicon layer supported by a SiGe layer achieves reduced external resistance by removing SiGe material outside the transistor body and below the strained silicon layer...
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6864158 |
Method of manufacturing nitride semiconductor substrate
A main surface of a base substrate of sapphire is selectively formed an irregular region on the main surface. Then, a semiconductor layer of gallium nitride is grown to fill recessed portions in...
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6858308 |
Semiconductor element, and method of forming silicon-based film
The invention provides a semiconductor element having a semiconductor junction composed of silicon-based films, at least one of the silicon-based films containing a microcrystal. The microcrystal...
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6828178 |
Thin film semiconductor device having arrayed configuration of semiconductor crystals and a method for producing it
A thin film semiconductor device and a method for producing it are described. In the thin film layer of semiconductor of the device, a plurality of large size single-crystalline grains of...
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