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9034717 Semiconductor-on-insulator structure and method of fabricating the same  
Methods for forming a layer of semiconductor material and a semiconductor-on-insulator structure are provided. A substrate including one or more devices or features formed therein is provided. A...
9029243 Method for producing a semiconductor device and field-effect semiconductor device  
A method for producing a semiconductor device is provided. The method includes providing a wafer including a main surface and a silicon layer arranged at the main surface and having a nitrogen...
9024414 Semiconductor device and method for forming the same  
A semiconductor device in which a gettering layer is formed in a semiconductor substrate, and a method for forming the same are disclosed, resulting in increased reliability of the semiconductor...
8999815 Method to form finFET/trigate devices on bulk semiconductor wafers  
A method for fabricating a finFET device having an insulating layer that insulates the fin from a substrate is described. The insulating layer can prevent leakage current that would otherwise flow...
8980728 Method of manufacturing a semiconductor apparatus  
A method of manufacturing a semiconductor apparatus is disclosed. A first-type doped layer, a second-type doped layer, and an internal electrical connection layer are formed. The internal...
8963234 Semiconductor device  
The substrate is made of a compound semiconductor, and has a recess, which opens at one main surface and has side wall surfaces when viewed in a cross section along a thickness direction. The gate...
8951886 Method for separating a layer system comprising a wafer by precisely maintaining the position of the separating front  
A method for mechanically separating a laminar structure from a first carrier assembly, comprising or consisting of a first carrier, wherein the laminar structure comprises a wafer and a second,...
8940622 Method for manufacturing compound semiconductor device and detergent  
A method for manufacturing a compound semiconductor device, the method includes: forming a compound semiconductor laminated structure; removing a part of the compound semiconductor laminated...
8927427 Anticipatory implant for TSV  
A method including introducing a dopant into a region of a substrate, etching a deep trench in the substrate through the region, gettering impurities introduced during etching of the deep trench...
RE45238 Silicon wafer and method of manufacturing the same  
A silicon wafer in which both occurrences of slip dislocation and warpage are suppressed in device manufacturing processes is a silicon wafer having BMDs having an octahedral shape, wherein BMDs...
8846500 Method of forming a gettering structure having reduced warpage and gettering a semiconductor wafer therewith  
At least one exemplary embodiment is directed to a method of forming a multilayered gettering structure that can be used to control wafer warpage.
8816394 Field effect transistor with narrow bandgap source and drain regions and method of fabrication  
A transistor having a narrow bandgap semiconductor source/drain region is described. The transistor includes a gate electrode formed on a gate dielectric layer formed on a silicon layer. A pair of...
8796116 Methods for reducing the metal content in the device layer of SOI structures and SOI structures produced by such methods  
Methods for producing silicon on insulator structures with a reduced metal content in the device layer thereof are disclosed. Silicon on insulator structures with a reduced metal content are also...
8759198 Accelerated furnace ramp rates for reduced slip  
A method for fabricating an integrated circuit (IC) includes initial oxidizing of a semiconductor surface of a substrate. The substrate is heated after the initial oxidizing using a plurality of...
8753961 Thermal budget optimization for yield enhancement on bulk silicon wafers  
A method of nucleating and growing oxygen precipitates during a pad oxidation process. The nucleating is performed during in the oxidation furnace prior to the pad oxide growth. At least a portion...
8664694 Field effect transistor with narrow bandgap source and drain regions and method of fabrication  
A transistor having a narrow bandgap semiconductor source/drain region is described. The transistor includes a gate electrode formed on a gate dielectric layer formed on a silicon layer. A pair of...
8658516 Method of producing silicon wafer, epitaxial wafer and solid state image sensor, and device for producing silicon wafer  
An object of the present invention is to provide a method of producing a silicon wafer and a method of producing an epitaxial wafer, which enable easily forming a gettering site in a relatively...
8658481 Method for manufacturing semiconductor device  
A reduction in contaminating impurities in a TFT, and a TFT which is reliable, is obtained in a semiconductor device which uses the TFT. By removing contaminating impurities residing in a film...
8642449 Silicon wafer  
A silicon wafer which has DZ layers formed on both sides thereof by heat treatment in an atmosphere of reducing gas (such as hydrogen) or rare gas (such as argon) with a specific temperature...
8629044 ***WITHDRAWN PATENT AS PER THE LATEST USPTO WITHDRAWN LIST***
Method of producing silicon wafer, epitaxial wafer and solid state image sensor, and device for producing silicon wafer
 
An object of the present invention is to provide a method of producing a silicon wafer and a method of producing an epitaxial wafer, which enable easily forming a gettering site in a relatively...
8629047 Quantum tunneling devices and circuits with lattice-mismatched semiconductor structures  
Structures include a tunneling device disposed over first and second lattice-mismatched semiconductor materials. Process embodiments include forming tunneling devices over lattice-mismatched...
8569175 Method for dry chemical treatment of substrates and also use thereof  
The invention relates to a method for dry chemical treatment of substrates selected from the group comprising silicon, ceramic, glass, and quartz glass, in which the substrate is treated in a...
8546928 Micromechanical housing comprising at least two cavities having different internal pressure and/or different gas compositions and method for the production thereof  
The present application relates to a multiple component which is to be subsequently individualized by forming components containing active structures, in addition to a corresponding component...
8541305 3D integrated circuit and method of manufacturing the same  
The present invention provides a 3D integrated circuit and a manufacturing method thereof. The circuit structure comprises: a semiconductor substrate; at least one semiconductor device formed on...
8492193 Semiconductor substrate for solid-state imaging sensing device as well as solid-state image sensing device and method for producing the same  
There is provided a semiconductor substrate for solid-state image sensing device in which the production cost is lower than that of a gettering method through a carbon ion implantation and...
8476149 Method of manufacturing single crystal silicon wafer from ingot grown by Czocharlski process with rapid heating/cooling process  
A silicon wafer produced from a silicon single crystal ingot grown by Czochralski process is subjected to rapid heating/cooling thermal process at a maximum temperature (T1) of 1300° C. or more,...
8466043 Process of internal gettering for Czochralski silicon wafer  
An internal gettering process for a Czochralski silicon wafers comprises: (1) heating a Cz silicon wafer to 1200-1250° C. at a heating rate of 50-100° C./s under a nitrogen atmosphere, maintaining...
8399280 Method for protecting an integrated circuit chip against laser attacks  
A method for protecting, against laser attacks, an integrated circuit chip formed inside and on top of a semiconductor substrate and including in the upper portion of the substrate an active...
8383452 Semiconductor device and method for manufacturing the same  
In one embodiment, a method for manufacturing a semiconductor device is disclosed. The method can include depositing a first amorphous film having a first impurity, depositing a third amorphous...
8349646 Semiconductor wafer for semiconductor components and production method  
A semiconductor wafer for semiconductor components and to a method for its production is disclosed. In one embodiment, the semiconductor wafer includes a front side with an adjoining near-surface...
8343853 Semiconductor wafer, semiconductor device using the same, and method and apparatus for producing the same  
A method of processing a semiconductor wafer includes preheating the wafer to a preheating temperature that is less than a peak temperature, heating the wafer from the preheating temperature to...
8343618 Silicon wafer and method of manufacturing the same  
A silicon wafer in which both occurrences of slip dislocation and warpage are suppressed in device manufacturing processes is a silicon wafer having BMDs having an octahedral shape, wherein BMDs...
8329563 Semiconductor device including a gettering layer and manufacturing method therefor  
A device and a device manufacturing process. First, a gettering layer is formed on the bottom surface of a silicon substrate. Gates having a MOS structure are then formed on the principal surface...
8309436 Method of producing epitaxial substrate with gettering for solid-state imaging device, and method of producing solid-state imaging device using same substrate  
A method of producing an epitaxial substrate for a solid-state imaging device, comprising: forming a gettering sink by injecting laser beam to a semiconductor substrate through one surface...
8227299 Removal of impurities from semiconductor device layers  
A method for removing impurities from at least one semiconductor device layer during manufacturing of a semiconductor device is disclosed. The semiconductor device layer has a compound...
8198177 AlxInyGal-x-yN mixture crystal substrate, method of growing same and method of producing same  
Seeds are implanted in a regular pattern upon an undersubstrate. An AlxInyGa1-x-yN (0≦x≦1, 0≦y≦1, 0
8193075 Remote hydrogen plasma with ion filter for terminating silicon dangling bonds  
Apparatus and methods for repairing silicon dangling bonds resulting from semiconductor processing are disclosed. The silicon dangling bonds can be repaired by introducing hydrogen radicals with...
8192648 Method for forming a sintered semiconductor material  
A method of forming a material from a source material including the following steps of grinding the source material to get powders if the source material is not already in the form of powders;...
8183646 Field effect transistor with narrow bandgap source and drain regions and method of fabrication  
A transistor having a narrow bandgap semiconductor source/drain region is described. The transistor includes a gate electrode formed on a gate dielectric layer formed on a silicon layer. A pair of...
8178951 Compound semiconductor substrate and control for electrical property thereof  
There is provided a compound semiconductor substrate prepared by forming a point defect in an inside structure thereof by implanting an electrically-neutral impurity with energy of 0.1 to 10 MeV...
8142885 Silicon wafer and method for manufacturing the same  
Silicon wafers and a process for their manufacture wherein both slip dislocation and occurrence of warpage are suppressed include heat treatment to provide wafers having plate-shaped BMDs, a...
8143142 Method of fabricating epi-wafer, epi-wafer fabricated by the method, and image sensor fabricated using the epi-wafer  
A method of fabricating an epi-wafer includes providing a wafer including boron by cutting a single crystal silicon ingot, growing an insulating layer on one surface of the wafer, performing...
8133769 Methods for gettering in semiconductor substrate  
A method for forming gettering sites and gettering impurities in a substrate layer includes producing a first masking layer over the substrate layer and patterning the masking layer to define...
8124502 Semiconductor device manufacturing method, semiconductor device and semiconductor device manufacturing installation  
A semiconductor device manufacturing method is provided, including: providing a semiconductor substrate, forming on the semiconductor substrate a layer including a semiconductor compound and a...
8101999 SOI substrate and method for producing the same, solid-state image pickup device and method for producing the same, and image pickup apparatus  
A SOI substrate includes a silicon substrate, a silicon oxide layer arranged on the silicon substrate, a silicon layer arranged on the silicon oxide layer, a gettering layer arranged in the...
8093089 Methods of manufacturing image sensors including gettering regions  
Method of manufacturing image sensors having a plurality of gettering regions. In the method, a gate electrode may be formed on a semiconductor substrate. A source/drain region may be formed in...
8088670 Method for manufacturing bonded substrate with sandblast treatment  
When manufacturing a bonded substrate using an insulator substrate as a handle wafer, there is provided a method for manufacturing a bonded substrate which can be readily removed after carried and...
8087135 Method of manufacturing a piezoelectric vibrator  
A piezoelectric vibrator manufacturing method includes a cavity forming step for forming depressions for a cavities on at least one of two wafers; a bonding electrode film forming step for forming...
8063466 Semiconductor substrate for solid-state image sensing device as well as solid-state image sensing device and method for producing the same  
There is provided a semiconductor substrate for solid-state image sensing device in which the production cost is lower than that of a gettering method through a carbon ion implantation and...
8030182 Semiconductor device manufacturing method and semiconductor manufacturing apparatus  
By hydrogen-terminating a semiconductor surface using a solution containing HF2− ions and an oxidant, the hydrogen termination can be quickly carried out. In this case, the semiconductor surface...

Matches 1 - 50 out of 313 1 2 3 4 5 6 7 >