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6730990 |
Mountable microstructure and optical transmission apparatus
A mountable microstructure is provided for mounting with high positional accuracy a compound semiconductor element such as a surface emitting laser element engaged under gravity in concavities on...
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6727549 |
Method of delaminating a pre-fabricated transistor layer from a substrate for placement on another wafer
A method of fabricating a film of active devices is provided. First damaged regions are formed, in a substrate, underneath first areas of the substrate where active devices are to be formed. Active...
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6716661 |
Process to fabricate an integrated micro-fluidic system on a single wafer
Formation of micro-fluidic systems is normally achieved using a multi-wafer fabrication procedure. The present invention teaches how a complete micro-fluidic system can be implemented on a single...
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6716666 |
Wafer scale molding of protective caps
The invention is a method of applying an array ( 134 ) of caps to a wafer ( 144 ) of semiconductor material which includes a plurality of microfabricated devices ( 146 ). The method includes...
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6689627 |
Process for manufacturing micromechanical components in a semiconductor material wafer with reduction in the starting wafer thickness
A process for manufacturing components in a multi-layer wafer, including the steps of: providing a multi-layer wafer comprising a first semiconductor material layer, a second semiconductor material...
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6673694 |
Method for microfabricating structures using silicon-on-insulator material
The invention provides a general fabrication method for producing MicroElectroMechanical Systems (MEMS) and related devices using Silicon-On-Insulator (SOI). One first obtains an SOI wafer that has...
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6673189 |
Method for producing a stable bond between two wafers
A method for producing a re-releasable bond between two wafers which is stable at high temperatures and mechanically stable is described. The two wafers to be bonded are placed one on top of the...
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6670257 |
Method for forming horizontal buried channels or cavities in wafers of monocrystalline semiconductor material
A method of forming buried cavities in a wafer of monocrystalline semiconductor material with at least one cavity formed in a substrate of monocrystalline semiconductor material by timed TMAH...
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6667252 |
Method of manufacturing compound semiconductor substrate
A compound semiconductor substrate is manufactured by forming a higher-quality compound semiconductor layer having a smaller number of crystalline defects on a single-crystal substrate, and...
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6645831 |
Thermally stable crystalline defect-free germanium bonded to silicon and silicon dioxide
A wafer pair comprising a substantially defect-free germanium wafer and methods of making the same. The wafer pair comprises the substantially defect-free germanium wafer directly bonded to a...
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6645833 |
Method for producing layered structures on a substrate, substrate and semiconductor components produced according to said method
The invention relates to a method of manufacturing layer-like structures in which a material layer having hollow cavities, preferably a porous material layer, is produced on or out of a substrate...
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6624047 |
Substrate and method of manufacturing the same
In a method of manufacturing a bonded substrate stack by bonding a first substrate having a porous layer to a second substrate to prepare a bonded substrate stack, and separating the bonded...
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6620646 |
Chip size image sensor wirebond package fabrication method
To form an image sensor package, a window is mounted above an active area on an upper surface of an image sensor. A noncritical region of the upper surface of the image sensor is between the active...
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6613652 |
Method for fabricating SOI devices with option of incorporating air-gap feature for better insulation and performance
A method to form SOI devices using wafer bonding. A first substrate is provided having trenches in a first side. A first insulating layer is formed over the first side of the first substrate and...
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6607934 |
Micro-electromechanical process for fabrication of integrated multi-frequency communication passive components
A micro-electromechanical (MEM) process for fabrication of integrated multi-frequency communication passive components is fused into co-fired ceramics by way of “flip chip” for fabrication of a...
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6582985 |
SOI/glass process for forming thin silicon micromachined structures
Methods for making thin silicon layers suspended over recesses in glass wafers. One method includes providing a thin silicon-on-insulator (SOI) wafer, and a glass wafer. The SOI wafer can include a...
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6566233 |
Method for manufacturing bonded wafer
A method for manufacturing a bonded wafer, in which when a bonded wafer is manufactured using an ion implantation separation method, impurities attached in the ion implantation step can be removed...
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6562127 |
Method of making mosaic array of thin semiconductor material of large substrates
A method for making an array of thin single-crystal substrates on a handle substrate comprising the steps: attaching a plurality of single-crystal substrates to a face of a support wafer; polishing...
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6551851 |
Production of diaphragms over a cavity by grinding to reduce wafer thickness
A method of manufacturing a diaphragm utilising a precision grinding technique after etching a cavity in a wafer. A technique for preventing distortion of the diaphragm based on use of a...
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6548322 |
Micromachined gas-filled chambers and method of microfabrication
Micromachining, etching and bonding techniques are employed to fabricate hermetically sealed gas-filled chambers from silicon and/or glass wafers. The hermetically sealed gas-filled chambers have...
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6548391 |
Method of vertically integrating electric components by means of back contacting
The present invention relates to a method of connecting two semiconductor components comprising the steps of providing in a first main surface of a first semiconductor substrate first component...
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6544863 |
Method of fabricating semiconductor wafers having multiple height subsurface layers
A method for fabricating semiconductor wafers as multiple-depth structure (i.e., having portions of varying height). The method includes patterning a first substrate and bonding a second substrate...
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6537846 |
Substrate bonding using a selenidation reaction
A selenidation reaction for bonding one or more active substrates to a base substrate is disclosed. A bonded-substrate is fabricated by forming a first multi-stacked layer of selenium and indium on...
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6531376 |
Method of making a semiconductor device with a low permittivity region
A method of making a semiconductor device ( 10 ) having a low permittivity region ( 24 ) includes forming a first layer ( 30/42 ) over a surface of a trench ( 20 ), and etching through an opening (...
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6527964 |
Methods and apparatuses for improved flow in performing fluidic self assembly
Methods and apparatuses for assembling elements onto a substrate. The surfaces of the elements and/or the substrate are treated and the elements are dispensed over the substrate in a slurry. In one...
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6524888 |
Method of attaching a conformal chip carrier to a flip chip
Mixtures for attaching a semiconductor chip to a substrate. The semiconductor chip has an array of joining material bumps, such as C4 solder balls. The substrate has an array of conductive pads...
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6524878 |
Microactuator, method for making the same, and magnetic head unit and magnetic recording apparatus using the same
A microactuator has a first substrate, a second substrate, a first comb electrode having a plurality of first comb elements formed on an inner surface of the first substrate, a second comb...
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6511866 |
Use of diverse materials in air-cavity packaging of electronic devices
Semiconductor circuit devices (dies) are incorporated into moisture-impenetrable electronic packages by forming enclosures around the die in three separate parts—base, sidewalls, and lid. The die...
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6495388 |
Surface micro-machined sensor with pedestal
A surface micro-machined sensor uses a pedestal in a cavity to support a flexible structure and reduce the span of the flexible structure. The reduced span per sense area allows larger sensor areas...
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6479366 |
Method of manufacturing a semiconductor device with air gaps formed between metal leads
A semiconductor device is fabricated first by thermocompression-bonding a silicon oxide film onto a plurality of conductive films under vacuum using a film having the silicon oxide film formed...
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6475880 |
Cassette invertor method
A method of inverting a plurality of plate-like materials. One form of the method may include supporting the plurality of plate-like materials in an orientation such that the plate-like materials...
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6458618 |
Robust substrate-based micromachining techniques and their application to micromachined sensors and actuators
The use of robust substrates on the surface micro-machined structures combines (1) the use of micro-machining technology; (2) the use of electronic packaging technologies; and (3) the use of...
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6451668 |
Method of producing calibration structures in semiconductor substrates
The invention relates to a method of producing calibration structures in semiconductor substrates in the manufacture of components, specifically micro-mechanical systems with integrated...
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6417075 |
Method for producing thin substrate layers
The present invention relates to a method of producing very thin substrate layers, particularly thin semiconductor areas, which may comprise integrated circuits. In the method two substrates ( 1, 2...
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6395374 |
Method of making microwave, multifunction modules using fluoropolymer composite substrates
A platform is provided for the manufacture of microwave, multilayer integrated circuits and microwave, multifunction modules. The manufacturing process involves bonding fluoropolymer composite...
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6391742 |
Small size electronic part and a method for manufacturing the same, and a method for forming a via hole for use in the same
A small size electronic part comprises a silicon substrate having a functional element and a signal output portion to output a signal from the functional element to outside the electronic part; a...
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6380048 |
Die paddle enhancement for exposed pad in semiconductor packaging
A new design is provided for the die-paddle that is used as part of a package for packaging semiconductor devices. The new design of the invention creates a space between the ground ring of the...
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6372608 |
Separating method, method for transferring thin film device, thin film device, thin film integrated circuit device, and liquid crystal display device manufactured by using the transferring method
A method for transferring a thin film device on a substrate onto a transfer member, includes a step for forming a separation layer on the substrate, a step for forming a transferred layer including...
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6372609 |
Method of Fabricating SOI wafer by hydrogen ION delamination method and SOI wafer fabricated by the method
There is provided a method of fabricating an SOI wafer having high quality by hydrogen ion delamination method wherein a damage layer remaining on the surface of the SOI layer after delamination...
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6362075 |
Method for making a diffused back-side layer on a bonded-wafer with a thick bond oxide
Integrated circuits, semiconductor devices and methods for making the same are described. Each embodiment shows a diffused, doped backside layer in a device wafer that is oxide bonded to a handle...
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6352875 |
Photoelectric conversion apparatus and method of manufacturing the same
In a photoelectric conversion apparatus obtained by arranging and fixing a plurality of semiconductor element substrates onto a base with an adhesive, the levels of the upper surfaces of the...
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6348358 |
Emitter array with individually addressable laser diodes
A linear array of diode laser emitters is manufactured with sufficient thermal and electronic isolation among the emitters to permit separate addressability. The emitter bar has first and second...
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6306680 |
Power overlay chip scale packages for discrete power devices
A power semiconductor device package includes at least one power semiconductor device mounted onto at least one electrically and thermally conductive spacer having an upper end surface bonded to a...
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6297072 |
Method of fabrication of a microstructure having an internal cavity
A method of fabricating a microstructure having an inside cavity. The method includes depositing a first layer or a first stack of layers in a substantially closed geometric configuration on a...
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6277666 |
Precisely defined microelectromechanical structures and associated fabrication methods
A method is provided for fabricating a MEMS structure from a silicon-on insulator (SOI) wafer that has been bonded to a support substrate, such as a glass substrate, in order to form silicon...
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6261871 |
Method and structure for temperature stabilization in flip chip technology
Phase Change Material ("PCM") are used to reduce the range of temperature excursions in a semiconductor die attached to an interconnect substrate in the flip chip technology. In one embodiment a...
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6248646 |
Discrete wafer array process
A method of preparing small wafers for compatibility with conventional large wafer fabrication equipment comprising the following steps: indenting a face of a large wafer to form an array of...
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6242319 |
Method for fabricating an integrated circuit configuration
A first structure of a circuit configuration and a first alignment structure are produced in the region of a surface of a first substrate. The first alignment structure scatters electron beams...
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6235611 |
Method for making silicon-on-sapphire transducers
An improved method for making silicon-on-sapphire transducers including the steps of: forming a first silicon layer on a first side of a first sapphire wafer; bonding a second sapphire wafer to the...
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6235612 |
Edge bond pads on integrated circuits
The invention is to a device and the method of making circuit devices with side wall contacts produced on a semiconductor wafer (30) by forming grooves (33,34) partially through the wafer surface...
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