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7341924 |
Method for manufacturing semiconductor device
A method of separating a lamination body with high yield without damaging the lamination body is provided. Further, a method of manufacturing a lightweight, flexible semiconductor device, which is...
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7338896 |
Formation of deep via airgaps for three dimensional wafer to wafer interconnect
A method for forming deep via airgaps in a semiconductor substrate is disclosed comprising the steps of patterning a hole in the substrate, partly fill said hole with a sacrificial material (e.g....
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7332413 |
Semiconductor wafers including one or more reinforcement structures and methods of forming the same
Methods of forming semiconductor devices include thinning a region of a semiconductor wafer and forming at least one semiconductor die laterally within a thinned region of the wafer. One or more...
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7332411 |
Systems and methods for wafer bonding by localized induction heating
A system and method bond wafers using localized induction heating. One or more induction micro-heaters are formed with a first substrate to be bonded. A second substrate is positioned in intimate...
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7320928 |
Method of forming a stacked device filler
Numerous embodiments of a stacked device filler and a method of formation are disclosed. In one embodiment, a method of forming a stacked device filler comprises forming a material layer between...
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7307005 |
Wafer bonding with highly compliant plate having filler material enclosed hollow core
The present invention discloses a method that includes: providing two wafers; forming raised contacts on the two wafers; aligning the two wafers; bringing together the raised contacts; locally...
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7303976 |
Wafer bonding method
One embodiment of a micro-electronic device includes a substrate including micro-electronic components thereon, and a cover including a ring of sealing material secured to the substrate and a...
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7300813 |
Method for manufacturing micro-machined switch using pull-up type contact pad
The present invention relates to the manufacture of a semiconductor switch for use in a variety of communication systems, and particularly to the manufacture of a RF micro-machined switch of...
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7300823 |
Apparatus for housing a micromechanical structure and method for producing the same
Apparatus for housing a micromechanical structure, and a method for producing the housing. The apparatus has a substrate having a main side on which the micromechanical structure is formed, a...
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7297562 |
Circuit-on-foil process for manufacturing a laminated semiconductor package substrate having embedded conductive patterns
A circuit-on-foil process for manufacturing a laminated semiconductor package substrate having embedded conductive patterns provides a high-density mounting and interconnect structure for...
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7291513 |
Hermetic wafer-level packaging for MEMS devices with low-temperature metallurgy
A method is disclosed for making a wafer-level package for a plurality of MEMS devices. The method involves preparing a MEMS wafer and a lid wafer, each having respective bonding structures. The...
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7288464 |
MEMS packaging structure and methods
A MEMS article is made by forming a MEMS device on a first substrate, providing a second substrate, depositing a layer of etchable dielectric material, forming at least one lateral post-bond...
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7285844 |
Multiple internal seal right micro-electro-mechanical system vacuum package
A Multiple Internal Seal Ring (MISR) Micro-Electro-Mechanical System (MEMS) vacuum package that hermetically seals MEMS devices using MISR. The method bonds a capping plate having metal seal rings...
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7265027 |
Bond method and structure using selective application of spin on glass
A method for bonding substrate structures. The method includes providing a transparent substrate structure, the transparent substrate structure comprising a face region and an incident light...
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7259080 |
Glass-type planar substrate, use thereof, and method for the production thereof
The invented method is distinguished by a combination of the following method steps:
provision of a semiconductor planar substrate composed of a semiconductor material, reduction of the...
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7244663 |
Wafer reinforcement structure and methods of fabrication
A method of fabricating a thinned, reinforced semiconductor wafer is disclosed. Particularly, a semiconductor wafer may be provided and a plurality of separate semiconductor dice may be formed upon...
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7220656 |
Strained semiconductor by wafer bonding with misorientation
One aspect of the present invention relates to a method for forming a strained semiconductor structure. In various embodiments, at least two strong bonding regions are defined for a desired bond...
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7214324 |
Technique for manufacturing micro-electro mechanical structures
A technique for manufacturing a micro-electro mechanical structure includes a number of steps. Initially, a cavity is formed into a first side of a handling wafer, with a sidewall of the cavity...
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7205211 |
Method for handling semiconductor layers in such a way as to thin same
This invention relates to a method for making a thin layer starting from a wafer comprising a front face with a given relief, and a back face, comprising steps consisting of:
a) obtaining a...
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7192842 |
Method for bonding wafers
A first wafer is provided, and a photosensitive masking-and-bonding pattern is formed on the surface of the first wafer. Then, an etching process using the photosensitive masking-and-bonding...
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7192841 |
Method of wafer/substrate bonding
A method of bonding two components by depositing an amorphous and non-hydrogenated intermediate layer ( 2 ) on one of the components ( 1,4 ) and arranging the components ( 1,4 ) in spaced...
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7176072 |
Strained silicon devices transfer to glass for display applications
A method of fabricating strained silicon devices for transfer to glass for display applications includes preparing a wafer having a silicon substrate thereon; forming a relaxed SiGe layer on the...
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7176106 |
Wafer bonding using reactive foils for massively parallel micro-electromechanical systems packaging
A method for forming device packages includes forming a perimeter comprising a reactive foil and a bonding material interposed between a first wafer and a second wafer, pressing the first and the...
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7176107 |
Hybrid substrate and method for fabricating the same
A hybrid substrate, i.e., a substrate fabricated from different materials, and method for fabricating the same are presented. The hybrid substrate is configured for fabricating more than two...
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7160478 |
Method for producing electronic componets
A method for producing an electronic component is provided. The method includes providing at least one die on a wafer, the at least one die having at least one sensor-technologically active and/or...
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7153718 |
Micromechanical component as well as a method for producing a micromechanical component
A micromechanical component having a substrate beneath at least one structured layer, in the structured layer at least one functional structure being formed, a cap which covers the functional...
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7141176 |
Methods and apparatuses for assembling elements onto a substrate
Methods and apparatuses for assembling elements onto a substrate. The surfaces of the elements and/or the substrate are treated and the elements are dispensed over the substrate in a slurry. In one...
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7135383 |
Composite structure with high heat dissipation
A composite structure is disclosed that includes a support wafer and a layered structure on the support wafer. The layered structure includes at least one layer of a monocrystalline material and at...
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7118991 |
Encapsulation wafer process
A method of processing a wafer, and particularly a cap wafer configured for mating with a device wafer in the production of a die package. Masking layers are deposited on oxide layers present on...
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7105421 |
Silicon on insulator field effect transistor with heterojunction gate
A field effect transistor (FET) is formed on a silicon on insulator (SOI) substrate in the thin silicon layer above the insulating buried oxide layer. The channel region is lightly doped with a...
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7098117 |
Method of fabricating a package with substantially vertical feedthroughs for micromachined or MEMS devices
A vacuum or hermetic packaged micromachined or MEMS device and methods for manufacturing the device so that the device has at least one substantially vertical feedthrough are provided. In a first...
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7094665 |
Exfoliating method, transferring method of thin film device, and thin film device, thin film integrated circuit device, and liquid crystal display device produced by the same
A transferring method including providing a substrate, forming a transferred layer over the substrate, joining a transfer member to the transferred layer, and removing the transferred layer from...
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7090325 |
Liquid drop discharge head and manufacture method thereof, micro device ink-jet head ink cartridge and ink-jet printing device
A liquid drop discharge head includes a chip ( 21 ) that is formed by separation of a silicon wafer ( 20 ). The silicon wafer ( 20 ) has a first direction and a second direction which are mutually...
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7078317 |
Method and system for source switching and in-situ plasma bonding
A system for in-situ plasma treatment. The system has a processing chamber, e.g., plasma chamber. The system has a first susceptor coupled within the chamber and a second susceptor facing the first...
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7078320 |
Partial wafer bonding and dicing
Disclosed is a method of manufacturing integrated circuit chips that partially joins an integrated circuit wafer to a supporting wafer at a limited number of joining points. Once joined, the...
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7078318 |
Method for depositing III-V semiconductor layers on a non-III-V substrate
The invention relates to a method for depositing thick III-V semiconductor layers on a non-III-V substrate, particularly a silicon substrate, by introducing gaseous starting materials into the...
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7069652 |
Method for producing laminated smart cards
A smart card is laminated from at least two layers of paper or film as a mounting material. A first of the layers is fitted with a semiconductor chip and a second layer has connecting contacts as...
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7071012 |
Methods relating to the reconstruction of semiconductor wafers for wafer-level processing
Methods relating to the reconstruction of semiconductor wafers for wafer-level processing are disclosed. Selected semiconductor dice having alignment cavities formed in a surface thereof are placed...
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7067344 |
Method of manufacturing an external force detection sensor
A method of manufacturing an external force detection sensor in which a sensor element is formed by through-hole dry etching of an element substrate, and an electrically conductive material is used...
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RE39143 |
Method for making a wafer-pair having sealed chambers
A method for fabricating a wafer-pair having at least one recess in one wafer and the recess formed into a chamber with the attaching of the other wafer which has a port plugged with a deposited...
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7064004 |
Induction-based heating for chip attach
A method for bonding a semiconductor die to a substrate is described. The method comprises arranging a semiconductor die, an interconnect, and a substrate in a suitable configuration and using...
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7056807 |
Barrier structure against corrosion and contamination in three-dimensional (3-D) wafer-to-wafer vertical stack
A three-dimensional (3-D) integrated chip system is provided with a first wafer including one or more integrated circuit (IC) devices, metallic lines deposited via an interlevel dielectric (ILD) on...
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7052948 |
Film or layer made of semi-conductive material and method for producing said film or layer
The invention relates to a film or a layer made of semi-conducting material with low defect density in the thin layer, and a SOI-disk with a thin silicon layer exhibiting low surface roughness,...
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7049207 |
Isolating method and transferring method for semiconductor devices
A method of isolating semiconductor devices by wet etching of a semiconductor laminate structure formed on a substrate includes providing an etching stop layer having at least two layers between...
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7049624 |
Member and member manufacturing method
A porous structure with high uniformity is provided even when evaluated at a high resolution (high evaluation standard) of several or several ten nm or less. By applying this porous structure to...
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7045440 |
Method of fabricating radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates
A phased-array antenna system and other types of radio frequency (RF) devices and systems using microelectromechanical switches (“MEMS”) and low-temperature co-fired ceramic (“LTCC”)...
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7041227 |
Method for revealing crystalline defects and/or stress field defects at the molecular adhesion interface of two solid materials
A process for permitting defects or stresses in a structure to be revealed, including (a) securing by molecular bonding of a face of a first element containing crystalline material with a face of a...
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7041577 |
Process for manufacturing a substrate and associated substrate
A process for producing a substrate is described. The process includes providing an assembly having a first layer weakly bonded to a temporary support at an interface therebetween. At least a...
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7042105 |
Methods for dicing wafer stacks to provide access to interior structures
Methods for dicing water stacks are provided. Preferably, the method includes the steps of: (1) providing a wafer stack having a first wafer and a second wafer; (2) exposing a portion of the first...
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7037805 |
Methods and apparatus for attaching a die to a substrate
A method for increasing the bonding strength between a die and a housing for the die is described where a micro-electromechanical system (MEMS) device is formed on the die. The method includes...
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