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7615390 |
Method and apparatus for forming expitaxial layers
The present invention provides a method of depositing epitaxial layers based on Group IV elements on a silicon substrate by Chemical Vapor Deposition, wherein nitrogen or one of the noble gases is...
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7560389 |
Method for fabricating semiconductor element
A method for fabricating a semiconductor element on a semiconductor substrate having a support substrate and a semiconductor layer above the support substrate. The method includes preparing the...
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7554139 |
Semiconductor manufacturing method and semiconductor device
A production method for a semiconductor device according to the present invention includes: step (A) of providing a substrate including a semiconductor layer having a principal face, the substrate...
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7534689 |
Stress enhanced MOS transistor and methods for its fabrication
A stress enhanced MOS transistor and methods for its fabrication are provided. In one embodiment the method comprises forming a gate electrode overlying and defining a channel region in a...
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7514337 |
Semiconductor device using EPI-layer and method of forming the same
A method of fabricating a semiconductor device includes forming a pad oxide film and a nitride film on a semiconductor substrate; exposing the semiconductor substrate by selectively etching the pad...
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7338881 |
Method for manufacturing semiconductor element
A method for manufacturing a semiconductor element includes preparing an SOI layer having a transistor forming area and an element isolation area, forming an oxidation-resistant mask layer on the...
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7232728 |
High quality oxide on an epitaxial layer
This invention improves the quality of gate oxide dielectric layers using a two-pronged approach, thus permitting the use of much thinner silicon dioxide gate dielectric layers required for...
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7176101 |
Method of forming isolation oxide layer in semiconductor integrated circuit device
A method is provided in which a first oxide layer is deposited on a silicon substrate and etched to form openings. A first silicon epitaxial layer is grown on the substrate in the openings, forming...
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7078313 |
Method for fabricating an integrated semiconductor circuit to prevent formation of voids
Recesses between gate layer stacks are filled with a first electrically insulating material. Cavities or voids are opened up during the removal of a portion of the first insulating material. These...
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7060596 |
Process for fabricating a single-crystal substrate and integrated circuit comprising such a substrate
An initial single-crystal substrate 1 having, locally and on the surface, at least one discontinuity in the single-crystal lattice is formed. The initial substrate is recessed at the...
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6997985 |
Semiconductor, semiconductor device, and method for fabricating the same
Method of fabricating semiconductor devices such as thin-film transistors by annealing a substantially amorphous silicon film at a temperature either lower than normal crystallization temperature...
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6723618 |
Methods of forming field isolation structures
Field isolation structures and methods of forming field isolation structures are described. In one implementation, the method includes etching a trench within a monocrystalline silicon substrate....
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6716719 |
Method of forming biasable isolation regions using epitaxially grown silicon between the isolation regions
An improved isolation structure for use in an integrated circuit and a method for making the same is disclosed. In a preferred embodiment, an silicon dioxide, polysilicon, silicon dioxide stack is...
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6699773 |
Shallow trench isolation type semiconductor device and method of forming the same
A method of forming a shallow trench isolation type semiconductor device comprises forming an etch protecting layer pattern to define at least one active region on a substrate, forming at least one...
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6548388 |
Semiconductor device including gate electrode having damascene structure and method of fabricating the same
A gate electrode conductive layer is formed on an active region that is recessed relative to field oxide layers so as to define a damascene structure. The gate electrode conductive layer is formed...
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6503799 |
Method of manufacturing semiconductor device
There is provided a method of forming an element isolation structure that can maintain its element isolation capability even with the progress of miniaturization of semiconductor elements. Through...
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6489193 |
Process for device isolation
A novel process for isolating devices on a semiconductor substrate is disclosed. An isolation layer is first formed over the semiconductor substrate and patterned into at least two isolation mesas...
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6461887 |
Method to form an inverted staircase STI structure by etch-deposition-etch and selective epitaxial growth
A method of forming an inverted staircase shaped STI structure comprising the following steps. A semiconductor substrate having an overlying oxide layer is provided. The substrate having at least a...
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6436780 |
Semiconductor device
A number of npn and pnp bipolar transistors are formed in a single chip of silicon, so that some of the transistors have a greater frequency response than others The higher frequency transistors...
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6410404 |
Process for manufacturing SOI integrated circuits and circuits made thereby
Presented is a process for manufacturing circuit structures of the SOI type integrated on a semiconductor substrate having a first type of conductivity. The process includes forming at least one...
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6352884 |
Method for growing crystals having impurities and crystals prepared thereby
A method for forming a crystal layer including the steps of (1) supplying first impurity atoms onto a surface of a crystal substrate to form a surfactant layer adsorbed on the surface, (2)...
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6297118 |
Vertical bipolar semiconductor power transistor with an interdigitzed geometry, with optimization of the base-to-emitter potential difference
A transistor including an epitaxial layer with a first conductivity type, a base buried region with a second conductivity type, and a sinker base region with the second conductivity type which...
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6284606 |
Process to achieve uniform groove depth in a silicon substrate
A process for forming a groove in a semiconductor substrate, to be used to fabricate grooved gate, MOSFET devices, has been developed. The process features the use of an insulator mask, used as an...
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6083520 |
Bioactive feed
The present invention relates to a bioactive feed pellet comprising besides commonly used nutritionally valuable components, a biologically active ingredient such as a therapeutically or...
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6060372 |
Method for making a semiconductor device with improved sidewall junction capacitance
A semiconductor device (10) of the present invention has a gate (32) insulatively disposed above the substrate, source and drain regions (36, 38) disposed near the surface in the substrate adjacent...
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5981359 |
Method of manufacturing semiconductor device having isolation film on SOI substrate
Disclosed is a method of manufacturing a semiconductor device having a reliable element isolation insulating film on an SOI substrate having an SOI layer. That is, the step of forming a...
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5953604 |
Methods for making compact P-channel/N-channel transistor structure
A structure for a complementary field effect transistor includes a semiconductor body having a first body region of a first conductivity type and an adjoining second body region of an opposite...
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5824151 |
Vapor deposition method
The method of forming a III-V group compound semiconductor crystalline layer on a semiconductor crystal containing at least V-group compound, includes the steps of: performing the crystal growth of...
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5686343 |
Process for isolating a semiconductor layer on an insulator
A process for the isolation of a semiconductor layer on an insulator. A process for isolating a semiconductor layer on an insulator is disclosed that includes the steps of: forming a first...
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5683933 |
Method of fabricating a semiconductor device
To minimize error in size and form a thick oxide layer as field insulating means in a narrow isolation region, a method of fabricating a semiconductor device is carried out as followings. A...
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5681776 |
Planar selective field oxide isolation process using SEG/ELO
An isolation method for separating active regions on a semiconductor substrate is disclosed. Portions of the substrate not corresponding to the active regions are etched to a predetermined depth....
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5637529 |
Method for forming element isolation insulating film of semiconductor device
A method for forming an element isolation insulating film of semiconductor devices, by which junction leakage current can be greatly reduced, comprising the steps of: forming a pad oxide film and a...
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5624858 |
Method of manufacturing a semiconductor device with increased breakdown voltage
A low concentration impurity region 6 of a second conductivity type is formed to cover lower portion of a high concentration impurity region 8 of the second conductivity type. Consequently,...
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5580816 |
Local oxidation process for high field threshold applications
A method for electrically isolating semiconductor devices in an integrated circuit structure with high field threshold, low defect level regions. The semiconductor structure includes a device layer...
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5565029 |
Method for manufacturing semiconductor device having grown layer on insulating layer
A semiconductor device produced by forming an epitaxial layer insulated from a silicon substrate, and forming a device in the epitaxial layer. According to the process a silicon dioxide layer is...
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5512508 |
Method and apparatus for improvement of interconnection capacitance
A method and apparatus for reducing interconnection capacitance. A lightly doped buried layer is provided in or on a substrate below a field oxide region. The capacitance of an interconnect on the...
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5506156 |
Method of fabricating bipolar transistor having high speed and MOS transistor having small size
A semiconductor device includes a plurality of semiconductor regions of a first conductive type and a plurality of semiconductor regions of a second conductive type. AMOS transistor having a...
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5500391 |
Method for making a semiconductor device including diffusion control
A process for making a MOS device on a silicon substrate includes the step of forming a buried layer of germanium-silicon alloy in the substrate, or, alternatively, a buried layer of silicon...
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5457067 |
Process for formation of an isolating layer for a semiconductor device
A process for formation of an isolating layer for a semiconductor device is disclosed. During formation of a field isolating layer, a pad oxide layer is formed which is intended to buffer the...
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5455189 |
Method of forming BICMOS structures
In a bipolar or BiCMOS process, a heavily doped buried layer of a first conductivity type and a heavily doped channel stop region of a second conductivity type are formed in a lightly doped...
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5451530 |
Method for forming integrated circuits having buried doped regions
A method for fabricating an integrated circuit having a buried doped region is disclosed. A thermal oxide layer is formed over a portion of a p-type substrate at which an n+ buried doped region is...
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5418185 |
Method of making schottky diode with guard ring
A Schottky diode circuit 20 is formed on a semiconductor layer 24. A conductive contact 36 on the surface of the semiconductor layer 24 forms a Schottky barrier 40 at the junction of the conductive...
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5256563 |
Doped well structure and method for semiconductor technologies
A method of forming doped wells 24 and 30 in a semiconductor layer is disclosed herein. In a preferred embodiment, an oxide layer 16 is formed on the surface of a silicon layer 14. A nitride layer...
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5242854 |
High performance semiconductor devices and their manufacture
A high performance bipolar transistor and a method of fabrication. Base resistance is reduced by a self-aligned silicide formed in the single-crystal region of the extrinsic base, thereby...
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5212110 |
Method for forming isolation regions in a semiconductor device
A process for fabricating isolation regions in a semiconductor substrate which does not depend upon pattern definition capability. In one embodiment a device isolation region (30) is formed in a...
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5149663 |
Method for manufacturing a Bi-CMOS semiconductor device
There is provided a method of manufacturing Bi-CMOS semiconductor devices in which further comprises the steps of; depositing a polysilicon layer, an oxide film and a nitride film one and another...
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5135884 |
Method of producing isoplanar isolated active regions
A method is provided for forming isoplanar isolated regions in an integrated circuit, and an integrated circuit formed according to the same. According to a first disclosed embodiment, a first...
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5121194 |
Substrate output for a semiconductor device and a method of fabricating the same
In a semiconductor device, a first diffusion region on a surface of an output region for a substrate electric potential, and an element segregation third diffusion region under a field insulating...
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5114875 |
Planar dielectric isolated wafer
A substantially planar dielectric wafer is formed by utilizing a polysilicon filler to remove surface irregularities (15, 15'). The polysilicon filler is formed by filling surface irregularities...
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5114868 |
Manufacturing method of well region in coms intergrated circuit
First, N-type channel stoppers are formed in an element formation region of a P-channel MOS transistor and in an element isolation region of the P-channel MOS transistor, of a CMOS transistor....
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