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8178418 |
Method for fabricating intra-device isolation structure
A method for fabricating intra-device isolation structure is provided, including providing a semiconductor substrate with a mask layer formed thereover. A plurality of first trenches is formed in...
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8030171 |
Method of forming element isolation film and nonvolatile semiconductor memory
An element isolation film is formed by filling an oxide in a trench formed in an element isolation region of a semiconductor substrate to thereby form an insulation film for element isolation. A...
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7998806 |
Semiconductor device and method of manufacturing the same
A method of manufacturing a semiconductor device includes forming an oxidation film over a first and a second device region, forming an first etching preventing film extending over a first and a...
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7994006 |
Manufacturing method of semiconductor device
A semiconductor device including a drift layer of a first conductivity type formed on a surface of a semiconductor substrate. A surface of the drift layer has a second area positioned on an outer...
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7968421 |
Method for manufacturing SOI structure in desired region of a semiconductor device
Manufacturing a semiconductor device includes defining bulb-type trenches having spherical portions in a silicon substrate. Oxide layers are formed in surfaces of spherical portions of the...
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7960244 |
Process for the aligned manufacture of electronic semiconductor devices in a SOI substrate
A process for manufacturing an electronic semiconductor device, wherein a SOI wafer is provided, formed by a bottom layer of semiconductor material, an insulating layer, and a top layer of...
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7957330 |
Failsafe management of periodic communications during system upgrade for a network device
The invention is directed to techniques for failsafe management of periodic communications between network devices. A first network device, for example, establishes with a second network device a...
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7951679 |
Method for fabricating semiconductor device
First, on a semiconductor region of a first conductivity type, a trapping film is formed which stores information by accumulating charges. Then, the trapping film is formed with a plurality of...
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7947561 |
Methods for oxidation of a semiconductor device
Methods of fabricating an oxide layer on a semiconductor substrate are provided herein. The oxide layer may be formed over an entire structure disposed on the substrate, or selectively formed on a...
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7939423 |
Method for manufacturing nonvolatile semiconductor memory device structure
A non-volatile semiconductor manufacturing method comprises the steps of making element isolation/insulation films that partitions element-forming regions in a semiconductor substrate; stacking a...
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7867871 |
System and method for increasing breakdown voltage of LOCOS isolated devices
An efficient method is disclosed for increasing the breakdown voltage of an integrated circuit device that is isolated by a local oxidation of silicon (LOCOS) process. The method comprises forming...
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7863145 |
Method and resulting structure using silver for LCOS devices
A method for fabricating an LCOS device. The method includes providing a semiconductor substrate and forming a plurality of MOS transistor devices formed on a portion of the semiconductor...
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7858466 |
Different-voltage device manufactured by a CMOS compatible process and high-voltage device used in the different-voltage device
A method of manufacturing different-voltage devices mainly comprises forming at least one high-voltage well in high-voltage device regions, at least one N-well in low-voltage device regions, at...
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7851329 |
Semiconductor device having EDMOS transistor and method for manufacturing the same
A semiconductor device having an EDMOS transistor and a method for forming the same are provided. The semiconductor device includes source and drain regions formed separately in a semiconductor...
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7816226 |
Method for forming self-alignment insulation structure
A method for forming a self-align insulation of a passing gate is disclosed. First, a substrate is provided. A deep trench filled with silicon material and a shallow trench isolation adjacent to...
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RE41696 |
Semiconductor device and manufacturing method thereof
The present invention provides a semiconductor device that reduces the junction leak current and achieves an improvement in the reliability of the gate oxide film by minimizing divot formation and...
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7790541 |
Method and structure for forming multiple self-aligned gate stacks for logic devices
A method for forming multiple self-aligned gate stacks, the method comprising, forming a first group of gate stack layers on a first portion of a substrate, forming a second group of gate stack...
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7736932 |
Method of manufacturing sensor with photodiode and charge transfer transistor
A method of manufacturing a photodiode sensor and an associated charge transfer transistor includes forming an insulation region on a substrate, forming the diode on a first side of the insulation...
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7709348 |
Method for manufacturing semiconductor device
The present invention provides a method for manufacturing a semiconductor device, comprising the steps of preparing a substrate having a quartz support substrate and a silicon layer, forming a base...
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7687356 |
Formation of shallow siGe conduction channel
A method of forming a silicon germanium conduction channel under a gate stack of a semiconductor device, the gate stack being formed on a silicon layer on an insulating layer, the method including...
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7651921 |
Semiconductor device having a frontside contact and vertical trench isolation and method of fabricating same
There is a method of forming a contact post and surrounding isolation trench in a semiconductor-on-insulator (SOI) substrate. The method comprises etching a contact hole and surrounding isolation...
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7648878 |
Method for fabricating semiconductor device with recess gate
A pad oxide layer is formed on a substrate. A pad nitride layer is formed on the pad oxide layer. The pad nitride layer and the pad oxide layer are patterned. Predetermined portions of the...
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7645680 |
Method of manufacturing isolation layer pattern in a semiconductor device and isolation layer pattern using the same
Disclosed is a method of manufacturing an isolation layer pattern in a semiconductor device and an isolation layer pattern in a semiconductor device. A device at a low voltage device formation...
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7625783 |
Semiconductor element and method for manufacturing the same
A method by which generation of leak current can be suppressed and also a fine element can be formed by performing element isolation at a temperature at which a glass substrate can be used is...
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7560389 |
Method for fabricating semiconductor element
A method for fabricating a semiconductor element on a semiconductor substrate having a support substrate and a semiconductor layer above the support substrate. The method includes preparing the...
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7514285 |
Isolation scheme for reducing film stress in a MEMS device
A method of electrically isolating a MEMS device is provided. In one example, a piezo-resistive pressure sensor having an exposed silicon region undergoes a Local Oxidation of Silicon (LOCOS)...
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7498226 |
Method for fabricating semiconductor device with step gated asymmetric recess
A method for fabricating a semiconductor device with a step gated asymmetric recess is provided. The method includes: forming an organic bottom anti-reflective coating (BARC) layer over a...
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7491623 |
Method of making a semiconductor structure
The invention is directed to a structure and method of forming a structure having a sealed gate oxide layer. The structure includes a gate oxide layer formed on a substrate and a gate formed on the...
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7488647 |
System and method for providing a poly cap and a no field oxide area to prevent formation of a vertical bird's beak structure in the manufacture of a semiconductor device
A system and method is disclosed that prevents the formation of a vertical bird's beak structure in the manufacture of a semiconductor device. A polysilicon filled trench is formed in a substrate...
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7482190 |
Micromechanical strained semiconductor by wafer bonding
One aspect disclosed herein relates to a method for forming a strained semiconductor structure. In various embodiments of the method, a number of recesses are formed in a surface of a silicon...
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7465644 |
Isolation region bird's beak suppression
A structure for electrically isolating semiconductor devices includes a semiconducting layer and a layer of aluminum oxide formed in a pattern over the semiconducting layer, where the pattern...
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7459758 |
Transistor structure and method for making same
A gate structure in a transistor and method for fabricating the structure. A gate structure is formed on a substrate. The gate structure includes three layers: an oxide layer, a nitride layer and a...
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7338881 |
Method for manufacturing semiconductor element
A method for manufacturing a semiconductor element includes preparing an SOI layer having a transistor forming area and an element isolation area, forming an oxidation-resistant mask layer on the...
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7250351 |
Enhanced silicon-on-insulator (SOI) transistors and methods of making enhanced SOI transistors
Enhanced silicon-on-insulator transistors and methods are provided for implementing enhanced silicon-on-insulator transistors. The enhanced silicon-on-insulator (SOI) transistors include a thin...
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7244661 |
Method for forming a buried diffusion layer with reducing topography in a surface of a semiconductor substrate
A method for forming a buried diffusion layer with reducing topography in a surface of a semiconductor substrate is provided. A patterned first dielectric layer is formed on a semiconductor...
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7232697 |
Semiconductor device having enhanced photo sensitivity and method for manufacture thereof
Provided are a semiconductor device and a method for its manufacture. In one example, the method includes forming an isolation structure having a first refraction index over a sensor embedded in a...
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7199023 |
Atomic layer deposited HfSiON dielectric films wherein each precursor is independendently pulsed
A dielectric film containing atomic layer deposited HfSiON and a method of fabricating such a dielectric film produce a reliable dielectric layer having an equivalent oxide thickness thinner than...
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7192840 |
Semiconductor device fabrication method using oxygen ion implantation
A method of fabricating a semiconductor device having a silicon layer disposed on an insulating film. Oxygen ions are implanted into selected parts of the silicon layer, which are then oxidized to...
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7190036 |
Transistor mobility improvement by adjusting stress in shallow trench isolation
A method of improving transistor carrier mobility by adjusting stress through recessing shallow trench isolation is presented. A trench is formed in a substrate. The trench is filled with a...
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7163869 |
Shallow trench isolation structure with converted liner layer
A STI (shallow trench isolation) structure is formed with a liner layer that is converted from an initial material to a subsequent material. For example, the liner layer is initially comprised of...
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7160772 |
Structure and method for integrating MIM capacitor in BEOL wiring levels
A method for integrating a metal-insulator-metal (MIM) capacitor in back end of line (BEOL) wiring levels of a semiconductor device includes forming an isolating layer over a lower wiring level,...
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7144785 |
Method of forming isolation trench with spacer formation
A strained silicon semiconductor arrangement with a shallow trench isolation (STI) structure has a strained silicon (Si) layer formed on a silicon germanium (SiGe) layer. A trench extends through...
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7112849 |
Method of preventing semiconductor layers from bending and semiconductor device formed thereby
Disclosed herein are various methods for preventing bending of a patterned SOI layer during trench sidewall oxidation, the methods comprising providing a patterned SOI layer having at least one...
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7071076 |
Method of manufacturing semiconductor device
A semiconductor device has an STI oxide film (106), of which surface is positioned higher than the surface of the silicon substrate (100) to prevent a pointed portion and a thin film thickness of a...
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7060579 |
Increased drive current by isotropic recess etch
A method (100) of forming a transistor includes forming a gate structure (108) over a semiconductor body and forming recesses (112) using an isotropic etch using the gate structure as an etch mask....
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7060551 |
Method of fabricating read only memory and memory cell array
A method of fabricating a read only memory cell array is described. A patterned film is formed over the substrate to define the predetermined positions of bit lines on the substrate and exposing a...
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7045435 |
Shallow trench isolation method for a semiconductor wafer
The present invention relates to a shallow trench isolation method of a semiconductor wafer which fills dielectric material into shallow trenches between components on the surface of the...
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7038289 |
Deep insulating trench
Deep isolation trenches having sides and a bottom are formed in a semiconductor substrate. The sides and the bottom are coated with an electrically insulating material that delimits an empty...
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7026232 |
Systems and methods for low leakage strained-channel transistor
The present invention facilitates semiconductor fabrication by providing methods of fabrication that mitigate leakage and apply strain to channel regions of transistor devices. A semiconductor...
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7015115 |
Method for forming deep trench isolation and related structure
According to one embodiment, a structure comprises a substrate and a field oxide region, where the field oxide region has a top surface, and where the top surface of the field oxide region...
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