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7214582 |
Semiconductor substrate and semiconductor circuit formed therein and fabrication methods
A semiconductor substrate and a semiconductor circuit formed therein and associated fabrication methods are provided. A multiplicity of depressions with a respective dielectric layer and a...
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7205625 |
Junction substrate and method of bonding substrates together
A junction substrate includes a first substrate, a buffer film formed on one surface of the first substrate, a metal containing film formed on the buffer film and having a lower resistance than the...
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7195987 |
Methods of forming CMOS integrated circuit devices and substrates having buried silicon germanium layers therein
CMOS integrated circuit devices include an electrically insulating layer and an unstrained silicon active layer on the electrically insulating layer. An insulated gate electrode is also provided on...
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7192841 |
Method of wafer/substrate bonding
A method of bonding two components by depositing an amorphous and non-hydrogenated intermediate layer ( 2 ) on one of the components ( 1,4 ) and arranging the components ( 1,4 ) in spaced...
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7186576 |
Stacked die module and techniques for forming a stacked die module
Embodiments of the present technique relate to forming die stacks. Specifically, embodiments of the present technique include a method of forming and testing semiconductor die comprising forming a...
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7176102 |
Method for producing SOI wafer and SOI wafer
A method for producing an SOI wafer by the hydrogen ion delamination method comprising at least a step of bonding a base wafer and a bond wafer having a micro bubble layer formed by gas ion...
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7169683 |
Preventive treatment method for a multilayer semiconductor structure
A preventive treatment method for a multilayer semiconductor structure having a support substrate, at least one intermediate layer and a surface layer in which the surface layer is to be subjected...
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7151041 |
Methods of forming semiconductor circuitry
The invention includes a method of forming semiconductor circuitry wherein a first semiconductor structure comprising a first monocrystalline semiconductor substrate is bonded to a second...
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7148119 |
Process for production of semiconductor substrate
A process for producing a semiconductor substrate is provided which comprises steps of forming a porous layer on a first substrate, forming a nonporous monocrystalline semiconductor layer on the...
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7135383 |
Composite structure with high heat dissipation
A composite structure is disclosed that includes a support wafer and a layered structure on the support wafer. The layered structure includes at least one layer of a monocrystalline material and at...
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7122442 |
Method and system for dopant containment
According to one embodiment, a semiconductor device is provided. The semiconductor device includes an oxide layer. The semiconductor device also includes a silicon layer disposed outwardly from the...
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7118978 |
Semiconductor device and method for producing the same
A method for producing a semiconductor device with an SOI substrate having a support substrate 1 and a semiconductor layer 3 that interpose a first insulating film 2 between them includes the...
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7109092 |
Method of room temperature covalent bonding
A method of bonding includes using a bonding layer having a fluorinated oxide. Fluorine may be introduced into the bonding layer by exposure to a fluorine-containing solution, vapor or gas or by...
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7091108 |
Methods and apparatuses for manufacturing ultra thin device layers for integrated circuit devices
Embodiments of the invention use silicon on porous silicon wafers to produce a reduced-thickness IC device wafers. After device manufacturing, a temporary support is bonded to the device layer. The...
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7074693 |
Plasma spraying for joining silicon parts
A method of joining two silicon members and the bonded assembly in which the members are assembled to place them into alignment across a seam. Silicon derived from silicon powder is plasma sprayed...
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7071530 |
Multiple layer structure for substrate noise isolation
A method of forming a semiconductor structure, comprising: providing a substrate having a buried insulative layer and a heavily doped layer; forming a first trench within the substrate around a...
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7064391 |
Bond and back side etchback transistor fabrication process
A supporting structure is wafer-bonded to the upper face side of a partially or fully processed device wafer. The device wafer includes a transistor having a well region that extends into the...
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7029986 |
Bonded products and methods of fabrication therefor
This invention relates to a method of fabricating a bonded product comprising at least two components that are bonded together, the method comprising the steps of: a) bringing the components...
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7008855 |
Glass frit bond and process therefor
A lead-containing glass material of the type suitable for use in a wafer bonding process, wherein the moisture resistance of the glass material is increased by the presence of a lead phosphate...
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7008854 |
Silicon oxycarbide substrates for bonded silicon on insulator
A method for forming a semiconductor on insulator structure includes forming a semiconductor layer on an insulating substrate, where the substrate is a different material than the semiconductor...
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6995455 |
Semiconductor device
Semiconductor device includes a pair of substrates ( 1, 2 ) disposed oppositely, semiconductor elements ( 5, 6 ) formed in the substrates ( 1, 2 ), respectively, and having semiconductor circuits (...
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6982208 |
Method for producing high throughput strained-Si channel MOSFETS
A method for forming a strained silicon layer device with improved wafer throughput and low defect density including providing a silicon substrate; epitaxially growing a first silicon layer using...
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6979629 |
Method and apparatus for processing composite member
A detection apparatus for detecting a feature portion of a composite member having a structure in which a first member having a separation layer inside is brought into tight contact with a second...
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6955971 |
Semiconductor structure and methods for fabricating same
A semiconductor structure and methods for fabricating are disclosed. In an implementation, a method of fabricating a semiconductor structure includes forming a first semiconductor material...
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6939778 |
Method of joining an insulator element to a substrate
Bonding methods and articles produced thereby are provided wherein an insulator, such as glass, is bonded to a solder with the assistance of an electric field.
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6939777 |
Method for manufacturing semiconductor device
An alignment mark section on a semiconductor substrate has two grooves which are filled with silicon oxide. The surface of the portion of the semiconductor substrate sandwiched by these grooves is...
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6933205 |
Integrated circuit device and method of manufacturing the same
The present invention provides an integrated circuit, comprising a semiconductor substrate, an active element formed on the side of one main surface of the semiconductor substrate, an insulating...
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6908828 |
Support-integrated donor wafers for repeated thin donor layer separation
Processes that may be used in producing electronic, optoelectronic, or optical components may be provided. The processes may involve preparing a reusable donor wafer for donating a thin layer of...
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6900108 |
High temperature sensors utilizing doping controlled, dielectrically isolated beta silicon carbide (SiC) sensing elements on a specifically selected high temperature force collecting membrane
Semiconductor devices useful in high temperature sensing applications include a silicon carbide substrate, a silicon dioxide layer, and an outer layer of crystalline doped silicon carbide. The...
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6887342 |
Field-assisted fusion bonding
A method of field-assisted fusion bonding produces multiple-layer devices. Contacts ( 301, 303, 305, 307, 309 ) are placed at various points along different surfaces of a combination of two or more...
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6884693 |
Silicon-on-insulator wafer and method of manufacturing the same
In a silicon-on-insulator (SOI) wafer and a method of manufacturing the same, the SOI wafer includes a first semiconductor wafer including an isolation insulating film formed to define an active...
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6878605 |
Methods for manufacturing SOI substrate using wafer bonding and complementary high voltage bipolar transistor using the SOI substrate
A method of manufacturing an SOI substrate for semiconductor devices is described. The method includes forming a low density impurity region in a first semiconductor substrate and a high density...
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6867508 |
Method and apparatus for fabricating semiconductor laser device
After profiles of two chips are recognized on intermediate stages and their positions are corrected, collets are used as electrodes and a voltage is applied to the chips on bonding stage on which...
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6864176 |
Fabrication process for bonded wafer precision layer thickness control and its non-destructive measurement method
A measurement method for the thinned thickness of the silicon wafer, wherein thickness inspection patterns are fabricated onto the silicon wafer substrate by anisotropic etching, and then the wafer...
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6844236 |
Method and structure for DC and RF shielding of integrated circuits
A method for electromagnetically shielding circuits which combine to form an integrated circuit device provides isolated silicon islands surrounded laterally and subjacently by conductive material....
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6835633 |
SOI wafers with 30-100 &angst buried oxide (BOX) created by wafer bonding using 30-100 &angst thin oxide as bonding layer
A method of fabricating a SOI wafer having a gate-quality, thin buried oxide region is provided. The wafer is fabricating by forming a substantially uniform thermal oxide on a surface of a...
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6815312 |
Bonding type semiconductor substrate, semiconductor light emitting element, and preparation process thereof
The process comprises a step of growing epitaxially mixed crystals of a compound semiconductor represented by the composition formula In x (Ga 1−y Al y ) 1−x P on a GaAs substrate 12 to form...
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6801679 |
Multifunctional intelligent optical modules based on planar lightwave circuits
Since the bandwidth-intensive applications such as Internet access, electronic commerce, multimedia applications, and distributed computing are rapidly increasing the volume of telecommunication...
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6790748 |
Thinning techniques for wafer-to-wafer vertical stacks
Methods for thinning wafer-to-wafer vertical stacks in the fabrication of stacked microelectronic devices. The methods include physically removing unsupported portions of a wafer to be thinned in...
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6784071 |
Bonded SOI wafer with <100> device layer and <110> substrate for performance improvement
A new silicon structure is provided. Under a first embodiment of the invention, a first silicon substrate having a < 100 > crystallographic orientation is bonded to the surface of a second...
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6770542 |
Method for fabricating semiconductor layers
A method is provided for fabricating a useful layer containing at least one semiconductor layer, in which the useful layer is separated from a carrier. In this case, the useful layer is applied to...
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6770507 |
Semiconductor wafer and method for producing the same
There is provided a novel bonded semiconductor wafer having a layered structure alternately stacked with semiconductor layers and insulator layers in two cycles or more and manufactured by means of...
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6767802 |
Methods of making relaxed silicon-germanium on insulator via layer transfer
Methods of forming a SiGe layer overlying an insulator are provided. A layer of SiGe is deposited on a substrate and implanted with ion to form a defect region within the SiGe material below its...
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6764917 |
SOI device with different silicon thicknesses
A method of manufacturing a semiconductor device includes providing a silicon semiconductor layer over an insulating layer, and partially removing a first portion of the silicon layer. The silicon...
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6759308 |
Silicon on insulator field effect transistor with heterojunction gate
A field effect transistor (FET) is formed on a silicon on insulator (SOI) substrate in the thin silicon layer above the insulating buried oxide layer. The channel region is lightly doped with a...
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6759310 |
Method for making a semiconductor substrate comprising a variant porous layer
A semiconductor substrate includes a porous semiconductor having: a porous layer, with an impurity concentration on varying in the depth direction, or having a porous semiconductor containing an...
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6753239 |
Bond and back side etchback transistor fabrication process
A supporting structure is wafer-bonded to the upper face side of a partially or fully processed device wafer. The device wafer includes a transistor having a well region that extends into the...
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6743662 |
Silicon-on-insulator wafer for RF integrated circuit
An RF semiconductor device is fabricated from a starting substrate comprising a polysilicon handle wafer, a buried oxide layer over the polysilicon handle wafer, and a silicon layer over the oxide...
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6709948 |
Process for manufacturing a two-axis mirror
A process for manufacturing a wafer from a layer of material such as silicon and having a multiplicity of MEMS devices such as mirrors with gimbals formed thereon is disclosed. The features of the...
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6699770 |
Method of making a hybride substrate having a thin silicon carbide membrane layer
A hybrid semiconductor substrate assembly is made by first forming a silicon oxide (SiO x ) layer within a silicon carbide wafer, thus forming a silicon carbide membrane on top of the silicon oxide...
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