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7625809 |
Semiconductor device and method of manufacturing the same
A semiconductor device includes a substrate, and a semiconductor thin film bonded to the substrate, wherein the semiconductor thin film includes a plurality of discrete operating regions and an...
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7611937 |
High performance transistors with hybrid crystal orientations
A method of forming a semiconductor structure having a hybrid crystal orientation and forming MOSFETs having improved performance on the semiconductor structure is provided. The method includes...
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7579256 |
Method for forming shallow trench isolation in semiconductor device using a pore-generating layer
A method for forming shallow trench isolation in a semiconductor device including forming a pad oxide, a pad nitride, and a pore-generating layer on an entire surface of a semiconductor substrate...
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7563706 |
Material for forming insulating film with low dielectric constant, low dielectric insulating film, method for forming low dielectric insulating film and semiconductor device
A material for forming an insulating film with low dielectric constant of this invention is a solution including a fine particle principally composed of a silicon atom and an oxygen atom and having...
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7560313 |
SOI wafer and method for producing the same
The present invention provides a SOI wafer produced by an ion implantation delamination method wherein a width of a SOI island region in a terrace portion generated in an edge portion of the SOI...
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7560389 |
Method for fabricating semiconductor element
A method for fabricating a semiconductor element on a semiconductor substrate having a support substrate and a semiconductor layer above the support substrate. The method includes preparing the...
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7528056 |
Low-cost strained SOI substrate for high-performance CMOS technology
A cost-effective and simple method of fabricating strained semiconductor-on-insulator (SSOI) structures which avoids epitaxial growth and subsequent wafer bonding processing steps is provided. In...
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7528078 |
Process of forming electronic device including a densified nitride layer adjacent to an opening within a semiconductor layer
A process of forming an electronic device can include patterning a semiconductor layer to define an opening extending to an insulating layer, wherein the insulating layer lies between a substrate...
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7507647 |
Method of manufacturing a high voltage semiconductor device including a deep well and a gate oxide layer simultaneously
A method of manufacturing a high voltage semiconductor device including forming a P-type region implanted with P-type impurities and an N-type region implanted with N-type impurities in a silicon...
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7498233 |
Method of forming an insulation layer structure having a concave surface and method of manufacturing a memory device using the same
A method of forming an isolation layer structure for a semiconductor device includes forming a first structure on a substrate, the first structure including an insulation layer pattern having a...
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7439153 |
Semiconductor device and manufacturing method thereof for reducing the area of the memory cell region
A structure is adopted for a layout of an SRAM cell which provides a local wiring 3 a between a gate 2 a and gate 2 b and connects an active region 1 a and an active region 1 b . This...
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7432149 |
CMOS on SOI substrates with hybrid crystal orientations
Methods and structures for CMOS devices with hybrid crystal orientations using double SOI substrates is provided. In accordance with preferred embodiments, a manufacturing sequence includes the...
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7425495 |
Method of manufacturing semiconductor substrate and semiconductor device
A method of manufacturing a semiconductor substrate and semiconductor device is disclosed and comprises forming a first monocrystalline semiconductor layer on a semiconductor base material, forming...
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7420202 |
Electronic device including a transistor structure having an active region adjacent to a stressor layer and a process for forming the electronic device
An electronic device can include a transistor structure of a first conductivity type, a field isolation region, and a layer of a first stress type overlying the field isolation region. For example,...
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7390696 |
Wafer, semiconductor device, and fabrication methods therefor
In order to fabricate a semiconductor device that can perform at its full capacity, in which (i) a single-crystal silicon integrated circuit is formed on an insulating substrate without an adhesive...
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7384857 |
Method to fabricate completely isolated silicon regions
The construction of Shallow Trench Isolation, STI, regions is integrated in to a SIMOX fabrication process for a Silicon On Insulator, SOI, wafer. Prior to the beginning of the SOI process, a...
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7382031 |
Component including a fixed element that is in a silicon layer and is mechanically connected to a substrate via an anchoring element and method for its manufacture
A method and device are for anchoring fixed structural elements and, e.g., for anchoring electrodes for components, e.g., SOI wafer components, whose component structure is formed in a silicon...
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7358586 |
Silicon-on-insulator wafer having reentrant shape dielectric trenches
A bonded SOI wafer and a method for forming a bonded SOI wafer are provided. According to the disclosed method, a first semiconductor wafer is provided, having a first dielectric layer disposed at...
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7354812 |
Multiple-depth STI trenches in integrated circuit fabrication
Multiple trench depths within an integrated circuit device are formed by first forming trenches in a substrate to a first depth, but of varying widths. Formation of a dielectric layer can cause...
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7351616 |
Semiconductor substrate, semiconductor device, method for manufacturing semiconductor substrate and method for manufacturing semiconductor device
A semiconductor substrate comprising: a semiconductor base; dielectric layers of mutually different film thicknesses formed on the semiconductor base; and semiconductor layers of mutually different...
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7348254 |
Method of fabricating fin field-effect transistors
A method of fabricating a fin field-effect transistor that may enable a reduction in the number of process steps, by forming the fin structure by etching away a predetermined thickness of an...
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7348255 |
Semiconductor device and method for fabricating a semiconductor device
A semiconductor structure has an active region on a substrate, and recessed portions are formed at lower edges of lateral portions of the semiconductor structure. Patterned first insulation layers...
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7323394 |
Method of producing element separation structure
A method of producing an element separation structure includes the steps of: forming a first thermal oxide film on the substrate; forming a silicon nitride film on the first thermal oxide film;...
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7316979 |
Method and apparatus for providing an integrated active region on silicon-on-insulator devices
A method and apparatus for providing integrated active regions on silicon-on-insulator (SOI) devices by oxidizing a portion of the active layer. When the active layer of the SOI wafer is relatively...
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7297608 |
Method for controlling properties of conformal silica nanolaminates formed by rapid vapor deposition
A method employing atomic layer deposition rapid vapor deposition (RVD) conformally deposits a dielectric material on small features of a substrate surface. The resulting dielectric film is then...
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7294573 |
Method for controlling poly 1 thickness and uniformity in a memory array fabrication process
According to one exemplary embodiment, a method includes planarizing a layer of polysilicon situated over field oxide regions on a substrate to form polysilicon segments, where the polysilicon...
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7288462 |
Buffer zone for the prevention of metal migration
Particle migration, such as silver electro-migration, on a flat ceramic surface is effectively eliminated by an upward vertical barrier formed on the surface or a groove formed in the surface...
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7279769 |
Semiconductor device and manufacturing method thereof
To suppress occurrence of dislocation in a substrate of a semiconductor device at an end portion of a gate electrode. Provided is a semiconductor device having a plurality of element formation...
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7273904 |
Nanocrystals in ligand boxes exhibiting enhanced chemical, photochemical, and thermal stability, and methods of making the same
Dendron ligands or other branched ligands with cross-linkable groups were coordinated to colloidal inorganic nanoparticles, including nanocrystals, and substantially globally cross-linked through...
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7220654 |
Method for manufacturing semiconductor substrate
An epitaxial layer is formed on a high-resistance semiconductor substrate containing interstitial oxygen at a high concentration, and then a heat treatment is performed to the semiconductor...
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7217634 |
Methods of forming integrated circuitry
The invention includes methods of forming integrated circuitry. In one implementation, a method of forming an integrated circuit includes forming a plurality of isolation trenches within...
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7208354 |
Deposition of silicon germanium on silicon-on-insulator structures and bulk substrates
Methods are provided for producing SiGe-on-insulator structures and for forming strain-relaxed SiGe layers on silicon while minimizing defects. Amorphous SiGe layers are deposited by CVD from...
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7205205 |
Ramp temperature techniques for improved mean wafer before clean
A method of operating a substrate processing chamber comprising transferring a first substrate into the substrate processing chamber and heating the substrate to a first temperature of at least...
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7205248 |
Method of eliminating residual carbon from flowable oxide fill
Methods of forming an oxide layer such as high aspect ratio trench isolations, and treating the oxide substrate to remove carbon, structures formed by the method, and devices and systems...
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7199017 |
Methods of forming semiconductor circuitry
The invention includes a method of forming semiconductor circuitry. A monocrystalline silicon substrate is provided, and a mask is formed which covers a first portion of the substrate and leaves a...
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7176101 |
Method of forming isolation oxide layer in semiconductor integrated circuit device
A method is provided in which a first oxide layer is deposited on a silicon substrate and etched to form openings. A first silicon epitaxial layer is grown on the substrate in the openings, forming...
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7153753 |
Strained Si/SiGe/SOI islands and processes of making same
A process of making a strained silicon-on-insulator structure is disclosed. A recess is formed in a substrate to laterally isolate an active area. An undercutting etch forms a bubble recess under...
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7112850 |
Non-volatile memory device with a polarizable layer
This invention concerns a non-volatile memory device with a polarizable layer. The apparatus concerns a substrate, a buried oxide layer within the substrate, and a polarizable layer within the...
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7109091 |
Method for processing a substrate to form a structure
A method for processing a substrate to produce a structure, for example an insulating trench, uses a lithographic mask exposure process. Conventionally, the optical resolution limit prescribes the...
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7091107 |
Method for producing SOI wafer and SOI wafer
There is disclosed a method of producing an SOI wafer in which an SOI layer is formed on a buried oxide film by, at least implanting at least one kind of ion of hydrogen ion and a rare gas ion into...
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7071530 |
Multiple layer structure for substrate noise isolation
A method of forming a semiconductor structure, comprising: providing a substrate having a buried insulative layer and a heavily doped layer; forming a first trench within the substrate around a...
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7053451 |
Semiconductor device having impurity region under isolation region
In formation of a source/drain region of an NMOS transistor, a gate-directional extension region < 41 a > of an N + block region < 41 > in an N + block resist film < 51 >...
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7029980 |
Method of manufacturing SOI template layer
A vacancy injecting process for injecting vacancies in template layer material of an SOI substrate. The template layer material has a crystalline structure that includes, in some embodiments, both...
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7029995 |
Methods for depositing amorphous materials and using them as templates for epitaxial films by solid phase epitaxy
Methods for forming epitaxial films involve forming a buffer layer on a single crystal substrate, depositing an amorphous layer on the buffer layer, then forming an epitaxial film from the...
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7018904 |
Semiconductor chip having multiple functional blocks integrated in a single chip and method for fabricating the same
A semiconductor chip comprises a base substrate, a bulk device region having a bulk growth layer on a part of the base substrate, an SOI device region having a buried insulator on the base...
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6998324 |
Methods of fabricating silicon on insulator substrates for use in semiconductor devices
Example methods of fabricating a silicon on insulator substrate are disclosed. One example method may include forming a plurality of trenches on a substrate, forming an insulation layer on the...
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6989315 |
SIMOX using controlled water vapor for oxygen implants
An ion implantation system for producing silicon wafers having relatively low defect densities, e.g., below about 1×10 6 /cm 2 , includes a fluid port in the ion implantation chamber for...
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6984570 |
Wafer bonding method of forming silicon-on-insulator comprising integrated circuitry
A wafer bonding method of forming silicon-on-insulator comprising integrated circuitry includes nitridizing at least a portion of an outer surface of silicon of a device wafer. After the...
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6982460 |
Self-aligned gate MOSFET with separate gates
A structure and method of manufacturing a double-gate integrated circuit which includes forming a laminated structure having a channel layer and first insulating layers on each side of the channel...
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6977204 |
Method for forming contact plug having double doping distribution in semiconductor device
The present invention provides a method for forming a contact plug in a semiconductor device capable of preventing an increase of contact resistance caused by a decrease in dopant concentration and...
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