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7598099 |
Method of controlling a fabrication process using an iso-dense bias
Embodiments of controlling a fabrication process using an iso-dense bias are generally described herein. Other embodiments may be described and claimed.
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7595213 |
Semiconductor devices, CMOS image sensors, and methods of manufacturing same
A semiconductor device includes: a trench device isolating region formed in a substrate to define a photodiode active region; a channel stop impurity region formed in the substrate contacting the...
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7592234 |
Method for forming a nitrogen-containing gate insulating film
A method for forming a nitrogen-containing gate insulating film includes the steps of forming a silicon oxide film on a silicon substrate, nitriding the top portion of the silicon oxide film to...
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7585745 |
Semiconductor device and a method of manufacturing the same
A technique is provided which permits formation within a single chip both a field effect transistor of high reliability capable of suppressing the occurrence of a crystal defect and a field effect...
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7560363 |
Manufacturing method for SIMOX substrate
A manufacturing method for a SIMOX substrate for obtaining a SIMOX substrate by subjecting a silicon substrate having oxygen ions implanted thereinto by heat treatment at 1300 to 1350° C. in an...
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7550361 |
Trench structure and method for co-alignment of mixed optical and electron beam lithographic fabrication levels
A method for aligning a first set of features of a fabrication level of an integrated circuit chip to an electron beam alignment target formed in a substrate and forming the first set of features...
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7521331 |
High dielectric film and related method of manufacture
A method of forming a high dielectric film for a semiconductor device comprises supplying a first source gas to a reaction chamber during a first time interval, supplying a first reactant gas to...
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7514802 |
Wiring board
A flexible insulating base, a plurality of conductor wirings aligned on the flexible insulating base, and bump electrodes provided respectively in end portions of the plurality of conductor wirings...
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7488671 |
Nanostructure arrays and methods of making same
A method of making a nanostructure array including disposing a masking material on a nanoporous template such that a first number of the plurality of nanopores are fully coated while a second...
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7485504 |
Stable PD-SOI devices and methods
One aspect of the present subject matter relates to a partially depleted silicon-on-insulator structure. The structure includes a well region formed above an oxide insulation layer. In various...
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7482258 |
Product and method for integration of deep trench mesh and structures under a bond pad
A method of integrating circuit components under bond pads includes establishing a trench border on a circuit element and synthesizing a set of trench mesh edges of a trench mesh to be coincident...
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7465642 |
Methods for forming semiconductor structures with buried isolation collars
A semiconductor structure including a trench formed in a substrate and a buried isolation collar that extends about sidewalls of the trench. The buried isolation collar is constituted by an...
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7432593 |
Semiconductor package assembly and method for electrically isolating modules
A semiconductor package assembly and method for electrically isolating modules, having a capacitor within the semiconductor package assembly. The package assembly and method are suitable for...
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7429518 |
Method for forming shallow trench isolation of semiconductor device
A shallow trench isolation well is formed to be very thin in a highly integrated semiconductor device. When critical dimension (CD) is small, it is difficult to reduce the width of the...
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7407826 |
Vacuum packaged single crystal silicon device
A method for forming a vibrating micromechanical structure having a single crystal silicon (SCS) micromechanical resonator formed using a two-wafer process, including either a Silicon-on-insulator...
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7387918 |
Method of forming a silicon controlled rectifier structure with improved punch through resistance
When a high-voltage, such as from an ESD pulse, is placed across a silicon controlled rectifier, which includes an NPN transistor and a PNP transistor that is connected to the NPN transistor, the...
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7381625 |
Deterministic process for constructing nanodevices
A method is provided for constructing a nanodevice. The method includes: fabricating an electrode on a substrate; forming a nanogap across the electrode; dispersing a plurality of nanoobjects onto...
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7354812 |
Multiple-depth STI trenches in integrated circuit fabrication
Multiple trench depths within an integrated circuit device are formed by first forming trenches in a substrate to a first depth, but of varying widths. Formation of a dielectric layer can cause...
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7344981 |
Plated terminations
A multilayer electronic component includes a plurality of dielectric layers interleaved with a plurality of internal electrode elements and a plurality of internal anchor tabs. Portions of the...
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7303974 |
Method for producing electrochemical capacitor electrode
A method is provided for optimizing the physical characteristics of a coating solution for an undercoat layer formed between a polarizable electrode layer and surface-roughened collector. A first...
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7285433 |
Integrated devices with optical and electrical isolation and method for making
The invention is directed to a method for optical and electrical isolation between adjacent integrated devices. The method comprises the steps of forming at least one trench through an exposed...
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7279393 |
Trench isolation structure and method of manufacture therefor
The present invention provides a trench isolation structure, a method for manufacturing a trench isolation structure, and a method for manufacturing an integrated circuit including the trench...
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7262110 |
Trench isolation structure and method of formation
In general, the present invention discloses at least one trench isolation region formed in a semiconductor substrate to electrically and/or optically isolate at least one active region from another...
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7256099 |
Method of producing electrochemical device, and the electrochemical device
A first electrode and a second electrode to be used are electrodes each of which has a collector, and a porous material layer with electron conductivity placed between the collector and a...
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7214595 |
Method of producing semiconductor devices
A method of producing semiconductor devices is provided, which makes it possible to bury a silicon oxide without shape deterioration in device isolation trenches. The method comprises the steps of:...
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7172914 |
Method of making uniform oxide layer
A method of forming a semiconductor structure includes forming an isolation region in a semiconductor substrate. A first oxide layer is on the substrate, a first sacrificial layer is on the first...
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7166519 |
Method for isolating semiconductor devices with use of shallow trench isolation method
The present invention relates to a method for isolating semiconductor devices. The method includes the steps of: forming a patterned pad nitride layer pattern to open at least one isolation region...
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7154537 |
Camera system, control method thereof, device manufacturing apparatus, exposure apparatus, and device manufacturing method
An exposure apparatus for exposing a substrate to a pattern. The apparatus includes a stage configured to hold the substrate and to move, a driving unit configured to drive the stage, a plurality...
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7141486 |
Shallow trench isolation structures comprising a graded doped sacrificial silicon dioxide material and a method for forming shallow trench isolation structures
A shallow trench isolation structure having a negative taper angle. A graded doped sacrificial layer is formed over a semiconductor substrate and etched to form a first trench therein having trench...
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7112849 |
Method of preventing semiconductor layers from bending and semiconductor device formed thereby
Disclosed herein are various methods for preventing bending of a patterned SOI layer during trench sidewall oxidation, the methods comprising providing a patterned SOI layer having at least one...
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7094661 |
Single and dual damascene techniques utilizing composite polymer dielectric film
A method of forming an electrically conductive element in an integrated circuit is disclosed. The method includes depositing a composite polymer dielectric film onto a silicon-containing substrate,...
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7078349 |
Method to form self-aligned floating gate to diffusion structures in flash
A self-aligned conductive region to active region structure is disclosed in which parallel active regions of a semiconductor region of a substrate, which extends to a surface, are separated by STI...
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7072167 |
Co-fired ceramic capacitor and method for forming ceramic capacitors for use in printed wiring boards
A capacitor structure is fabricated by forming a pattern of first dielectrics over a foil, forming first electrodes over the first dielectrics, and co-firing the first dielectrics and the first...
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7071039 |
Manufacturing method of partial SOI wafer, semiconductor device using the partial SOI wafer and manufacturing method thereof
A semiconductor device includes a first semiconductor region having a buried oxide layer formed therein, a second semiconductor region in which the buried oxide layer does not exist, a trench...
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7053007 |
Method for fabricating semiconductor integrated circuit device
A method for fabricating a semiconductor integrated circuit device of the invention comprises feeding oxidation species containing a low concentration of water, which is generated from hydrogen and...
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7052970 |
Method for producing insulator structures including a main layer and a barrier layer
In order to produce insulator structures ( 8 ), insulator trenches ( 21 ) with aspect ratios of greater than 4:1 are introduced into a semiconductor substrate ( 1 ) from a substrate surface ( 10 )...
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7045437 |
Method for fabricating shallow trenches
A method of forming shallow trenches used, for example, in shallow trench isolation includes the steps of providing a p-type silicon substrate, forming a layer in the p-type silicon substrate,...
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7019378 |
Field-shielded SOI-MOS structure free from floating body effects, and method of fabrication therefor
A silicon-on-insulator structure provides an effective drift field for holes, and simultaneously enhanced recombination centers for holes and electrons. The structure includes a silicon substrate,...
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7008547 |
Solid phase sensors
Provided is a solid phase array of electrical sensors, each comprising a channel and electrical leads for attaching to a voltage, current or resistivity meter for measuring the voltage, current or...
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7005334 |
Zero threshold voltage pFET and method of making same
A zero threshold voltage (ZVt) pFET ( 104 ) and a method of making the same. The ZVt pFET is made by implanting a p-type substrate ( 112 ) with a retrograde n-well ( 116 ) so that a pocket ( 136 )...
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6998695 |
Semiconductor device having a mushroom gate with hollow space
A method of manufacturing a semiconductor device has the steps of: forming a mushroom gate traversing an active region of a semiconductor substrate and having a fine gate and an expanded over gate...
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6995072 |
Method of making sacrificial self-aligned interconnection structure
A sacrificial, self-aligned polysilicon interconnect structure is formed in a region of insulating material to the side of an active region location and underlying a semiconductor device of a...
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6989317 |
Trench formation in semiconductor integrated circuits (ICs)
A novel trench etching method for etching trenches of different depths which are self-aligned to one another is presented. The method comprises the steps of (a) creating first and second trenches...
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6987065 |
Method of manufacturing self aligned electrode with field insulation
The present invention provides a semiconductor device comprising: a semiconductor layer ( 3 ); a gate electrode ( 11 ) formed on the semiconductor layer ( 3 ) via a gate insulation film ( 10 ); and...
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6982206 |
Mechanism for improving the structural integrity of low-k films
According to one embodiment, a method of forming a low-k dielectric composite film is provided. A low-k interconnect dielectric layer is strengthened by forming whiskers in the low-k film. The...
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6977205 |
Method for manufacturing SOI LOCOS MOSFET with metal oxide film or impurity-implanted field oxide
This invention provides a semiconductor device with an element isolation implemented by a method of manufacturing a semiconductor device comprising the steps of: forming a pad oxide film 140 and...
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6969663 |
Method of manufacturing a memory integrated circuit device
A method of manufacturing a memory integrated circuit device including a memory cell region and a peripheral circuit region on a semiconductor substrate includes the steps of (a) forming a first...
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6964911 |
Method for forming a semiconductor device having isolation regions
A method for forming a semiconductor device having isolation structures decreases leakage current. A channel isolation structure decreases leakage current through a channel structure. In addition,...
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6936481 |
Method of depositing dielectric
This invention relates to a method of depositing dielectric on a semiconductor substrate to form part of a capacitor. The method includes reactive sputtering a metal oxide layer from a target of...
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6933203 |
Methods for improving well to well isolation
Methods are provided for forming wells in a semiconductor wafer, in which p-wells and n-wells are formed in a substrate, and first p-type dopants are implanted into n-well regions while an n-well...
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