|
Match
|
Document |
Document Title |
|
|
6451651 |
Method of manufacturing DRAM device invention
A method of manufacturing a DRAM device comprises forming a bit line interlayer insulating layer over a substrate over which a bit line pattern is formed; planarizing the bit line interlayer...
|
|
|
6444517 |
High Q inductor with Cu damascene via/trench etching simultaneous module
A new method is provided for the creation of an inductive over the surface of a semiconductor substrate. A first layer of metal is created in a layer of dielectric, a second layer of metal is...
|
|
|
6444482 |
Method of monitoring power supplied to heat a substrate
Methods for monitoring power supplied to a substrate to form a doped or undoped crystalline semiconductor material are disclosed. The methods include providing a layer of an amorphous semiconductor...
|
|
|
6444488 |
Process of fabricating electronic microcomponent of the variable capacitor or microswitch type
Process for fabricating electronic components, of the variable capacitor or microswitch type, comprising a fixed plate ( 1 ) and a deformable membrane ( 20 ) which are located opposite each other,...
|
|
|
6436786 |
Method for fabricating a semiconductor device
A semiconductor device of the present invention includes an electrode, which is formed over a substrate and contains ruthenium. Crystal grains of ruthenium in the electrode have stepped surfaces.
|
|
|
6432791 |
Integrated circuit capacitor and method
Capacitors for integrated circuits with a common polysilicon layer for both MOS gates ( 274, 276, 278 ) and capacitor ( 270 ) lower plates but with implanted doping for the gates and masked...
|
|
|
6432767 |
Method of fabricating semiconductor device
A semiconductor device having a bottom electrode, a ferroelectric film, and a top electrode formed on a semiconductor substrate, wherein the angle of each of the main cross sectional sides of the...
|
|
|
6429087 |
Methods of forming capacitors
In one aspect, the invention encompasses a method of forming a capacitor. A mass is formed over an electrical node. An opening is formed within the mass. The opening has a lower portion proximate...
|
|
|
6420226 |
Method of defining a buried stack capacitor structure for a one transistor RAM cell
A process for fabricating a buried stack capacitor structure, to be used in a one transistor, RAM cell, has been developed. The process features formation of a self-aligned, ring shaped storage...
|
|
|
6417061 |
Zener diode and RC network combination semiconductor device for use in integrated circuits and method therefor
An improved semiconductor device and method which includes a zener diode and RC network combination that share common semiconductor mask steps during the fabrication process. A common N+ layer...
|
|
|
6417039 |
Method of manufacturing a semiconductor device comprising a semiconductor body having a surface provided with a coil having a magnetic core
The invention relates to a method of manufacturing a semiconductor device comprising a semiconductor body ( 1 ) having a coil ( 3 ) with a magnetic core ( 4 ). By means of this method, the surface...
|
|
|
6417535 |
Vertical interdigitated metal-insulator-metal capacitor for an integrated circuit
A substantially vertical interdigitated plate capacitor, formed in interlayer dielectric material between upper and lower interconnect layers of conductors in an integrated circuit, comprising a...
|
|
|
6413386 |
Reactive sputtering method for forming metal-silicon layer
Within a method for forming a metal-silicon layer there is first provided a reactor chamber. There is then positioned within the reactor chamber a substrate spaced from a metal source target. There...
|
|
|
6410397 |
Method for manufacturing a dielectric trench capacitor with a stacked-layer structure
A trench is formed by forming a photoresist film on a second interlevel insulator and performing isoprotonic etching using the photoresist film as a mask. A lower electrode layer made of platinum...
|
|
|
6406967 |
Method for manufacturing cylindrical storage electrode of semiconductor device
A method for manufacturing a cylindrical storage electrode of a semiconductor device includes forming a contact pad to be connected to an active region of a semiconductor substrate in an interlayer...
|
|
|
6406968 |
Method of forming dynamic random access memory
A method of forming a dynamic random access memory. A substrate having a memory cell region and a logic circuit region is provided. The substrate also has a first dielectric layer thereon. The...
|
|
|
6402792 |
Electric double layer capacitor and process for its production
An electric double layer capacitor comprising an electrode containing a carbonaceous material having a specific surface area of at least 500 m 2 /g, and an organic electrolytic solution capable of...
|
|
|
6399456 |
Method of fabricating a resistor and a capacitor electrode in an integrated circuit
A semiconductor fabrication method is provided for fabricating a resistor and a capacitor electrode in an integrated circuit, which can help enhance the quality of the resultant integrated circuit....
|
|
|
6395611 |
Inductor or low loss interconnect and a method of manufacturing an inductor or low loss interconnect in an integrated circuit
An integrated circuit with a buried layer for increasing the Q of an inductor formed in the integrated circuit. The substrate includes a highly doped buried preserving device and latchup...
|
|
|
6395350 |
Mesoporous transition metal oxide thin films and methods of making and uses thereof
Mesoporous transition metal oxide thin films and methods for producing these films are provided. Also provided are methods of fabricating useful chemical sensors and electrochromic devices from the...
|
|
|
6395605 |
Multifunctional protective component
A method of making a multifunctional protective component is disclosed. The method includes plastering a suspension comprising a mixture of glass dust, binder, and solvent onto a multilayer ZnO...
|
|
|
6387747 |
Method to fabricate RF inductors with minimum area
A method for forming an RF inductor of helical shape having high Q and minimum area. The inductor is fabricated of metal or damascened linear segments formed on three levels of intermetal...
|
|
|
6388290 |
Single crystal silicon on polycrystalline silicon integrated circuits
An integrated circuit comprising active and passive devices is formed in a thin slice of monocrystalline semiconductor bonded to a high resistivity polycrystalline silicon substrate. As compared...
|
|
|
6383858 |
Interdigitated capacitor structure for use in an integrated circuit
The present invention provides a capacitor structure comprising an array having two dimensions and having first and second electrode elements alternating in both dimensions of the array, the first...
|
|
|
6383889 |
Semiconductor device having improved parasitic capacitance and mechanical strength
A cavity structure formed in a semiconductor substrate and under a device formation region on which a device if formed. The cavity structure has supporting pillars providing the device formation...
|
|
|
6380023 |
Methods of forming contacts, methods of contacting lines, methods of operating integrated circuitry, and integrated circuits
Methods of forming contacts, methods of contacting lines, methods of operating integrated circuitry, and related integrated circuitry constructions are described. In one embodiment, a plurality of...
|
|
|
6380045 |
Method of forming asymmetric wells for DRAM cells
A fabrication method for forming asymmetric wells of a DRAM cell, and more particularly to a fabrication method for producing a transistor that is capable of reducing body effect, gate-swing and...
|
|
|
6372667 |
Method of manufacturing a capacitor for semiconductor memory devices
A method of manufacturing a capacitor for semiconductor memory devices is disclosed. According to the present invention, a lower electrode is formed on the semiconductor substrate. A Ta 2 O 5 ...
|
|
|
6368887 |
Method of monitoring a process of manufacturing a semiconductor wafer including hemispherical grain polysilicon
A method of monitoring a process of manufacturing a semiconductor wafer including an area of hemispherical grain polysilicon, the method comprising providing a probe including a liquid conductor;...
|
|
|
6365498 |
Integrated process for I/O redistribution and passive components fabrication and devices formed
The present invention discloses an integrated method for I/O redistribution and in-situ passive components fabrication such that passive components such as resistors and capacitors can be formed...
|
|
|
6365482 |
I.C. thin film resistor stabilization method
A method for stabilizing thin film structures fabricated on an I.C. wafer requires the performance of a rapid thermal annealing (RTA) step after the thin film material, preferably silicon-chromium...
|
|
|
6365480 |
IC resistor and capacitor fabrication method
An IC resistor and capacitor fabrication method comprises depositing a dielectric layer over existing active devices and metal interconnections on an IC substrate. In a preferred embodiment, a...
|
|
|
6365483 |
Method for forming a thin film resistor
The invention provides a method for forming a thin film resistor, which comprises the following steps: providing an insulator substrate; forming a patterned conductive layer over the insulator...
|
|
|
6362525 |
Circuit structure including a passive element formed within a grid array substrate and method for making the same
A circuit structure combines an integrated circuit with a passive circuit element formed within a grid-array substrate. Formation of the circuit structure includes forming a passive circuit element...
|
|
|
6358756 |
Self-aligned, magnetoresistive random-access memory (MRAM) structure utilizing a spacer containment scheme
This invention pertains to a method of fabricating a MRAM structure and the resulting structure. The MRAM structure of the invention has the pinned layer recessed within a trench with the upper...
|
|
|
6358808 |
Semiconductor element with thermally nitrided film on high resistance film and method of manufacturing the same
In a method of manufacturing a semiconductor device, an insulating film is formed on a semiconductor substrate. A semiconductor film pattern is formed on the insulating film. A direct thermal...
|
|
|
6355492 |
Process for the manufacturing of oxide electrodes for ferroelectric capacitor
An electrode for a capacitor having two electrodes and a capacitor insulation layer formed of a dielectric film sandwiched between the two electrodes, at least one of the electrodes being formed of...
|
|
|
6355535 |
Method and structure of manufacturing a high-Q inductor with an air trench
The structure of a high-Q inductor applied in a monolithic circuit according to the invention comprises a plurality of spiral metal lines and a plurality of dielectric layers, each dielectric layer...
|
|
|
6352888 |
Method of fabricating SRAM cell having a field region
A static random access memory (SRAM) cell includes first and second load devices, first and second access transistors, first and second drive transistors, and two bit lines. The SRAM includes a...
|
|
|
6348391 |
Monolithic inductor with guard rings
An integrated circuit and method of fabrication are disclosed for achieving electrical isolation between a spiral inductor and an underlying silicon substrate using standard semiconductor...
|
|
|
6344373 |
Antifuse structure and process
According to the preferred embodiment, an antifuse structure and method for personalizing a semiconductor device is provided that overcomes the limitations of the prior art. The preferred...
|
|
|
6344406 |
Method for manufacturing a semiconductor device having a conductor pattern side face provided with a separate conductive sidewall
It is possible to obtain a semiconductor device in which a contact and a wiring provided on the contact can be electrically connected well even if a shift of superposition is caused. Sidewalls 5 a...
|
|
|
6342424 |
High-Q spiral inductor structure and methods of manufacturing the structure
A high-Q spiral inductor structure that utilizes a three-layer substrate, and methods of manufacturing the structure, are provided. The three-layer substrate is utilizable for CMOS circuits while...
|
|
|
6342164 |
Pinhole-free dielectric films
A method for producing a pinhole-free dielectric film comprising applying a photopolymer to a first dielectric surface of a dielectric film having pinholes, exposing a second and opposing surface...
|
|
|
6340620 |
Method of fabricating a capacitor
A process for fabricating a capacitor in a microcircuit, and the capacitor so fabricated. A first layer of a polycrystalline semiconductor, preferably polysilicon, is deposited. A layer of a binary...
|
|
|
6338994 |
Semiconductor device and method of fabricating thereof
A semiconductor device having a bottom electrode, a ferroelectric film, and a top electrode formed on a semiconductor substrate, wherein the angle of each of the main cross sectional sides of the...
|
|
|
6338970 |
Ferroelectric capacitor of semiconductor device and method for fabricating the same
There is provided a ferroelectric capacitor of semiconductor device including a SBT ferroelectric thin film. The SBT ferroelectric thin film has double layer structure in which each layer is...
|
|
|
6326256 |
Method of producing a laser trimmable thin film resistor in an integrated circuit
A thin film resistor processing flow solves the problem of accurately incorporating the resistor (80) to be trimmed in an optimized multilayer stack (60,70). This is achieved by measuring the total...
|
|
|
6319790 |
Process for fabricating semiconductor device with multiple cylindrical capacitor
A method for making a semiconductor device is provided. In the method, an insulating layer is formed over a semiconductor substrate, and a groove is formed in the insulating layer. Then, a first...
|
|
|
6316306 |
Memory cell array in a dynamic random access memory and method for fabricating the same
A memory cell array structure of a DRAM is disclosed. The disclosed memory cell array includes at least one active region surrounded with an element isolating insulation layer in a semiconductor...
|