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7598160 |
Method for manufacturing thin film semiconductor
A method for manufacturing thin film semiconductor device is provided. The semiconductor thin film includes a semiconductor thin film and a gate electrode and has an active region turned into a...
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7598150 |
Compensation techniques for substrate heating processes
Methods for compensating for a thermal profile in a substrate heating process are provided herein. In one embodiment, a method of processing a substrate includes determining an initial thermal...
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7575979 |
Method to form a film
A method includes forming a fluid including an inorganic semiconductor material, depositing a layer of said fluid on a substrate to form a film, and curing said film to form a porous semiconductor...
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7573122 |
Method for producing a semiconductor component having a metallic control electrode, and semiconductor component
A method for producing a semiconductor component, and a semiconductor component, having a metallic gate electrode deposited onto a semiconductor layer, with the gate electrode having a gate foot...
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7569458 |
Non-thermally annealed doped semiconductor material and methods related thereto
A method of non-thermal annealing of a silicon wafer comprising irradiating a doped silicon wafer with electromagnetic radiation in a wavelength or frequency range coinciding with lattice phonon...
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7566625 |
Semiconductor device manufacturing method, heat treatment apparatus, and heat treatment method
For manufacture of a semiconductor device using a low heat resistant substrate such as a glass substrate, a method of heat treatment for activating an impurity element that is used to dope a...
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7550356 |
Method of fabricating strained-silicon transistors
A method of fabricating strained-silicon transistors includes providing a semiconductor substrate, in which the semiconductor substrate includes a gate, at least a spacer, and a source/drain...
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7524777 |
Method for manufacturing an isolation structure using an energy beam treatment
The invention provides a method for manufacturing a semiconductor device. The method for manufacturing the semiconductor device, among others, may include forming one or more layers of material...
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7397111 |
Semiconductor wafer, an electronic component, and a component carrier for producing the electronic component
An electronic component includes a semiconductor chip with a chip topside, an integrated circuit, and a chip backside. The chip backside includes a magnetic layer. The electronic component further...
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7348222 |
Method for manufacturing a thin film transistor and method for manufacturing a semiconductor device
It is an object of the present invention to provide a method for removing the metal element from the semiconductor film which is different from the conventional gettering step for removing the...
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7343661 |
Method for making condenser microphones
A method for making condenser microphones includes: forming a fixed electrode layer structure of a plurality of fixed electrode units; forming a sacrificial layer of a plurality of sacrificial...
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7329620 |
System and method for providing an integrated circuit having increased radiation hardness and reliability
A system and method is disclosed for providing an integrated circuit that has increased radiation hardness and reliability. A device active area of an integrated circuit is provided and a layer of...
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7294589 |
Laser irradiation apparatus
An object is to obtain an even energy distribution of a laser beam in one direction, thereby conducting a uniform laser annealing on a film. A laser irradiation apparatus comprising: a lens for...
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7259103 |
Fabrication method of polycrystalline silicon TFT
A method of fabricating polycrystalline silicon thin film transistor according to the present invention includes: depositing a buffer layer on a substrate; depositing an amorphous silicon layer on...
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7232734 |
Radiation emitting semiconductor device and method of manufacturing such a device
Radiation-emitting semiconductor device and method of manufacturing such a device. The invention relates to a radiation-emitting semiconductor device ( 10 ) comprising a silicon-containing...
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7192818 |
Polysilicon thin film fabrication method
A polysilicon thin film fabrication method is provided, in which a heat-absorbing layer is used to provide sufficient heat for grain growth of an amorphous silicon thin film, and an insulating...
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7157320 |
Semiconductor device and process of production of same
A semiconductor device comprising: a first insulating film formed on a semiconductor substrate; a semiconductor layer at least a part of which is formed on the first insulating film; a second...
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7148091 |
Method of manufacturing thin film transistor
Impurity ions contained in a semiconductor layer are diffused downwardly from a gate electrode by irradiating laser light from the back surface of a transparent substrate after source-drain regions...
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7112458 |
Method of forming a liquid crystal display
An active layer of a P-type low temperature polysilicon thin film transistor and a bottom electrode of a storage capacitor are first formed. Then, a P-type source/drain is formed and the bottom...
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7105415 |
Method for the production of a bipolar transistor
The invention relates to a method for producing a bipolar transistor. A semiconductor substrate is provided that encompasses a collector area of a first conductivity type, which is embedded therein...
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7037797 |
Localized heating and cooling of substrates
The present invention is directed to an apparatus and process for locally heating and/or cooling of semiconductor wafers in thermal processing chambers. In particular, the apparatus of the present...
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7015057 |
Method of manufacturing a drive circuit of active matrix device
A data holding control signal for each data line is supplied to a plurality of source followers that are connected together in parallel. The parallel-connected source followers are a combination of...
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6930009 |
Laser synthesized wide-bandgap semiconductor electronic devices and circuits
A laser apparatus and methods are disclosed for synthesizing areas of wide-bandgap semiconductor substrates or thin films, including wide-bandgap semiconductors such as silicon carbide, aluminum...
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6913982 |
Method of fabricating a probe of a scanning probe microscope (SPM) having a field-effect transistor channel
A probe of a scanning probe microscope (SPM) having a field-effect transistor (FET) structure at the tip of the probe, and a method of fabricating the probe are provided. The SPM probe having a...
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6908805 |
Method of manufacturing dual gate oxide film
The present invention is provided to manufacture a dual gate oxide film. According to the present invention, it is possible to obtain a high-quality NO gate oxide film for high voltage and a...
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6890839 |
Method and apparatus for laser annealing configurations of a beam
An object of the present invention is to provide a laser annealing method and apparatus capable of performing uniform beam emission. By means of the present invention, uniform beam application to a...
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6884699 |
Process and unit for production of polycrystalline silicon film
A process for making a polycrystalline silicon film includes forming, on a glass substrate, an amorphous silicon film having a first region and a second region that contacts the first region,...
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6870199 |
Semiconductor device having an electrode overlaps a short carrier lifetime region
A semiconductor device that helps to prevent the occurrence of current localization in the vicinity of an electrode edge and improves the reverse-recovery withstanding capability. The semiconductor...
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6852601 |
Heat treatment method that includes a low negative pressure
When carrying workpieces from a loading area in which the workpieces are handled into a heat treatment furnace to make the workpieces subjected to a heat treatment process using a predetermined...
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6847006 |
Laser annealing apparatus and semiconductor device manufacturing method
This invention is intended to provide a laser annealing method by employing a laser annealer lower in running cost so as to deal with a large-sized substrate, for preventing or decreasing the...
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6818568 |
Method of using beam homogenizer and laser irradiation apparatus
There is provided a beam homogenizer which can unify the energy distribution of a linear laser beam in a longitudinal direction. In the beam homogenizer including cylindrical lens groups for...
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6800541 |
Pulse laser irradiation method for forming a semiconductor thin film
A method of irradiation of plural pulse laser beams onto one position of a non-single crystal semiconductor, wherein the pulse laser beams are not higher in energy density than an energy density...
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6790722 |
Logic SOI structure, process and application for vertical bipolar transistor
A method and structure for forming an emitter in a vertical bipolar transistor includes providing a substrate having a collector layer and a base layer over the collector layer, forming a...
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6784017 |
Method of creating a high performance organic semiconductor device
A high temperature thermal annealing process creates a low resistance contact between a metal material and an organic material of an organic semiconductor device, which improves the efficiency of...
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6777272 |
Method of manufacturing an active matrix display
A driver circuit integration type (monolithic type) active matrix display device having high performance is formed by using thin film transistors (TFT). While a nickel element is added t an...
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6767773 |
Method of Production of a thin film type semiconductor device having a heat-retaining layer
An operating semiconductor layer is formed in such a manner that amorphous silicon layer is formed to be shaped so that it has a wide region and a narrow region and the narrow region is connected...
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6767799 |
Laser beam irradiation method
A laser beam irradiation method that achieves uniform crystallization, even if a film thickness of an a-Si film or the like fluctuates, is provided. The present invention provides a laser beam...
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6767804 |
2N mask design and method of sequential lateral solidification
A pan/tilt camera system includes a sensor spaced from a rotational shaft of a pan/tilt camera, a detected piece rotated with the rotational shaft so as to correspond to the sensor, an origin...
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6677214 |
Semiconductor device and method of fabricating the same
In order to easily and accurately manufacture a micromachine comprising a member which is made of a single-crystalline material and having a complicated structure, an uppermost layer ( 1104 ) of a...
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6668122 |
Coated optical fiber
In a coated optical fiber comprising a quartz glass fiber, a primary coating and a secondary coating, the secondary coating is formed by curing a resin composition comprising (A) 20-90 wt % of a...
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6586308 |
Method for producing circuit structures on a semiconductor substrate and semiconductor configuration with functional circuit structures and dummy circuit structures
A method for producing circuit structures on a semiconductor substrate is described. Photoresist structures are formed, which define functional circuit structures and dummy circuit structures,...
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6548332 |
Thermal treatment process for forming thin film transistors without the use of plasma treatment to further improve the output property of the thin film transistor
A process for forming a thin film transistor includes steps of (a) forming a gate on a portion of a substrate, (b) forming a gate dielectric layer, a semiconductor layer, a source, a drain, and a...
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6537864 |
Method of fabricating a thin film transistor using electromagnetic wave heating of an amorphous semiconductor film
A method of fabricating a semiconductor device capable of fabricating a semiconductor device including a polycrystalline semiconductor film having excellent characteristics with a high yield is...
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6489188 |
Laser annealing system for crystallization of semiconductor layer and method of the same
The present invention discloses a method for forming a polycrystalline semiconductor layer on a substrate at an atmospheric pressure, including: providing a chamber having an opening portion and a...
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6468871 |
Method of forming bipolar transistor salicided emitter using selective laser annealing
A method is provided for forming a uniformly salicided single crystal silicon emitter structure in a semiconductor integrated circuit bipolar transistor structure. The bipolar transistor structure...
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6423605 |
Method and apparatus for forming ultra-shallow junction for semiconductor device
A practical, low-cost method for forming an ultra-shallow junction in a semiconductor material is provided. The method is directed to an initial RTA process using a heat source at a selected...
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6415431 |
Repair of phase shift materials to enhance adhesion
A method and apparatus are provided for repairing clear defects in photomasks such as attenuated photomasks having a patterned MoSi film on a glass substrate. The method and apparatus use an energy...
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6406966 |
Uniform emitter formation using selective laser recrystallization
Method is provided for forming an emitter structure in a semiconductor integrated circuit bipolar transistor structure. The bipolar transistor structure includes a collector region that has a first...
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6372597 |
Method and a circuit for improving the effectiveness of ESD protection in circuit structures formed in a semiconductor substrate
A method and a related circuit structure are described for improving the effectiveness of ESD protection in circuit structures realized in a semiconductor substrate overlaid with an epitaxial layer...
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6372520 |
Sonic assisted strengthening of gate oxides
A method and apparatus for repairing and improving the endurance characteristics of process damaged oxide film formed in a semiconductor device involving sonic annealing by vibrating or oscillating...
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