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7615457 |
Method of fabricating self-aligned bipolar transistor having tapered collector
A method is provided for making a bipolar transistor which includes a tapered, i.e. frustum-shaped, collector pedestal having an upper substantially planar surface, a lower surface, and a slanted...
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7611955 |
Method of forming a bipolar transistor and semiconductor component thereof
A semiconductor component is formed using the following processes: (a) forming a first dielectric layer over the semiconductor substrate; (b) forming a base electrode for the bipolar transistor...
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7521327 |
High fT and fmax bipolar transistor and method of making same
A high f T and f max bipolar transistor includes an emitter, a base, and a collector. The emitter has a lower portion and an upper portion that extends beyond the lower portion. The base includes...
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7491617 |
Transistor structure with minimized parasitics and method of fabricating the same
A transistor having minimized parasitics is provided including an emitter having a recessed extrinsic emitter portion atop an intrinsic emitter portion; a base including an intrinsic base portion...
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7397070 |
Self-aligned transistor
In one embodiment, a transistor is formed to use two conductors to make electrical connection to one of the active regions of the transistor.
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7396723 |
Method of manufacturing EEPROM device
A method of manufacturing an EEPROM device can reduce the cell area. The method of manufacturing an Electrically Erasable Programmable Read-Only Memory (EEPROM) includes forming a mask pattern over...
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7338875 |
Method of fabricating a semiconductor device having a toroidal-like junction
Formation of elements of a vertical bipolar transistor is described, in particular a vertical npn transistor formed on a p-type substrate. Accordingly, an improved method not limited by constraints...
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7300850 |
Method of forming a self-aligned transistor
In one embodiment, a transistor is formed to use two conductors to make electrical connection to one of the active regions of the transistor.
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7288829 |
Bipolar transistor with self-aligned retrograde extrinsic base implant profile and self-aligned silicide
Disclosed is a method of forming a transistor in an integrated circuit structure that begins by forming a collector in a substrate and an intrinsic base above the collector. Then, the invention...
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7259050 |
Semiconductor device and method of making the same
A semiconductor device comprises a substrate, a gate disposed on the substrate, and a source and drain formed in the substrate on both sides of the gate. The device further comprises a thin spacer...
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7232732 |
Semiconductor device with a toroidal-like junction
Formation of elements of a vertical bipolar transistor is described, in particular a vertical npn transistor formed on a p-type substrate. Accordingly, an improved method not limited by constraints...
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7169677 |
Method for producing a spacer structure
A method for fabricating a spacer structure includes: forming a gate insulation layer having a gate deposition-inhibiting layer, a gate layer and a covering deposition-inhibiting layer on a...
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7118981 |
Method of fabricating an integrated silicon-germanium heterobipolar transistor and an integrated silicon-germanium heterobipolar transistor
In a method of fabricating an integrated silicon-germanium heterobipolar transistor a silicon dioxide layer arranged between a silicon-germanium base layer and a silicon emitter layer is formed by...
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7105415 |
Method for the production of a bipolar transistor
The invention relates to a method for producing a bipolar transistor. A semiconductor substrate is provided that encompasses a collector area of a first conductivity type, which is embedded therein...
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7094636 |
Method of forming a conductive line
A method of forming a conductive line includes forming conductive material received over a semiconductor substrate into a line having opposing sidewalls. Insulative material is deposited over the...
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7084028 |
Semiconductor device and method of manufacturing a semiconductor device
A semiconductor device comprises a semiconductor substrate having a cavity region inside; a first insulation film formed on the inner wall of the cavity region; a first electrode formed on the...
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7005359 |
Bipolar junction transistor with improved extrinsic base region and method of fabrication
A bipolar transistor and its fabrication are described. The extrinsic base region is formed by growing a second, more heavily doped, epitaxial layer over a first epitaxial layer. The second layer...
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6943077 |
Selective spacer layer deposition method for forming spacers with different widths
A method of forming spacers with different widths on a semiconductor substrate, includes the steps of disposing a first spacer layer over the substrate, defining the first spacer layer into a...
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6924202 |
Heterojunction bipolar transistor with self-aligned emitter and sidewall base contact
A heterojunction bipolar transistor (HBT), and manufacturing method therfor, comprising a semiconductor substrate having a collector region is provided. A base contact layer is formed over the...
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6911368 |
Arrangement for preventing short-circuiting in a bipolar double-poly transistor and a method of fabricating such an arrangement
In a bipolar double-poly transistor comprising a layer of base silicon ( 1 ′) on a silicon substrate ( 2 ′), a first layer of silicon dioxide ( 3 ′) on the base silicon layer ( 1 ′), an...
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6900519 |
Diffused extrinsic base and method for fabrication
The present invention provides a unique device structure and method that provides increased transistor performance in integrated bipolar circuit devices. The preferred embodiment of the present...
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6887765 |
Method for manufacturing a bipolar junction transistor
According to one embodiment of the invention, a method used in manufacturing an intermediate structure in a bipolar junction transistor includes implanting a base dopant in a semiconductor...
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6867105 |
Bipolar transistor and method of fabricating a bipolar transistor
A bipolar transistor includes a first layer with a collector. A second layer has a base cutout for a base. A third layer includes a lead for the base. The third layer is formed with an emitter...
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6861325 |
Methods for fabricating CMOS-compatible lateral bipolar junction transistors
A method for fabricating a lateral bipolar junction transistor in an active area of a substrate includes forming a base structure directly on a central portion of the active area without a gate...
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6846716 |
Integrated circuit device and method therefor
A semiconductor device has recesses formed in the substrate during removal of the anti-reflective coating (ARC) because these recess locations are exposed during the etching of the ARC. Although...
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6830967 |
Method for forming CMOS transistor spacers in a BiCMOS process
According to an exemplary method in one embodiment, a transistor gate is fabricated on a substrate. Next, an etch stop layer may be deposited on the substrate. The etch stop layer may, for example,...
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6818492 |
Semiconductor device and manufacturing method thereof
This invention provides a semiconductor device which is excellent in high-frequency characteristics, wherein emitter diffusion is performed by a trench formed in a base region, the base resistance...
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6797579 |
Semiconductor device having trench isolation structure and method of fabricating the same
A semiconductor device having a trench isolation structure and a method of fabricating the same are provided. The device has a trench region and an isolation structure. The trench region is...
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6784065 |
Bipolar transistor with ultra small self-aligned polysilicon emitter and method of forming the transistor
A low-power bipolar transistor is formed to have an intrinsic emitter region with a sub-lithographic width, and an oxide layer that is self aligned to an overlying extrinsic emitter. The small...
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6774002 |
Structure and method for forming self-aligned bipolar junction transistor with expitaxy base
The present invention proposes a novel method to fabricate a Bipolar Junction Transistor device. The steps of the present invention include forming a shallow trench isolation structure in a...
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6764893 |
Method for reducing a parasitic capacitance of a semiconductive memory cell using metal mask for sidewall formation
The present invention provides a method for reducing loading capacitance. The inventive method includes the steps of: forming a plurality of patterns on a substrate, wherein the patterns are formed...
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6727155 |
Method for spin etching sidewall spacers by acid vapor
A method forming sidewall spacers on a semiconductor substrate without using the conventional plasma etching method is disclosed. In the method, a semiconductor substrate that has a gate structure...
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6720226 |
Semiconductor device and method for facticating the same
Gate insulating film, gate electrode made up of lower and upper gate electrodes, and on-gate passivation film are formed in this order on an Si substrate. Then, a sidewall is formed as a stack of...
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6713361 |
Method of manufacturing a bipolar junction transistor including undercutting regions adjacent to the emitter region to enlarge the emitter region
According to one embodiment of the invention, a method for manufacturing bipolar junction transistors includes disposing a first oxide layer between a semiconductor substrate and a base polysilicon...
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6686251 |
Method for fabricating a bipolar transistor having self-aligned emitter and base
A method for forming a self-aligned bipolar transistor includes the steps of combination etching a silicon substrate in an opening to form a concave surface on the silicon substrate, and forming an...
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6661055 |
Transistor in semiconductor devices
The present invention relates to a transistor in a semiconductor device and method of manufacturing the same. According to the present invention, the transistor has an auxiliary electrode to which...
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6642119 |
Silicide MOSFET architecture and method of manufacture
The present invention relates to a method of forming a transistor and a transistor structure. The invention comprises forming the transistor using a double silicide process which reduces resistance...
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6627504 |
Stacked double sidewall spacer oxide over nitride
Bridging between nickel suicide layers on a gate electrode and source/drain regions along silicon nitride sidewall spacers is prevented by recessing the silicon nitride spacers and forming barrier...
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6624034 |
Method of making field effect transistor in which the increase of parasitic capacitance is restrained by scale reduction
A method of producing a semiconductor device includes forming a gate electrode on a channel region on a surface of a semiconductor region of a semiconductor substrate, the channel region having a...
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6610571 |
Approach to prevent spacer undercut by low temperature nitridation
A new method is provided for the removal of liner oxide from the surface of a gate electrode during the creation of the gate electrode. A layer of gate oxide is formed over the surface of a...
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6607961 |
Method of definition of two self-aligned areas at the upper surface of a substrate
A method for defining, on the upper surface of a substrate, two self-aligned areas, including the steps of depositing a protective layer; depositing a covering layer; opening the protective and...
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6479362 |
Semiconductor device with high-temperature-stable gate electrode for sub-micron applications and fabrication thereof
An improved gate electrode provides greater tolerances to higher temperature annealing treatments, and is useful in connection with the formation of self-aligned contacts as are needed for high...
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6465317 |
Process for producing a bipolar transistor with self-aligned emitter and extrinsic base
A transistor manufacturing process includes the formation, on a layer ( 15 ) that will form the base of the transistor, of a stack of an SiGe alloy layer ( 16 ), a silicon oxide layer ( 17 ) and a...
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6458667 |
High power PMOS device
An improved MOS transistor and method for making it are described. The MOS transistor's source and drain have a first conductivity type and are separated from each other by a first region having a...
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6436783 |
Method of forming MOS transistor
(issue) It is an issue to suppress variation in threshold voltage due to deterioration in shot channel characteristics and improve the slow trap characteristics of the MOS transistor for...
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6436782 |
Process for fabricating a self-aligned double-polysilicon bipolar transistor
The process includes successively forming, over a base region of a semiconductor substrate, a poly-Ge or poly-SiGe layer, an etch-stop layer over a selected zone of the Ge or SiGe layer, a layer of...
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6436781 |
High speed and low parasitic capacitance semiconductor device and method for fabricating the same
A semiconductor device including a bipolar transistor formed by epitaxial growth or ion implantation is provided has an epitaxial silicon collector layer, a base region directly under an emitter...
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6399452 |
Method of fabricating transistors with low thermal budget
A low thermal budget transistor is fabricated by first forming a gate on a semiconductor substrate. First amorphous regions and first inactive dopant regions are then created in the substrate by...
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6368946 |
Manufacture of a semiconductor device with an epitaxial semiconductor zone
A method of manufacturing a semiconductor device with an epitaxial semiconductor zone, whereby a first layer of insulating material, a first layer of non-monocrystalline silicon, and a second...
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6365451 |
Transistor and method
A method of fabricating a semiconductor device and the device. The device is fabricated by providing a substrate having a region thereover of electrically conductive material, and a dielectric...
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