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7378324 |
Selective links in silicon hetero-junction bipolar transistors using carbon doping and method of forming same
Bipolar transistors and methods of forming the bipolar transistors. The method including forming a P-type collector in a silicon substrate; forming an intrinsic base on the collector, the intrinsic...
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7033895 |
Method of fabricating a MOS transistor with elevated source/drain structure using a selective epitaxial growth process
In a metal-oxide semiconductor (MOS) transistor with an elevated source/drain structure and in a method of fabricating the MOS transistor with the elevated source/drain structure using a selective...
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6767798 |
Method of forming self-aligned NPN transistor with raised extrinsic base
A self-aligned bipolar transistor and a method of formation thereof are provided. The bipolar transistor has a raised extrinsic base such that the link base resistance is reduced by providing an...
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6699760 |
Method for growing layers of group III-nitride semiconductor having electrically passivated threading defects
One method includes epitaxially growing a layer of group III-nitride semiconductor under growth conditions that cause a growth surface to be rough. The method also includes performing an epitaxial...
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6624045 |
Thermal conducting trench in a seminconductor structure and method for forming the same
The invention relates to a method of forming a trench filled with a thermally conducting material in a semiconductor substrate. In one embodiment, the method includes filling a portion of the...
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6593200 |
Method of forming an integrated inductor and high speed interconnect in a planarized process with shallow trench isolation
A method of forming a semiconductor device with an inductor and/or high speed interconnect. The method comprises forming an epitaxial layer over the substrate, forming an opening through the...
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6579774 |
Semiconductor device fabrication method
A semiconductor device fabrication method includes the steps of forming a first insulation layer and a first semiconductor layer sequentially on a semiconductor substrate having a buried diffusion...
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6444591 |
Method for reducing contamination prior to epitaxial growth and related structure
According to a disclosed embodiment, the surface of a semiconductor wafer is covered by an etch stop layer. For example, the etch stop layer can be composed of silicon dioxide. A cap layer is then...
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6436780 |
Semiconductor device
A number of npn and pnp bipolar transistors are formed in a single chip of silicon, so that some of the transistors have a greater frequency response than others The higher frequency transistors...
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6331470 |
Process for manufacturing a semiconductor material wafer having power regions dielectrically insulated from circuitry regions
A manufacturing process is carried out starting from an SOI type wafer including a top silicon layer and a bottom silicon layer separated from each other by a buried silicon dioxide layer. In the...
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6313000 |
Process for formation of vertically isolated bipolar transistor device
A vertically-isolated bipolar transistor occupying reduced surface area is fabricated by circumscribing an expected active device region within a first narrow trench. The first trench is filled...
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6297118 |
Vertical bipolar semiconductor power transistor with an interdigitzed geometry, with optimization of the base-to-emitter potential difference
A transistor including an epitaxial layer with a first conductivity type, a base buried region with a second conductivity type, and a sinker base region with the second conductivity type which...
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6242313 |
Use of polysilicon field plates to improve high voltage bipolar device breakdown voltage
A method for fabricating a buried layer pinched collector bipolar, (BPCB), device, sharing several process steps with simultaneously formed CMOS devices, has been developed. The BPCB device...
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6228733 |
Non-selective epitaxial depostion technology
Base layer formation without the use of selective epitaxial deposition is described. The process begins with the deposition of a seed layer of polysilicon over both the field oxide and the wafer...
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6171894 |
Method of manufacturing BICMOS integrated circuits on a conventional CMOS substrate
A method of manufacturing a BICMOS integrated circuit including an NPN transistor in a heavily-doped P-type wafer coated with a lightly-doped P-type layer, including the steps of forming an N well...
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6140196 |
Method of fabricating high power bipolar junction transistor
A method of fabricating a high power bipolar junction transistor. A P-type substrate having an N-type buried region is provided and a trench is formed within the substrate to expose the buried...
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6057184 |
Semiconductor device fabrication method using connecting implants
A semiconductor device and method of fabrication for such device in which a P- epitaxial layer is positioned above a P++ substrate. A P++ buried layer implant is positioned within the device...
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6015726 |
Semiconductor device and method of producing the same
A method of producing a semiconductor device having a bipolar transistor and a CMOS (Complementary Metal Oxide Semiconductor) transistor is disclosed. An epitaxial layer is formed on a...
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6010937 |
Reduction of dislocations in a heteroepitaxial semiconductor structure
A heteroepitaxial semiconductor device having reduced density of threading dislocations and a process for forming such a device. According to one embodiment, the device includes a substrate which...
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5909623 |
Manufacturing method of semiconductor device
A manufacturing method of the present invention comprises the first step of forming an epitaxial base layer in an opening of an element-isolating oxide film on a semiconductor substrate in a...
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5866446 |
Method of manufacturing bimos device
To enable a high speed operation and to increase the current gain, the disclosed a method of manufacturing a semiconductor device, comprising the steps of: forming a first semiconductor layer with...
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5677209 |
Method for fabricating a vertical bipolar transistor
A method for reproducibly fabricating a thin base region of a vertical bipolar transistor therein, which has a high transfer speed and increases a current driving force, and a method for increasing...
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5646055 |
Method for making bipolar transistor
A bipolar transistor (10) includes a collector region (13), a base region (14) in the collector region (13), and an emitter region (20) in the base region (14). A portion (18) of an electrical...
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5580798 |
Method of fabricating bipolar transistor having a guard ring
In a bipolar or BiCMOS process, a heavily doped buried layer of a first conductivity type and a heavily doped channel stop region of a second conductivity type are formed in a lightly doped...
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5512508 |
Method and apparatus for improvement of interconnection capacitance
A method and apparatus for reducing interconnection capacitance. A lightly doped buried layer is provided in or on a substrate below a field oxide region. The capacitance of an interconnect on the...
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5500378 |
Process for forming a bipolar type semiconductor device
A semiconductor device in which a bipolar transistor is provided, such as a BiCMOS, and a production process thereof. The device has collector region of a first conductivity type; an intrinsic base...
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5416039 |
Method of making BiCDMOS structures
A process is disclosed which simultaneously forms high quality complementary bipolar transistors, relatively high voltage CMOS transistors, relatively low voltage CMOS transistors, DMOS...
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5389563 |
Method of fabricating a bipolar transistor having a high ion concentration buried floating collector
A semiconductor device having a reduced leakage current is fabricated in a short time at a low cost with excellent controllability. A buried layer (20) which includes a principal buried layer (21)...
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5389553 |
Methods for fabrication of transistors
In a bipolar transistor, the collector and the base are formed in an isolation region laterally bounded by a field insulator. The isolation region corners are spaced far from the emitter to reduce...
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5376564 |
Method of manufacturing a bipolar transistor having a decreased collector-base capacitance
On manufacturing a bipolar transistor, a field silicon oxide layer (7) having a beaked edge portion (bird's beak portion) is formed by a heat oxidation process using a silicon nitride film (5) as...
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5366907 |
Method of fabricating a BI-CMOS integrated circuit device
The invention provides a novel method of fabricating a semiconductor integrated circuit device involving a bipolar transistor having a collector contact with side-wall oxide films. After forming an...
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5364802 |
Method of making a semiconductor device with buried electrode
A semiconductor device including a bipolar transistor, has a collector region including a first semiconductor region of the first conductivity type and a second semiconductor region of the first...
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5352617 |
Method for manufacturing Bi-CMOS transistor devices
A method of manufacturing a semiconductor device having a bipolar transistor and a MOS transistor is disclosed, which comprises covering the bipolar transistor formation region with a gate...
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5328858 |
Method for producing the bipolar transistor
A silicon oxide film is formed at a surface of a silicon substrate of a first conductive type, and then patterned to have an opening. PSG is deposited on the silicon substrate having the insulating...
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5324672 |
Manufacturing method for bipolar transistor
A bipolar transistor including a semiconductor layer formed on a semiconductor substrate; a base region formed at an upper portion of the semiconductor layer; a graft base region formed at the...
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5294558 |
Method of making double-self-aligned bipolar transistor structure
A method of making an improved bipolar transistor and the transistor itself having a double-self-aligned device structure are disclosed. The method and the transistor device provide self-alignment...
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5244832 |
Method for fabricating a poly emitter logic array and apparatus produced thereby
A Schottky diode includes a metal layer (62) on an epitaxial region (24). The metal layer (62) is covered with a dielectric layer (64). An area (90) on the metal is exposed by opening a via (68) in...
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5242854 |
High performance semiconductor devices and their manufacture
A high performance bipolar transistor and a method of fabrication. Base resistance is reduced by a self-aligned silicide formed in the single-crystal region of the extrinsic base, thereby...
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5238850 |
Bi-MOS type semiconductor integrated circuit device having high-frequency characteristics and method of making the same
A Bi-MOS type semiconductor integrated circuit device having at least one bipolar transistor in an island region is provided. The island region is covered with a multilayer insulating film which is...
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5229307 |
Method of making extended silicide and external contact
There is disclosed a process for making high performance bipolar and high performance MOS devices on the same integrated circuit die. The process comprises forming isolation islands of epitaxial...
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5213988 |
Method of manufacturing bipolar transistor with self-aligned base regions
To manufacture a semiconductor device, a buried layer, epitaxial layer and an element separating layer are formed on a substrate, in order; a first resist film is formed thereon and an opening at...
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5208169 |
Method of forming high voltage bipolar transistor for a BICMOS integrated circuit
A high voltage bipolar transistor (10) is fabricated in an N- HV/epitaxial well (12) formed by an N- substrate implant and the overlying portion of the N- epitaxial layer 12b. The N- substrate...
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5139961 |
Reducing base resistance of a BJT by forming a self aligned silicide in the single crystal region of the extrinsic base
A high performance bipolar transistor and a method of fabrication. Base resistance is reduced by a self-aligned silicide formed in the single-crystal region of the extrinsic base, thereby...
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5137839 |
Method of manufacturing a bipolar transistor having polysilicon layer which serves as an emitter electrode and passivating dangling bonds
In a bipolar transistor, a polysilicon layer formed on an emitter diffusion layer is used as an emitter electrode. After the polysilicon layer is formed, an atom is introduced into the polysilicon...
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5061646 |
Method for forming a self-aligned bipolar transistor
A structure and process for fabricating a fully self-aligned high-performance bipolar semiconductor device is disclosed. In accordance with one embodiment of the invention, a substrate is provided...
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5045484 |
Fabrication method of a BIMOS semiconductor device
A method for fabricating a BIMOS device includes steps of forming a first insulator layer on the semiconductor layer in correspondence to a first region, providing a gate electrode of a...
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5013672 |
Manufacturing process for high-frequency bipolar transistors
The process calls for determination of the contact areas occupied by the collector, emitter and base implantations by selective removal of a layer of oxidation resistant material only from said...
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5010026 |
Process for making bipolar transistor
A bipolar transistor has a base region consisting of a graft base region, linking base region and an intrinsic base region, and a diffusion suppressing region of an opposite conductivity type to...
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5006476 |
Transistor manufacturing process using three-step base doping
In a transistor fabrication process, the use of a three-step base doping technique enables the characteristics of a vertical bipolar transistor to be controllably reproduced at highly optimal...
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4994413 |
Method of manufacturing a semiconductor device having a silicon carbide layer
A method of forming a semiconductor device on a silicon carbide layer comprises steps of introducing an impurity into selected parts of the silicon carbide layer, and oxidizing the silicon carbide...
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