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7618864 |
Nonvolatile memory device and methods of forming the same
Example embodiments relate to a semiconductor memory device and methods of forming the same. Other example embodiments relate to a nonvolatile memory device and methods of forming the same. The...
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7595245 |
Semiconductor device having a gate electrode material feature located adjacent a gate width side of its gate electrode and a method of manufacture therefor
The present invention provides a semiconductor device, a method of manufacture therefore and an integrated circuit including the same. The semiconductor device ( 300 ), without limitation, may...
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7579243 |
Split gate memory cell method
Split gate memory cell formation includes forming a sacrificial layer over a substrate. The sacrificial layer is patterned to form a sacrificial structure with a first sidewall and a second...
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7569436 |
Manufacturing method of semiconductor device
The present invention makes it is possible to provide a manufacturing method of a semiconductor device by which damage by plasma process or doping process during a LDD formation process can be...
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7566615 |
Methods of fabricating scalable two transistor memory devices
A memory device includes a semiconductor substrate, a first gate insulator on a first portion of a semiconductor substrate, a storage node on the first gate insulator, a tunnel junction barrier on...
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7547602 |
Semiconductor integrated circuit device and its manufacturing method
A method of manufacturing a semiconductor integrated circuit device is provided including providing a substrate with projecting island regions formed in stripes, with first regions of the substrate...
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7544562 |
Method for manufacturing a capacitor electrode structure
A method for manufacturing a capacitor electrode structure, according to which the following steps are executed: A substrate is provided, which comprises contact pads arranged in lines and rows on...
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7541241 |
Method for fabricating memory cell
A memory cell structure comprises a semiconductor substrate, two stack structures positioned on the semiconductor substrate, two conductive spacers positioned on sidewalls of the two stack...
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7537988 |
Differential offset spacer
A method of fabricating a CMOS integrated circuit includes the steps of providing a substrate having a semiconductor surface, forming a gate dielectric and a plurality of gate electrodes thereon in...
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7521314 |
Method for selective removal of a layer
A method for forming a semiconductor device includes forming a liner over a semiconductor material including a control electrode. The method further includes forming a first spacer adjacent to the...
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7517757 |
Non-volatile memory device having dual gate and method of forming the same
A non-volatile memory device including a control gate pattern having a tunnel insulation pattern, a trap-insulation pattern, a blocking insulation pattern and a control gate electrode, which are...
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7510941 |
Semiconductor device and manufacturing method of the same
The invention improves the performance of a semiconductor device. A metal silicide film is formed by a silicide process on a gate electrode and an n + -type source region of an LDMOSFET, and no...
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7432168 |
Method for fabricating semiconductor device with thin gate spacer
A method for fabricating a transistor. A substrate having a gate electrode thereon and insulated therefrom is provided. A first gate spacer with a first dielectric material is formed on the...
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7429527 |
Method of manufacturing self-aligned contact openings
A method of manufacturing self-aligned contact openings is provided. A substrate having a number of device structures is provided and the top of the device structures is higher than the surface of...
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7419870 |
Method of manufacturing a flash memory device
Provided is a method of manufacturing a flash memory device. In the method, after forming a cell string and source/drain selection transistors, it forms a first oxide film in which a sidewall oxide...
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7419879 |
Transistor having gate dielectric layer of partial thickness difference and method of fabricating the same
A transistor having a gate dielectric layer of partial thickness difference and a method of fabricating the same are provided. The method includes forming a gate dielectric layer having a main...
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7371631 |
Method of manufacturing a nonvolatile semiconductor memory device, and a nonvolatile semiconductor memory device
For enhancing the high performance of a non-volatile semiconductor memory device having an MONOS type transistor, a non-volatile semiconductor memory device is provided with MONOS type transistors...
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7361564 |
Method of manufacturing high-voltage device
A method of manufacturing a high-voltage device DDD (Double Doped Drain) ion implantation process is performed at a tilt angle in order to form a smooth junction profile. Accordingly, the intensity...
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7338870 |
Methods of fabricating semiconductor devices
Methods of recovering damage on a semiconductor device by performing a hydrogen annealing process are disclosed. An example disclosed method includes forming an STI structure on a semiconductor...
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7335567 |
Gate electrodes of semiconductor devices and methods of manufacturing the same
Gate electrodes of semiconductor devices and methods of manufacturing the same are disclosed. An example method comprises: sequentially forming a gate oxide layer and a sacrificial buffer layer on...
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7312129 |
Method for producing two gates controlling the same channel
A semiconductor process and apparatus use a predetermined sequence of patterning and etching steps to etch a gate stack ( 62 ) formed over a substrate ( 11 ) and a first spacer structure ( 42 ),...
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7262456 |
Bit line structure and production method thereof
The disclosure relates to a bit line structure and an associated production method for the bit line structure. In the bit line structure, at least in a region of a second contact and a plurality of...
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7259062 |
Method of making a magnetic tunnel junction device
A method of making a magnetic tunnel junction device is disclosed. The magnetic tunnel junction device includes a magnetic tunnel junction stack and an electrically non-conductive spacer in contact...
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7220649 |
Method of manufacturing semiconductor device and the semiconductor device manufactured by the method
The method of manufacturing the semiconductor device that includes a high voltage MOS transistor with high operating voltage under both high and low gate voltages with low-cost is disclosed. When...
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7217624 |
Non-volatile memory device with conductive sidewall spacer and method for fabricating the same
The present invention relates to a non-volatile memory device having conductive sidewall spacers and a method for fabricating the same. The non-volatile memory device includes: a substrate; a gate...
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7189623 |
Semiconductor processing method and field effect transistor
A method of forming a transistor gate includes forming a gate oxide layer over a semiconductive substrate. Chlorine is provided within the gate oxide layer. A gate is formed proximate the gate...
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7172944 |
Method of fabricating a semiconductor device having an elevated source/drain
The present invention provides a semiconductor device having an elevated source/drain and a method of fabricating the same. In the semiconductor device, an active region is defined at a...
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7169674 |
Complementary metal oxide semiconductor (CMOS) gate stack with high dielectric constant gate dielectric and integrated diffusion barrier
A diffusion barrier (and method for forming the diffusion barrier) for a field-effect transistor having a channel region and a gate electrode, includes an insulating material being disposed over...
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7169678 |
Method of forming a semiconductor device using a silicide etching mask
Semiconductor devices and methods for fabricating a silicide of a semiconductor device are disclosed. An illustrated method comprises: forming a gate electrode; depositing an insulating layer;...
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7118977 |
System and method for improved dopant profiles in CMOS transistors
According to one embodiment of the present invention, a method of forming a semiconductor device includes forming a gate stack on an outer surface of a semiconductor body. First and second sidewall...
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7112498 |
Methods of forming silicide layer of semiconductor device
Methods of forming silicide layers of a semiconductor device are disclosed. A disclosed method comprises depositing a polysilicon layer, a buffer oxide layer, and a buffer nitride layer on a...
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7101766 |
Methods of fabricating semiconductor device having T-shaped gate and L-shaped spacer
There are provided methods of fabricating a semiconductor device having a T-shaped gate and an L-shaped spacer. In the method, an insulating layer and a sacrificial layer are formed in sequence on...
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7098124 |
Method of forming contact hole and method of fabricating semiconductor device
A method of forming contact holes is provided. A substrate having a plurality of device structures is provided. A first dielectric layer and a conductive layer sequentially cover the device...
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7094654 |
Manufacture of electronic devices comprising thin-film transistors
A method of manufacturing an electronic device including a thin film transistor comprises forming a semiconductor film over an insulating substrate; depositing a first masking layer over the...
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7087503 |
Shallow self isolated doped implanted silicon process
A process and structure for forming electrical devices. The process and structure provide for forming an insulating layer on a substrate. A conductive region is then formed in the insulating layer...
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7071046 |
Method of manufacturing a MOS transistor
A method of manufacturing a MOS transistor, comprising the steps of providing a semiconductor substrate, forming a gate structure on the semiconductor substrate, performing an implantation to form...
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7071061 |
Method for fabricating non-volatile memory
A method of fabricating a non-volatile memory is described. A substrate is provided and a first dielectric layer, an electron trapping layer and a second dielectric layer are sequentially formed...
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7064022 |
Method of forming merged FET inverter/logic gate
A method forms a semiconductor device from a device that includes a first source region, a first drain region, and a first fin structure that are separated from a second source region, a second...
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7045433 |
Tip architecture with SPE for buffer and deep source/drain regions
A method of manufacturing a semiconductor device includes forming a gate, source/drain extensions, buffer regions, and source/drain regions. The gate is formed over a semiconductor layer, and the...
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7033856 |
Spacer chalcogenide memory method
The present invention includes devices and methods to form memory cell devices including a spacer comprising a programmable resistive material alloy. Particular aspects of the present invention are...
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6998302 |
Method of manufacturing mosfet having a fine gate width with improvement of short channel effect
A method for fabricating a transistor in a semiconductor device is disclosed. An example method forms an isolation region in a semiconductor substrate and sequentially deposits a pad oxide layer, a...
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6991973 |
Manufacturing method of thin film transistor
A method of manufacturing a thin film transistor for solving the drawbacks of the prior arts is disclosed. The method includes steps of providing an insulating substrate, sequentially forming a...
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6982201 |
Structure and fabricating method with self-aligned bit line contact to word line in split gate flash
A new structure is disclosed for semiconductor devices in which contact regions are self-aligned to conductive lines. Openings to a gate oxide layer, in partially fabricated devices on a silicon...
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6967143 |
Semiconductor fabrication process with asymmetrical conductive spacers
A semiconductor process and resulting transistor includes forming conductive extension spacers ( 146, 150 ) on either side of a gate electrode ( 116 ). Conductive extensions ( 146, 150 ) and gate...
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6943082 |
Method for manufacturing a nonvolatile memory device
A method, for manufacturing a nonvolatile memory device, includes: forming a gate layer above which a stopper layer is disposed on a semiconductor layer; forming control gates on both side surfaces...
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6908822 |
Semiconductor device having an insulating layer and method for forming
An insulating layer ( 24, 66, 82 ) is formed over a stack ( 14 ) of materials and a semiconductor substrate ( 12 ) and an implant is performed through the insulating layer into the semiconductor...
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6908833 |
Shallow self isolated doped implanted silicon process
A process and structure for forming electrical devices. The process and structure provide for forming an insulating layer on a substrate. A conductive region is then formed in the insulating layer...
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6897116 |
Method and structure to improve the gate coupling ratio (GCR) for manufacturing a flash memory device
Method and structure to improve the gate coupling ratio (GCR) for manufacturing a flash memory device are provided. The method and structure include the following steps. A gate oxide layer, a first...
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6867103 |
Method of fabricating an ESD device on SOI
A method to form transistors having improved ESD performance in the manufacture of an integrated circuit device is achieved. The method includes providing a SOI substrate with a doped silicon layer...
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6849515 |
Semiconductor process for disposable sidewall spacers
A semiconductor process and structure ( 32 ) uses a disposable sidewall spacer ( 42 ) associated with lightly doped drain (LDD) transistors. The disposable sidewall spacers are efficiently removed...
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