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6773978 |
Methods for improved metal gate fabrication
Methods are disclosed for manufacturing semiconductor devices with silicide metal gates, wherein a single-step anneal is used to react a metal such as cobalt or nickel with substantially all of a...
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6773997 |
Method for manufacturing a high voltage MOSFET semiconductor device with enhanced charge controllability
A high voltage MOSFET device ( 100 ) has an nwell region ( 113 ) with a p-top layer ( 108 ) of opposite conductivity formed to enhance device characteristics. The p-top layer is implanted through a...
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6773998 |
Modified film stack and patterning strategy for stress compensation and prevention of pattern distortion in amorphous carbon gate patterning
A method for an integrated circuit includes the use of an amorphous carbon ARC mask. A layer of amorphous carbon material is deposited above a layer of conductive material, and a layer of...
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6767778 |
Low dose super deep source/drain implant
A semiconductor device for reducing junction capacitance by an additional low dose super deep source/drain implant and a method for its fabrication are disclosed. In particular, the super deep...
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6753217 |
Method for making self-registering non-lithographic transistors with ultrashort channel lengths
In a method for making transistors with ultrashort channel length, the deposition of respectively source, drain and gate electrodes initially can be performed with prior art technology limiting the...
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6753227 |
Method of fabricating MOS transistors
A method of fabricating a MOS transistor is provided. According to the method, a rapid thermal anneal is applied to a semiconductor substrate having active regions doped with well impurity ions and...
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6746920 |
Fabrication method of flash memory device with L-shaped floating gate
The present invention generally relates to provide a fabrication method of a flash memory with L-shaped floating gate. The present invention utilizes a dielectric spacer on a surface of a...
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6746924 |
Method of forming asymmetric extension mosfet using a drain side spacer
A method of forming an asymmetric extension MOSFET using a drain side spacer which allows a choice of source and drain sides for each individual MOSFET device and also allows an independent design...
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6723662 |
Methods of forming gate oxide films in integrated circuit devices using wet or dry oxidization processes with reduced chloride
Methods of forming gate oxide films in integrated circuit devices using wet or dry oxidization processes with a reduced amount of chloride are disclosed. A gate oxide film is formed on a substrate...
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6720228 |
Current source bias circuit with hot carrier injection tracking
A current mirror bias circuit for an RF amplifier transistor is modified whereby the reference transistor of the current mirror tracks hot carrier degradation in the RF transistor. Gate bias to the...
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6713333 |
Method for fabricating a MOSFET
The disclosed invention provides a method for fabricating a MOSFET comprising the steps of forming a first insulation layer over a semiconductor substrate; forming a trench which bottoms on the...
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6713346 |
Methods of forming a line of flash memory cells
The invention comprises FLASH memory and methods of forming flash memory. In one implementation, a line of floating gates is formed over a semiconductor substrate. The semiconductor substrate is...
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6706571 |
Method for forming multiple structures in a semiconductor device
A method of forming multiple structures in a semiconductor device includes depositing a film over a conductive layer, etching a trench in a portion of the film and forming adjacent the sidewalls of...
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6699740 |
Method for manufacturing a lateral double-diffused MOS transistor having stable characteristics and equal drift length
A semiconductor device including a P-type semiconductor layer; an N-type first well on the surface of the semiconductor layer; a P-type second well on the surface of the first well; an N-type...
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6693323 |
Super-junction semiconductor device
A method of manufacture reduces costs and provides an excellent mass-productivity, a super-junction semiconductor device, that facilitates reducing times of heat treatment of the alternating...
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6686245 |
Vertical MOSFET with asymmetric gate structure
A semiconductor fabrication process and structure in which a semiconductor channel structure ( 140 ) having first and second major surfaces perpendicular to a semiconductor substrate ( 102 ) is...
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6682980 |
Fabrication of abrupt ultra-shallow junctions using angled PAI and fluorine implant
The present invention is directed to a method of forming a PMOS transistor within a semiconductor substrate, and comprises forming a gate over an n-type portion of the semiconductor substrate,...
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6680231 |
High-voltage device process compatible with low-voltage device process
A high-voltage device process compatible with a low-voltage device process. A high-voltage device area and a low-voltage device area are defined on an epitaxial layer of a semiconductor substrate....
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6660596 |
Double planar gated SOI MOSFET structure
A double gated silicon-on-insulator (SOI) MOSFET is fabricated by using a mandrel shallow trench isolation formation process, followed by a damascene gate. The double gated MOSFET features narrow...
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6660578 |
High-K dielectric having barrier layer for P-doped devices and method of fabrication
A semiconductor device, a semiconductor wafer and a method of forming a semiconductor wafer where a barrier layer is used to inhibit P-type ion-penetration into a dielectric layer made from a...
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6653193 |
Resistance variable device
A resistance variable device and a method for using the same. The device includes a body formed of a voltage or current controlled resistance setable material, and at least two spaced electrodes on...
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6638842 |
Methods of fabricating integrated circuitry
A method of fabricating integrated circuitry comprises forming a conductive line having opposing sidewalls over a semiconductor substrate. An insulating layer is then deposited. The insulating...
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6632716 |
Semiconductor device and manufacturing method thereof
A semiconductor device is comprised of: an element isolating film formed on one major surface of a semiconductor substrate; an element forming region formed on the major surface and surrounded by...
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6624057 |
Method for making an access transistor
Methods are disclosed for the fabrication of novel polysilicon structures having increased surface areas to achieve lower resistances after silicidation. The structures are applicable, for example,...
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6620688 |
Method for fabricating an extended drain metal oxide semiconductor field effect transistor with a source field plate
An extended drain metal oxide semiconductor field effect transistor (EDMOSFET) with a source field plate is provided. The EDMOSFET includes: a first-conductivity type semiconductor substrate; a...
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6620656 |
Method of forming body-tied silicon on insulator semiconductor device
An integrated circuit using silicon-on-insulator (SOI) has most of its transistors with their channels (bodies) floating. Some of the transistors, however, must have their channels coupled to a...
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6613633 |
Method for manufacturing a high power semiconductor device having a field plate extendedly disposed on a gate
A method to fabricate a high voltage transistor of a smart power device is discussed. The method includes forming a well of first conductivity in a substrate of second conductivity; forming a drift...
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6610576 |
Method for forming asymmetric dual gate transistor
The present invention provides a double gated transistor and a method for forming the same that results in improved device performance and density. The preferred embodiment of the present invention...
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6596594 |
Method for fabricating field effect transistor (FET) device with asymmetric channel region and asymmetric source and drain regions
Within a method for fabricating a field effect transistor (FET) device there is provided a series of ion implant methods which provide the field effect transistor (FET) device with both: (1) a...
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6597044 |
Semiconductor device having a charge removal facility for minority carriers
The invention relates to a high-voltage deep depletion transistor, provided in a semiconductor body ( 1 ) having a substrate ( 2 ) of a first conductivity type, for example the p-type, and a...
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6576520 |
Amorphous carbon layer for improved adhesion of photoresist and method of fabrication
An improved and novel semiconductor device including an amorphous carbon layer for improved adhesion of photoresist and method of fabrication. The device includes a substrate having a surface, a...
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6569731 |
Method of forming a capacitor dielectric structure
A method of forming capacitor dielectric structure. The method includes steps of providing a semiconductor substrate having at least a predetermined capacitor structure, using silicon nitride...
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6566204 |
Use of mask shadowing and angled implantation in fabricating asymmetrical field-effect transistors
To furnish an IGFET ( 120 or 122 ) with an asymmetrically doped channel zone ( 144 or 164 ), a mask ( 212 ) is provided over a semiconductor body and an overlying electrically insulated gate...
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6563176 |
Asymmetrical semiconductor device for ESD protection
An asymmetrical ESD protection device and a method of production thereof are provided. A source region and a drain region are formed in a substrate. A gate is formed over the substrate between the...
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6559019 |
Breakdown drain extended NMOS
An MOS device and the method of making the device which includes a semiconductor substrate having a well therein of predetermined conductivity type. A tank having a surface is disposed within the...
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6548355 |
EEPROM memory cell and corresponding manufacturing method
An EEPROM memory cell integrated in a semiconductor substrate comprises a floating gate MOS transistor having a source region, a drain region, and a gate region projecting from the substrate and is...
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6544850 |
Dynamic random access memory
A dynamic random access memory (DRAM) formed in a silicon chip that includes a support area in which support circuitry of the memory includes a single electrical contact through two dielectric...
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6541320 |
Method to controllably form notched polysilicon gate structures
A method and structure for forming a notched gate structure having a gate conductor layer on a gate dielectric layer. The gate conductor layer has a first thickness. The inventive method includes...
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6541393 |
Method for fabricating semiconductor device
A semiconductor device is fabricated by a method comprising the steps of: selectively introducing a halogen element or argon into a device region 14 of a silicon substrate 10 ; and wet oxidizing...
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6537884 |
Semiconductor device and method of manufacturing the same including an offset-gate structure
A semiconductor device having an offset-gate structure, which can achieve a release of an electric field concentration and a lowering a transistor resistance at the same time. A semiconductor...
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6531355 |
LDMOS device with self-aligned RESURF region and method of fabrication
A RESURF LDMOS transistor ( 64 ) includes a RESURF region ( 42 ) that is self-aligned to a LOCOS field oxide region ( 44 ). The self-alignment produces a stable breakdown voltage BVdss by...
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6528372 |
Sidewall spacer definition of gates
A method of forming features on a semiconductor device uses sidewall spacers, and includes providing a sidewall template having first and second sidewall regions. A spacer layer of a spacer...
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6524914 |
Source side boron implanting and diffusing device architecture for deep sub 0.18 micron flash memory
One aspect of the present invention relates to a method of making a flash memory cell involving the steps of providing a substrate having a flash memory cell thereon; forming a self-aligned source...
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6518138 |
Method of forming Self-aligned lateral DMOS with spacer drift region
An LDMOS transistor formed in an N-type substrate. A polysilicon gate is formed atop the N-type substrate. A P-type well is formed in the N-type substrate extending from the source side to under...
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6514829 |
Method of fabricating abrupt source/drain junctions
A method of fabricating an integrated circuit forming abrupt source/drain junctions. The process can be utilized for P-channel or N-channel metal oxide field semiconductor effect transistors...
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6509237 |
Flash memory cell fabrication sequence
An abrupt drain junction and a graded source junction are fabricated using a common diffusion step, wherein the common diffusion step is used to create both the drain junction-and the source...
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6506648 |
Method of fabricating a high power RF field effect transistor with reduced hot electron injection and resulting structure
Methods of fabricating a high power RF lateral diffused MOS transistor (LDMOS) having increased reliability includes fabricating an N-drift region for the drain prior to fabrication of the gate...
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6506649 |
Method for forming notch gate having self-aligned raised source/drain structure
An innovative MOSFET having a raised source drain (RSD) is constructed prior to implanting source-drain dopants. The RSD structure thus built has a distinct advantage in that the offset from the...
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6506642 |
Removable spacer technique
Submicron-dimensioned MOS and/or CMOS transistors are fabricated utilizing a simplified removable sidewall spacer technique, enabling effective tailoring of individual transistors to optimize their...
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6500739 |
Formation of an indium retrograde profile via antimony ion implantation to improve NMOS short channel effect
A method of forming a pocket implant region, to reduce short channel effects (SCE), for narrow channel length, NMOS devices, has been developed. After forming an indium pocket implant region, in...
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