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7445995 |
Flash memory structure and fabrication method thereof
A flash memory structure comprises a semiconductor substrate, a source region, a drain region, a first insulating dielectric layer, a floating gate, a second insulating dielectric layer, and a...
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7445992 |
Method for fabricating cell structure of non-volatile memory device
A cell structure of a non-volatile memory device, which uses a nitride layer as a floating gate spacer, includes a gate stack and a floating gate transistor formed over a semiconductor substrate....
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7443725 |
Floating gate isolation and method of making the same
The present invention relates to a method for forming a set of floating gates which are isolated from each other by means of slits, as well as semiconductor devices using the floating gate. The...
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7442567 |
Method for fabricating transflective liquid crystal display
An exemplary method for fabricating a transflective liquid crystal display is provided. The transflective liquid crystal display includes a substrate ( 200 ) having a transmission region ( 201 )...
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7442605 |
Resistively switching memory
The present invention relates to a reproducible conditioning during the manufacturing of a resistively switching CBRAM memory cell comprising a first electrode and a second electrode with an active...
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7439134 |
Method for process integration of non-volatile memory cell transistors with transistors of another type
A method for making a semiconductor device having non-volatile memory cell transistors and transistors of another type is provided. In the method, a substrate is provided having an NVM region, a...
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7439132 |
Semiconductor device comprising capacitor and method of fabricating the same
A semiconductor device, having a memory cell region and a peripheral circuit region, includes an insulating film, having an upper surface, formed on a major surface of a semiconductor substrate to...
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7439135 |
Self-aligned body contact for a semiconductor-on-insulator trench device and method of fabricating same
A structure and method of forming a body contact for an semiconductor-on-insulator trench device. The method including: forming set of mandrels on a top surface of a substrate, each mandrel of the...
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7439157 |
Isolation trenches for memory devices
A method includes removing a portion of a substrate to define an isolation trench; forming a first dielectric layer on exposed surfaces of the substrate in the trench; forming a second dielectric...
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7439082 |
Conductive memory stack with non-uniform width
A conductive memory stack is provided. The memory stack includes a bottom electrode, a top electrode and a multi-resistive state element that is sandwiched between the electrodes. The bottom...
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7439131 |
Flash memory device having resistivity measurement pattern and method of forming the same
A flash memory device has a resistivity measurement pattern and method of forming the same. A trench is formed in an isolation film in a Self-Aligned Floating Gate (SAFG) scheme. The trench is...
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7439567 |
Contactless nonvolatile memory array
An array of memory cells with non-volatile memory transistors having a compact arrangement of diagonally symmetric floating gates. The floating gates have portions extending in both X and Y...
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7439125 |
Contact structure for a stack DRAM storage capacitor
A method for fabricating a contact structure for a stack storage capacitor includes forming the contact structure in a node contact region with contact openings, an insulating liner and a...
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7435647 |
NOR-type flash memory device and manufacturing method thereof
A flash memory device that has a structure capable of preventing gate stack damage, and a method of manufacturing the same, is presented. The method includes forming a first photo resist pattern to...
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7435646 |
Method for forming floating gates within NVM process
A semiconductor process and apparatus includes forming a semiconductor device by depositing a layer of nitride ( 20 ) over a semiconductor structure ( 10 ), patterning and etching the nitride layer...
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7436019 |
Non-volatile memory cells shaped to increase coupling to word lines
A non-volatile memory array has word lines coupled to floating gates, the floating gates having an upper portion that is adapted to provide increased surface area, and thereby, to provide increased...
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7435645 |
Dynamic random access memory (DRAM)
A dynamic random access memory (DRAM) includes a substrate, an active device and a deep trench capacitor. A trench and a deep trench are formed in the substrate. The active device is disposed on...
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7435648 |
Methods of trench and contact formation in memory cells
Methods of contact formation and memory arrays formed using such methods, which methods include providing a memory array having a plurality of bit lines disposed below a surface of a semiconductor...
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RE40532 |
Non-volatile memory cell and fabrication method
Memory cell transistors with back-channel isolation are produced without using an SOI substrate. With the word line stack acting as a mask, the semiconductor material is etched on both sides of the...
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7432153 |
Direct tunneling semiconductor memory device and fabrication process thereof
A direct-tunneling semiconductor memory device includes a device isolation structure formed on a semiconductor substrate, including a device isolation trench and a device isolation insulation film...
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7429511 |
Method of forming a tunneling insulating layer in nonvolatile memory device
A method of forming a tunneling insulating layer having a size smaller than the size obtained by the resolution of a photolithography process is provided. The method includes the steps of forming a...
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7429766 |
Split gate type nonvolatile memory device
In a split gate type nonvolatile memory device, a supplementary layer pattern is disposed on a source region of a semiconductor substrate. Since the source region is vertically extended by virtue...
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7429512 |
Method for fabricating flash memory device
A method of fabricating a flash memory device. A DDD ion is implanted into a high voltage PMOS transistor and into source and drain junctions of a cell transistor in order to facilitate a pinch-off...
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7427533 |
Methods of fabricating semiconductor devices including trench device isolation layers having protective insulating layers and related devices
A method of fabricating a semiconductor device includes forming an active region including opposing sidewalls and a surface therebetween protruding from a substrate. A protective insulating layer...
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7427546 |
Transistor device and method for manufacturing the same
A transistor device includes a recess in a surface of semiconductor substrate, a gate insulation layer formed over an inner side of the recess, a gate conductor filling the recess in which the gate...
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7427537 |
Semiconductor integrated circuit device and method for manufacturing the same
In a semiconductor integrated circuit device having a system-on-chip structure in which a DRAM and a logic integrated circuit are mixedly mounted on a chip, a silicide layer is formed on the...
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7425482 |
Non-volatile memory device and method for fabricating the same
A non-volatile memory device and a method for fabricating the same are provided. The method includes: forming a plurality of gate structures on a substrate, each gate structure including a first...
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7423312 |
Apparatus and method for a memory array with shallow trench isolation regions between bit lines for increased process margins
The present invention provides an apparatus and method for a non-volatile memory comprising at least one array of memory cells with shallow trench isolation (STI) regions between bit lines for...
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7422939 |
Semiconductor device having one-time programmable ROM and method of fabricating the same
A semiconductor device with a one-time programmable (OTP) ROM disposed over a semiconductor substrate including a memory cell area and a peripheral circuit area includes a MOS transistor and an OTP...
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7422932 |
Nonvolatile semiconductor memory device
A nonvolatile semiconductor memory device includes a semiconductor substrate, a memory cell region which is disposed on the semiconductor substrate and has a transistor array of a stacked gate...
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7419869 |
Semiconductor device and a method for manufacturing the same
Provided is a manufacturing method of a semiconductor device which has the following steps of forming a plurality of layered patterns obtained by stacking an insulating film, a conductor film for...
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7419888 |
Method of forming a silicon-rich nanocrystalline structure by an atomic layer deposition process and method of manufacturing a non-volatile semiconductor device using the same
In a method of forming a silicon-rich nanocrystalline structure by an ALD process, a first gas including a first silicon compound is provided onto an object to form a silicon-rich chemisorption...
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7419875 |
Shallow trench isolation in floating gate devices
The present invention provides a method for manufacturing a floating gate type semiconductor device on a substrate having a surface ( 2 ), and a device thus manufactured. The method...
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7416935 |
Method of manufacturing nonvolatile semiconductor memory device having adjacent selection transistors connected together
A method of manufacturing a nonvolatile semiconductor memory device, including forming a gate insulating film, a first conductive layer providing floating gates and a mask, in that order, on a...
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7416941 |
Four-bit finfet NVRAM memory device
A four-bit FinFET memory cell, a method of fabricating a four-bit FinFET memory cell and an NVRAM formed of four-bit FINFET memory cells. The four-bit memory cell including two charge storage...
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7416945 |
Method for forming a split gate memory device
A method forms a split gate memory device. A layer of select gate material over a substrate is patterned to form a first sidewall. A sacrificial spacer is formed adjacent to the first sidewall....
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7416940 |
Methods for fabricating flash memory devices
Methods for fabricating a flash memory device are provided. A method comprises forming a plurality of gate stacks overlying a substrate. Each gate stack comprises a charge trapping layer and a...
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7416939 |
Conductive spacers extended floating gates
A method for manufacturing on a substrate ( 24 ) a semiconductor device with improved floating-gate to control-gate coupling ratio is described. The method comprises the steps of first forming an...
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7413953 |
Method of forming floating gate array of flash memory device
The method of forming a floating gate array of a flash memory device includes: (a) sequentially forming a tunnel oxide film, a floating gate forming film, a capping oxide film and a first nitride...
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7414281 |
Flash memory with high-K dielectric material between substrate and gate
A flash memory cell and a method of forming the same are described. The flash memory cell may include a substrate having a source and a drain, a gate element, and a dielectric layer between the...
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7413947 |
Integrated high voltage capacitor having a top-level dielectric layer and a method of manufacture therefor
The present invention provides an integrated high voltage capacitor, a method of manufacture therefore, and an integrated circuit chip including the same. The integrated high voltage capacitor,...
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7410870 |
Methods of forming non-volatile memory devices and devices formed thereby
Methods of forming non-volatile memory devices include steps to define features that enhance shielding of electronic interference between adjacent floating gate electrodes and improve leakage...
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7410871 |
Split gate type flash memory device and method for manufacturing same
A split gate type flash memory device and a method of manufacturing the split gate type flash memory device are disclosed. The split gate type flash memory device includes a silicon epitaxial layer...
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7410869 |
Method of manufacturing a semiconductor device
In a method of manufacturing a semiconductor device such as a flash memory device, an insulating pattern having an opening is formed to partially expose a surface of a substrate. A first silicon...
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7411239 |
Nand flash memory devices and methods of fabricating the same
A NAND includes a device isolation pattern disposed in a region of a substrate defining a plurality of active regions. Memory transistors having memory gate patterns, constituting a cell string,...
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7410868 |
Method for fabricating a nonvolatile memory element and a nonvolatile memory element
In a method for fabricating a nonvolatile memory element a substrate is provided, a nanomask structure is fabricated on the substrate and a self-assembled monolayer of an organic memory molecule is...
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7408220 |
Non-volatile memory and fabricating method thereof
A method of fabricating a non-volatile memory is provided. A plurality of columns of isolation structures are formed on a substrate. A plurality of rows of stacked gate structures crossing over the...
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7407855 |
Method of producing semiconductor element and nonvolatile semiconductor memory produced by this method
In a first embodiment, Tetraethyl Orthosilicate Si(OC2H5)4 is used at the process temperature of 650° C.±5° C. as film forming material, to decrease crystal defects occurring during deposition....
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7407856 |
Method of manufacturing a memory device
A method of manufacturing a memory device includes defining a field region and an active region in a substrate, forming a field oxide layer on the field region, forming an insulating layer on the...
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7407857 |
Method of making a scalable flash EEPROM memory cell with notched floating gate and graded source region
An memory device, and method of making same, that includes source and drain regions defining a channel region therebetween. A select gate is formed over and insulated from a first portion of the...
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