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7611945 |
Method and resulting structure for fabricating DRAM capacitor structure
A method for forming a capacitor structure for a dynamic random access memory device. The method includes forming a device layer overlying a semiconductor substrate, e.g., silicon wafer. The method...
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7592220 |
Capacitance process using passivation film scheme
In accordance with the objectives of the invention a new method and structure is provided for the creation of a capacitor. A contact pad and a lower capacitor plate have been provided over a...
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7585723 |
Method for fabricating capacitor
A method for fabricating a semiconductor device includes forming an insulation structure over a substrate structure including contact plugs, etching the insulation structure to form opening regions...
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7579235 |
Container capacitor structure and method of formation thereof
Disclosed is a container capacitor structure and method of constructing it. An etch mask and etch are used to expose portions of an exterior surface of electrode (“bottom electrodes”) of the...
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7566611 |
Manufacturing method for an integrated semiconductor structure
The present invention provides a manufacturing method for an integrated semiconductor structure comprising the steps of providing a semiconductor substrate having a plurality of gate stacks in a...
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7557015 |
Methods of forming pluralities of capacitors
The invention includes methods of forming pluralities of capacitors. In one implementation, a method of forming a plurality of capacitors includes providing a plurality of capacitor electrodes...
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7541254 |
Method of manufacturing thin film capacitor
A first electrode layer having protrusions and depressions on its surface are formed on a lower insulating layer on a semiconductor substrate, and a sacrificial layer is formed on the first...
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7514320 |
Semiconductor device having increased capacitance of capacitor for data storage and method of manufacturing semiconductor device
A semiconductor device of the present invention comprises a memory cell area having memory cells arranged in an array form, each of which includes a capacitor for storing data and a peripheral...
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7504300 |
Method for fabricating semiconductor memory device having cylinder type storage node
Disclosed is a method for fabricating a semiconductor memory device capable of preventing a bunker defect caused by a pinhole or a crack on a single metal layer used as a storage node. The method...
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7494871 |
Semiconductor memory devices and methods for forming the same
A semiconductor memory device can include select transistors and cell transistors on a semiconductor substrate. An insulation layer covers the select transistors and the cell transistors. The bit...
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7465657 |
Method of manufacturing a semiconductor device having a capacitor
There is provided a semiconductor device that comprises a first impurity diffusion region formed on a silicon substrate (semiconductor substrate), a first interlayer insulating film (first...
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7452769 |
Semiconductor device including an improved capacitor and method for manufacturing the same
In a semiconductor device according to embodiments of the invention, a capacitor includes a storage electrode having a cylindrical storage conductive layer pattern and connecting members formed on...
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7449391 |
Methods of forming plurality of capacitor devices
The invention includes semiconductor constructions, and also includes methods of forming pluralities of capacitor devices. An exemplary method of the invention includes forming conductive storage...
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7449383 |
Method of manufacturing a capacitor and method of manufacturing a dynamic random access memory device using the same
In a method of manufacturing a capacitor and a method of manufacturing a dynamic random access memory device, an insulating layer covering an upper portion of a conductive layer may be provided...
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7435644 |
Method of manufacturing capacitor of semiconductor device
Provided is a method of manufacturing a capacitor of a semiconductor device, which can prevent tilting or an electrical short of a lower electrode. In the method, a mesh-type bridge insulating...
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7416954 |
Enhanced on-chip decoupling capacitors and method of making same
An apparatus including a capacitor formed between metallization layers on a circuit, the capacitor including a bottom electrode coupled to a metal layer and a top electrode coupled to a metal via...
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7413951 |
Stacked capacitor and method for producing stacked capacitors for dynamic memory cells
A method produces stacked capacitors for dynamic memory cells, in which a number of trenches ( 48 ) are formed in the masking layer ( 40 ), each trench ( 48 ) being arranged above a respective...
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7411240 |
Integrated circuits including spacers that extend beneath a conductive line
Integrated circuit devices are fabricated by fabricating a conductive line on an insulating layer on an integrated circuit substrate. The conductive line includes a bottom adjacent the insulating...
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7410866 |
Method for forming storage node of capacitor in semiconductor device
A method for forming a capacitor in a semiconductor device comprises forming an inter-layer layer on a semi-finished substrate; etching the inter-layer insulation layer to form a plurality of first...
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7402486 |
Cylinder-type capacitor and storage device, and method(s) for fabricating the same
A one cylinder storage device and a method for fabricating a capacitor are disclosed, realizing simplified fabrication by overexposure with a mask having a plurality of holes, in which the method...
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7397078 |
Non-volatile semiconductor memory
A non-volatile semiconductor memory comprising at least one EPROM/EEPROM memory cell that includes a floating gate transistor and a coupling capacitor, said floating gate transistor comprising a...
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7393742 |
Semiconductor device having a capacitor and a fabrication method thereof
In a semiconductor device having a capacitor and a method of fabricating the same, the semiconductor device comprises a semiconductor substrate and an insulating layer on the semiconductor...
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7385240 |
Storage cell capacitor compatible with high dielectric constant materials
An integrated circuit structure includes a digit line and an electrode adapted to be part of a storage cell capacitor and includes a barrier layer interposed between a conductive plug and an...
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7371636 |
Method for fabricating storage node contact hole of semiconductor device
A method for fabricating a storage node contact hole of a semiconductor device includes: forming an inter-layer insulation layer over a substrate; forming a hard mask over the inter-layer...
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7364967 |
Methods of forming storage capacitors for semiconductor devices
Methods of forming a storage capacitor include forming an interlayer insulation layer having an opening therethrough on a semiconductor substrate, forming a contact plug in the opening, forming a...
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7361550 |
Methods of fabricating semiconductor memory devices including electrode contact structures having reduced contact resistance
A semiconductor memory device includes a semiconductor substrate having an active region therein, an insulating layer on the substrate, and a lower electrode conductive pad extending through the...
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7338610 |
Etching method for manufacturing semiconductor device
A wafer having a dielectric layer and an electrode partially protruding from the top surface of the dielectric layer is provided. The dielectric layer is etched with a chemical solution such as...
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7335554 |
Method for fabricating semiconductor
A method for fabricating a semiconductor device includes forming a first trench by etching a substrate already provided with a storage node contact (SNC) region and a bit line contact (BLC) region,...
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7329576 |
Double-sided container capacitors using a sacrificial layer
Double-sided container capacitors are formed using sacrificial layers. A sacrificial layer is formed within a recess in a structural layer. A lower electrode is formed within the recess. The...
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7312131 |
Method for forming multilayer electrode capacitor
A method of forming a multilayer electrode capacitor is described. A trench is formed in a substrate or in an insulator layer. Two sets of conductive layers are deposited on the inner surface of...
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7312130 |
Methods of forming capacitor structures including L-shaped cavities
Methods of forming capacitor structures may include forming an insulating layer on a substrate, forming a first capacitor electrode on the insulating layer, forming a capacitor dielectric layer on...
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7312118 |
Semiconductor device and method of manufacturing the same
Disclosed is a semiconductor device comprising a semiconductor substrate, a capacitor structure formed above the semiconductor substrate and comprising a first electrode, a second electrode...
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7309627 |
Method for fabricating a gate mask of a semiconductor device
A nitride layer of the gate mask for the semiconductor device is deposited at a temperature higher than 750 deg. C so as to release hydrogen from the nitride layer. Alternatively, a nitride layer...
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7300841 |
Capacitor and method of manufacturing the same
A capacitor includes a cylindrical storage electrode formed on a substrate. A ring-shaped stabilizing member encloses an upper portion of the storage electrode to structurally support the storage...
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7279383 |
Liquid crystal display device and method of fabricating the same
There is disclosed a liquid crystal display device and a fabricating method thereof that reduce the number of processes and production cost. A liquid crystal display device and a fabricating method...
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7279382 |
Methods of manufacturing semiconductor devices having capacitors
An example method of manufacturing a semiconductor device having a capacitor includes sequentially depositing a lower metal layer, an insulating layer and an upper metal layer on a semiconductor...
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7268058 |
Tri-gate transistors and methods to fabricate same
Embodiments of the invention provide a method for effecting uniform silicon body height for silicon-on-insulator transistor fabrication. For one embodiment, a sacrificial oxide layer is disposed...
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7265013 |
Sidewall image transfer (SIT) technologies
A structure fabrication method. The method comprises providing a structure which comprises (a) a to-be-etched layer, (b) a memory region, (c) a positioning region, (d) and a capping region on top...
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7235452 |
Method for fabricating capacitor in semiconductor device
A method for fabricating a capacitor in a semiconductor device is disclosed. The method comprises the steps of: forming an interlayer insulating film on a semiconductor substrate, which includes a...
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7226837 |
Semiconductor device and method for fabricating the same
A semiconductor device comprises: a lower contact electrode 1 ; an adhesion improving layer 3 formed on the lower contact electrode 1 ; and a capacitor including a lower electrode 4 in a...
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7217618 |
Semiconductor device and method for fabricating the same using damascene process
A semiconductor device and method for fabricating same according to an embodiment of the invention includes: preparing a semiconductor substrate having a first contact pad and a second contact pad;...
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7214584 |
Method for forming semiconductor device capable of preventing bunker defect
Disclosed is a method for preventing a bunker defect generation on a lower portion of a cylinder type metal bottom electrode. The method includes the steps of: forming an etch stop layer on a...
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7183171 |
Pyramid-shaped capacitor structure
A capacitor structure which has generally pyramidal or stepped profile to prevent or reduce dielectric layer breakdown is disclosed. The capacitor structure includes a first conductive layer, at...
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7170127 |
Semiconductor device and fabricating method thereof
The present invention provides a semiconductor device and fabricating method thereof, by which capacitance is enhanced by increasing an effective area of a lower electrode of a capacitor. The...
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7169665 |
Capacitance process by using passivation film scheme
In accordance with the objectives of the invention a new method and structure is provided for the creation of a capacitor. A contact pad and a lower capacitor plate have been provided over a...
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7166537 |
Miniaturized imaging device with integrated circuit connector system
A miniaturized imaging device and method of viewing small luminal cavities are described. The imaging device can be used as part of a catheter, and can include a lens, an SSID including an imaging...
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7161205 |
Semiconductor memory device with cylindrical storage electrode and method of manufacturing the same
There are provided a semiconductor memory device including a cylindrical storage electrode and a method of manufacturing the same. The semiconductor memory device includes an interlevel dielectric...
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7153740 |
Fabrication of lean-free stacked capacitors
For fabricating lean-free stacked capacitors, openings are formed through layers of materials including a layer of support material displaced from a bottom of the openings. A respective first...
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7125766 |
Method of forming capacitor for semiconductor device
A method of forming a capacitor for a semiconductor device is disclosed. According to the method, a silicon germanium layer and an oxide layer are used as mold layers for forming a storage...
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7122420 |
Methods of recessing conductive material and methods of forming capacitor constructions
The invention includes a method of forming spaced conductive regions. A construction is formed which includes a first electrically conductive material over a semiconductor substrate. The...
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