Patents in Class 438/243

Matches 1 - 50 out of 732

Match	Document	Document Title
1	7622351	Method of manufacturing semiconductor device and semiconductor device A method of manufacturing a semiconductor device, includes: forming a first and a second trench regions adjacent from each other in a first conductivity type semiconductor base; forming a second...
2	7615443	Method of forming finFET device The invention discloses a method of forming a finFET device. A hard mask layer is formed on an active area of a semiconductor substrate. A portion of the hard mask layer is etched to form a recess....
3	7611931	Semiconductor structures with body contacts and fabrication methods thereof A semiconductor structure for a dynamic random access memory (DRAM) cell array that includes a plurality of vertical memory cells built on a semiconductor-on-insulator (SOI) wafer and a body...
4	7608881	Thin-film device and method of manufacturing same A thin-film device comprises: a substrate; a flattening film made of an insulating material and disposed on the substrate; and a capacitor provided on the flattening film. The capacitor...
5	7598138	Semiconductor device manufacturing method Provided is a semiconductor device manufacturing method including the steps of: forming an n-type impurity diffusion region by ion-implanting arsenic into a capacitor formation region of a silicon...
6	7595236	Method for production of semiconductor device having a hole extending through a first insulating film, a second insulating film and a third insulating film A short circuit with an adjacent hole is prevented. By enlarging a hole diameter in the lower part of the hole, a stable storage node is formed without causing a decrease in capacitance. Provided...
7	7592216	Fabrication process of a semiconductor device having a capacitor A method of manufacturing a semiconductor device includes forming a first trench in a capacitor device region of a semiconductor substrate, forming a capacitor insulation film over a sidewall...
8	7586142	Semiconductor device having metal-insulator-metal capacitor and method of fabricating the same A semiconductor device having a metal-insulator-metal (MIM) capacitor is provided and can include a lower line formed in a semiconductor substrate; a first interlayer insulating layer formed over...
9	7582525	Method for fabricating capacitor of semiconductor memory device using amorphous carbon A method for fabricating a semiconductor device is provided. The method includes: forming an inter-layer insulation layer on a substrate; forming storage node contact plugs penetrating into the...
10	7579234	Method for fabricating memory device with recess channel MOS transistor A method for fabricating line type recess channel MOS transistors utilizes a lithography process to form line type gate trenches in the line type recess channel MOS transistors before finishing a...
11	7575971	Semiconductor device having a capacitor with a stepped cylindrical structure and method of manufacturing the same According to some embodiments, a capacitor includes a storage conductive pattern, a storage electrode having a complementary member enclosing a storage conductive pattern so as to complement an...
12	7572710	Methods of forming conductive contacts to source/drain regions and methods of forming local interconnects The invention comprises methods of forming a conductive contact to a source/drain region of a field effect transistor, and methods of forming local interconnects. In one implementation, a method of...
13	7572699	Process of forming an electronic device including fins and discontinuous storage elements An electronic device can include a substrate including a fin lying between a first trench and a second trench, wherein the fin is no more than approximately 90 nm wide. The electronic device can...
14	7569451	Method of fabricating an isolation shallow trench A method of fabricating an isolation shallow trench contains providing a substrate with at least a deep trench, forming a cap layer on the upper portion of the deep trench, forming a crust layer on...
15	7569450	Semiconductor capacitors in hot (hybrid orientation technology) substrates A semiconductor structure and a method for forming the same. The semiconductor structure includes a semiconductor substrate. The semiconductor structure further includes an electrically insulating...
16	7566614	Capacitor of semiconductor device and method of fabricating the same Disclosed are a capacitor of a semiconductor device and a method of fabricating the same. The capacitor includes a capacitor top electrode, a capacitor bottom electrode aligned with a bottom...
17	7564114	Semiconductor devices and methods of manufacture thereof Semiconductor devices and methods of manufacture thereof are disclosed. A preferred embodiment comprises a method of forming an insulating material layer. The method includes forming an interface...
18	7564086	Self-aligned, silicided, trench-based DRAM/eDRAM processes with improved retention A DRAM cell in a substrate has a deep trench (DT) extending from a surface of the substrate into the substrate, a word line (WL) formed on the surface of the substrate adjacent the deep trench, and...
19	7563672	Methods of fabricating integrated circuit devices including metal-insulator-metal capacitors Integrated circuit devices including metal-insulator-metal (MIM) capacitors are provided. The MIM capacitors may include an upper electrode having first and second layers. The first layer of the...
20	7563671	Method for forming trench capacitor and memory cell A method for forming a trench capacitor and memory cell by providing a substrate on which a grid STI and a plurality of active regions covered by a hard mask layer are formed. A photoresist is...
21	7563670	Method for etching single-crystal semiconductor selective to amorphous/polycrystalline semiconductor and structure formed by same A method of forming a vertical DRAM device. A lower trench is filled with polycrystalline or amorphous semiconductor for a capacitor. An upper trench portion has exposed sidewalls of single-crystal...
22	7563669	Integrated circuit with a trench capacitor structure and method of manufacture An integrated circuit device having a capacitor structure. In one form of the invention, an integrated circuit device includes a capacitor structure formed along a surface of a semiconductor layer....
23	7557002	Methods of forming transistor devices Some embodiments include formation of at least one cavity in a first semiconductor material, followed by epitaxially growing a second semiconductor material over the first semiconductor material...
24	7550359	Methods involving silicon-on-insulator trench memory with implanted plate A method for fabricating silicon-on-insulator (SOI) trench memory includes forming a trench on a substrate, wherein a buried oxide layer is disposed on the substrate, a SOI layer is disposed on the...
25	7547598	Method for fabricating capacitor in semiconductor device A method for fabricating a capacitor in a semiconductor device includes forming a first insulation layer over a substrate, forming storage node contact plugs in the first insulation layer,...
26	7541656	Semiconductor devices with enlarged recessed gate electrodes A semiconductor device includes a semiconductor substrate having a recess therein. A gate insulator is disposed on the substrate in the recess. The device further includes a gate electrode...
27	7535046	Dielectric memory and manufacturing method thereof As an oxygen diffusion prevention layer, a multilayer film formed by a metal nitride and a noble metal element. As an interlayer insulation film on the oxygen diffusion prevention layer, a plasma...
28	7531406	Method for fabricating an electrical component An electrical component, such as a DRAM semiconductor memory or a field-effect transistor is fabricated. At least one capacitor having a dielectric ( 130 ) and at least one connection electrode (...
29	7528035	Vertical trench memory cell with insulating ring A method of forming a vertical transistor trench memory cell having an insulating ring is provided. The method includes forming a semiconductor material region in an etched portion of a...
30	7525142	Semiconductor device including a conductive layer buried in an opening and method of manufacturing the same A trench capacitor is formed in a semiconductor substrate with a capacitor insulating film. The trench has a conductive layer as storage node electrode buried in a trench. The conductive layer...
31	7510930	Method for fabricating recessed gate MOS transistor device A method of fabricating self-aligned gate trench utilizing trench top oxide (TTO) poly spacer is disclosed. A semiconductor substrate having thereon a pad oxide layer and pad nitride layer is...
32	7494891	Trench capacitor with void-free conductor fill A method forms a node dielectric in a bottle shaped trench and then deposits an initial conductor within the lower portion of the bottle shaped trench, such that a void is formed within the initial...
33	7488642	Process for forming a buried plate A method is provided for making a buried plate region in a semiconductor substrate. According to such method, a trench is a single-crystal semiconductor region of a substrate is etched to form a...
34	7488641	Trench DRAM cell with vertical device and buried word lines A DRAM array having trench capacitor cells of potentially 4F 2 surface area (F being the photolithographic minimum feature width), and a process for fabricating such an array. The array has a...
35	7485921	Trench gate type MOS transistor semiconductor device This semiconductor device comprises a first semiconductor layer of a first conductivity type, an epitaxial layer of a first conductivity type formed in the surface on the first semiconductor layer,...
36	7479424	Method for fabricating an integrated circuit comprising a three-dimensional capacitor A capacitor fabricated, within an integrated circuit, has at least two capacitive trenches extending within a dielectric material. A metal layer is produced which is embedded in the dielectric...
37	7470585	Integrated circuit and fabrication process An integrated circuit has at least one semiconductor device for storing charge that includes at least one elementary active component and at least one elementary storage capacitor. The device...
38	7468323	Method of forming high aspect ratio structures An etching process includes providing a dielectric first film on a substrate and a sacrificial second film on the dielectric first film. A conductive structure such as a container capacitor is...
39	7459365	Method for fabricating a semiconductor component The fabrication of a semiconductor component having a semiconductor body in which is arranged a very thin dielectric layer having sections which run in the vertical direction and which extend very...
40	7449741	SRAM cell structure and manufacturing method thereof A static random access memory (SRAM) cell structure at least comprising a substrate, a transistor, an upper electrode and a capacitor dielectric layer. A device isolation structure is set up in the...
41	7449382	Memory device and fabrication method thereof A memory device is disclosed. A substrate is provided. A plurality of pillars is disposed on the substrate. Each pillar has a plurality of epitaxial layers, has a first sidewall and a second...
42	7449375	Fin semiconductor device and method for fabricating the same A semiconductor device includes second to fourth semiconductor layers, a gate electrode, and an insulating film. The second semiconductor layer is formed on a first semiconductor layer and has a...
43	7445988	Trench memory A trench device and method for fabricating same are provided. The trench device has a collar with a first portion that is doped and a second portion that is undoped. Fabrication of the partially...
44	7445987	Offset vertical device The present invention includes a method for forming a memory array and the memory array produced therefrom. Specifically, the memory array includes at least one first-type memory device, each of...
45	7445985	DRAM memory and method for fabricating a DRAM memory cell A DRAM memory cell arrangement having memory cells each having a trench capacitor and a fin field-effect transistor or FinFET for addressing the trench capacitor. The memory cells are arranged in...
46	7439130	Semiconductor device with capacitor and method for fabricating the same A method of fabricating a semiconductor device having a capacitor is provided. The method includes forming second, third, fourth, and fifth insulating layers on a first conductive layer formed in a...
47	7439128	Method of creating deep trench capacitor using a P+ metal electrode The present invention comprises a method including the steps of providing a substrate; forming a trench in the substrate; forming a buried plate in the substrate about the trench; depositing a...
48	7439112	Semiconductor device using partial SOI substrate and manufacturing method thereof A semiconductor device manufacturing method includes selectively removing portions of a buried oxide layer and first semiconductor layer in an SOI substrate having the first semiconductor layer...
49	7435643	Fabrication method of a dynamic random access memory A dynamic random access memory (DRAM) cell is described, including a semiconductor pillar on a substrate, a capacitor on a lower portion of a sidewall of the pillar, and a vertical transistor on an...
50	7432151	Semiconductor device and method for fabricating the same A method for fabricating a semiconductor device that forms a capacitor and metal interconnection in the same level, simultaneously using a damascene process for forming a metal interconnection. A...

Matches 1 - 50 out of 732

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