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6380045 |
Method of forming asymmetric wells for DRAM cells
A fabrication method for forming asymmetric wells of a DRAM cell, and more particularly to a fabrication method for producing a transistor that is capable of reducing body effect, gate-swing and...
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6380024 |
Method of fabricating an SRAM cell featuring dual silicide gates and four buried contact regions
A process of fabricating an SRAM cell, comprised with four NMOS devices, and two PMOS devices, featuring a dual gate polycide structure, traversing both NMOS and PMOS device regions, and featuring...
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6380578 |
High-speed stacked capacitor in SOI structure
Implemented are a semiconductor device comprising a trench type capacitor having such a structure that a soft error tolerance is excellent, a contact resistance between an electrode and a metal...
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6380025 |
Method of encapsulating a photovoltaic module by an encapsulating material and the photovoltaic module
In the present invention, a diaphragm for pressurizing and heating an encapsulating material is pre-heated to a predetermined temperature before laminating a lamination unit comprising a...
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6376298 |
Layout method for scalable design of the aggressive RAM cells using a poly-cap mask
A method for integrating salicide and self-aligned contact processes in the fabrication of integrated circuits by using a poly cap mask and a special layout technique is described. A pair of gate...
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6372565 |
Method of manufacturing SRAM cell
The present invention discloses a static random access memory cell having a reduced cell size and method of manufacturing the same. According to the invention, the SRAM cell includes: a word line...
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6372639 |
Method for constructing interconnects for sub-micron semiconductor devices and the resulting semiconductor devices
A workpiece and method are provided for forming N polysilicon interconnects coupled to N contact openings in a semiconductor device. The workpiece includes an active area and N potential contact...
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6368908 |
Method of fabricating dynamic random access memory capacitor
A method of fabricating a capacitor includes formation of a stacked layer formed by alternately forming conductive layers and isolation layers and then patterning these layers to form a stacked...
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6365481 |
Isotropic resistor protect etch to aid in residue removal
Various methods of fabricating a circuit structure, such as a gate electrode or a resistor are provided. In one aspect, a method of fabricating a circuit structure is provided that includes forming...
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6365461 |
Method of manufacturing epitaxial wafer
Methods are designed to manufacture an epitaxial wafer wherein the formation of defects in an epitaxial layer is sufficiently suppressed even if the epitaxial wafer is prepared from a silicon...
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6362071 |
Method for forming a semiconductor device with an opening in a dielectric layer
In accordance with one embodiment of the present invention, a method is disclosed for forming a semiconductor device having an isolation region ( 601 ). A dielectric layer ( 108 ) is deposited and...
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6362525 |
Circuit structure including a passive element formed within a grid array substrate and method for making the same
A circuit structure combines an integrated circuit with a passive circuit element formed within a grid-array substrate. Formation of the circuit structure includes forming a passive circuit element...
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6362508 |
Triple layer pre-metal dielectric structure for CMOS memory devices
A CMOS memory device includes source and drain regions diffused into a substrate, a polysilicon gate structure formed over a channel region located between the first and second diffusion regions,...
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6358756 |
Self-aligned, magnetoresistive random-access memory (MRAM) structure utilizing a spacer containment scheme
This invention pertains to a method of fabricating a MRAM structure and the resulting structure. The MRAM structure of the invention has the pinned layer recessed within a trench with the upper...
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6358809 |
Method of modifying properties of deposited thin film material
A method of modifying a layer of thin film composite material to achieve one or more desired properties for the thin film layer which cannot be achieved by heat treatment at all practical...
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6358788 |
Method of fabricating a wordline in a memory array of a semiconductor device
Metal nitride and metal oxynitride extrusions often form on metal silicides. These extrusions can cause short circuits and degrade processing yields. The present invention discloses a method of...
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6355515 |
Wiring structure of semiconductor device and method for manufacturing the same
A wiring structure of a semiconductor device and a method for manufacturing the same are provided. The wiring structure according to the present invention includes a body formed of a conductive...
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6352888 |
Method of fabricating SRAM cell having a field region
A static random access memory (SRAM) cell includes first and second load devices, first and second access transistors, first and second drive transistors, and two bit lines. The SRAM includes a...
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6352868 |
Method and apparatus for wafer level burn-in
A built-in circuit for wafer level burn-in of a die. The burn-in circuit includes a main burn-in control circuit, a word line control circuit and a bit line control circuit. A number of internal...
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6350707 |
Method of fabricating capacitor dielectric
The present invention provides a method of fabricating capacitor dielectric layer. A bottom electrode covered by a native oxide layer on a chip is provided. The chip is disposed into a low pressure...
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6348370 |
Method to fabricate a self aligned source resistor in embedded flash memory applications
A method for fabricating a semiconductor resistor in embedded FLASH memory applications is described. In the method a gate array ( 9 ) is formed on a semiconductor substrate. Isolations regions (...
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6348391 |
Monolithic inductor with guard rings
An integrated circuit and method of fabrication are disclosed for achieving electrical isolation between a spiral inductor and an underlying silicon substrate using standard semiconductor...
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6348388 |
Process for fabricating a uniform gate oxide of a vertical transistor
A process for fabricating a gate oxide of a vertical transistor. In a first step, a trench is formed in a substrate, the trench extending from a top surface of the substrate and having a trench...
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6344386 |
Method for fabricating semiconductor device including memory cell region and CMOS logic region
A CMOS transistor and a memory cell transistor are formed without causing deterioration to reliability and performance. A step of covering a memory cell region with an HTO film and forming...
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6338993 |
Method to fabricate embedded DRAM with salicide logic cell structure
A method for forming salicide on the peripheral logic region of the embedded DRAM without using a salicide block mask layer to protect the memory cell region of the embedded DRAM and without oxide...
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6338994 |
Semiconductor device and method of fabricating thereof
A semiconductor device having a bottom electrode, a ferroelectric film, and a top electrode formed on a semiconductor substrate, wherein the angle of each of the main cross sectional sides of the...
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6339024 |
Reinforced integrated circuits
A method of manufacturing integrated circuits wherein a conductive structure in a topmost semiconductive layer of an integrated circuit is provided having a thickness greater than or equal to 1.5...
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6335237 |
Methods of forming capacitor and bitline structures
The invention encompasses a method of forming bitlines. A substrate is provided, and comprises a plurality of spaced electrical nodes. A bitline layer is formed over at least some of the spaced...
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6333219 |
Method for forming a polysilicon node in a semiconductor device
A self-aligned contact hole is formed in a cell area of a semiconductor device, and then a polysilicon layer is formed on both the cell area and a peripheral circuit area. A first etch back process...
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6331455 |
Power rectifier device and method of fabricating power rectifier devices
A power rectifier having low on resistance, mass recovery times and low forward voltage drop. In a preferred embodiment, the present invention provides a power rectifier device employing a vertical...
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6329235 |
Method of performing a pocket implantation on a MOS transistor of a memory cell of a DRAM
This invention provides a method of performing a pocket implantation on a MOS transistor of a memory cell of a DRAM. The DRAM on a predetermined area of a semiconductor wafer comprises memory cells...
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6329236 |
Method for fabricating resistive load static random access memory device
A method for fabricating a resistive load static random access memory (SRAM) capable of providing a high resistive load without local resistance variation, includes a step of forming an isolated...
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6326256 |
Method of producing a laser trimmable thin film resistor in an integrated circuit
A thin film resistor processing flow solves the problem of accurately incorporating the resistor (80) to be trimmed in an optimized multilayer stack (60,70). This is achieved by measuring the total...
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6326257 |
Method of fabricating static random access memory with spacers
A method of fabricating a static random access memory. A stacked gate is formed on a substrate. A lightly doped drain region and a lightly doped source region are formed in the substrate. A thin...
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6323143 |
Method for making silicon nitride-oxide ultra-thin gate insulating layers for submicrometer field effect transistors
A method for making an improved ultra-thin silicon nitride-oxide gate insulating layer for field effect transistors (FETs) is achieved. After forming a field oxide to electrically isolate device...
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6323512 |
Nonvolatile ferroelectric capacitor and nonvolatile ferroelectric memory
A nonvolatile ferroelectric capacitor comprising Bi 4 -x A x Ti 3 O 12 thin film which is obtained by substituting at least some atoms of nonvolatile element A such as La for volatile Bi atoms...
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6323080 |
Conductive electrical contacts, capacitors, DRAMs, and integrated circuitry, and methods of forming conductive electrical contacts, capacitors, DRAMs, and integrated circuitry
The invention encompasses DRAM constructions, capacitor constructions, conductive contacts, integrated circuitry, methods of forming DRAM constructions, and methods of forming capacitor...
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6323127 |
Capacitor formed with Pt electrodes having a 3D cup-like shape with roughened inner and outer surfaces
A noble metal electrode structure having a cup-like, approximately cylindrical shape, roughened inner and outer surfaces, and a surface area of at least 1 sq. micron or greater is provided as well...
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6323079 |
Method for manufacturing a semiconductor device
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6319800 |
Static memory cell
A static memory cell is described which has cross coupled pulldown transistors and dual access transistors. The memory cell is fabricated such that balanced current paths are formed through the two...
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6316275 |
Method for fabricating a semiconductor component
In a method for fabricating a semiconductor component, a first oxide layer is produced above a substrate. A capacitor is formed above the first oxide layer. The capacitor includes a bottom...
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6313492 |
Integrated circuit chip produced by using frequency doubling hybrid photoresist
A photoresist composition is disclosed having both negative tone and positive tone responses, giving rise to spaces being formed in the areas of diffraction which are exposed to intermediate...
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6312983 |
Etching method for reducing bit line coupling in a DRAM
A method for forming a bit line of a DRAM memory array is disclosed. The method comprises the steps of: forming an interlayer dielectric over the DRAM memory array; etching the interlayer...
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6312982 |
Method of fabricating a trench capacitor
This invention provides a semiconductor device by which a high-speed DRAM cell and logic circuit can be obtained without increasing the number of fabrication steps, and a method of fabricating the...
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6309922 |
Method for fabrication of on-chip inductors and related structure
Method for fabrication of on-chip inductors and related structure are disclosed. According to one embodiment, inductors are formed by patterning conductors within a certain dielectric layer in a...
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6309930 |
SRAM cell arrangement and method for manufacturing same
The SRAM cell arrangement comprises six MOS transistors per memory cell that are fashioned as vertical transistors. The MOS transistors are arranged at sidewalls of trenches (G1, G2, G4). Parts of...
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6306703 |
Memory array having a digit line buried in an isolation region and method for forming same
A memory array includes a semiconductor substrate, an isolation trench disposed in the substrate, and a conductor that is disposed in the trench. The array also includes a memory cell that is...
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6306718 |
Method of making polysilicon resistor having adjustable temperature coefficients
A polysilicon resistor is formed using a late implant process. Low dopant concentrations on the order of 6×10 19 to 3.75×10 20 have shown good results. with a reduced post anneal temperature....
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6306704 |
Nonvolatile ferroelectric memory
A nonvolatile ferroelectric memory comprising a main memory cell blocks including first and second wordlines, a first cell transistor whose gate is connected to the first wordline and one electrode...
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6303422 |
Semiconductor memory and manufacturing method thereof
A semiconductor memory in which a layout margin at the contact hole between wiring layers of a SRAM does not need and the wiring capacity at bit lines is reduced and the high speed processing is...
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