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7615437 |
Non-volatile memory device and method of manufacturing the same
A method of manufacturing a non-volatile memory device includes sequentially depositing a first insulation layer, a charge storage layer, and a second insulation layer on a substrate, forming a...
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7615436 |
Two mask floating gate EEPROM and method of making
There is provided a floating gate transistor, such as an EEPROM transistor, and method of making the transistor using two masking steps. The method of making a transistor includes patterning a...
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7612401 |
Non-volatile memory cell
A semiconductor device comprises a semiconductor substrate, and a non-volatile memory cell provided on the semiconductor substrate, the non-volatile memory cell comprising a tunnel insulating film...
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7611941 |
Method for manufacturing a memory cell arrangement
In an embodiment of the invention, a method for manufacturing a memory cell arrangement includes forming a charge storing memory cell layer stack over a substrate; forming first and second select...
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7605430 |
Nonvolatile memory devices having a fin shaped active region and methods of fabricating the same
A nonvolatile memory device includes a semiconductor substrate and a device isolation layer on the semiconductor substrate. A fin-shaped active region is formed between portions of the device...
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7601581 |
Method of manufacturing a semiconductor device
Provided is a manufacturing method of a semiconductor device, which comprises forming a film stack of a gate insulating film, a charge storage film, insulating film, polysilicon film, silicon oxide...
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7598561 |
NOR flash memory
Semiconductor memory array and process of fabrication in which a plurality of bit line diffusions are formed in a substrate, and memory cells formed in pairs between the bit line diffusions, with...
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7598141 |
Method of fabricating static random access memory
A method of fabricating a static random access memory device includes selectively removing an insulating film and growing a single crystalline silicon layer using selective epitaxy growth, the...
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7598136 |
Image sensor and related fabrication method
An image sensor comprising a transfer gate electrode having a uniform impurity doping distribution is provided. The image sensor further comprises a semiconductor substrate comprising a pixel area,...
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7595522 |
Nonvolatile semiconductor memory
According to the invention, there is provided a nonvolatile semiconductor memory having:
a floating gate electrode formed on a gate insulating film on an element region isolated by an...
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7589371 |
Semiconductor device and fabrication method therefor
The present invention provides semiconductor device and a fabrication method therefor. The semiconductor device includes trenches ( 11 ) formed in a semiconductor substrate ( 10 ), first ONO films...
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7588986 |
Method of manufacturing a semiconductor device
According to an exemplary embodiment of the present invention, a method of manufacturing a semiconductor device having active regions including a SONOS device region, a high voltage device region,...
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7588983 |
EEPROM cell and EEPROM device with high integration and low source resistance and method of manufacturing the same
Provided are an EEPROM cell, an EEPROM device, and methods of manufacturing the EEPROM cell and the EEPROM device. The EEPROM cell is formed on a substrate including a first region and a second...
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7588979 |
Method of manufacturing a semiconductor integrated circuit using a selective disposable spacer technique and semiconductor integrated circuit manufactured thereby
Methods of manufacturing a semiconductor integrated circuit using selective disposable spacer technology and semiconductor integrated circuits manufactured thereby. The method includes providing a...
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7586144 |
Memory device with high dielectric constant gate dielectrics and metal floating gates
A memory cell transistor includes a high dielectric constant tunnel insulator, a metal floating gate, and a high dielectric constant inter-gate insulator comprising a metal oxide formed over a...
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7585726 |
Nonvolatile semiconductor memory devices and the fabrication process of them
The present invention enables to avoid a reduction in coupling ratio in a nonvolatile semiconductor memory device. The reduction is coupling ratio is caused due to difficulties in batch forming of...
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7572724 |
Doped single crystal silicon silicided eFuse
An eFuse begins with a single crystal silicon-on-insulator (SOI) structure that has a single crystal silicon layer on a first insulator layer. The single crystal silicon layer is patterned into a...
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7564094 |
Non-volatile memory devices and methods of manufacturing the same
Non-volatile memory devices include a tunnel insulating layer on a channel region of a substrate, a charge-trapping layer pattern on the tunnel insulating layer and a first blocking layer pattern...
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7564090 |
Transistor of a semiconductor device
Disclosed are a semiconductor device and a method of manufacturing the same. According to the present invention, the transistor of the semiconductor device comprises a stack type gate in which a...
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7563674 |
Method of manufacturing NAND flash memory device
A method of manufacturing a NAND flash memory device, wherein isolation layers are formed in a semiconductor substrate, and an upper side of each of the isolation layers is made to have a negative...
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7563664 |
Semiconductor memory device equipped with memory transistor and peripheral transistor and method of manufacturing the same
A semiconductor memory device provided with a memory cell region having first gate electrodes and a peripheral circuit region having second gate electrodes includes first gate electrodes arranged a...
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7563662 |
Processes for forming electronic devices including non-volatile memory
A process for forming an electronic device can be performed, such that as little as one gate electric layer may be formed within each region of the electronic device. In one embodiment, the...
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7557402 |
High write and erase efficiency embedded flash cell
An embedded flash cell structure comprising a structure, a first floating gate having an exposed side wall over the structure, a second floating gate having an exposed side wall over the structure...
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7557042 |
Method for making a semiconductor device with reduced spacing
Floating gates are formed in two separate polysilicon depositions steps resulting in distinct portions. The first formed portions are between isolation regions. A thick insulator is formed over the...
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7557004 |
Method for fabricating semiconductor device
The method for fabricating the semiconductor device includes the steps of: forming an insulating film 20 , a conductive film 22 and an insulating film 24 over a semiconductor substrate 10 ...
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7556999 |
Method for fabricating non-volatile memory
A method for fabrication a memory having a memory area and a peripheral area includes forming a first gate insulating layer with a first thickness over a substrate of a first region in the...
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7554150 |
Non-volatile memory device and method of manufacturing the same
A non-volatile memory device includes isolation layers, a cell trench, a floating gate, a common source region and a word line. The isolation layers define an active region of a substrate. The cell...
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7553729 |
Method of manufacturing non-volatile memory device
A method of manufacturing a non-volatile memory device includes the steps of forming gates respectively having a structure in which a gate insulating layer, a first conductive layer, a dielectric...
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7553720 |
Non-volatile memory device and fabrication method thereof
A non-volatile memory device includes a buffer oxide film on a substrate; a polysilicon layer on the buffer oxide film; a silicon oxy-nitride (SiON) layer on the polysilicon layer, a first...
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7553719 |
Flash memory device and method for fabricating the same
A flash memory device includes a source region formed in an active region of a semiconductor substrate; a recessed region formed in the active region on either side of the source region, the...
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7550353 |
Method of forming semiconductor device
One embodiment of a method for forming a semiconductor device can include forming a gate pattern on a semiconductor substrate and performing a selective re-oxidation process on the gate pattern in...
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7550350 |
Methods of forming flash memory device
The present disclosure relates to methods of forming a flash memory device. A plurality of cells, a plurality of select transistors, and a transistor are formed over a semiconductor substrate...
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7550339 |
Memory device with high dielectric constant gate dielectrics and metal floating gates
A memory cell transistor includes a high dielectric constant tunnel insulator, a metal floating gate, and a high dielectric constant inter-gate insulator comprising a metal oxide formed over a...
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7544989 |
High density stepped, non-planar flash memory
A first plurality of memory cells is in a first plane in a first column of the array. A second plurality of memory cells is in a second plane in the same column. The second plurality of memory...
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7544558 |
Method for integrating DMOS into sub-micron CMOS process
This invention is forming the DMOS channel after CMOS active layer before gate poly layer to make the modular DMOS process step easily adding into the sub-micron CMOS or BiCMOS process. And DMOS...
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7541637 |
Non-volatile semiconductor memory element and corresponding production and operation method
The invention relates to a nonvolatile semiconductor storage element and an associated production and control method, the storage element includes a semiconductor substrate having a source region,...
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7541237 |
Non-volatile memory cell array having discontinuous source and drain diffusions contacted by continuous bit line conductors and methods of forming
Rows of memory cells are electrically isolated from one another by trenches formed in the substrate between the rows that are filled with a dielectric, commonly called “shallow trench...
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7534690 |
Non-volatile memory with asymmetrical doping profile
Stacked gate structures for a NAND string are created on a substrate. Source implantations are performed at a first implantation angle to areas between the stacked gate structures. Drain...
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7534682 |
Semiconductor memory device with a stacked gate including a floating gate and a control gate and method of manufacturing the same
A semiconductor memory device includes first and second MOS transistors. The first MOS transistor is formed on a region enclosed by a first element isolating region and includes a first gate...
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7534625 |
Phase change memory with damascene memory element
A phase change material may be formed within a trench in a first layer to form a damascene memory element and in an overlying layer to form a threshold device. Below the first layer may be a wall...
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7531405 |
Method of manufacturing a dielectric layer and corresponding semiconductor device
A polycrystalline dielectric layer is formed wherein the dielectric layer comprises a first dielectric material containing an oxide or nitride and a second material contributing to less than 1% in...
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7531403 |
SOI semiconductor components and methods for their fabrication
SOI semiconductor components and methods for their fabrication are provided wherein the SOI semiconductor components include an MOS transistor in the supporting semiconductor substrate. In...
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7517762 |
Semiconductor device capable of preventing moisture-absorption of fuse area thereof and method for manufacturing the fuse area
A fuse area of a semiconductor device capable of preventing moisture-absorption and a method for manufacturing the fuse area are provided. When forming a guard ring for preventing permeation of...
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7517747 |
Nanocrystal non-volatile memory cell and method therefor
A method of forming a semiconductor device includes forming a first dielectric layer over a semiconductor substrate, forming a plurality of discrete storage elements over the first dielectric...
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7514734 |
Hardmask for forming ferroelectric capacitors in a semiconductor device and methods for fabricating the same
Hardmasks and fabrication methods are presented for producing ferroelectric capacitors in a semiconductor device, wherein a hardmask comprising aluminum oxide or strontium tantalum oxide is formed...
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7514311 |
Method of manufacturing a SONOS memory
A method of manufacturing a silicon-oxide-nitride-oxide-silicon (SONOS) memory is provided herein. In the method, a bottom silicon oxide layer is formed over a substrate. A patterned mask layer...
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7510931 |
Method of fabricating a nonvolatile memory device
A method of fabricating a nonvolatile memory device includes forming a charge tunneling layer on a semiconductor substrate, forming a charge trapping layer on the charge tunneling layer, forming a...
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7504294 |
Method of manufacturing an electrically erasable programmable read-only memory (EEPROM)
A semiconductor device comprises a memory cell array portion and peripheral circuit portion, wherein a first insulation film including elements as main components other than nitrogen fills between...
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7501319 |
Manufacturing a semiconductor device including sidewall floating gates
A semiconductor device and a fabricating method thereof are disclosed. The semiconductor device includes polysilicon gate electrodes, a gate oxide layer, sidewall floating gates, a block oxide...
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7498217 |
Methods of manufacturing semiconductor memory devices with unit cells having charge trapping layers
In a method of manufacturing a semiconductor device such as a SONOS type semiconductor device, a trench is formed on a substrate. An isolation layer protruding from the substrate is formed to fill...
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