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8183104 Method for dual-channel nanowire FET device  
An apparatus, system, and method for dual-channel FET devices is presented. In some embodiments, the nanowire FET device may include a first transistor on a substrate, where the first transistor...
8183105 Integrated circuit device with stress reduction layer  
An integrated circuit device is disclosed that includes a dual stress liner NMOS device having a tensile stress layer that overlies a NMOS gate film stack, a dual stress liner PMOS device having a...
8183137 Use of dopants to provide low defect gate full silicidation  
The disclosure provides a semiconductor device and method of manufacture therefore. The method for manufacturing the semiconductor device, in one embodiment, includes forming a layer of gate...
8183118 Method for fabricating MOS transistor  
The invention discloses a method for fabricating a MOS transistor. A substrate having thereon a gate structure is provided. A silicon nitride layer is deposited on the gate structure. A dry etching...
8183640 Method of fabricating transistors and a transistor structure for improving short channel effect and drain induced barrier lowering  
A method of fabricating transistors includes: providing a substrate including an N-type well and P-type well; forming a first gate on the N-type well and a second gate on the P-type well,...
8183641 Semiconductor device and method for manufacturing same  
A silicon oxynitride film is formed on entire surface of a semiconductor substrate, a lanthanum oxide film is formed on the silicon oxynitride film and the lanthanum oxide film is removed from a...
8183642 Gate effective-workfunction modification for CMOS  
CMOS circuit structures are disclosed with the PFET and NFET devices having high-k dielectric layers consisting of the same gate insulator material, and metal gate layers consisting of the same...
8183605 Reducing transistor junction capacitance by recessing drain and source regions  
By recessing portions of the drain and source areas on the basis of a spacer structure, the subsequent implantation process for forming the deep drain and source regions may result in a moderately...
8178402 End functionalization of carbon nanotubes  
Carbon nanotubes may be selectively opened and their exposed ends functionalized. Opposite ends of carbon nanotubes may be functionalized in different fashions to facilitate self-assembly and other...
8178401 Method for fabricating dual-metal gate device  
A method of fabricating a MOS transistor that comprises a dual-metal gate that is formed from heterotypical metals. A gate dielectric (34), such as HfO2, is deposited on a semiconductor substrate....
8178400 Replacement spacer for tunnel FETs  
A semiconductor fabrication method includes depositing a dummy gate layer onto a substrate, patterning the dummy gate layer, depositing a hardmask layer over the dummy gate layer, patterning the...
8178399 Production method for semiconductor device  
An SGT production method includes forming a pillar-shaped first-conductive-type semiconductor layer and forming a second-conductive-type semiconductor layer underneath the first-conductive-type...
8173499 Method of fabricating a gate stack integration of complementary MOS device  
A method of forming an integrated circuit structure includes providing a substrate comprising a first device region and a second device region; forming an oxide cap over the substrate and in the...
8168489 High performance stress-enhanced MOSFETS using Si:C and SiGe epitaxial source/drain and method of manufacture  
A semiconductor device and method of manufacturing a semiconductor device. The semiconductor device includes channels for a pFET and an nFET. A SiGe layer is selectively grown in the source and...
8168491 Method for fabricating dual poly gate in semiconductor device  
A method for fabricating a dual poly gate in a semiconductor device, comprising: forming a gate insulation layer and a polysilicon layer on a semiconductor substrate that defines a first region and...
8168490 Co-packaging approach for power converters based on planar devices, structure and method  
A voltage converter includes an output circuit having a high-side device and a low-side device which can be formed on a single die (a “PowerDie”). The high-side device can include a lateral dif...
8168971 Pseudomorphic Si/SiGe/Si body device with embedded SiGe source/drain  
The invention relates to a semiconductor structure and method of manufacturing and more particularly to a CMOS device with at least one embedded SiGe layer in the source/drain region of the PFET,...
8169033 Semiconductor devices and methods of manufacture thereof  
Methods of forming transistors and structures thereof are disclosed. A preferred embodiment comprises a semiconductor device including a workpiece, a gate dielectric disposed over the workpiece,...
8163607 Semiconductor device and method of making the same  
In a method of the present invention during a salicide process, before a second thermal process, a dopant is implanted at a place located in a region ranging from a NixSi layer at meddle height...
8163605 Production method for semiconductor device  
It is intended to provide an SGT production method capable of obtaining a structure for reducing a resistance of a source, drain and gate, a desired gate length, desired source and drain...
8158473 Method for manufacturing a semiconductor device having a silicide region comprised of a silicide of a nickel alloy  
To provide a semiconductor device which can reduce an electrical resistance between a plug and a silicide region, and a manufacturing method thereof. At least one semiconductor element having a...
8159034 Semiconductor device having insulated gate field effect transistors and method of manufacturing the same  
N-type semiconductor region and P-type semiconductor region are provided in a surface region of a semiconductor substrate. Insulating film and silicon containing film are laminated on the...
8154319 Three-dimensional architecture for integration of CMOS circuits and nano-material in hybrid digital circuits  
A hybrid CMOL stack enables more efficient design of CMOS logical circuits. The hybrid CMOL structure includes a first substrate having a CMOS device layer on the substrate, a first interconnect...
8153498 Downsize polysilicon height for polysilicon resistor integration of replacement gate process  
A semiconductor device and method for fabricating a semiconductor device protecting a resistive structure in gate replacement processing is disclosed. The method comprises providing a semiconductor...
8154055 CMOS image sensor and method for fabricating the same  
A complementary metal-oxide semiconductor (CMOS) image sensor includes a photodiode formed in a substrate structure, first to fourth gate electrodes formed over the substrate structure, spacers...
8148221 Double anneal with improved reliability for dual contact etch stop liner scheme  
A method for forming a device with both PFET and NFET transistors using a PFET compressive etch stop liner and a NFET tensile etch stop liner and two anneals in a deuterium containing atmosphere....
8143119 Method of manufacturing semiconductor device having plural transistors formed in well region and semiconductor device  
A first transistor and a second transistor are formed in a first element formation region, and a third transistor is formed in a second element formation region. The three transistors are of the...
8143082 Wafer bonding of micro-electro mechanical systems to active circuitry  
A single integrated wafer package includes a micro electromechanical system (MEMS) wafer, an active device wafer, and a seal ring. The MEMS wafer has a first surface and includes at least one MEMS...
8138030 Asymmetric finFET device with improved parasitic resistance and capacitance  
A method for forming a fin field effect transistor (finFET) device includes, forming a fin structure in a substrate, forming a gate stack structure perpendicular to the fin structure, and...
8138038 Superior fill conditions in a replacement gate approach by performing a polishing process based on a sacrificial fill material  
In a replacement gate approach, a top area of a gate opening may receive a superior cross-sectional shape after the deposition of a work function adjusting species on the basis of a polishing...
8138055 Semiconductor devices having pFET with SiGe gate electrode and embedded SiGe source/drain regions and methods of making the same  
In a method of making a semiconductor device, a first gate stack is formed on a substrate at a pFET region, which includes a first gate electrode material. The source/drain regions of the substrate...
8138035 Method for forming integrated circuits with aligned (100) NMOS and (110) PMOS FinFET sidewall channels  
A method of forming an integrated circuit device that includes a plurality of multiple gate FinFETs (MuGFETs) is disclosed. Fins of different crystal orientations for PMOS and NMOS MuGFETs are...
8138037 Method and structure for gate height scaling with high-k/metal gate technology  
A method and structure to scale metal gate height in high-k/metal gate transistors. A method includes forming a dummy gate and at least one polysilicon feature, all of which are formed from a same...
8138036 Through silicon via and method of fabricating same  
A through silicon via structure and a method of fabricating the through silicon via. The method includes: (a) forming a trench in a silicon substrate, the trench open to a top surface of the...
8134152 CMOS thin film transistor, method of fabricating the same and organic light emitting display device having laminated PMOS poly-silicon thin film transistor with a top gate configuration and a NMOS oxide thin film transistor with an inverted staggered bottom gate configuration  
A CMOS thin film transistor arrangement including a PMOS poly-silicon thin film transistor having a top gate configuration and a NMOS oxide thin film transistor having an inverted staggered bottom...
8133777 Method of fabricating memory  
A method of fabricating a memory is provided. A substrate including a memory region and a periphery region is provided. A plurality of gates each having spacers is formed on the substrate. A...
RE43229 Method for manufacturing semiconductor device, including multiple heat treatment  
A semiconductor device manufacturing method having forming first and second insulating gate portions spaced from each other on a semiconductor substrate, selectively implanting the first...
8119473 High temperature anneal for aluminum surface protection  
The present disclosure also provides another embodiment of a method for making metal gate stacks. The method includes forming a first dummy gate and a second dummy gate on a substrate; removing a...
8119474 High performance capacitors in planar back gates CMOS  
A method of manufacture and device for a dual-gate CMOS structure. The structure includes a first plate in an insulating layer and a second plate above the insulating layer electrically...
8119472 Silicon device on Si:C SOI and SiGe and method of manufacture  
A semiconductor structure and method of manufacturing is provided. The method of manufacturing includes forming shallow trench isolation (STI) in a substrate and providing a first material and a...
8120118 Semiconductor device and manufacturing method of the same  
Provided is a highly reliable semiconductor device equipped with a plurality of semiconductor elements having desired properties, respectively; and a manufacturing method facilitating the...
8114722 Manufacturing method of semiconductor device  
To suppress generation of dangling bonds, the present invention relates to a method for manufacturing a semiconductor device including the steps of: forming a semiconductor film; forming a gate...
8114696 CMOS image sensor with asymmetric well structure of source follower  
Provided is a CMOS image sensor with an asymmetric well structure of a source follower. The CMOS image sensor includes: a well disposed in an active region of a substrate; a drive transistor having...
8114784 Laminated stress overlayer using In-situ multiple plasma treatments for transistor improvement  
Integrated circuits (ICs) commonly contain pre-metal dielectric (PMD) liners with compressive stress to increase electron and hole mobilities in MOS transistors. The increase is limited by the...
8115256 Semiconductor device  
A semiconductor device includes an inverter having an NMOSFET and a PMOSFET having sources, drains and gate electrodes respectively, the drains being connected to each other and the gate electrodes...
8114684 Vertical hall effect sensor with current focus  
A complementary metal oxide semiconductor (CMOS) sensor system in one embodiment includes a doped substrate, a doped central island extending downwardly within the doped substrate from an upper...
8114727 Disposable spacer integration with stress memorization technique and silicon-germanium  
An integrated process flow for forming an NMOS transistor (104) and an embedded SiGe (eSiGe) PMOS transistor (102) using a stress memorization technique (SMT) layer (126). The SMT layer (126) is...
8114728 Integration scheme for an NMOS metal gate  
A method for making an NMOS transistor on a semiconductor substrate includes reducing the thickness of the PMD layer to expose the polysilicon gate electrode of the NMOS transistor and the...
8116121 Semiconductor device and manufacturing methods with using non-planar type of transistors  
Static random access memory cells and methods of making static random access memory cells are provided. The static random access memory cells contain two non-planar pass-gate transistors, two...
8114741 Oxygen-rich layers underlying BPSG  
An integrated circuit structure and a method of forming the same are provided. The method includes providing a surface; performing an ionized oxygen treatment to the surface; forming an initial...