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7622344 |
Method of manufacturing complementary metal oxide semiconductor transistors
A method for manufacturing CMOS transistors includes an etching back process alternatively performed after the gate structure formation, the lightly doped drain formation, source/drain...
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7622342 |
Method of fabricating back-illuminated imaging sensors
A method for fabricating a back-illuminated semiconductor imaging device on a semiconductor-on-insulator substrate, and resulting imaging device is disclosed. A substrate which includes an...
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7622341 |
Sige channel epitaxial development for high-k PFET manufacturability
A method for growing an epitaxial layer patterns a mask over a substrate. The mask protects first areas (N-type areas) of the substrate where N-type field effect transistors (NFETs) are to be...
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7622340 |
Method for manufacturing semiconductor device
A method for manufacturing a semiconductor device includes doping a surface of a silicon-containing dielectric film with nitrogen to change an etching rate of the silicon-containing dielectric film...
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7619262 |
Method and device for electrostatic discharge protection
Electrostatic discharge (ESD) protection is provided for an integrated circuit. In an aspect, a dynamic region having doped regions is formed on an epitaxy layer and substrate, and interconnects...
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7619239 |
Semiconductor device and method of manufacturing the same
A semiconductor device includes an n-channel MIS transistor and a p-channel MIS transistor on a semiconductor layer formed on an insulating layer, in which the channel of the n-channel MIS...
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7618855 |
Manufacturing method of semiconductor device
A technology capable of improving the yield in a manufacturing process of a MISFET with a gate electrode formed of a metal silicide film. A gate insulating film is formed on a semiconductor...
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7618854 |
High frequency MOS transistor, method of forming the same, and method of manufacturing a semiconductor device including the same
In a high frequency LDMOS transistor, a gate structure is formed on a substrate. A drain, doped with first type impurities at a first concentration, is formed on the substrate spaced apart from the...
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7616120 |
Multiple RF-port modulator for RFID tag
Apparatus and systems may include integrated circuits for use with Radio Frequency Identification (RFID) tags having an antenna structure with at least three coupling ends. The integrated circuits...
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7615806 |
Method for forming a semiconductor structure and structure thereof
Forming a semiconductor structure includes providing a substrate having a strained semiconductor layer overlying an insulating layer, providing a first device region for forming a first plurality...
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7615435 |
Semiconductor device and method of manufacture
A semiconductor device and method of manufacture and, more particularly, a semiconductor device having strain films and a method of manufacture. The device includes an embedded SiGeC layer in...
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7615434 |
CMOS device and fabricating method thereof
A CMOS device is provided, comprising a substrate, a first-type MOS transistor, a second-type MOS transistor, a first stress layer, a first liner layer, and a second stress layer. The substrate has...
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7615433 |
Double anneal with improved reliability for dual contact etch stop liner scheme
A method for forming a device with both PFET and NFET transistors using a PFET compressive etch stop liner and a NFET tensile etch stop liner and two anneals in a deuterium containing atmosphere....
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7615432 |
HDP/PECVD methods of fabricating stress nitride structures for field effect transistors
A stress nitride structure is formed on an integrated circuit field effect transistor by high density plasma (HDP) depositing a first stress nitride layer on the integrated circuit field effect...
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7615431 |
Manufacturing method of semiconductor device
Before applying a resist on a first gate insulating film, a thinner is provided on an entire surface including a surface of the first gate insulating film to wash the surface of the first gate...
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7615430 |
Field effect transistor and method of manufacturing a field effect transistor
The invention relates to a method of manufacturing a field effect transistor, in which a semiconductor body of silicon is provided at a surface thereof with a source region and a drain region of a...
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7615427 |
Spacer-less low-k dielectric processes
A first example embodiment provides a method of removing first spacers from gates and incorporating a low-k material into the ILD layer to increase device performance. A second example embodiment...
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7615402 |
Electrostatically operated tunneling transistor
A transistor operated by changing the electrostatic potential of an island disposed between two tunnel junctions. The transistor has an island of material which has a band gap (e.g. semiconductor...
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7611951 |
Method of fabricating MOS transistor having epitaxial region
Example embodiments relate to a method of manufacturing a semiconductor device. Other example embodiments relate to a method of manufacturing a metal-oxide-semiconductor (MOS) transistor having an...
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7611943 |
Transistors, integrated circuits, systems, and processes of manufacture with improved work function modulation
A process ( 200 ) for making integrated circuits with a gate, uses a doped precursor ( 124, 126 N and/or 126 P) on barrier material ( 118 ) on gate dielectric ( 116 ). The process ( 200 ) involves...
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7611939 |
Semiconductor device manufactured using a laminated stress layer
There is presented a method of forming a semiconductor device. The method comprises forming gate structures including forming gate electrodes over a semiconductor substrate and forming spacers...
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7611938 |
Semiconductor device having high drive current and method of manufacture therefor
A method comprises forming a first semiconductor device in a substrate, where the first semiconductor device comprises a gate structure, a spacer disposed on sidewalls of the gate structure, the...
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7611935 |
Gate straining in a semiconductor device
Gate straining techniques as described herein can be utilized during the fabrication of NMOS transistor devices, PMOS transistor devices, or CMOS device structures. For an NMOS device, conductive...
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7611922 |
Image sensor and method for manufacturing the same
A method for manufacturing an image sensor includes forming first to third photodiodes and first to third color filters corresponding thereto; forming a photoresist film including photosensitive...
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7608501 |
Technique for creating different mechanical strain by forming a contact etch stop layer stack having differently modified intrinsic stress
By partially removing an etch stop layer prior to the formation of a first contact etch stop layer, a superior stress transfer mechanism may be provided in an integration scheme for generating...
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7608499 |
Semiconductor structure comprising field effect transistors with stressed channel regions and method of forming the same
A method of forming a semiconductor structure comprises providing a semiconductor substrate comprising a first transistor element and a second transistor element. Each of the first transistor...
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7608476 |
Electronic device
A technique for high-resolution surface energy assisted patterning of semiconductor active layer islands on top of an array of predefined source-drain electrodes without requiring an additional...
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7605447 |
Highly manufacturable SRAM cells in substrates with hybrid crystal orientation
The present invention relates to a semiconductor device structure that includes at least one SRAM cell formed in a substrate. Such SRAM cell comprises two pull-up transistors, two pull-down...
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7598542 |
SRAM devices and methods of fabricating the same
SRAM devices and methods of fabricating the same are disclosed, by which a process margin and a degree of device integration are enhanced by reducing the number of contact holes of an SRAM device...
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7598540 |
High performance CMOS devices comprising gapped dual stressors with dielectric gap fillers, and methods of fabricating the same
The present invention relates to complementary metal-oxide-semiconductor (CMOS) devices having gapped dual stressors with dielectric gap fillers. Specifically, each CMOS device of the present...
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7598142 |
CMOS device with dual-epi channels and self-aligned contacts
A CMOS device having dual-epi channels comprises a first epitaxial region formed on a substrate, a PMOS device formed on the first epitaxial region, a second epitaxial region formed on the...
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7595234 |
Fabricating method for a metal oxide semiconductor transistor
A method for forming a metal oxide semiconductor (MOS) transistor is provided. First, a gate structure is formed over a substrate. Then, offset spacers are formed on respective sidewalls of the...
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7595233 |
Gate stress engineering for MOSFET
Methods of stressing a channel of a transistor as a result of a material volume change in a gate structure and a related structure are disclosed. In one embodiment, a method includes forming a gate...
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7595231 |
Semiconductor device and its manufacture
In a logic area, impurities are doped into the gate electrode and the source/drain diffusion regions of a MIS transistor. Thereafter in a memory cell area, word lines are patterned, source/drain...
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7595230 |
Thin film transistor, method of manufacturing same, display device, method of modifying an oxide film, method of forming an oxide film, semiconductor device, method of manufacturing semiconductor device, and apparatus for manufacturing semiconductor device
In a manufacturing method of a thin film transistor ( 1 ), the oxide film forming step is performed whereby: a process-target substrate ( 2 ) having a surface on which a gate oxide film ( 4 )...
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7595210 |
Method of manufacturing complementary metal oxide semiconductor image sensor
A method of manufacturing a complementary metal oxide semiconductor (CMOS) image sensor is provided. The method can include the steps of: providing a semiconductor substrate having an active region...
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7592270 |
Modulation of stress in stress film through ion implantation and its application in stress memorization technique
Some example embodiments of the invention provide a method to improve the performance of MOS devices by increasing the stress in the channel region. An example embodiment for a NMOS transistor is...
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7592214 |
Method of manufacturing a semiconductor device including epitaxially growing semiconductor epitaxial layers on a surface of semiconductor substrate
A semiconductor device has a first MOS transistor formed on first active region of the first conductivity type, having first gate electrode structure, first source/drain regions, recesses formed in...
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7589386 |
Semiconductor device and manufacturing method thereof
A semiconductor device including a first field effect transistor having a source, a first conductivity type drain, a gate, and a first conductivity type channel layer formed beneath the gate and...
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7586160 |
Method of manufacturing a semiconductor integrated circuit and semiconductor integrated circuit
A semiconductor integrated circuit is provided in which a CMOS transistor is formed on a first conductivity type semiconductor film provided on a first conductivity type supporting substrate...
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7585720 |
Dual stress liner device and method
A dual stress liner manufacturing method and device is described. Overlapping stress liner layers of opposite effect (e.g., tensile versus compression) may be deposited over portions of the device,...
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7582521 |
Dual metal gates for mugfet device
Exemplary embodiments provide methods and structures for controlling work function values of dual metal gate electrodes for transistor devices. Specifically, the work function value of one of the...
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7579660 |
Semiconductor device and manufacturing method thereof
A semiconductor device includes a substrate including a semiconductor layer at a surface, a gate insulating film disposed on the semiconductor layer, and a gate electrode disposed on the gate...
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7579229 |
Semiconductor device and semiconductor substrate
In order to provide a semiconductor device having a field effect transistor with a low power consumption and a high speed by use of the combination of Si and an element such as Ge, C or the like of...
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7579228 |
Disposable organic spacers
A method for making a semiconductor device is provided, comprising (a) providing a semiconductor structure comprising a first gate electrode ( 210 ); (b) forming a first set of organic spacers (...
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7575969 |
Buried layer and method
A high resistivity silicon for RF passive operation including CMOS structures with implanted CMOS wells and a buried layer under the wells formed by deep implants during well implantations.
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7575968 |
Inverse slope isolation and dual surface orientation integration
A semiconductor process and apparatus provide a high performance CMOS devices ( 108, 109 ) with hybrid or dual substrates by etching a deposited oxide layer ( 62 ) using inverse slope isolation...
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7572692 |
Complementary transistors having different source and drain extension spacing controlled by different spacer sizes
Disclosed is a method of forming an integrated circuit structure having first-type transistors, such as P-type field effect transistors (PFETs) and complementary second-type transistors, such as...
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7572690 |
Method of fabricating CMOS thin film transistor (TFT) and CMOS TFT fabricated using the same
A method of fabricating a CMOS thin film transistor (TFT) and a CMOS TFT fabricated using the method involve provision of a substrate having a first region and a second region. A first...
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7572689 |
Method and structure for reducing induced mechanical stresses
Methods and structures for relieving stresses in stressed semiconductor liners. A stress liner that enhances performance of either an NFET or a PFET is deposited over a semiconductor to cover the...
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