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6486012 |
Semiconductor device having field effect transistors different in thickness of gate electrodes and process of fabrication thereof
An n-channel type field effect transistor and a p-channel type field effect transistor are fabricated on a p-type well and an n-type well, respectively, and the arsenic-doped gate electrode of the...
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6486007 |
Method of fabricating a memory cell for a static random access memory
A method is disclosed for a memory cell for a static random access memory. The memory cell includes a pair of cross-coupled CMOS logic inverters that are connected together to form a latch, and a...
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6479339 |
Use of a thin nitride spacer in a split gate embedded analog process
A mixed voltage CMOS process for high reliability and high performance core transistors and input-output and analog transistors with reduced mask steps. A patterned silicon nitride film 160 is...
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6479350 |
Reduced masking step CMOS transistor formation using removable amorphous silicon sidewall spacers
CMOS semiconductor devices comprising MOS transistors of different channel conductivity type are formed in or on a common semiconductor substrate using a minimum number of critical masks....
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6475844 |
Field effect transistor and method of manufacturing same
A silicided region ( 11 a ) is formed in part of a surface of a gate electrode ( 3 a ) which is far from a storage node when a diffusion region ( 7 a ) is connected to a bit line and a diffusion...
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6472243 |
Method of forming an integrated CMOS capacitive pressure sensor
A capacitive pressure sensor ( 10 ) utilizes a diaphragm ( 38 ) that is formed along with forming gates ( 56,57 ) of active devices on the same semiconductor substrate ( 11 ).
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6468860 |
Integrated circuit capable of operating at two different power supply voltages
A method for manufacturing an integrated circuit having high voltage transistors and low voltage transistors is disclosed. First, lightly doped drains are formed in both high voltage transistors...
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6468848 |
Method of fabricating electrically isolated double gated transistor
A gated field effect transistor (gated-FET) in which the body of the FET is electrically isolated from the substrate thereby reducing leakage current through parasitic bipolar action. The back-bias...
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6465295 |
Method of fabricating a semiconductor device
A semiconductor device fabrication method comprises the steps of forming a gate insulating film on a surface of a semiconductor substrate, forming a polysilicon film on the gate insulating film,...
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6465283 |
Structure and fabrication method using latch-up implantation for improving latch-up immunity in CMOS fabrication process
A structure and fabrication method using latch-up implantation to improve latch-up immunity in CMOS circuit. The impedance of parasitic SCR conducting path is raised by performing an...
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6455895 |
Overvoltage protector having same gate thickness as the protected integrated circuit
A semiconductor integrated circuit having an input protection device which is suitable for receiving inputs of signals having voltages higher than the internal power supply voltage is provided. The...
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6451657 |
Transistor with an ultra short channel length defined by a laterally diffused nitrogen implant
A process is disclosed for fabricating a transistor having a channel length that is smaller than lengths resolvable using common photolithography techniques. A gate oxide layer is formed over a...
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6451656 |
CMOS inverter configured from double gate MOSFET and method of fabricating same
A method of forming a semiconductor line from a semiconductor-on-insulator (SOI) wafer, the SOI wafer having a substrate with a buried oxide (BOX) layer disposed thereon and a semiconductor active...
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6451640 |
Semiconductor device having NMOS and PMOS transistors on common substrate and method of fabricating the same
There is provided a method of fabricating a semiconductor device, including the steps of (a) forming first well regions in a semiconductor substrate in all regions in which high-voltage and...
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6448122 |
Method and device structure for enhanced ESD performance
An integrated circuit manufacturing process selectively blocks silicide formation during the fabrication of I/O devices to enhance their ESD performance while not impacting the performance of core...
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6444523 |
Method for fabricating a memory device with a floating gate
A fabrication method for a memory device with a floating gate is provided. A substrate is provided. A channel doping step is performed on the substrate, wherein the actual threshold voltage of the...
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6440802 |
Process for fabricating semiconductor device and photolithography mask
A process for fabricating a semiconductor device including MOS transistors of low breakdown voltage type and of high breakdown voltage type provided on a semiconductor substrate, the MOS transistor...
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6436748 |
Method for fabricating CMOS transistors having matching characteristics and apparatus formed thereby
A method for forming NMOS and PMOS transistors that includes cutting a substrate along a (111) orientation and fabricating deep sub-micron NMOS and PMOS transistors thereon. The complementary NMOS...
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6436749 |
Method for forming mixed high voltage (HV/LV) transistors for CMOS devices using controlled gate depletion
A method for forming mixed high voltage/low voltage (HV/LV) transistors for CMOS devices is disclosed. In an exemplary embodiment, depletion of the gate conductor is controlled by leaving a fixed...
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6432759 |
Method of forming source and drain regions for CMOS devices
Method for producing an NMOS, PMOS or CMOS semiconductor device with reduced substrate current and increased device lifetime. A source-gate-drain device is fabricated having a moderately doped...
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6429080 |
Multi-level dram trench store utilizing two capacitors and two plates
A multi-level memory cell capable of storing two or three bits of digital data occupies only four lithographic squares and requires only one or two logic level voltage sources, respectively. High...
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6429062 |
Integrated-circuit manufacturing using high interstitial-recombination-rate blocking layer for source/drain extension implant
In the fabrication of a 0.10 micron CMOS integrated circuit, a high-energy plasma etch is used to pattern a polysilicon layer and an underlying gate oxide layer to define gate structures. A thermal...
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6420221 |
Method of manufacturing a highly latchup-immune CMOS I/O structure
CMOS I/O structures are described which are latchup-immune by inserting p+ and n+ diffusion guard-rings into the NMOS and PMOS source side of a semiconductor substrate, respectively. P+ diffusion...
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6417074 |
Method of manufacturing a structure for reducing leakage currents by providing isolation between adjacent regions of an integrated circuit
A fabrication method for providing isolation between adjacent regions of an integrated circuit includes providing a guard layer over field edges that are the interfaces between field oxide regions...
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6417037 |
Method of dual gate process
A new method for forming dual gate dielectrics having high quality where both thin and thick gate dielectric thicknesses can be controlled separately is described. An isolation region separates a...
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6413811 |
Method of forming a shared contact in a semiconductor device including MOSFETS
An objective of this invention is to provide a process for manufacturing a shared contact without protrusion toward an adjacent gate electrode and an improved shared contact. This invention allows...
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6413808 |
Semiconductor device and process for production thereof
In the semiconductor device disclosed in the present invention, the well regions in the internal circuit comprise high-impurity-concentration regions 4 and 5 as lower layers and...
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6410376 |
Method to fabricate dual-metal CMOS transistors for sub-0.1 &mgr m ULSI integration
A new method for forming a dual-metal gate CMOS transistors is described. An NMOS and a PMOS active area of a semiconductor substrate are separated by isolation regions. A nitride layer is...
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6410375 |
Methods of forming transistors including gate dielectric layers having different nitrogen concentrations
A method of forming an electronic device on a semiconductor substrate includes forming first and second field effect transistors on a substrate. In particular, the first field effect transistor...
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6406954 |
Method for forming out-diffusing a dopant from the doped polysilicon into the N-type and P-type doped portion
In one aspect, the invention includes a semiconductor processing method of diffusing dopant into both n-type and p-type doped regions of a semiconductive substrate. A semiconductive material is...
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6406952 |
Process for device fabrication
A process for device fabrication, comprising the steps of forming a dielectric material region on a silicon substrate, forming a first amorphous silicon or polysilicon region on the dielectric...
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6406955 |
Method for manufacturing CMOS devices having transistors with mutually different punch-through voltage characteristics
A CMOS device which includes first and second wells formed in first and second regions of a semiconductor substrate, respectively, first and second transistors formed in the respective wells, a...
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6395644 |
Process for fabricating a semiconductor device using a silicon-rich silicon nitride ARC
A process for fabricating a semiconductor device using an ARC layer includes the formation of a silicon-rich silicon nitride material to provide an anti-reflective layer over a electrically...
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6395591 |
Selective substrate implant process for decoupling analog and digital grounds
An integrated circuit fabrication process includes a selective substrate implant process to effectively decouple a first power supply connection from a second power supply connection while...
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6391698 |
Forming complementary metal-oxide semiconductor with gradient doped source/drain
The present invention provides a method for forming a transistor with a gradient doped source/drain. The method comprises the following steps. First, two first N-wells are formed in a substrate and...
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6387743 |
Semiconductor device manufacturing method and semiconductor device
A semiconductor device and manufacturing method capable of forming shallow extension regions in insulated-gate transistors. A side wall material containing about 1 to 20% of phosphorus, such as...
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6388288 |
Integrating dual supply voltages using a single extra mask level
Integration of dual voltages on a single chip can be accomplished with a minimum of extra masks by optimizing only the MDD implant of the peripheral transistors, while other implants remain the...
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6380013 |
Method for forming semiconductor device having epitaxial channel layer using laser treatment
A method for fabricating a semiconductor device, and, more particularly, a method for fabricating a transistor using an epitaxial channel and a laser thermal treatment is disclosed. The method for...
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6380015 |
MOSFETs with improved short channel effects and method of making the same
In the manufacture of CMOS devices, the n+ gate is partially counterdoped with boron to produce a modified p-type FET that has improved short channel effects, reduced gate induced drain leakage and...
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6380021 |
Ultra-shallow junction formation by novel process sequence for PMOSFET
A new method for forming ultra-shallow junctions for PMOSFET while reducing short channel effects is described. A semiconductor substrate wafer is provided wherein there is at least one NMOS active...
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6376296 |
High-voltage device and method for manufacturing high-voltage device
A high-voltage device. A substrate has a first conductive type. A first well region with the first conductive type is located in the substrate. A second well region with the second conductive type...
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6376293 |
Shallow drain extenders for CMOS transistors using replacement gate design
A method of fabricating a CMOS transistor to construct shallow drain extenders ( 30 ) using a replacement gate design. The method involves forming epitaxial layers ( 30 ) and ( 220 ) the will later...
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6372569 |
Selective formation of hydrogen rich PECVD silicon nitride for improved NMOS transistor performance
A method of selective formation of SiN layer in a semiconductor device comprising the following steps. A semiconductor structure having at least one PMOS transistor and one NMOS transistor formed...
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6368952 |
Diffusion inhibited dielectric structure for diffusion enhanced conductor layer
Within a method for forming a microelectronic fabrication, there is first provided a substrate. There is then formed over the substrate a microelectronic device passivated with a patterned first...
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6365426 |
Method of determining the impact of plasma-charging damage on yield and reliability in submicron integrated circuits
The present invention provides a method of determining a reliability of a semiconductor device. In an exemplary embodiment, the method determines an oxide stress voltage as a function of an antenna...
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6362035 |
Channel stop ion implantation method for CMOS integrated circuits
A method for incorporating an ion implanted channel stop layer under field isolation for a twin-well CMOS process is described in which the layer is placed directly under the completed field...
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6362034 |
Method of forming MOSFET gate electrodes having reduced depletion region growth sensitivity to applied electric field
A method of fabricating a FET having a gate electrode with reduced susceptibility to the carrier depletion effect, includes increasing the amount of n-type dopant in the gate electrode of an...
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6362059 |
Production of a semiconductor device having a P-well
A process for preparing a semiconductor which is capable of implanting indium effectively during the process of forming a gate insulation film with different levels of thickness includes a 1 st ...
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6358824 |
Integrated circuits with tub-ties and shallow trench isolation
A method of fabricating an IC comprises the steps of: (a) forming trench isolation regions in a surface of a semiconductor body; and (b) forming a tub-tie region between at least one pair of the...
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6352913 |
Damascene process for MOSFET fabrication
An improved MOSFET transistor is disclosed having a high dielectric constant gate dielectric and a metal gate electrode. With such a procedure, the known problems with polysilicon gate electrodes...
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