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7622737 |
Test structures for electrically detecting back end of the line failures and methods of making and using the same
Test structures for electrically detecting BEOL failures are provided. In an embodiment, the structure comprises: an input/output connection disposed above a primary conductive pad which is...
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7622323 |
Method for increasing mobility of an organic thin film transistor by application of an electric field
A method for fabricating an organic thin film transistor by application of an electric field. The method includes the steps of fabricating a common organic thin film transistor including a gate...
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7622312 |
Method for evaluating dopant contamination of semiconductor wafer
The present invention provides a method for evaluating dopant contamination of a semiconductor wafer, wherein a resistivity of a bulk portion of the semiconductor wafer is measured by an eddy...
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7622052 |
Methods for chemical mechanical planarization and for detecting endpoint of a CMP operation
Methods are provided for chemical mechanical planarization of a layer and for determining the endpoint of a CMP operation. In accordance with one embodiment the method for determining an endpoint...
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7618833 |
Method for pre-treating epitaxial layer, method for evaluating epitaxial layer, and apparatus for evaluating epitaxial layer
A method for pre-treating an epitaxial layer performed before evaluation of the epitaxial layer by making the epitaxial layer contact with a metal electrode by a capacitance-voltage measurement,...
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7618832 |
Semiconductor substrate having reference semiconductor chip and method of assembling semiconductor chip using the same
A semiconductor substrate having a reference semiconductor chip and a method of assembling semiconductor chips using the same are provided. According to the method, a semiconductor substrate having...
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7615781 |
Semiconductor wafer and semiconductor device, and method for manufacturing same
There is a room for improvement in conventional semiconductor devices in terms of reducing the chip area. A semiconductor device 1 comprises an evaluation transistor 10 (first characteristic...
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7609070 |
Manufacturing method and controlling method of electronic device
A manufacturing method of an electronic device includes applying a direct voltage having a first polarity to a capacitor that has an insulating layer including nitrogen and silicon as a capacitor...
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7608469 |
Method of fabricating a chip
A method of fabricating a chip may include the step of providing a first electrical part. The method may also include the step of forming a shell with the first electrical part embedded in a first...
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7605597 |
Intra-chip power and test signal generation for use with test structures on wafers
The fabrication of the wafer may be analyzed starting from when the wafer is in a partially fabricated state. The value of a specified performance parameter may be determined at a plurality of...
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7601619 |
Method and apparatus for plasma processing
A method and an apparatus for plasma processing which can accurately monitor an ion current applied to the surface of a sample. Predetermined gas is exhausted via an exhaust port by a...
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7601559 |
Apparatus and method for identifying proper orientation and electrical conductivity between a semiconductor device and a socket or contactor
A semiconductor device with a semiconductor die thereon and a contactor board are electrically coupled when the electrically conductive elements on the semiconductor device and the contactor board...
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7598100 |
Manufacturing method of semiconductor integrated circuit device
As the thickness of the card holder for preventing warping of a multilayered wiring substrate 1 is increased, there occurs a problem that a thin film sheet 2 is buried in a card holder and...
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7598099 |
Method of controlling a fabrication process using an iso-dense bias
Embodiments of controlling a fabrication process using an iso-dense bias are generally described herein. Other embodiments may be described and claimed.
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7595649 |
Method to accurately estimate the source and drain resistance of a MOSFET
Measurements of parameters of MOS transistors, also known as MOSFETs, such as threshold potentials, require accurate estimates of source and drain series resistance. In cases where connections to...
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7595557 |
Semiconductor device and manufacturing method thereof
A metal wire for inspection and an electrode for inspection are formed on a region of a semiconductor substrate where a metal wire and an electrode for external connection are not formed. The metal...
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7592828 |
Method and device of measuring interface trap density in semiconductor device
A method is provided for measuring interface trap density in a semiconductor device. In the method, measurement parameters are input to a host computer. A pulse condition is set at a pulse...
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7587298 |
Diagnostic method for root-cause analysis of FET performance variation
A diagnostic method of and computer system for root-cause analysis of performance variations of FETs in integrated circuits and a method and computer system for monitoring a field effect transistor...
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7586322 |
Test structure and method for measuring mismatch and well proximity effects
The present invention is directed to a test structure and method to determine the effects of the well proximity effect on the gate threshold voltage of FETs at different distances from the edge of...
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7573278 |
Semiconductor device
A semiconductor device comprises IC chips, each having semiconductor elements and pad regions, formed on a substrate, and conductor patterns for detecting displacement of a probe needle during a...
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7572650 |
Suppression of localized metal precipitate formation and corresponding metallization depletion in semiconductor processing
A method and structure for suppressing localized metal precipitate formation (LMPF) in semiconductor processing. For each metal wire that is exposed to the manufacturing environment and is...
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7571732 |
Ignition control of remote plasma unit
A method of maintaining a remote plasma unit for cleaning a semiconductor-processing apparatus includes: (i) detecting if the semiconductor-processing apparatus is in an idle state; (ii) if the...
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7566575 |
Mounting circuit and method for producing semiconductor-chip-mounting circuit
A method according to the present invention for producing a semiconductor-chip-mounting circuit 1 includes mainly three steps. In a first step, contacts 2 each in the form of a conical helix...
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7556973 |
Manufacturing method for semiconductor device
A Manufacturing method for a semiconductor device is provided and includes examining a semiconductor element on a semiconductor wafer, by an on-wafer test, storing on-semiconductor-wafer coordinate...
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7556971 |
Testing electromigration at multiple points of a single node
Systems and methods for testing the reliability of a semiconductor component are disclosed herein. One embodiment of a method for testing reliability, among others, comprises providing simulation...
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7544522 |
Fabrication method of semiconductor integrated circuit device
To prevent breakage of a membrane probe during a probe test using a probe card having the membrane probe, appearance of a main surface of a wafer as a test object is tested by an appearance tester ...
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7541203 |
Conductive adhesive for thinned silicon wafers with through silicon vias
The present invention relates to a process for preparing a thinned silicon wafer for electrical testing, the thinned silicon wafer comprising at least one circuit design and at least one...
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7541202 |
Connection device and test system
To achieve high speed exchange of electrical signals between a connection device and a tester, a support member is provided for supporting the connection device, a plurality of pointed contact...
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7538873 |
Method for simulating the movement of particles
A method for determining the movement of particles, particularly impurities, in a medium, under the influence of a changing interface between two neighboring phases. In a first step, the temporal...
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7538443 |
Offset dependent resistor for measuring misalignment of stitched masks
A system and method for identifying misalignments in an overlapping region of a stitched circuit in an integrated circuit fabrication process. The method comprises: creating a first circuit using a...
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7537943 |
Method of manufacturing a semiconductor integrated circuit device
A technique of manufacturing a semiconductor integrated circuit device is provided for reducing the possibility of attachment of foreign matter to a membrane probe when performing probe inspection...
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7531136 |
Chemical sensor
The application relates to a chemical sensor device comprising a substrate ( 1 ), a sensor medium ( 3 ) formed on the substrate, the sensor medium comprising one-dimensional nanoparticles, wherein...
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7529634 |
Method, apparatus, and computer program of searching for clustering faults in semiconductor device manufacturing
A method of searching for clustering faults is employed for semiconductor device manufacturing. The method enters data on faults present in a search target, calculates a frequency distribution of...
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7526699 |
Method for creating a built-in self test (BIST) table for monitoring a monolayer deposition (MLD) system
A method of monitoring a processing system in real-time using low-pressure based modeling techniques that include processing one or more of wafers in a processing chamber, calculating dynamic...
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7525325 |
System and method for floating-substrate passive voltage contrast
A passive voltage contrast (PVC) system and method are disclosed for analyzing ICs to locate defects and failure mechanisms. During analysis a device side of a semiconductor die containing the IC...
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7524682 |
Method for monitoring temperature in thermal process
A method for monitoring a temperature in a thermal process is described. A monitor substrate is provided and subject to ion implantation, and a characteristic parameter of the monitor substrate...
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7521952 |
Test structure for electromigration analysis and related method
A test structure for electromigration and related method are disclosed. The test structure may include an array of a plurality of multilink test sets, each multilink test set including a plurality...
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7519885 |
Monitoring a monolayer deposition (MLD) system using a built-in self test (BIST) table
A method of monitoring a processing system in real-time using low-pressure based modeling techniques that include processing one or more of wafers in a processing chamber; determining a measured...
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7517706 |
Method for evaluating quality of semiconductor substrate and method for manufacturing semiconductor substrate
Methods for evaluating a quality of a semiconductor substrate. In one aspect, etching a surface of the semiconductor substrate by dry-etching, detecting bright points on the surface of the etched...
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7514278 |
Test-key for checking interconnect and corresponding checking method
A test key for checking an interconnect structure is described, including a contiguous metal line and multiple conductive plugs on the contiguous metal line, wherein one end of each plug contacts...
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7514276 |
Aligning stacked chips using resistance assistance
The present invention relates to a method of aligning stacked chips wherein the apparatus and method utilize bumps in the form of exposed metal lines on a first chip. The present invention further...
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7511507 |
Integrated circuit and circuit board
An integrated circuit has an analog output circuit for outputting an analog signal and a leadless terminal for connecting an output line of the analog output circuit to a circuit board by...
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7511375 |
Semiconductor device carrier unit and semiconductor socket provided therewith
In a pressing cap forming part of a semiconductor device carrier unit, a pressing portion of a pressure body has recesses, to each of which a bump is inserted.
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7510895 |
Inferential temperature control system
A system manages the temperature of thermoplastic material by initiating a default heating cycle in response to a sensor failure. The system may thus continue to heat the thermoplastic material...
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7504270 |
Methods of quantifying variations resulting from manufacturing-induced corner rounding of various features, and structures for testing same
The present invention is directed to methods of quantifying variations resulting from manufacturing-induced corner rounding of various features, and structures for testing same. In one illustrative...
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7501847 |
Increased yield manufacturing for integrated circuits
A system and method for providing increased manufacturing yield for integrated circuits. Various aspects of the invention may comprise receiving an integrated circuit designed to operate at nominal...
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7500208 |
Non-destructive evaluation of microstructure and interface roughness of electrically conducting lines in semiconductor integrated circuits in deep sub-micron regime
Novel structures and methods for evaluating lines in semiconductor integrated circuits. A first plurality of lines are formed on a wafer each of which includes multiple line sections. All the line...
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7498604 |
Deposition stop time detection apparatus and methods for fabricating copper using the same
A method for fabricating copper wiring of a semiconductor device comprises forming a deposition stop time detection pattern having two trench structures positioned with a predetermined distance...
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7498180 |
Method for manufacturing semiconductor device
A burn-in input signal input to a burn-in circuit is delivered to an internal circuit through a selector. In response to a control signal from the burn-in circuit, the selector selects either the...
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7494929 |
Automatic gain control
Methods and apparatus for automatic gain control. A film on a substrate is polished by a chemical mechanical polisher that includes a polishing pad and an in-situ monitoring system. The polishing...
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