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RE38900 Automating photolithography in the fabrication of integrated circuits  
Automated photolithography of integrated circuit wafers is enabled with a processor connected to a Rayleigh derator, a form factor generator, a logic synthesizer, a layout generator, a lithography...
6969620 Semiconductor device inspection system  
A device inspection apparatus inspects a plurality of semiconductor devices on an individual device basis. An inspection target sorting part ( 8 ) omits an execution of an inspection to be applied...
6969619 Full spectrum endpoint detection  
A method of endpoint detection during plasma processing of a semiconductor wafer comprises processing a semiconductor wafer using a plasma, detecting radiation emission from the plasma during the...
6969621 Contamination distribution apparatus and method  
Embodiments of the invention include an apparatus for uniformly contaminating samples. The apparatus includes a housing that contains a rotatable carousel for the holding samples. A drive element...
6968481 Method and device for adapting/tuning signal transit times on line systems or networks between integrated circuits  
A method and a device adapt/tune signal transit times on line systems or networks between integrated circuits which are mounted on printed circuit boards. Fine tuning of differences in transit...
6967112 Three-dimensional quantum dot structure for infrared photodetection  
A 3D quantum dot optical path structure is provided, along with a method for selectively forming a 3D quantum dot optical path. The method comprises: forming a single crystal Si substrate with a...
6968287 System and method for predicting burn-in conditions  
According to one embodiment of the invention, a method for predicting burn-in conditions includes identifying a baseline IDDQ, a baseline temperature, and a baseline IDDQ current density based on a...
6964875 Array of gate dielectric structures to measure gate dielectric thickness and parasitic capacitance  
Accurate determination of gate dielectric thickness is required to produce high-reliability and high-performance ultra-thin gate dielectric semiconductor devices. Large area gate dielectric...
6964874 Void formation monitoring in a damascene process  
The invention provides a technique of monitoring the void formation in a damascene interconnection process. According to the invention, a test structure is provided that includes at least two...
6963082 Multi-chip package device including a semiconductor memory chip  
A multi-chip package device includes package terminals, a semiconductor memory chip and an interface chip. The semiconductor memory chip has a test circuit and a test terminal. The test circuit is...
6962827 Semiconductor device capable of shortening test time and suppressing increase in chip area, and method of manufacturing semiconductor integrated circuit device  
A plurality of semiconductor integrated circuits and a plurality of TEG circuits are aligned and provided on a substrate. In the TEG circuit, a built-in test circuit is provided in a region which...
6963193 a-C:H ISFET device, manufacturing method, and testing methods and apparatus thereof  
An a-C:H ISFET device and manufacturing method thereof. The present invention prepares a-C:H as the detection membrane of an ISFET by plasma enhanced low pressure chemical vapor deposition...
6963393 Measurement of lateral diffusion of diffused layers  
Any semiconductor wafer fabrication process may be changed to monitor lateral abruptness of doped layers as an additional step in the wafer fabrication process. In one embodiment, a test structure...
6960802 Performing passive voltage contrast on a silicon on insulator semiconductor device  
A method and type of device for performing passive voltage contrast on a silicon on insulator (SOI) device. A first portion of a substrate of the SOI device may be ground with a dimpler. A second...
6960123 Cleaning sheet for probe needles  
A cleaning sheet has a disc-shaped substrate. First and second polishing layers are disposed over the substrate. The first polishing layer has a surface formed in a surface-roughened fashion to...
6958248 Method and apparatus for the improvement of material/voltage contrast  
A method and system for registering a CAD layout to a Focused Ion Beam image for through-the substrate probing, without using an optical image and without requiring biasing, includes an improved...
6957581 Acoustic detection of mechanically induced circuit damage  
An apparatus and method thereof includes at least one acoustic transducer for receiving acoustic emissions produced during a semiconductor fabrication process. The acoustic transducer is mounted to...
6959252 Method for analyzing in-line QC test parameters  
A method for analyzing in-line QCtest parameters is used to analyze a plurality of lots of products, each lot of products having a lot number and being formed using a plurality of equipments. At...
6957120 Multi-level process data representation  
A method and an apparatus for implementing enhancing data population based upon manufacturing data. A first and a second workpiece are processed. Metrology data relating to the first workpiece is...
6955929 Method of measuring a gate channel length of a metal-oxide semiconductor transistor  
A predetermined voltage is applied respectively on a first gate of a first metal-oxide semiconductor (MOS) transistor with a known channel length and a second gate of a second MOS transistor with...
6955987 Comparison of chemical-mechanical polishing processes  
Chemical-mechanical polishing (“CMP”) processes performed on bodies ( 10 ), each having areas ( 16 and 18 ) of different depression pattern densities, are compared by correlating polishing...
6955928 Closed loop residual gas analyzer process control technique  
A technique for use in fabricating an integrated circuit are disclosed. The method generally begins by performing an operation on a wafer using a fabrication tool. Next, volatiles are desorbed from...
6955930 Method for determining thickness of a semiconductor substrate at the floor of a trench  
Apparatus and method for exposing a selected feature of an integrated circuit device such as a selected portion of the metallization layer, from the backside of the integrated circuit substrate...
6953755 Technique for monitoring the state of metal lines in microstructures  
By preparing fully-embedded interconnect structure samples for a cross-section analysis by means of electron microscopy or x-ray microscopy, degradation mechanisms may be efficiently monitored....
6954678 Artificial intelligence system for track defect problem solving  
A system and method facilitating lithography defect solution generation is provided. The invention includes a defect solution component and a defect alert component. The defect solution component...
6951767 Development hastened stability of titanium nitride for APM etching rate monitor  
A method of fabricating a stabilized TiN control wafer comprising the following steps. A silicon substrate is provided having a silicon oxide layer formed thereover. An initial TiN layer is formed...
6951765 Method and apparatus for introduction of solid precursors and reactants into a supercritical fluid reactor  
The present invention pertains to apparatus and methods for introduction of solid precursors and reactants into a supercritical fluid reactor. Solids are dissolved in supercritical fluid solvents...
6949387 Method of designing a semiconductor device  
A technique for a semiconductor device is provided that includes forming circuit regions on a device formation region and device isolation regions on a semiconductor substrate, a ratio of the width...
6946304 Apparatus for and method of manufacturing a semiconductor device, and cleaning method for use in the apparatus for manufacturing a semiconductor device  
An apparatus for manufacturing a semiconductor device, comprising a process chamber which holds a substrate to be subjected to a prescribed process, a gas inlet pipe which introduces a process gas...
6946305 Apparatus for evaluating amount of charge, method for fabricating the same, and method for evaluating amount of charge  
A wafer for charge amount evaluation having a silicon substrate and p-type regions sandwiched between a first silicon oxide film and a SA-NSG film and surrounded by an undoped silicon film is...
6946303 Electronically diagnosing a component in a process line using a substrate signature  
The present invention is a system for creating a signature of a substrate manufactured in a semiconductor or data storage fabrication facility. A central processing unit is configured to receive...
6946378 Methods for fabricating protective structures for bond wires  
A method for fabricating a protective structure for bond wires of a semiconductor device assembly which includes sequentially fabricating one or more layers of the protective structure. After a...
6946394 Methods and systems for determining a characteristic of a layer formed on a specimen by a deposition process  
Methods and systems for monitoring semiconductor fabrication processes are provided. A system may include a stage configured to support a specimen and coupled to a measurement device. The...
6943055 Method and apparatus for detecting backside contamination during fabrication of a semiconductor wafer  
A method of detecting contamination on a backside of a semiconductor wafer includes the steps of positioning the backside of the wafer in contact with a detection surface of a contaminant sensor,...
6943043 Surface contamination analyzer for semiconductor wafers, method used therein and process for fabricating semiconductor device  
A semiconductor wafer is radiated with an electron beam so that the inelastic scattering takes place in the narrow region, and current flows out from the narrow region; the amount of current is...
6943042 Method of detecting spatially correlated variations in a parameter of an integrated circuit die  
A method of detecting spatially correlated variations that may be used for detecting statistical outliers in a production lot of integrated circuits to increase the average service life of the...
6943108 Interposer capacitor built on silicon wafer and joined to a ceramic substrate  
An interposer, located between an integrated circuit having power, ground and signal connections and a ceramic substrate having power, ground and signal connections, that includes an oxide layer...
6938505 Chamber wafer detection  
An apparatus and method for detecting in chamber wafer position and process status are disclosed. A chamber includes a processing pedestal and plurality of lift pins. Each lift pin has an...
6939726 Via array monitor and method of monitoring induced electrical charging  
An electrical monitor comprising a via array and method for determining and reducing an electrically charged state of a semiconductor process wafer the method including providing a metal filled via...
6939472 Etching method in fabrications of microstructures  
The present invention teaches a method and apparatus for removing sacrificial materials in fabrications of microstructures using one or more selected spontaneous vapor phase etchants. The selected...
6939727 Method for performing statistical post processing in semiconductor manufacturing using ID cells  
A method of manufacturing a semiconductor integrated circuit includes providing a fabricated integrated circuit on a wafer. A test fixture is connected to unencapsulated pads on the integrated...
6939794 Boron-doped amorphous carbon film for use as a hard etch mask during the formation of a semiconductor device  
A hard mask comprising boron-doped amorphous carbon, and a method for forming the hard mask, provides improved resistance to etches of a variety of materials compared with previous amorphous carbon...
6936904 Photo sensing integrated circuit device and related circuit adjustment  
A light-receiving element having a light-receiving portion is formed on a chip surface. A digital circuit element, an analog circuit element and a circuit adjusting element are provided for...
6935922 Methods and systems for generating a two-dimensional map of a characteristic at relative or absolute locations of measurement spots on a specimen during polishing  
Methods and systems for generating a two-dimensional map of a characteristic at relative or absolute locations of measurement spots on a specimen during polishing are provided. One method includes...
6936483 On-wafer burn-in of semiconductor devices using thermal rollover  
Apparatus and method for on-wafer burn-in of a semiconductor device. In a preferred embodiment, the present invention is realized using an auto-prober commonly used in scan-testing of semiconductor...
6936480 Method of controlling the chemical mechanical polishing of stacked layers having a surface topology  
An improved CMP controller allows the calculation of the polish time required for removing a patterned layer stack to a desired final thickness, wherein the initial layer thickness of each layer...
6933610 Method of bonding a semiconductor die without an ESD circuit and a separate ESD circuit to an external lead, and a semiconductor device made thereby  
In a semiconductor device having a semiconductor die without an ESD circuit and a separate ESD circuit and an external lead, the external lead is first bonded to the separate ESD circuit....
6930382 Semiconductor device and method of manufacturing the same  
A semiconductor device includes a first substrate including an element, a first plug penetrating through the first substrate, made of a conductive material, and electrically connected with the...
6929965 Early response to plasma/charging damage by special pattern design of active region  
A method of early and effective detection of plasma damage to a gate oxide layer by a special design of the active region is achieved. A plasma-damage testing structure is fabricated by providing a...
6927080 Structures for analyzing electromigration, and methods of using same  
The present invention is generally directed to various structures for analyzing electromigration, and methods of using same. In one illustrative embodiment, the method includes forming a grating...
Matches 551 - 600 out of 1719 < 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 >