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7405414 |
Method and apparatus for patterning a workpiece
The present invention relates to a method for creating a pattern on a workpiece sensitive to electromagnetic radiation. Electromagnetic radiation is emitted onto a computer controlled reticle...
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7402801 |
Inspecting method of a defect inspection device
An inspecting method comprises the following steps. A plurality of defect inspection devices is formed on a wafer. Each defect inspection device comprises an insulating layer and a conductive layer...
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7395518 |
Back end of line clone test vehicle
A test vehicle comprises at least one product layer having a east one product circuit pattern on the product layer, and one or more clone layers formed over the product layer ( 1902 ). The one or...
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7393703 |
Method for reducing within chip device parameter variations
A method of reducing parametric variation in an integrated circuit (IC) chip and an IC chip with reduced parametric variation. The method includes: on a first wafer having a first arrangement of...
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7391023 |
Lithography tool image quality evaluating and correcting
Electron beam lithography tool image quality evaluating and correcting including a test pattern with a repeated test pattern cell, an evaluation method and correction program product are disclosed....
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7390682 |
Method for testing metal-insulator-metal capacitor structures under high temperature at wafer level
A test methodology is provided for testing metal-insulator-metal (MIM) capacitor structures under high temperatures at the wafer level. A resistor is formed on a region of dielectric isolation...
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7378290 |
Isolation circuit
An isolation circuit includes a first pad adapted to receive a control signal and a second pad adapted to receive another signal. A third pad is coupled to a microelectronic die and a device is...
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7378289 |
Method for forming photomask having test patterns in blading areas
A photomask and a method for forming a photomask are disclosed in which die regions that define features for a process step of a semiconductor fabrication process are formed on a photomask and a...
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7373216 |
Method and apparatus for verifying a site-dependent wafer
The present invention includes a method of verifying a Site-Dependent (S-D) wafer that includes receiving a first set of S-D wafers by one or more S-D processing elements in one or more processing...
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7372072 |
Semiconductor wafer with test structure
The invention relates to a semiconductor wafer ( 1 ) having a plurality of first sawing regions ( 201 - 211 ) running parallel to one another in a first direction (X) and a plurality of second...
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7368304 |
Fabricating die with separate test pads selectively coupled to cores
Timely testing of die on wafer reduces the cost to manufacture ICs. This disclosure describes a die test structure and process to reduce test time by adding test pads on the top surface of the die....
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7339388 |
Intra-clip power and test signal generation for use with test structures on wafers
The fabrication of the wafer may be analyzed starting from when the wafer is in a partially fabricated state. The value of a specified performance parameter may be determined at a plurality of...
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7335518 |
Method for manufacturing semiconductor device
In a manufacturing method for a semiconductor device, a main body wafer is formed, and a monitor wafer on which a monitor element is formed is provided. Characteristics of the main body wafer are...
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7316935 |
Reticle for layout modification of wafer test structure areas
Techniques are provided for forming die on wafers with large area test structures between primary die. A reticle is used to pattern each die. The pattern on the reticle forms a primary die and test...
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7301225 |
Multi-row lead frame
A lead frame ( 10 ) for a semiconductor device includes a first row of terminals ( 12 ) surrounding a die receiving area ( 14 ) and a second row of terminals ( 16 ) spaced from and surrounding the...
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7282374 |
Method and apparatus for comparing device and non-device structures
The present invention provides a method and apparatus for comparing device and non-device structures. The method includes determining at least one characteristic parameter associated with at least...
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7276386 |
Semiconductor device and method of manufacturing the same
A method of manufacturing a semiconductor device includes the steps of forming barrier metals on first electrodes provided on a chip of the semiconductor device, implementing a predetermined test...
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7265445 |
Integrated circuit package
An IC package includes a package body of non-conductive material. A conductive heat-sink pad includes an interior pad portion located within an interior of the package body. An exterior pad portion...
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7256055 |
System and apparatus for using test structures inside of a chip during the fabrication of the chip
The fabrication of the wafer may be analyzed starting from when the wafer is in a partially fabricated state. The value of a specified performance parameter may be determined at a plurality of...
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7220990 |
Technique for evaluating a fabrication of a die and wafer
The fabrication of the wafer may be analyzed starting from when the wafer is in a partially fabricated state. The value of a specified performance parameter may be determined at a plurality of...
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7217579 |
Voltage contrast test structure
A method for electrically testing a semiconductor wafer during integrated-circuit fabrication process, the method including: (i) providing a scanning charged-particle microscope (SCPM), having a...
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7211453 |
Method and apparatus for personalization of semiconductor
A system for making small modifications to the pattern in standard processed semiconductor devices. The modifications are made to create a small variable part of the pattern against a large...
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7197726 |
Test structures for estimating dishing and erosion effects in copper damascene technology
A test structure combines a first structure ( 1010 ) for erosion evaluation with a second structure ( 1000 ) for extraction of defect size distributions. The first structure ( 1010 ) is a loop...
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7192790 |
Manufacturing method for a semiconductor device
A manufacturing method for a semiconductor device which is capable of manufacturing the semiconductor device with a high quality in high yields while reducing variations in electric characteristic...
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7192505 |
Wafer probe for measuring plasma and surface characteristics in plasma processing environments
There is provided by this invention a wafer probe for measuring plasma and surface characteristics in plasma processing environment that utilizes integrated sensors on a wafer substrate. A...
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7186576 |
Stacked die module and techniques for forming a stacked die module
Embodiments of the present technique relate to forming die stacks. Specifically, embodiments of the present technique include a method of forming and testing semiconductor die comprising forming a...
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7179661 |
Chemical mechanical polishing test structures and methods for inspecting the same
Disclosed is a semiconductor die having a plurality of dummy fillings positioned and sized to minimize defects during chemical mechanical polishing is disclosed. At least one of the dummy fillings...
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7176486 |
Structure of test element group wiring and semiconductor substrate
A structure of test element group wiring includes, in addition to an electrode on a substrate including one or more layers of insulating films, and real wirings electrically connected to the...
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7166480 |
Particle control device and particle control method for vacuum processing apparatus
A particle control device and a particle control method are capable of controlling the occurrences of particles in a vacuum reactor. The particle control device is used in a vacuum processing...
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7163829 |
Method of integration testing for packaged electronic components
A method of integration testing for packaged electronic components is capable of improving a conventional testing for packaged electronic components. In this method, non-tested sides of the...
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7154116 |
Rewiring substrate strip with a number of semiconductor component positions
A rewiring substrate strip with a number of semiconductor component positions and semiconductor components, which are arranged in rows and columns on the rewiring substrate strip also includes are...
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7138653 |
Structures for stabilizing semiconductor devices relative to test substrates and methods for fabricating the stabilizers
Stabilizers to be disposed on a surface of a semiconductor device or test substrate and methods of fabricating and disposing the stabilizers on semiconductor devices and test substrates....
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7135412 |
Method to control a management system to control semiconductor manufacturing equipment
In the control method in a management system of semiconductor manufacturing equipment to enhance a product yield through a control of etching process, information of a corresponding lot for the...
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7095045 |
Semiconductor device and manufacturing method thereof
A semiconductor device includes a substrate, a pad electrode formed on the substrate and a bump electrode formed on the pad electrode, wherein the pad electrode has an irregular flaw, and there is...
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7077120 |
Substrate cutting method
A method of producing a semiconductor device constructed by arranging a plurality of substrates, on each of which, thin film semiconductor elements two-dimensionally arranged are installed. The...
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7076178 |
Fiber optic transceiver array and fiber optic transceiver channel for short wave fiber optic communications
A fiber optic transceiver array and a fiber optic transceiver channel are provided for short wave fiber optic communications. A fiber optic transceiver array for short wave fiber optic...
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7074629 |
Test patterns for measurement of effective vacancy diffusion area
A test pattern ( 100, 200, 300, 400, 600, 700 ) has a first metal structure ( 102 ) disposed on a substrate ( 352 ), one or more intermediate layers ( 358 ) disposed above the first metal structure...
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7060511 |
Evaluation method of a field effect transistor
The present invention provides a method for estimating resistance value of an LDD region that works in an actual FET and forming an optimum LDD region. Therefore, the present invention provides an...
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7056751 |
Method and system for increasing yield of vertically integrated devices
A method for increasing the manufacturing yield for a vertically integrated device is disclosed. The devices are composed of one or more multiple layer die. The number of functioning layers of each...
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7049700 |
Semiconductor test board having laser patterned conductors
A method for fabricating semiconductor components is performed using a laser scanner and a laser imaging process. A substrate, such as a semiconductor wafer, containing multiple semiconductor...
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7037733 |
Method for measuring temperature, annealing method and method for fabricating semiconductor device
When the emissivity ε on the reverse face of a substrate 10 is measured during annealing processing for the substrate 10, films made from a material that varies the emissivity ε, such as a...
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7033843 |
Semiconductor manufacturing method and semiconductor manufacturing apparatus
A semiconductor manufacturing method whereby reactive gas processing such as selective epitaxial growth can be carried out with high precision by correctly adjusting conditions during processing is...
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7029934 |
Method and apparatus for testing TFT array
A testing method for a TFT array substrate using a self-emitting element drive where pixels are arranged in a matrix and each pixel comprises a drive transistor having a gate formed from a first...
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7026171 |
Rapid thermal annealing process
A rapid thermal annealing (“RTA”) process providing for an RTA equipment is disclosed. The RTA equipment has a pyrometer providing for measuring an operation parameter, e.g., a temperature of...
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7000822 |
Wire bond integrity test system
An improved bond integrity test system is provided by eliminating the spring loaded wire spool cover which contributes to particulate matter, and by addition of a second contact diverter in the...
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6995027 |
Integrated semiconductor structure for reliability tests of dielectrics
A test structure for assessing the reliability of a dielectric of a circuit element in an integrated circuit includes a plurality of test circuit elements and a plurality of contact pads, wherein...
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6991943 |
Process for preparation of semiconductor wafer surface
A method for adjusting the resistivity in the surface of a semiconductive substrate including selective measurement and counter-doping of areas on a major surface of a semiconductive substrate.
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6985674 |
Fiber optic transceiver array and fiber optic transceiver channel for short wave fiber optic communications
A fiber optic transceiver array and a fiber optic transceiver channel are provided for short wave fiber optic communications. A fiber optic transceiver array for short wave fiber optic...
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6984531 |
Electrical field alignment vernier
A test structure pattern includes a first comb having a first set of tines, and a second comb having a second set of tines of the same width and spacing as the first set of tines. When the test...
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6977128 |
Multi-layered semiconductor structure
A multi-layered semiconductor structure having an alignment feature for aligning a lithography mask and that may be used in connection with a SCALPEL tool. The present invention is particularly...
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