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7442038 Heat treatment jig for semiconductor silicon substrate  
This invention provides a heat treatment jig for semiconductor silicon substrates, which, in respective heat treatment of hydrogen annealing or argon annealing, can handle enlargement of the...
7393207 Wafer support tool for heat treatment and heat treatment apparatus  
The present invention provides a wafer support tool for heat treatment easy in working and capable of realizing reduction in cost without generating damages or slip dislocations that would be...
7241141 Low contact SiC boat for silicon nitride stress reduction  
A vertical wafer boat for supporting at least one semiconductor wafer, formed by a process includes forming a plurality of angled support grooves into a plurality of support members with a...
7210924 Heat treatment system and a method for cooling a loading chamber  
There is provided a vertical heat treatment system capable of simplifying the structure of various mechanisms in the vicinity of an opening which is formed in a partition wall separating a...
7204887 Wafer holding, wafer support member, wafer boat and heat treatment furnace  
The present invention provides a wafer holder, a wafer support member, a wafer boat and a heat treatment furnace, which are capable of sufficiently suppressing slip dislocations, without lowering...
6953338 Device for thermal treatment of substrates  
The aim of the invention is to reduce the formation of scratches in a device for the thermal treatment of substrates, in particular, semiconductor substrates, in a chamber in which the substrate is...
6939131 Support for a part to be subjected to heat treatment in an oven, and a method of heat treating a metal part  
A support slug ( 2 ) used for the heat treatment of a part ( 3 ), particularly for the hardening of a steel part, comprises a guide element ( 221 ) that is used to guide the part ( 3 ) towards a...
6869280 Support for material to be fired for a ceramic dental prosthesis  
A support for a material to be fired for a ceramic dental prosthesis, having a support plate dimensionally stable when heat is applied and having a plurality of passages which are arranged...
6808676 Method and device for producing shaped ceramic bodies using setter plates  
A method and device for producing shaped ceramic bodies, particularly ceramic sheets or multilayer hybrids provided with printed circuit traces, switching elements and/or plated-through holes. The...
6561799 Sealing box for a chamber for continuously treating a thin strip product, in particular for a furnace for continuously carbonizing a fiber substrate  
A sealing box for a chamber for continuously treating a thin strip product, in particular for a furnace for continuously carbonizing a fiber substrate. The sealing box comprises: a longitudinal...
6558158 Ceramic heater  
A ceramic heater ( 1 ) includes a ceramic substrate ( 2 ) having a heating surface ( 2 a ) for supporting and heating an object to be processed, a hearing element ( 6 ) provided in the substrate (...
6361313 Ladder boat for supporting wafers  
The present invention relates generally to an improved ladder boat for supporting semiconductor wafers during thermal treatments which comprises top and bottom plates vertically opposing each other...
6293789 Semiconductor processing apparatuses  
An apparatus for semiconductor processing includes: a) at least one support member comprising an upper surface for supporting a semiconductor wafer; b) a component through which the support member...
6280183 Substrate support for a thermal processing chamber  
A substrate support, such as an edge ring, includes an inner portion, and an outer portion contiguous with the inner portion and extending radially outward therefrom. The inner portion has a raised...
6186779 Wafer clamp for a heater assembly  
A clamp holds a semiconductor wafer during an Al reflow process. The clamp is made of a ceramic material, and thereby clamp surface roughening which damages semiconductor wafers and other damaging...
6099302 Semiconductor wafer boat with reduced wafer contact area  
A boat for semiconductor wafers has reduced contact surface area with the wafer, thereby preventing distortion of the wafer during heating. The boat has an upper member; a lower member, a plurality...
6062852 Substrate heat-treating apparatus  
A substrate heat-treating apparatus includes a heat-treating plate, and support pins extending through the heat-treating plate to be vertically movable relative thereto. The support pins support...
5848889 Semiconductor wafer support with graded thermal mass  
An annular-shaped edge ring support for a semiconductor wafer has an innermost radial portion for supporting the semiconductor wafer and an outermost radial portion contiguous with the inner...
5785519 Structure for a firing table  
The invention relates to a structure for a firing table to accept ceramic items to be fired.
5752821 Tray for heat treatment furnace  
A tray for heat treatment furnace including a tray base which comprises a plate and a lattice part being fixed on the plate, said lattice part having a plurality of cylindrical reinforcements...
5718574 Heat treatment apparatus  
A substrate holding assembly for horizontally holding a substrate to be treated is provided in a heat treatment chamber of a heat treatment apparatus. The substrate holding assembly has an annular...
5695331 Multiple width boat carrier for vertical ovens  
A boat carrier for accommodating multiple width integrated circuit (IC) boats is provided. The boat carrier comprises a base member and opposed guide faces which abut side surfaces of IC boats of...
5613848 Process for the production of glass-like carbon substrates for use as recording media and a setter for use in the process  
A supporting shaft 11 that can be inserted through a center hole 5a in each of cured resin disks 5 and which has a bottom plate in a disk form at an end, as well as a plurality of spacer disks 12...
5529732 Underlying boards for firing and a method for firing ceramic moldings by using such underlying boards  
A firing underlying board having a long use life free from thermal expansion and which does not cause twisting of ribs, deformation of an end face, color change or cracking in a honeycomb...
5362231 Article support apparatus  
A setter (10) for supporting an article of ceramic ware. The setter (10) comprising two identical engageable components (14). The components (14) comprise profiled pieces of recrystallised silicon...
5350551 Method of firing ceramic moldings containing a diffusible metallic oxide  
A ceramic firing method particularly suitable for the fabrication of metallic oxide varistor bodies containing a major proportion of zinc oxide and a minor proportion of antimony oxide. Should...
5336453 Method for producing ceramic-based electronic components  
A method of heat treating ceramic-based electronic components by providing a furnace fixture adapted to support the ceramic-based electronic components which is made from a substrate selected from...
5310339 Heat treatment apparatus having a wafer boat  
A heat treatment apparatus for transferring a semiconductor wafer between a cassette and a boat and heat-treating a number of wafers loaded on the boat, comprising wafer holding assembly for...
5283089 Non-porous diffusion furnace components  
Components for semiconductor diffusion furnaces are constructed of a high purity impervious silicon carbide or silicon nitride matrix deposited onto and within a pre-shaped fibrous matrix of...
5222890 Device for the sagger-less burning of crockery  
The present invention relates to a device for the sagger-less burning of crockery comprising setting plates (2) and individual supports (1) which are designed as separate components from the...
5174752 Support units  
A support unit, e.g. a setter, is designed for convenience of stacking both in use and in the stored condition. Each unit (10, 20, 20A) is of circular plan outline and has a rim (13) having...
5149264 Method of producing ceramic products  
An excellent method of firing ceramic materials is provided wherein bending or deformation of a supporting plate which supports a green shaped body of the ceramic materials, deformation of the...
5130067 Method and means for co-sintering ceramic/metal MLC substrates  
A method for co-sintering ceramic/metal multi-layered ceramic substrates wherein X-Y shrinkage is controlled and X-Y distortion and Z-direction chamber are substantially eliminated. Binder-burnoff...
5064588 Method of manufacturing elongate ceramic articles  
A method of manufacturing elongate ceramic articles including a plurality of firing stages. In a pre-firing stage, an elongate ceramic shaped-body is held in a first attitude and subjected to a...
4976612 Purge tube with floating end cap for loading silicon wafers into a furnace  
A purge tube for protecting a boat(s) of wafers. This purge tube does not enter the furnace. A floating end cap within the tube moves to substantially seal the furance opening during processing....
4966549 Wafer hanger useful for thermally treating semiconductor wafers  
A wafer hanger has a rod member and a supporting member. The rod member is inserted into respective notches formed in semiconductor wafers, and then placed on the supporting member. The wafer...
4919614 Apparatus for heat treatment of a substrate  
An apparatus for the heat treatment of a substrate comprises a heat treating plate for heating or cooling a substrate, three holes for one substrate provided on the surface of the heat treating...
4872554 Reinforced carrier with embedded rigid insert  
A carrier for silicon wafers and the like for use in processing wafers, the carrier having side components and end components, the side components being tubular rails with wafer spacing and...
4824063 Drying board  
The drying board supports a freshly coated article during drying and includes a plurality of rigid upright projections extending upward from a rigid support structure. Each projection has base...
4778383 Apparatus for firing ceramic shaped products  
An apparatus for firing ceramic shaped products, particularly porcelian tableware, comprising a kiln provided with a through tunnel and a heating device, grid-like pallets for holding the shaped...
4761134 Silicon carbide diffusion furnace components with an impervious coating thereon  
A diffusion furnace component system is disclosed which includes a liner, process tube, paddle and boat. These various elements are made up of a matrix of sintered silicon carbide which has been...
4728246 Wafer boat transfer tool  
A wafer boat transfer tool has an upper fork and a lower fork which may be differently configured for supporting wafer boats in different ways. The same tool may be used to transfer boats in one or...
4721460 Tile firing support structure  
An apparatus for supporting and conveying ceramic wall and floor tiles through a kiln is provided. The tile support structure is mounted on a kiln car having a structural base supported on...
4715812 Kiln furniture  
Kiln furniture for supporting ceramic products to be baked in a high-speed baking kiln includes an inorganic fibrous material needled blanket having a plurality of depressions therein, and a...
4669938 Apparatus for automatically loading a furnace with semiconductor wafers  
An apparatus for loading a furnace with semiconductor wafers is known, which has at least two heat treatment chambers (1A, 1B, 1C, 1D), each of them having an associated stationary loading unit (8)...
4653636 Wafer carrier and method  
A quartz wafer boat or carrier includes three slotted parallel members, each member including a plurality of grooves aligned with corresponding slots in the other members, for carrying...
4636170 Kiln furniture setter  
A kiln furniture setter used to support and transport greenware into a kiln to be fired comprising a multiple column support structure with sequential rotation of supports to eject greenware from...
4566839 Semiconductor wafer diffusion boat and method  
A quartz diffusion boat for carrying semiconductor wafers during very high temperature semiconductor manufacturing operations includes first and second quartz rails having first and second sets of...
4564489 Method and holder for the manufacture of annular cores  
In the manufacture of a flared ferromagnetic annular core for a television deflection unit in which a moulding (13) consisting of compressed starting material is supported in a hollow holder (11)...
4523885 Apparatus for loading magazines into furnaces  
Apparatus for introducing silicon wafers in magazines into a process tube of a furnace or diffusion oven. At least two spaced silica tubes closed at the end next adjacent the process tube...
Matches 1 - 50 out of 90 1 2 >