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Match Document Document Title
9027504 Heating apparatus, coating apparatus and heating method  
A heating apparatus including: a first heating part and a second heating part between which a substrate having a coating film is disposed at a substrate position in the film thickness direction;...
8937483 Semiconductor package transferring apparatus and method of manufacturing semiconductor device using the same  
A semiconductor package transferring apparatus is disclosed. The apparatus includes a tray that includes a front side and a rear side opposite the front side, the rear side including a plurality...
8936462 Multi-operation wafer baking system  
A multi-operation wafer baking system includes a chassis; a wafer loading device mounted on the chassis for laterally moving a wafer; a cruciform transportation device mounted on the chassis for...
8920162 Closed loop temperature heat up and control utilizing wafer-to-heater pedestal gap modulation  
Methods and apparatuses that decouple wafer temperature from pre-heat station residence time, thereby improving wafer-to-wafer temperature uniformity, are provided. The methods involve maintaining...
8900384 Method for heat-treating metal tubes or pipes for nuclear power plant  
In a method for heat treating a metal tube or pipe for a nuclear power plant, the tube or pipe being accommodated in a batch-type vacuum heat treatment furnace, when the tube or pipe is laid down...
8874254 Temperature setting method of heat processing plate, temperature setting apparatus of heat processing plate, program, and computer-readable recording medium recording program thereon  
An object of the present invention is to perform temperature setting of a heating plate so that a wafer is uniformly heated in an actual heat processing time. The temperature of a wafer is...
8858740 ***WITHDRAWN PATENT AS PER THE LATEST USPTO WITHDRAWN LIST***
Method for heat-treating metal tubes or pipes for nuclear power plant
 
In a method for heat treating a metal tube or pipe for a nuclear power plant, the tube or pipe being accommodated in a batch-type vacuum heat treatment furnace, when the tube or pipe is laid down...
8748780 Substrate processing apparatus, substrate processing method, and computer-readable storage medium  
A disclosed substrate processing apparatus comprises a heat exchange plate configured to heat and/or cool the substrate; plural protrusions provided on the heat exchange plate so as to allow the...
8708295 Workpiece-carrier  
Improved workpiece-carrier in the form of a high-temperature-grating 10 assembled from mutually engaging elements consisting of carbon-fiber-reinforced carbon-composite-board-strips comprising...
8696351 Multi-purpose heat-collecting kiln device  
A heat-collecting kiln device includes a housing assembly including a single housing or a plurality of housings having a same height or different heights, with the housings stackable one upon...
8672675 Firing tray  
A firing tray for a furnace for dental ceramics having a plate for the placement on it of the firing material, wherein the plate is made as a base for the improvement of the application...
8608885 Substrate heat treatment apparatus  
A substrate heat treatment apparatus includes a heat-treating plate having a flat upper surface, support devices formed of a heat-resistant resin for contacting and supporting a substrate, a seal...
8544305 Conveying jig, method of manufacturing conveying jig, and method of heat-treating metal rings using conveying jig  
Provided are a conveying jig, a method of manufacturing the conveying jig, and a method of heat-treating metal rings using the conveying jig. The conveying jig is provided with a base and ten...
8506712 Wafer support jig, vertical heat treatment boat including wafer support jig, and method for manufacturing wafer support jig  
The present invention provides a wafer support jig having at least a support surface on which a treatment target wafer is mounted and supported when performing a heat treatment, wherein skewness...
8469703 Vertical boat for heat treatment and heat treatment method of semiconductor wafer using thereof  
A vertical boat for heat treatment includes a plurality of supporting columns, a pair of plate members coupled to both ends of each supporting column. In each of the supporting columns a plurality...
8461061 Quartz boat method and apparatus for thin film thermal treatment  
A method of supporting a plurality of planar substrates in a tube shaped furnace for conducting a thermal treatment process is disclosed. The method uses a boat fixture having a base frame...
8454356 Systems and methods for supporting a workpiece during heat-treating  
An apparatus for supporting a workpiece during heat-treating includes a support plate having a non-planar upper surface, and a support system. The support system is configured to support the...
8454357 Hotplate with lifting elements  
The hotplate for a workpiece comprises a heatable plate which on a first side comprises a support surface for the workpiece, several lifting elements for the lifting of the workpiece relative to...
8424485 Substrate treatment equipment and manufacturing method of substrate  
The invention aims to provide substrate treatment equipment that can automatically collect a substrate in a normal condition without needing manual operation. The equipment includes a substrate...
8287649 Vertical boat for heat treatment and method for heat treatment of silicon wafer using the same  
The present invention is a vertical boat for heat treatment having an auxiliary supporting member removably attached to each of supporting parts of a boat body, the auxiliary supporting member on...
8178820 Method and heat treatment apparatus for uniformly heating a substrate during a bake process  
A heat treatment apparatus and associated method are provided for heating a substrate. The apparatus includes a processing chamber containing a process space, first and second substrate supports,...
8167611 Drying furnace for coated film  
In drying of a glass substrate to which a coated film is applied, the heating and drying is conducted while feeding means 10, 18, which always moves on a lower surface of the glass substrate 6 to...
8147242 Substrate supporting/transferring tray  
To provide a substrate supporting/transferring tray, which can be placed on a substrate supporting part arranged in a treatment chamber in which the heat treatment is performed to a substrate,...
8128714 Apparatus for manufacturing polycrystalline silicon thin film  
Provided is an apparatus for manufacturing a polysilicon thin film by depositing an amorphous silicon thin film and an upper silicon dioxide substrate on a lower silicon dioxide substrate, forming...
8087931 Device for supporting articles to be fired that has a defined compensation of thermal expansions  
The present invention relates to a device for supporting, stacking, and transporting kiln run, in particular for firing ceramic products, comprising an assembly of supports and support beams, like...
8067820 Silocon wafer supporting method, heat treatment jig and heat-treated wafer  
Provided is a method applicable to the production of silicon wafers having crystal orientation <100> or <110> and consisting in specifying wafer-supporting positions on the occasion of heat...
8014895 Temperature setting method of heat processing plate, temperature setting apparatus of heat processing plate, program, and computer-readable recording medium recording program thereon  
An object of the present invention is to perform temperature setting of a heating plate so that a wafer is uniformly heated in an actual heat processing time. The temperature of a wafer is...
8003918 Vertical heat treatment boat and heat treatment method for semiconductor wafer  
The present invention provides a vertical heat treatment boat that has at least four or more support portions per processing target substrate to be supported, the support portions horizontally...
8003919 Substrate heat treatment apparatus  
A heat-treating plate has support elements projecting from an upper surface thereof. The support elements are located at apexes of equilateral triangles arranged regularly and continually. The...
7927096 Substrate support structure, heat treatment apparatus using same, first sheet-like object for use in the substrate support structure, method of manufacturing the substrate support structure, heat treatment apparatus, and substrate sucking method  
A heat treatment apparatus includes a support sheet placed on an upper surface of a heat-treating plate. The support sheet has, formed on an upper surface thereof, projections for contacting and...
7819658 Heat treatment system and method therefore  
Disclosed herein is a vertical heat treatment system capable of simplifying the structure of various mechanisms in the vicinity of an opening which is formed in a partition wall separating a...
7815056 Support apparatus to maintain physical geometry of sheet glass and methods of using same  
Disclosed are devices and methods for supporting glass sheets during a thermal treatment process, such as heat treating, to maintain the physical geometry of the glass sheets. The device can...
7780440 Substrate supporting/transferring tray  
To provide a substrate supporting/transferring tray, which can be placed on a substrate supporting part arranged in a treatment chamber in which the heat treatment is performed to a substrate,...
7736436 Detachable edge ring for thermal processing support towers  
An edge ring for use in batch thermal processing of wafers supported on a vertical tower within a furnace. The edge rings are have a width approximately overlapping the periphery of the wafers and...
7717705 Supporting device for articles to be fired that has an elastic support fixing  
The present invention relates to a device for supporting, stacking and transporting kiln run, in particular, when firing ceramic products, comprising an assembly from supports and support beams,...
7677885 Material supply device for diffusion furnaces  
A material supply device for diffusion furnaces includes a main body, a fixing pedestal mechanism, a transmission mechanism and a cover mechanism for a furnace door. The main body includes a base...
7625205 Heat treatment apparatus and method of manufacturing substrates  
A heat treatment device and a method of manufacturing substrates capable of reducing the slippage of the substrates when the substrates are supported on support parts comprising plate-like...
7517217 Method and apparatus for heat processing of substrate  
The present invention relates to a method for heat processing of a substrate having the step of baking a substrate, on which a coating film is formed, at a predetermined high temperature,...
7429168 Oven protection system for a thermo-forming machine  
An oven protection system for a thermo-forming machine having a source of heat for heating a workpiece. The oven protection system includes a barrier that is movable from a stored position to a...
7331780 Heat treatment jig for semiconductor wafer  
A heat treatment jig by the invention comprising: the diameter of a disk-type structure being 60% or more of that of loaded semiconductor wafers; the thickness being 1.0 mm or more but 10 mm or...
7329947 Heat treatment jig for semiconductor substrate  
When a two-division structure heat treatment jig for semiconductor substrate that includes a silicon first jig that comes into direct contact with a semiconductor substrate that is heat treated...
7241140 Burning oven  
A burning oven is provided, and has a housing that surrounds a combustion chamber in which material that is to be burned can be introduced after the housing is opened and can be placed upon a...
7210924 Heat treatment system and a method for cooling a loading chamber  
There is provided a vertical heat treatment system capable of simplifying the structure of various mechanisms in the vicinity of an opening which is formed in a partition wall separating a...
7210925 Heat treatment jig for silicon semiconductor substrate  
A heat treatment jig for supporting silicon semiconductor substrates by contacting, being loaded onto a heat treatment boat in a vertical heat treatment furnace, comprises; the configuration of a...
7204887 Wafer holding, wafer support member, wafer boat and heat treatment furnace  
The present invention provides a wafer holder, a wafer support member, a wafer boat and a heat treatment furnace, which are capable of sufficiently suppressing slip dislocations, without lowering...
7125600 Setter, method for manufacturing ceramic substrate, and ceramic substrate  
A setter and a method for manufacturing a ceramic substrate are capable of suppressing deformation such as warpage occurring in a ceramic substrate after baking. A ceramic green sheet 4 is mounted...
7033168 Semiconductor wafer boat for a vertical furnace  
A wafer boat for use in heat treatment of semiconductor wafers in a vertical furnace comprises support rods extending generally vertically when the wafer boat is placed in the vertical furnace....
6994544 Wafer scale thermal stress fixture and method  
A fixture for supporting a plurality of semiconductor chips during the thermal cycling of the chips, including a fluid-permeable bottom screen, a chip-cavity-defining plate supported against a top...
6966771 Boat for heat treatment and vertical heat treatment equipment  
The present invention is a boat for a thermal process including: a plurality of pillars; a plurality of claws formed in each of the pillars in a height direction at predetermined intervals; a...
6939131 Support for a part to be subjected to heat treatment in an oven, and a method of heat treating a metal part  
A support slug (2) used for the heat treatment of a part (3), particularly for the hardening of a steel part, comprises a guide element (221) that is used to guide the part (3) towards a...

Matches 1 - 50 out of 348 1 2 3 4 5 6 7 >