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7600997 |
Method for increasing the throughput of packages in rotary tubular kiln apparatus
In a method for increasing the throughput of packages of waste material of a high caloric value of rotary kiln plants which include a rotary tube with a combustion chamber and a post combustion...
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7547209 |
Vertical heat treatment system and automatic teaching method for transfer mechanism
A transfer mechanism 21 of a vertical heat treatment system 1 includes a base capable of vertical movement and turning movement, and plural substrate support devices, disposed on the base so as...
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7416405 |
Vertical type of thermal processing apparatus and method of using the same
A vertical type of thermal processing apparatus of the present invention includes a thermal processing furnace having a furnace opening at a lower portion thereof. A boat holding objects to be...
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7411165 |
Product stream heater
In an apparatus and a method for heating product streams, particularly food product streams containing fruits or fruit pieces, the product 47 flows through a product-carrying channel 2 . The...
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7358469 |
Apparatus for microwave heat treatment of manufactured components
An apparatus for heat treating manufactured components using microwave energy and microwave susceptor material. Heat treating medium such as eutectic salts may be employed. A fluidized bed...
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7311519 |
Raw material feeding apparatus for rotary hearth furnace
The invention provides a raw materials feeding apparatus capable of uniformly dispersing and feeding into a furnace agglomerated raw materials that are likely to undergo dusting, deformation and...
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6824736 |
Pusher furnace rails with plate-shaped sliding supports and sliding shoes
The invention relates to a pusher furnace ( 1 ) for the annealing treatment of aluminum bars for instance. Rails ( 7 ) with plate-shaped sliding supports ( 8 ) are provided. Said supports cover the...
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6814573 |
Vacuum heat-treatment apparatus
A vacuum heat-treatment apparatus for heat-treating a workpiece in a treating cell includes a hermetic chamber disposed at the center. A plurality of treating cells are disposed along the periphery...
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6736636 |
Thermal processor with gas supply
A thermal processing unit of the invention includes a processing container that can contain an object to be processed therein, the processing container having a lower end provided with an opening....
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6669471 |
Furnace conveyer belt having thermal barrier
A brazing furnace includes a housing defining an interior environment having an inlet and an outlet, a plurality of heating elements mounted within the housing and adapted to heat the interior...
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6575739 |
Configurable wafer furnace
A processing system including a chamber defining an interior cavity having a processing tube assembly arranged within the interior cavity. A heating assembly moveable relative to the processing...
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6537010 |
Wafer boat support and method for twin tower wafer boat loader
An apparatus for automatically and simultaneously loading/unloading a plurality of wafer boats ( 24 ) onto/from a cantilever paddle includes a cantilever paddle ( 47 - 1 ) and a carriage ( 42 - 1 )...
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6503079 |
Substrate processing apparatus and method for manufacturing semiconductor device
An apparatus and a method for manufacturing a semiconductor device can provide a good quality film growth in a highly clean reaction atmosphere unaffected by contamination from a furnace opening...
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6494994 |
Pulp heating apparatus
A pulp heating apparatus has a heater main body 1 which has a pulp introduction port for introducing pulp, a vapor introduction port for introducing vapor, a disperser for dispersing the pulp...
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6483082 |
Heater lift lead screw for vertical furnaces
A heater lift mechanism with a ball screw linear actuator provides a relatively maintenance free lift mechanism with low starting torque and high positional accuracy. The heater lift mechanism can...
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6450804 |
Compact continuous charging apparatus
An improved method and apparatus for charging, preheating and refining steel. The charging apparatus has a skirted charging section for introducing charge materials, a dynamic gas seal adjacent the...
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6431860 |
Material feeding mechanism in association with continuous sintering apparatus
In a material feeding mechanism in association with a continuous sintering apparatus, a material (S) carried by a transporting conveyer (1) into an atmosphere-displacement chamber (2) is fed into a...
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6409503 |
Heat treatment method and heat treatment apparatus
When carrying workpieces from a loading area in which the workpieces are handled into a heat treatment furnace to make the workpieces subjected to a heat treatment process using a predetermined...
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6402508 |
Heat and cooling treatment apparatus and substrate processing system
The present invention is an apparatus for performing heat and cooling treatments for a substrate includes: a heating table for mounting the substrate thereon to perform the heat treatment for the...
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6390811 |
High-temperature and high-pressure treatment device
To provide a high-temperature and high-pressure treatment device in which articles to be treated such as wafers of LSI semiconductors can be transported in a stable attitude, and the entire...
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6390753 |
System for loading, processing and unloading substrates arranged on a carrier
In a system for loading, processing and unloading substrates, a carrier has a bottom and a plurality of slots to receive a plurality of substrates for processing in a reactor. The reactor is...
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6367163 |
Hot air dryer
A hot air slurry dryer having a cylindrical housing with a central shaft rotatably mounted in the housing. Material to be dried moves from an upstream end of the housing to an outlet at a...
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6352399 |
Twin tower wafer boat loading system and method
An apparatus for automatically and simultaneously loading a single long wafer boat or a plurality of wafer boats onto a cantilever paddle includes a stationary first track aligned with a first...
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6336775 |
Gas floating apparatus, gas floating-transporting apparatus, and thermal treatment apparatus
A gas floating-transporting apparatus transports a material to be treated along a predetermined direction in a thermal space so as to thermally treat the material to be treated. The apparatus...
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6318948 |
Substrate transfer apparatus and substrate processing apparatus
This invention related to a substrate transfer apparatus having an arm holder moving into and out of a cassette while a substrate is mounted thereon, a forward and backward driving mechanism for...
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6318944 |
Semiconductor fabricating apparatus, method for modifying positional displacement of a wafer in a wafer cassette within the semiconductor fabricating apparatus and method for transferring the wafer cassette
A semiconductor fabricating apparatus having a vertical reaction furnace, a boat for holding plural wafers in a multi-layered fashion and being loaded into the vertical reaction furnace, a storage...
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6290494 |
Method and apparatus for coal coking
The invention provides a coke oven charging machine including a mobile frame and a coke oven feed device on the mobile frame. The coke oven feed device includes a movable, elongate charging plate...
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6270305 |
High temperature conveyor furnace with low friction conveyor travel surface
A high-temperature conveyor furnace with a low friction conveyor travel surface is provided. The furnace includes a muffle defining a heating chamber, hearth plates providing a hearth surface...
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6257820 |
Atmospheric rotary feed and discharge turret valve and method
A transfer valve assembly (10) for use as a feed valve or a discharge valve includes a series of open-faced pockets (46) biased by leaf springs (48) off of a central hub (44) and an arcuate saddle...
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6238210 |
Furnaces for reheating siderurgical products
A heating furnace reheats batches of iron steel products, which differ in their thermal state, introduced in succession into the furnace. The furnace has heating zones followed by at least two...
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6234788 |
Disk furnace for thermal processing
A furnace for thermal processing of substrates includes a substrate cassette that supports at least one substrate and a process chamber for thermal processing. A process chamber that includes a...
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6193506 |
Apparatus and method for batch thermal conditioning of substrates
A substrate heater having a chamber, a heating element located in the chamber, and an elevator having a substrate holder. The holder can hold a plurality of planar substrates in a general spaced...
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6190113 |
Quartz pin lift for single wafer chemical vapor deposition/etch process chamber
A wafer support device is provided. The wafer support device includes a susceptor having a surface configured to support a bottom surface of a wafer. The susceptor has a plurality of guiding...
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6168427 |
Apparatus for guiding the removal of a processing tube from a semiconductor furnace
A processing chamber tube used in a semiconductor furnace is guided during its removal from the furnace by a plurality of circumferentially spaced guides. The guides are mounted for adjustable...
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6082442 |
Apparatus for removal and cooling of ash from the bed of a fluidized bed furnace
A floor (2) of the device communicates with one or more ash-extraction pipes (3) associated with a semi-cooled conveyor. The conveyor is a drag conveyor (5) that travels over a semi-cooled floor...
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6056543 |
Article transport system
A transport system operates to convey articles preferably through an oven before their subsequent removal. The transport system is synchronized with an article delivery system to receive and...
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6053688 |
Method and apparatus for loading and unloading wafers from a wafer carrier
A wafer handling apparatus and method includes a wafer carrier station for supporting a wafer carrier, such as an enclosed pod, that holds one or more wafers. A grounded interface panel is provided...
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6038788 |
Chuck assembly with a contamination prevention device for a semiconductor wafer transfer apparatus
A wafer transfer apparatus used during the processes of manufacturing semiconductor devices has a chuck assembly which includes at least a pair of retainers for accommodating a group of wafers,...
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6030167 |
Apparatus for loading wafers into a horizontal quartz tube
An apparatus for loading wafers into horizontal quartz tube, the apparatus includes a base plate, holding plate, trolley main body and two supporting bases. The base plate has a plurality of...
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6018884 |
Air blow apparatus for a semiconductor wafer
An air blow apparatus peels wafers off and simultaneously removes grease and grindstone grains by blowing air into gaps formed between semiconductor wafers sliced by a wire saw from a semiconductor...
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6016612 |
Process and device for drying of substrates
To dry semiconductor substrates, especially silicon wafers subsequent to rinsing after etching, the substrate is exposed to the action of radiation which contains an IR portion and a UV portion,...
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5984671 |
Sealing device useful for providing air-seal self-controlled discharge of product from a process equipment such as a vertical shaft kiln
This invention relates to a sealing device useful for attachment to a process equipment such as vertical shaft kiln (VSK) for providing air-seal self-controlled discharge of product from the said...
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5906855 |
Method and device for baking food
A method pertaining to the baking of products (B) in a baking oven (1) in which the products are supported by at least one rotary oven trolley (17) comprises rotating the trolley through a number...
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5904478 |
Semiconductor processing furnace heating subassembly
A vertically oriented thermal processor for processing batches of semiconductor wafers held within a processing chamber. The processing chamber is contained within a processing vessel. A furnace...
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5900208 |
High-temperature flowable sintering bath and method of using same
An apparatus and method for high-temperature precision sintering applications are disclosed wherein a flowable bed of a refractory particulate material is used to support an article during...
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5897311 |
Support boat for objects to be processed
A support boat for objects-to-be-processed including a plurality of support shelves formed in multi-stages spaced from each other by a vertical pitch for mounting a plurality of...
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5895215 |
Charging apparatus for a rotary hearth furnance
An apparatus for charging a feed material onto a rotating hearth of a rotary hearth furnace, the rotary hearth furnace including refractory lined inner and outer walls and having a refractory roof...
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5890890 |
Kiln assembly
A kiln assembly (10) with a tunnel kiln (12) having an entrance (14) and exit (16). Two parallel guideways (18) are provided extending through the kiln (12), each adjacent a side wall of the kiln...
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5888048 |
Automatic wafer boat loading
A system for automatic loading of wafer boats onto a cantilever paddle for insertion of the wafer boats into a furnace tube includes an end effector carriage moving on a track and supporting an end...
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5883919 |
Diffusion furnace system for preventing gas leakage
A furnace system for preventing gas leakage is disclosed. The furnace system includes a bottom board for holding a furnace tube. A gas injection device is connected to the furnace tube at a first...
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