Matches 1 - 50 out of 278 1 2 3 4 5 6 >
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7384181 Milled asphalt pavement recycling  
A milled materials processor consists of a self contained, stationary or fully mobile thermal process plant for the thermal processing of 100% recycled asphalt pavement into new hot mix paving...
7329947 Heat treatment jig for semiconductor substrate  
When a two-division structure heat treatment jig for semiconductor substrate that includes a silicon first jig that comes into direct contact with a semiconductor substrate that is heat treated and...
7255829 Method and apparatus for treatment of metallic workpieces  
A method and an apparatus for the thermal treatment of metallic workpieces with which gas quenching can be obtained that is low in distortion, even for workpieces with an undulating shape or...
7204887 Wafer holding, wafer support member, wafer boat and heat treatment furnace  
The present invention provides a wafer holder, a wafer support member, a wafer boat and a heat treatment furnace, which are capable of sufficiently suppressing slip dislocations, without lowering...
7044731 Heat treatment apparatus  
Exhaust pressure in an exhaust system 15 that evacuates a processing furnace 2 is determined as absolute pressure by using a differential manometer 23, which measures the exhaust pressure as...
7029505 Sheet type heat treating apparatus and method for processing semiconductors  
The single substrate thermal processing apparatus ( 2 ) includes a process chamber ( 5 ) arranged to accommodate a target substrate (W) and provided with a showerhead ( 10 ) disposed on its...
7018585 Annealing apparatus  
An annealing apparatus includes a gas tight hollow main body, a conveying apparatus and a gas grid. A heating apparatus and a cooling apparatus are installed at an inlet and an outlet of the main...
7005249 Apparatus for processing substrate and method of processing the same  
A heating apparatus for a substrate to be processed with a coating film has a chamber with an inner space, a heating plate heating the substrate to be processed in the inner space, and a partition...
6952889 Forced convection assisted rapid thermal furnace  
An apparatus and corresponding method for heating a wafer during processing. The apparatus includes a process chamber enclosing a processing tube defining a processing area. The processing tube...
6930285 Firing furnace for plasma display panel and method of manufacturing plasma display panel  
In a firing furnace of plasma display panel, gas distribution piping and gas exhaust piping each have a circular cross section and a uniform diameter along the longitudinal direction of those...
6863732 Heat treatment system and method  
The present invention relates generally to a heat treatment system and method for heat-treating an object to be treated. Particularly, the invention relates to a heat treatment system wherein an...
6767206 Arrangement and method for heating gas in a gas duct in connection with continuously operated sintering  
The invention relates to an arrangement and method for heating gases in a gas circulation duct in connection with continuously operated sintering. In the sintering furnace, hot gas is fed in from...
6658762 Method and apparatus for transporting substrates in OLED process  
A method and an apparatus for transporting substrates in all organic light emitting diode (OLED) process is disclosed, which has a transferring chamber provided for transporting substrates between...
6644964 Substrate processing apparatus and substrate processing method  
A heating processing chamber has a plate for holding a wafer and a heater heating the plate portion. The plate portion is composed of a plurality of divided plates separated from each other, and...
6644963 Batch-type kiln  
A novel batch-type kiln and a method of use thereof are provided. The kiln comprises a kiln body and a heating chamber disposed within the kiln body, which has a heater disposed therein. A table is...
6644962 Heating furnace having heat regenerating burners and operation method thereof  
A method of controlling a furnace pressure for preventing air from intruding to a heating furnace, a method of stable operation during low combustion load of heat regenerating burners and a method...
6609907 Apparatus and method to control emissions of nitrogen oxide  
A combustion apparatus and process for improved flue gas recirculation wherein the recirculation line penetrates into an exhaust duct, such as the exhaust stack for capturing and directing a...
6544034 Heat treatment equipment for object to be treated and its exhausting method  
This invention provides a heat treatment equipment for an object to be treated capable of removing the desorption gas effectively, and of ensuring the equality of the temperature in the plane of...
6540509 Heat treatment system and method  
The present invention relates generally to a heat treatment system and method for heat-treating an object to be treated. Particularly, the invention relates to a heat treatment system wherein an...
6539934 Multiconveyor convection oven  
The multiconveyor convection oven comprises a baking chamber, at least two spaced-apart conveyors mounted transversally one over the other in the baking chamber, a heating chamber behind the baking...
6506256 Method and apparatus for diffusion of an impurity into a semiconductor wafer with high in-plane diffusion uniformity  
The present invention provides an apparatus for diffusing an impurity into a semiconductor wafer comprising: a diffusion furnace tubs which has a longitudinal center axis extending along a vertical...
6473993 Thermal treatment method and apparatus  
A semiconductor wafer is mounted on a susceptor disposed in a processing chamber, the wafer is heated at a temperature on the order of 1000° C. for annealing, and a gas is supplied from a gas...
6442867 Apparatus and method for cleaning a vertical furnace pedestal and cap  
A system ( 10 ) is disclosed for cleaning a vertical furnace ( 12 ) pedestal ( 34 ) and cap ( 36 ) including at least one inlet conduit ( 40 ) in fluid communication with a pressurized cleaning...
6442866 Method and apparatus for drying or heat-treating products  
The invention relates to a method and an apparatus for drying or heat-treating substances or products at a pressure other than atmospheric pressure. The invention relates furthermore to banana...
6435865 Apparatus and method for positioning gas injectors in a vertical furnace  
A vertical furnace equipped with self-positioning gas injectors for processing wafers and a method for mounting self-positioning gas injectors in the furnace are disclosed. The vertical furnace is...
6418755 Glass melting apparatus and method including exhausting the furnace atmosphere by removal of a heating element  
A system for melting and delivering glass to a work area such as spinners for making fiberglass includes a melter with heaters so arranged that the “hot spot” in the molten glass is located...
6394794 Modular furnace system  
A modular furnace is fabricated from at least one module having a frame, a removable cover mounted to the frame, exterior cover panels on the frame, and an insulated case fastened to the interior...
6328560 Pressure processing apparatus for semiconductors  
An inner vessel 16 capable of hermetically surrounding a portion for disposing works W is disposed to the inside of a pressure vessel 4, the inner vessel 16 is provided with a gas introducing...
6328558 Purge chamber  
A purge chamber for providing a controlled atmosphere for the treatment of materials comprises a housing within which materials to be treated may be passed through and subjected to a cross-flow of...
6247922 Helical oven with improved belt drive  
An oven comprises a housing provided with heating means, as well as an endless conveyor belt on which products to be heated can be accommodated and can be transported through the housing between an...
6217319 Semiconductor manufacturing device and method of processing wafer  
A hot plate unit includes a cover. The cover includes an inner wall and an outlet. There is provided immediately under the outlet a plate having a ventilation hole. The distance between the plate...
RE36960 Muffle convection brazing/annealing system  
A convection muffle furnace for brazing and/or annealing a workpiece includes a muffle having towers formed integrally therewith and being mounted movable relative to a top wall of a furnace....
RE36941 Dual conveyor oven  
The oven of the present invention is a low profile, dual conveyer conveyor oven including an oven cabinet, two closely spaced conveyers conveyors and an air heating and circulation system....
6120285 Dimpled thermal processing furnace and method for processing semiconductor wafers  
A tube for use in a thermal processing furnace. The tube comprises an elongated cylindrical tube having an inner surface with a plurality of dimples disposed thereon. In one preferred version of...
6116896 System and method for oxidant injection in rotary kilns  
A system and method for increasing the amount of oxygen in a kiln chamber is disclosed. The radial surface of a rotatable kiln is provided with at least one oxidant injection port extending through...
6116894 Continuous furnace  
A continuous furnace for baking ceramic molded parts has a heating area (14), a baking area (16) and a cooling area (18). At least one smoke gas duct (22) extends from the heating area (14) into a...
6106281 Method of reducing the flow of gas needed for a chamber with controlled temperature and controlled composition of gas  
A temperature-controlled chamber, such as an inerted oven for soldering, in which the buoyancy-induced motion of gas at the opening of the chamber is suppressed by adjusting the densities of gases....
6102693 Preheating method in a continuous furnace  
In order to prevent air pollution, gases evaporated from articles preheated in a preheating chamber of a continuous furnace are automatically and compulsorily sucked into a high-temperature chamber...
6074202 Apparatus for manufacturing a semiconductor material  
An apparatus for manufacturing a semiconductor material includes a load-lock chamber which can contain a cassette for holding at least one wafer for taking the wafer into or out of the apparatus, a...
6059567 Semiconductor thermal processor with recirculating heater exhaust cooling system  
In summary, the vertical rapid cooling furnace of this invention for treating semiconductor wafers with self contained gas chilling and recycling comprises a hot wall reaction tube positioned...
6050814 Forced convection furnace for heating glass sheets  
A forced convection furnace (20) and method for heating glass sheets includes a forced convection heater (42) having lower hot gas distributors (44) located below alternate conveyor rolls (38) to...
6036482 Heat treatment method  
5997286 Thermal treating apparatus and process  
A thermal treating apparatus and process providing convection thermal transfer for elevated processing temperatures and chemical treatment. A recirculation plenum for passage of spent treatment...
5974833 Heat transfer method in glass sheet bending oven and a bending oven  
A heat transfer method in a glass bending furnace, which has a top array of of successive heating sections (2) and under it a bottom array of successive cooling sections (3), and in which method...
5971752 Sintering plant  
A sintering plant includes an apparatus for transporting sinter material along a sintering section through at least one first zone in which the sinter material heats to a low temperature, and...
5970857 Baking oven  
In a baking oven comprising at least one hearth, a baking conveyor belt, which is guided over a deflection roller, is allocated to each hearth. The deflection roller is extended out of the baking...
5951282 Vertical heat treatment apparatus  
The vertical heat treatment apparatus for semiconductor wafers (W) includes a heat treatment furnace (19). In the heat treatment furnace (19), the wafers (W) are subjected to a batch treatment in a...
5951281 Gas flow circulation type tubular heating equipment  
The present invention relates to a gas recirculating tubular heating equipment which improves the heat transfer performance, reduces a heat transfer area to approximately 1/2 or under of that of a...
5947718 Semiconductor processing furnace  
A vertically oriented thermal processor for processing batches of semiconductor wafers held within a processing chamber. The processing chamber is contained within a processing vessel. A furnace...
5944515 Reversing air flow oven  
A reverse air flow oven for symmetrically heating product inserted within a heating chamber in the oven. The oven includes duct work configured symmetrically about the heating chamber, and a fan...
Matches 1 - 50 out of 278 1 2 3 4 5 6 >