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7390611 |
Photoresist coating composition and method for forming fine pattern using the same
A photoresist coating composition that includes a compound represented by Formula 1 and an aqueous solvent, and a method for forming a fine pattern by coating the composition on a photoresist...
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7384730 |
Top coating composition for photoresist and method of forming photoresist pattern using same
Top coating compositions capable of being used in immersion lithography, and methods of forming photoresist patterns using the same, are provided. The top coating composition includes: a polymer, a...
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7378223 |
Photoresist resin composition
The invention provides photoresist resin compositions and in particular, a photoresist resin compositions comprising a) an acrylate monomer having two urethane bonds, b) a crosslinkable urethane...
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7374859 |
Protective layers compatible with thick film pastes
This invention relates to novel processes comprising a protective polymer layer in the fabrication of electronic devices using thick film pastes. The protective polymer layer is fabricated from...
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7371510 |
Material for forming resist protecting film for use in liquid immersion lithography process, composite film, and method for forming resist pattern
Provided are a material for forming a resist protecting film which is for use in a liquid immersion lithography process and which is formed on a resist film, wherein the material has the following...
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7371504 |
Lithographic printing plate precursor
A lithographic printing plate precursor capable of forming an image upon irradiation with an infrared laser comprising a support, a first layer containing as the main component an alkali-soluble...
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7364835 |
Developer-soluble materials and methods of using the same in via-first dual damascene applications
Wet-recess (develop) gap-fill and bottom anti-reflective coatings based on a polyamic acid or polyester platform are provided. The polyamic acid platform allows imidization to form a polyimide when...
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7364832 |
Wet developable hard mask in conjunction with thin photoresist for micro photolithography
A novel process for using a hard mask or protective layer in conjunction with an extremely thin photoresist is provided. In this process, a thin film of the protective layer is coated on the...
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7358035 |
Topcoat compositions and methods of use thereof
A topcoat composition that includes a fluorine-containing polymer and a casting solvent selected from the group consisting of α,α,α-trifluorotoluene,...
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7351517 |
Lithographic printing with printing members including an oleophilic metal and plasma polymer layers
Printing members that include a plasma polymer layer exhibit enhanced tolerance for high imaging-power densities. The plasma polymer layer may contain or be adjacent to an oleophilic metal such as...
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7341821 |
Method for manufacture of lithographic printing plate precursor no dampening water
A method for manufacturing a lithographic printing plate precursor requiring no dampening water including: a support, a light-to heat conversion layer; and a silicone rubber layer in this order....
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7338746 |
Lithographic printing plate precursor and lithographic printing method
A lithographic printing plate precursor comprising: a support; an image recording layer comprising (A) an actinic ray absorber, (B) a polymerization initiator, and (C) a polymerizable compound,...
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7335456 |
Top coat material and use thereof in lithography processes
A top coat material for applying on top of a photoresist material is disclosed. The top coat material includes a polymer, which includes at least one fluorosulfonamide monomer unit having one of...
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7335455 |
Method of forming an underlayer of a bi-layer resist film and method of fabricating a semiconductor device using the same
A method of forming an underlayer of a bi-layer resist including forming a blended material by blending a polymer having an aromatic group and a methacrylate polymer, and coating a substrate with...
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7332262 |
Photolithography scheme using a silicon containing resist
A method for forming a patterned amorphous carbon layer in a semiconductor stack, including forming an amorphous carbon layer on a substrate and forming a silicon containing photoresist layer on...
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7329477 |
Process for forming a fine pattern using a top-coating composition for a photoresist and product formed by same
The present invention provides a process for using an amine contamination-protecting top-coating composition. Preferably, the amine contamination-protecting top-coating composition of the present...
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7326525 |
Top anti-reflective coating polymer, its preparation method and top anti-reflective coating composition comprising the same
Disclosed herein are top anti-reflective coating polymers used in a photolithography process, methods for preparing the anti-reflective coating polymer, and anti-reflective coating compositions...
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7316886 |
Protective film-forming composition for immersion exposure and pattern-forming method using the same
A protective film-forming composition for immersion exposure comprises a water-insoluble and alkali-soluble resin comprising a repeating unit derived from a monomer having an acid dissociation...
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7316874 |
Process and donor elements for transferring thermally sensitive materials to substrates by thermal imaging
Methods of forming a patterned semiconducting-dielectric material on a substrate by thermal processes are disclosed, comprising heating a thermally imageable donor element comprising a substrate...
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7314702 |
Composition for a bottom-layer resist
A composition for a bottom-layer resist, having superior anti-refractivity and dry-etch resistance for use in a bi-layer resist process employing a light source at a wavelength of 193 nm or below,...
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7303858 |
Photoacid generating polymer, its preparation method, top anti-reflective coating composition comprising the same, method of forming a pattern in a semiconductor device, and semiconductor device
Disclosed herein is a photoacid generating polymer represented by Formula 1 below:
wherein R 1 is a C 1-10 hydrocarbon or a C 1-10 hydrocarbon in which the hydrogen atoms are wholly or...
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7303856 |
Light-sensitive sheet comprising support, first light-sensitive layer and second light-sensitive layer
A light-sensitive sheet comprises a support, a first light-sensitive layer and a second light-sensitive layer in this order. Each of the first and second light sensitive layers independently...
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7303854 |
Electrode-forming composition for field emission type of display device, and method using such a composition
A composition utilized in and a method for forming an electrode used in field emission type of display devices said composition is a photosensitive copper conductive composition comprising: a...
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7300743 |
Radiation durable organic compounds with high transparency in the vacuum ultraviolet, and method for preparing
This invention concerns radiation durable organic compositions which are well-suited for use in 157 nm lithography by virtue of their high transparency and excellent radiation durability, and to a...
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7294447 |
Positive-working lithographic printing plate precursor
A lithographic printing plate precursor is disclosed which comprises (i) a support having a hydrophilic surface or which is provided with a hydrophilic layer and (ii) a coating provided thereon,...
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7291440 |
Bakeable multi-layer imageable element
Thermally imageable multilayer imageable elements useful as lithographic printing plate precursors that have good solvent resistance are disclosed. The underlayer of the imageable element comprises...
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7285373 |
Polymer and chemically amplified resist composition containing the same
A chemically amplified resist composition includes a novel polymer, a photoacid generator, and a solvent. The chemically amplified resist can form a resist pattern that is excellent in...
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7285372 |
Radiation-sensitive elements and their storage stability
Radiation-sensitive element comprising (a) a substrate with at least one hydrophilic surface and (b) a radiation-sensitive coating on at least one hydrophilic surface of the substrate, wherein the...
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7282256 |
Photosensitive resin laminate for sign boards
A photosensitive resin laminate for a sign board is provided, which laminate has a support and a photosensitive resin layer having a thickness of not less than 500 μm formed at least on the...
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7279266 |
Photosensitive composition and lithographic printing plate precursor using the same
A photosensitive composition comprising:
(A) a polymerizable compound represented by the following formula (I):
A—{O—[(CH(—R...
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7270937 |
Over-coating composition for photoresist and process for forming photoresist pattern using the same
Overcoating compositions for a photoresist and methods of using the same are disclosed. More specifically, overcoating compositions for a photoresist comprising materials which can weaken acid...
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7267928 |
Printing plate material and printing process
Disclosed is a printing plate material comprising a support and provided thereon, a hydrophilic layer and a thermosensitive image formation layer containing a blocked isocyanate compound, which is...
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RE39835 |
UV-absorbing support layers and flexographic printing elements comprising same
The present invention provides a method for producing direct-imaged flexographic printing elements such that both the front and back exposure times are economically efficient for the manufacturer....
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7264918 |
Resist composition for liquid immersion exposure process and method of forming resist pattern therewith
A resist composition for liquid immersion lithography process, which comprises: (A) a polymer comprising (a1) alkali-soluble constitutional units each comprising an alicyclic group having both (i)...
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7255967 |
Image forming method used in liquid crystal display device for both reflection and transmission modes
The present invention provides an image forming method comprising the steps (1) to (5): (1) forming a first negative photosensitive resin layer on a substrate; (2) forming a barrier layer on the...
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7241537 |
Method for producing an exposed substrate
Method for producing an exposed substrate, which has at least two different image areas. The substrate is provided with at least two photoresist layers, which are adjusted to the type of image...
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7238462 |
Undercoating material for wiring, embedded material, and wiring formation method
This invention provides an undercoating layer material and a filler material containing a resin component having at least a substituent group which is capable of releasing a terminal group to form...
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7235346 |
Photosensitive, flexo printing element and method for the production of newspaper flexo printing plates
The present invention relates to a photosensitive flexographic printing element for the production of flexographic newspaper printing plates, comprising at least a flexible, metallic support, an...
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7235345 |
Agent for forming coating for narrowing patterns and method for forming fine pattern using the same
It is disclosed an over-coating agent for forming fine patterns which is applied to cover a substrate having photoresist patterns thereon and allowed to shrink under heat so that the spacing...
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7232649 |
Method for thermally processing photosensitive printing sleeves
An improved method of manufacturing a photosensitive printing element that minimizes relief variation and improves image fidelity. The method involves a step of pre-curing the first (floor layer)...
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7223527 |
Immersion lithography process, and structure used for the same and patterning process
An immersion lithography process is described. First, a photoresist layer on a material layer is formed. Then, an acid compensation layer is formed on the photoresist layer. An immersion exposure...
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7223523 |
Demonstration kit and method for enhancing and/or demonstrating photoactive properties
A method is provided for simulating and/or demonstrating and/or enhancing photoactive properties, such as hydrophilicity, of a surface, such as a photoactive surface. One embodiment includes...
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7217498 |
Heat-sensitive lithographic printing plate precursor
A heat-sensitive lithographic printing plate precursor comprising a support having thereon two image-forming layers each containing a polymer insoluble in water and soluble in an aqueous alkaline...
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7213516 |
Method of processing laser sensitive lithographic printing plate
A method of developing a laser sensitive lithographic printing plate with ink and/or fountain solution is described. The printing member comprises on a substrate a photosensitive layer soluble or...
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7205093 |
Topcoats for use in immersion lithography
A method of forming a top coat layer and a topcoat material for use in immersion lithography. A topcoat layer is formed on a photoresist layer from an aqueous solution that is immiscible with the...
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7205092 |
Photosensitive resin printing plate original, process for producing the same and process for producing resin relief printing plate therewith
A photosensitive resin printing plate precursor including: a photosensitive resin layer (A) containing a water-soluble or water-dispersible resin and an ultraviolet-curable monomer; and a...
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7205091 |
Lithographic printing with printing members having primer layers
A primer layer that includes a surface-tension modifier dispersed within a polymer binder is disposed between the imaging layer and the substrate of a lithographic printing member to inhibit the...
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7198887 |
Organic anti-reflective coating polymer, its preparation method and organic anti-reflective coating composition comprising the same
Disclosed are an organic anti-reflective coating polymer having a structure represented by the following formula I, its preparation method and an organic anti-reflective coating composition with...
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7198876 |
Method of preparation of lithographic printing plates
A method for preparation of a lithographic printing plate, which comprises the steps of: imagewise recording on a lithographic printing plate precursor comprising a support having a hydrophilic...
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7192690 |
Process of preparing planographic printing plate
Disclosed is a process of preparing a planographic printing plate from a light sensitive planographic printing plate material comprising a hydrophilic support and provided thereon, an image...
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