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8173330 |
Pellicle
A pellicle is provided that includes an aluminum pellicle frame having an anodized layer on its entire surface; and a pellicle film stretched over and affixed to an end face of the pellicle frame,...
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8026023 |
Lithographic pellicle
A lithographic pellicle is provided that includes a pellicle frame, a pellicle film stretched over one end face of the pellicle frame via a pellicle film adhesive, and an exposure master plate...
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8012651 |
Mounting a pellicle to a frame
A pellicle membrane is mounted between an outer frame and an inner frame. At least one of the frames is attached to the reticle without using conventional adhesives. The pellicle and reticle may be...
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7992331 |
Magical image cups and containers with 3D displays
An optical illusion device such as a drinking glass/cup for providing a multi-dimensional visual display. The device includes a body with tubular sidewalls extending from an opening at a first end...
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7951513 |
Pellicle and method for producing pellicle
A silicon single crystal film having a crystal plane as its principal plane, the crystal plane being inclined at 3 to 5° from any lattice plane belonging to {100} planes or {111} planes is used as ...
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7927763 |
Pellicle for photolithography and pellicle frame
There is disclosed a pellicle 1 for photolithography comprising, a pellicle frame 2 for constituting a pellicle for photolithography, wherein the frame is made of an aluminum alloy whose surface is...
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7923341 |
Higher selectivity, method for passivating short circuit current paths in semiconductor devices
A method for passivating short circuit defects in a thin film large area photovoltaic device in accordance with an exemplary embodiment is provided. The method employs a passivation agent and a...
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7919217 |
Pellicle and method for producing pellicle
A pellicle film of a silicon single crystal film and a base substrate supporting the pellicle film are formed of a single substrate using an SOI substrate. The base substrate is provided with an...
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7901846 |
Pellicle and method for manufacturing the same
A pellicle of the present invention is provided with a silicon crystal film, the absorption coefficient of which is 0.005/nm or lower with respect to light having a wavelength of 13.5 nm, as a...
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7900384 |
Magical image cups and containers with 3D displays
An optical illusion device such as a drinking glass/cup for providing a multi-dimensional visual display. The device includes a body with tubular sidewalls extending from an opening at a first end...
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7767985 |
EUV pellicle and method for fabricating semiconductor dies using same
According to one exemplary embodiment, an extreme ultraviolet (EUV) pellicle for use with a lithographic mask comprises a carbon nanotube film. The carbon nanotube EUV pellicle can be mounted on...
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7723704 |
EUV pellicle with increased EUV light transmittance
According to one exemplary embodiment, an extreme ultraviolet (EUV) pellicle for protecting a lithographic mask includes an aerogel film. The pellicle further includes a frame for mounting the...
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7666555 |
Pellicle, methods of fabrication and methods of use for extreme ultraviolet lithography
Embodiments of a pellicle, methods of fabrication and methods of use in extreme ultraviolet (EUV) photolithography are disclosed. The pellicle may include a wire mesh with a square or hexagonal...
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7629090 |
Reticle and method of manufacturing method the same
A reticle and a method of producing the same are disclosed. The reticle includes a medium layer formed on a transparent substrate, chrome layer patterns spaced apart from each other at...
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7473501 |
Method for reducing photo-mask distortion
The present invention describes a structure and method for reducing or eliminating the flatness distortion effects of a photomask assembly which occurs when a pellicle is mounted to the photomask....
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7432023 |
Method for producing a pellicle for lithography
There is provided a pellicle for lithography which has at least, a pellicle film for dustproof protection, a pellicle frame to which the pellicle film is adhered, an adhesive layer provided on one...
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7430823 |
Snow globe
A snow globe comprises a holder and a photo frame. The holder comprises a globe, a stand and a base. The globe is transparent and comprises a slot, a frame mount and decoration comprising...
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7351503 |
Fused silica pellicle in intimate contact with the surface of a photomask
A fused silica pellicle for use on photomasks having increased durability and improved transmission uniformity and birefringence properties. The pellicle is to be intimately secured to the...
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7316869 |
Mounting a pellicle to a frame
A pellicle membrane is mounted between an outer frame and an inner frame. At least one of the frames is attached to the reticle without using conventional adhesives. The pellicle and reticle may be...
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7314667 |
Process to optimize properties of polymer pellicles and resist for lithography applications
Disclosed are pellicle compositions and methods of making such pellicle compositions. The pellicle compositions provided include highly fluorinated polymers as well as fluorinated polymer/PVDF...
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7312287 |
Fluorinated polymers useful as photoresists, and processes for microlithography
This invention provides a fluorine-containing copolymer having a repeat unit derived from at least one fluorinated olefin and a repeat unit derived from at least one polycyclic ethylenically...
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7288299 |
Fullerenes to increase radiation resistance in polymer-based pellicles
A pellicle made of a polymer material contains fullerenes within the polymer material to reduce the damaging effects of radiation that is transmitted through the pellicle during an exposure...
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7282525 |
Pellicle, producing method thereof and adhesive
A pellicle comprises a pellicle film and a pellicle frame for supporting the pellicle film, wherein the pellicle film is adhered to the pellicle frame through an adhesive layer comprising a...
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7264853 |
Attaching a pellicle frame to a reticle
A pellicle membrane is mounted between an outer frame and an inner frame. At least one of the frames is attached to the reticle without using conventional adhesives. The pellicle and reticle may be...
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7220471 |
Insert film used for forming resin panel, process for producing the film and resin panel using the film
An insert film having a printed part is integrally molded to a surface of a panel body made of a resin by an insert molding. The printed part is printed on a first binder layer applied to a resin...
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7214452 |
Using perfluoropoly-ethers to form pellicles
Exposure systems may use pellicles made of perfluoropoly-ether. These materials may exhibit reduced darkening upon repeated exposures compared to other materials.
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7205074 |
Venting of pellicle cavity for a mask
The present invention describes a method of providing a substrate, the substrate being transparent to radiation at an actinic wavelength; forming an absorber layer over the substrate, the absorber...
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7199199 |
Perfluorinated polymers
Amorphous perfluorinated homopolymers and copolymers of perfluorodioxoles of formula (IA): wherein R′F is equal to RF or ORF wherein RF is a linear or branched perfluoroalkyl radical having 1–5 car...
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7000772 |
Package for the presentation of goods especially perfume
A display package for displaying merchandise includes a base, at least one merchandise receptacle located in the base and a cover. Merchandise to be packaged or displayed is inserted into the...
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6994897 |
Method of processing high-resolution flex circuits with low distortion
A mechanism and a method for framing a low-distortion flexible dielectric substrate during subsequent flex circuit processing. The processing method comprising the following steps: making a...
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6986918 |
System and method for facilitating customer appreciation
The present invention relates to an article for association with a motor vehicle. The article may include a base, and a plurality of inserts received in the base. Each insert has at least two...
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6984474 |
Reticle barrier system for extreme ultra-violet lithography
The present invention is directed to a reticle barrier system that prevents contaminants from landing on a mask within lithographic systems using extreme ultra violet light. In particular, a...
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6977126 |
Pellicle, photomask, pellicle frame, and method for manufacturing pellicle
A pellicle for protecting a reticle, on which a circuit pattern is formed for manufacturing a semiconductor device, from an attachment of a foreign matter, comprising: a pellicle film having a...
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6921613 |
Electrostatic pellicle system for a mask
The present invention describes an apparatus comprising a mask; a pellicle spacer, the pellicle spacer attached to the mask; and an electrostatic pellicle system, the electrostatic pellicle system...
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6911283 |
Method and apparatus for coupling a pellicle to a photomask using a non-distorting mechanism
A method and apparatus for coupling a pellicle to a photomask using a non-distorting mechanism are disclosed. A pellicle is coupled to a photomask with a non-distorting mechanism that is located on...
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6893780 |
Photomask and method for reducing electrostatic discharge on the same with an ESD protection pattern
A photomask and method for reducing electrostatic discharge on the photomask with an ESD protection pattern are disclosed. A photomask includes a substrate and a patterned layer formed on at least...
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6869733 |
Pellicle with anti-static/dissipative material coating to prevent electrostatic damage on masks
The present invention is a method of protecting reticles from electrostatic damage during their use in manufacturing lines and while patterning photoresist films on device substrates. An...
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6849320 |
Decorative molding/casing
A decorative molding/casing for use in decorating a room or furniture as disclosed. The decorative molding/casing in general has a routed or lazered front surface establishing a front face section....
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6841312 |
Method and apparatus for coupling a pellicle assembly to a photomask
A method and apparatus for coupling a pellicle assembly to a photomask are disclosed. A pellicle assembly is mounted on a photomask by bringing an adhesive material formed on a surface of a frame...
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6811936 |
Structure and process for a pellicle membrane for 157 nanometer lithography
A pellicle membrane structure (800) is made by a process that includes depositing (115) a etch mask layer (110) on the backside of the semiconductor wafer, deposting (120) a first pellicle membrane...
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6803159 |
Method of keeping contaminants away from a mask with electrostatic forces
The present invention describes an apparatus comprising a mask; a pellicle spacer, the pellicle spacer attached to the mask; and an electrostatic pellicle system, the electrostatic pellicle system...
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6741333 |
Multiple image photolithography system and method
A multiple image photolithography system includes a radiation source (18) projecting electromagnetic radiation along a path. A reticle cartridge (26) is located in the path of the projected...
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6727029 |
Method for making reticles with reduced particle contamination and reticles formed
A reticle for holding a mask thereon with reduced particle contamination problem is described. The reticle is constructed by a base plate that is formed of an optically transparent material such as...
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6713136 |
Pellicle
A pellicle comprising a pellicle film, a pellicle frame supporting the pellicle film, and an adhesive resin layer provided on the surface of the pellicle frame on the side opposite to the surface...
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6703172 |
Pellicle and producing method of mask with pellicle
A pellicle comprises a pellicle frame, a pellicle film and at least two liners. The pellicle frame has one end face and the other end face and is provided at its central portion with an opening....
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6692806 |
Device for displaying photographs, certificates, compact discs and the like
A device, used for holding and displaying items such as photographs, certificates, compact discs and the like, includes a coversheet having an outward side and an inward side and an edge. A foam...
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6645580 |
Soft-shelled ornament
A soft-shelled ornament includes a transparent soft shell being clamped along an annular flange between a hold-down ring and a seat. The hold-down ring and the seat are tightly sealed into an...
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6635336 |
Luminescent mouse pad
To achieve the above-mentioned and other objectives, the present invention provides a luminescent mouse pad including a substrate, a cover including a window defined therein and a frame around the...
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6623893 |
Pellicle for use in EUV lithography and a method of making such a pellicle
A pellicle utilizes a film attached to a barrier layer above a substrate. The film is relatively transparent to radiation in the EUV range. The substrate and barrier layer are coupled to a...
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6620555 |
Pellicle, method of preparing the same and exposure method
A pellicle that excellently transmits ultraviolet rays and, particularly, vacuum ultraviolet rays, does not lose the film thickness thereof that stems from the photolysis and, hence, exhibits...
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