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7517800 |
Semiconductor device and manufacturing method thereof
A manufacturing method of a semiconductor device including a TiN film, including a deposition step of forming a TiN film by the CVD method, an anneal step of performing a heat treatment to the...
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7491431 |
Dense coating formation by reactive deposition
Methods for forming coated substrates can be based on depositing material from a flow onto a substrate in which the coating material is formed by a reaction within the flow. In some embodiments,...
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7482289 |
Methods and apparatus for depositing tantalum metal films to surfaces and substrates
Methods and an apparatus are disclosed for depositing tantalum metal films in next-generation solvent fluids on substrates and/or deposition surfaces useful, e.g., as metal seed layers. Deposition...
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7348042 |
Continuous method for depositing a film by modulated ion-induced atomic layer deposition (MII-ALD)
The present invention relates to an enhanced sequential atomic layer deposition (ALD) technique suitable for deposition of barrier layers, adhesion layers, seed layers, low dielectric constant...
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7214618 |
Technique for high efficiency metalorganic chemical vapor deposition
A technique for more efficiently forming conductive elements, such as conductive layers and electrodes, using chemical vapor deposition. A conductive precursor gas, such as a platinum precursor...
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7211300 |
Method and apparatus for performing laser CVD
An element is deposited by flowing a gas through a solid donor compound that includes the element, and over a substrate. The flow of gas deposits a film of a few monolayers of donor compound on the...
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7176044 |
B-stageable die attach adhesives
The present invention relates to b-stageable die attach adhesives, methods of preparing such adhesives, methods of applying such adhesives to the die and other substrate surfaces, and assemblies...
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7125588 |
Pulsed plasma CVD method for forming a film
A method of forming an insulating ceramic film or a metallic film by a plasma CVD process in which a high density plasma is generated in the presence of a magnetic field wherein the electric power...
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6926933 |
Method of manufacturing water-repelling film
A water-repelling film is formed by using a vacuum ultraviolet rays chemical vapor deposition (CVD) system ( 100 ) comprising a vacuum ultraviolet rays generating section ( 102 ), a reaction room (...
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6841079 |
Fluorochemical treatment for silicon articles
Silicon substrates having Si—H bonds are chemically modified using a fluorinated olefin having the formula:
wherein
m is an integer greater than or equal to 1; n is an integer...
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6808758 |
Pulse precursor deposition process for forming layers in semiconductor devices
A process for producing thin layers in electronic devices such as integrated circuit chips, is provided. The process includes the steps of injecting a precursor fluid into a thermal processing...
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6664030 |
System for and method of constructing an alternating phase-shifting mask
An exemplary method of constructing an alternating phase-shifting mask is described. This method can include providing a vapor in a vapor chamber containing a mask blank, and applying a laser to...
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6635589 |
Methods of heat treatment and heat treatment apparatus for silicon oxide films
Silicon oxide films which are good as gate insulation films are formed by subjecting a silicon oxide film which has been formed on an active layer comprising a silicon film by means of a PVD method...
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6586056 |
Silicon based films formed from iodosilane precursors and method of making the same
A method for near atmospheric pressure chemical vapor deposition of a silicon based film onto a substrate includes introducing into a deposition chamber at about atmospheric pressure: (i) a...
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6461692 |
Chemical vapor deposition method and chemical vapor deposition apparatus
A method an apparatus for chemical vapor deposition for producing a thin film. The method includes the steps of: introducing a reactive gas into a reaction chamber wherein a substrate is supported...
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6395347 |
Micromachining method for workpiece observation
A method for preparing a sample for observation, by the steps of: contacting a first predetermined area of the sample surface with an organic compound vapor while irradiating the first...
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6391528 |
Methods of making wire grid optical elements by preferential deposition of material on a substrate
A method for making wire grid optical elements by preferentially depositing material on a substrate is disclosed. Material can be preferentially deposited by directing an electromagnetic...
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6368658 |
Coating medical devices using air suspension
Methods and apparatuses for coating medical devices and the devices thereby produced are disclosed. In one embodiment, the invention includes a method comprising the steps of suspending the medical...
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6265033 |
Method for optically coupled vapor deposition
A system for the depositing of insulating, conducting, or semiconducting thin films is disclosed, in which the sputtering plasma is irradiated with a transverse, adjustable ultraviolet emission...
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6224934 |
Ozone-processing apparatus for semiconductor process system
An ozone-processing apparatus for a semiconductor process system includes an airtight process chamber and a lamp chamber, which are partitioned by a window for transmitting ultraviolet rays. A...
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6203865 |
Laser approaches for diamond synthesis
A method for producing well-crystallized adherent diamond layers on WC--Co substrates. An array of focused laser beams is scanned across the WC--Co sample. Useful lasers include the excimer,...
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6187392 |
Laser desorption of CVD precursor species
Relatively cool chemical vapor deposition precursor particles are desorbed from a target by increasing the temperature of a selected target area at a heating rate of at least about 10 6 K/sec such...
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6177147 |
Process and apparatus for treating a substrate
To produce a desirable amount of desirable radical and/or ion in treating a substrate such as etching the substrate, depositing a thin film on the substrate and the like by using plasma and the...
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6074691 |
Method for monitoring the flow of a gas into a vacuum reactor
A method for monitoring the actual flow of a gas into a vacuum facility, which flow of gas resulting from setting a desired flow of gas by means of at least one adjustable mass flow controller,...
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6033721 |
Image-based three-axis positioner for laser direct write microchemical reaction
Apparatus for determining a best trajectory for laser CVD through a strategy of acquiring a series of two-dimensional plane images of the substrate. These images, taken together, contain...
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5997963 |
Microchamber
The invented apparatus is a relatively small-volumed chamber useful for processing a substrate. The apparatus includes a reference member with a substantially flat surface. The apparatus also...
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5981001 |
Processing method for selectively irradiating a surface in presence of a reactive gas to cause etching
A processing method comprises: a first step of depositing on a substrate which is a specimen a film of any one of a semiconductor, a metal and an insulator; a second step of subjecting the...
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5925420 |
Method for preparing crosslinked aromatic polymers as low κ dielectrics
Amorphously crosslinked aromatic polymeric low κ materials and methods for their fabrication are provided. The subject materials are prepared by a modified transport polymerization process, in...
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5902651 |
Method of reducing carbon incorporation into films produced by chemical vapor deposition involving titanium organometallic and metal-organic precursor compounds
A chemical vapor deposition method of providing a layer of material atop a semiconductor substrate using an organometallic or metal-organic precursor in a manner which minimizes carbon...
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5820942 |
Process for depositing a material on a substrate using light energy
The present invention is generally directed to a process and a system for transforming a liquid into a solid material using light energy. In particular, a solution containing a parent material in a...
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5753320 |
Process for forming deposited film
A process for forming a deposited film on a substrate according to the chemical vapor deposition method comprises previously forming excited species of a gas phase compound containing atoms which...
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5750206 |
Method of pretreating metal surfaces for subsequent polymer coating
This invention relates to a new technique for preparing metal devices such as guidewires for the subsequent attachment of hydrophilic coatings. The invention also relates to guidewires and other...
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5728224 |
Apparatus and method for manufacturing a packaging material using gaseous phase atmospheric photo chemical vapor deposition to apply a barrier layer to a moving web substrate
An apparatus and process are disclosed for depositing a barrier layer, such as an SiOx barrier layer, onto a moving web of substrate material in a continuous process at atmospheric pressure using a...
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5718948 |
Cemented carbide body for rock drilling mineral cutting and highway engineering
The invention relates to a coated cemented carbide body for rock drilling having a substrate containing at least one metal carbide and a binder metal and an at least partly covering coating...
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5711999 |
Method for modifying the film of a photosensitive chemical material
A method is provided for modifying a photosensitive chemical material which controls exposure to make spectral intensity ratio constant, adjusts the pre-tilt angles of a liquid crystal orientation...
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5624720 |
Process for forming a deposited film by reacting between a gaseous starting material and an oxidizing agent
A process for forming a deposition film comprises introducing a gaseous starting material for forming a deposition film and a gaseous oxidizing agent having an oxidation action on the gaseous...
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5587200 |
Method for manufacturing a medical electrode
In a method for manufacturing electrodes for medical applications, particularly implantable stimulation electrodes, having an active layer of porous titanium nitride, a substrate of electrically...
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5585148 |
Process for forming a deposited film using a light transmissive perforated diffusion plate
A process for forming a deposited film on a substrate including generating a plasma in a plasma generating chamber via a light transmissive perforated diffusion plate which is located adjacent to a...
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5547716 |
Laser absorption wave deposition process and apparatus
Laser energy is used to make precursors of crystalline materials, such as diamond, by providing an environment in which optical radiation may be efficiently absorbed to create significant precursor...
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5542373 |
Method of manufacturing GaAs single crystals
A method of manufacturing GaAs single crystals in which gas in the vicinity of the surface of a substrate crystal is irradiated with light so as to an epitaxial growth of GaAs single crystals may...
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5538816 |
Halftone phase shift photomask, halftone phase shift photomask blank, and methods of producing the same
A halftone phase shift photomask designed so that it is possible to shorten the photoengraving process, use a production line for a conventional photomask, prevent lowering of the contract between...
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5510158 |
Process for oxidation of an article
An oxidation process for an article to be treated in which, by generating ozone with a high concentration, a high treatment rate is achieved. In particular, an oxygen-containing fluid is irradiated...
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5470799 |
Method for pretreating semiconductor substrate by photochemically removing native oxide
The present invention provides a method for removing a natural gas film or contaminant adhering on a surface of a silicon semiconductor substrate. The semiconductor substrate having the natural...
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5456945 |
Method and apparatus for material deposition
A method and apparatus are disclosed for forming thin films of chemical compounds utilized in integrated circuits. The method includes steps of forming a precursor liquid comprising a chemical...
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5449535 |
Light controlled vapor deposition
A method is disclosed for depositing a substance on a substrate, including the following steps: providing the substrate in a deposition chamber, providing in the chamber a vapor of the substance,...
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5407708 |
Method and apparatus for applying radiation curable inks in a flexographic printing system
A system and method for the printing of substrates for use in food packaging and, more particularly, a flexographic printing system and method for applying and curing radiation cured inks to a...
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5405481 |
Gas photonanograph for producing and optically analyzing nanometre scale patterns
Gas photonanograph for the production and optical analysis of nanometer scale patterns. The photonanograph has a gas expansion chamber equipped with a gas supply for producing patterns and provided...
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5380557 |
Carbon fluoride compositions
Carbon fluoride solid compositions having a low fluorine-to-carbon ratio are produced by chemical vapor deposition processes. These carbon fluoride compositions have improved wettability...
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5364667 |
Photo-assisted chemical vapor deposition method
In a photo-CVD system, ultraviolet light is introduced into a reaction chamber from light emitting elements of ultraviolet light sources, through transparent bulb surfaces thereof, and through...
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5346729 |
Solar-induced chemical vapor deposition of diamond-type carbon films
An improved chemical vapor deposition method for depositing transparent continuous coatings of sp 3 -bonded diamond-type carbon films, comprising: a) providing a volatile hydrocarbon gas/H 2 ...
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