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7618686 |
Method and apparatus for sequential plasma treatment
An apparatus for plasma treatment of a non-conductive hollow substrate, including a plurality of ionization energy sources disposed adjacent to each other all along the part of the substrate to be...
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7597940 |
Methods for preparing titania coatings by plasma CVD at atmospheric pressure
A method for deposition of titania, and titania-containing, thin films by CVD, using an atmospheric pressure glow discharge plasma as a major source of reaction, which leads to film properties, and...
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7578889 |
Methodology for cleaning of surface metal contamination from electrode assemblies
Systematic and effective methodology to clean capacitively coupled plasma reactor electrodes and reduce surface roughness so that the cleaned electrodes meet surface contamination specifications...
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7504136 |
Method and system for forming a film of material using plasmon assisted chemical reactions
A method for forming a film of material using chemical vapor deposition. The method includes providing a substrate comprising a pattern of at least one metallic nanostructure, which is made of a...
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7465478 |
Plasma immersion ion implantation process
A method of processing a workpiece includes placing the workpiece on a workpiece support pedestal in a main chamber with a gas distribution showerhead, introducing a process gas into a remote...
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7459188 |
Method and apparatus for making diamond-like carbon films
Ion-assisted plasma enhanced deposition of diamond-like carbon (DLC) films on the surface of photovoltaic solar cells is accomplished with a method and apparatus for controlling ion energy. The...
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7220463 |
Method for obtaining nanoparticles
The method is intended for obtaining nanosize amorphous particles, which find use in various fields of science and technology; in particular, metallic nanostructures can be regarded as a promising...
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7166206 |
Plasma electroplating
A method for depositing a film of an advanced material on a surface of an article is disclosed. The method comprises placing the article within a bath having a pair of spaced electrodes one of...
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7078074 |
Lens plasma coating system
The invention provides a method for plasma coating of optical lenses, particularly lenses made of silicone-containing polymer. The method of the invention comprising selectively depressurizing and...
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7014889 |
Process and apparatus for plasma activated depositions in a vacuum
Plasma deposition apparatus ( 1 ) and method that allows metal or nonmetal vapor ( 6 ) to be generated by electron-beam evaporation, guides that vapor using a noble gas stream (containing reactive...
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6926934 |
Method and apparatus for deposited film
In a deposited-film formation method or apparatus according to the present invention, which comprises providing a discharge electrode in a vacuum vessel equipped with exhaust means, supplying a...
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6861105 |
Method of making automotive trim with chromium inclusive coating thereon, and corresponding automotive trim product
A method is provided for making vehicle trim components that have a layer(s) including chromium (Cr), in metallic, oxide, nitride, and/or carbide form. In certain embodiments, a Cr inclusive gas is...
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6811956 |
Line edge roughness reduction by plasma treatment before etch
One aspect of the present invention relates to a system and method for mitigating LER as it may occur on short wavelength photoresists. The method involves forming a short wavelength photoresist...
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6777037 |
Plasma processing method and apparatus
A plasma processing method and apparatus are provided for processing the surface of a semiconductor device or the like through the effect of plasma. A pulsed plasma discharge is performed by...
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6767593 |
Apparatus and process for forming a deposited film
A deposited film-forming apparatus comprising a reaction chamber capable of being vacuumed in which glow discharge is caused by means of a high frequency power supplied by a high frequency power...
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6767590 |
Poled plasma deposition
A poled polymer material is formed on the surface of a substrate by poling a nonlinear optical reactant during a plasma polymerizing deposition of the reactant onto the surface. The substrate is...
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6756085 |
Ultraviolet curing processes for advanced low-k materials
Low dielectric constant materials with improved elastic modulus and material hardness. The process of making such materials involves providing a dielectric material and ultraviolet (UV) curing the...
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6730365 |
Method of thin film deposition under reactive conditions with RF or pulsed DC plasma at the substrate holder
Method of thin film deposition especially in reactive conditions. Optical coatings with negligible optical absorption, of high quality and low cost even on unheated substrates are deposited using...
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6699788 |
Method for integrated nucleation and bulk film deposition
An integrated nucleation and bulk deposition process is disclosed for forming a CVD metal film over a semiconductor substrate that has structures formed thereon. In the integrated deposition...
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6696108 |
Vacuum processing method
A vacuum processing method comprises placing an article to be processed in a reaction container and simultaneously supplying at least two high-frequency powers having mutually different frequencies...
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6676741 |
Methods for producing enhanced interference pigments
Methods and apparatus are provided for uniformly depositing a coating material from a vaporization source onto a powdered substrate material to form a thin coalescence film of the coating material...
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6649222 |
Modulated plasma glow discharge treatments for making superhydrophobic substrates
A method for treating substrates including the steps of: providing a substrate; exposing said substrate to a plasma glow discharge in the presence of a fluorocarbon gas; maintaining said gas at a...
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6638569 |
Apparatus and method for coating substrates with vacuum depositable materials
An apparatus for coating a substrate with a diamond like coating or other vacuum depositable material comprises a chamber 11 having, or acting as, an anode, means for supporting a substrate 15 ...
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6616987 |
Procedure and device for specific particle manipulation and deposition
A process for manipulating particles distributed substantially non-uniformly in a plasma of a carrier or reaction gas, wherein Coulomb interaction between the particles is so low that the particles...
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6613400 |
Cream
A cream for use as a topping on beverages, such that the cream floats on the surface of the beverage, whether hot or cold. The cream contains a hydrocolloid fluid gelling agent at a concentration...
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6569501 |
Sequential method for depositing a film by modulated ion-induced atomic layer deposition (MII-ALD)
The present invention relates to an enhanced sequential atomic layer deposition (ALD) technique suitable for deposition of barrier layers, adhesion layers, seed layers, low dielectric constant...
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6554969 |
Acoustically enhanced deposition processes, and systems for performing same
In general, the present invention is directed to acoustically enhanced deposition processes, and a system for performing same. In one embodiment, the method comprises providing a substrate having a...
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6517912 |
Particle manipulation
In a method for manipulating particles arranged in a plasma-cristalline state in a plasma of a carrier gas, the particles are at least partially subject to plasma treatment and/or applied to a...
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6486228 |
Mono-and Bis-acylphosphine oxide photoinitiator combinations
Photoinitiator combinations comprising at least one compound of formula (I) wherein R 1 is C 1 -C 4 alkyl, C 1 -C 4 alkoxy or halogen; R 2 is hydrogen, C 1 -C 4 alkyl, C 1 -C 4 alkoxy or...
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6468602 |
Method of manufacturing a magnetic recording medium
The present invention provides a method for manufacturing a magnetic recording medium comprising the steps of forming a carbon protective film onto a disc, the non-magnetic substrate of which is...
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6465052 |
Method for production of nano-porous coatings
A method for producing a nano-porous coating onto a substrate, including the steps of: (a) operating a twin-wire arc nozzle to heat and at least partially vaporize two wires of a metal for...
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6465051 |
Method of operating high density plasma CVD reactor with combined inductive and capacitive coupling
The invention is embodied in a method of cleaning a plasma reactor by creating a vacuum in the chamber while introducing an etchant gas into the chamber through the gas injection ports, and...
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6460243 |
Method of making low stress and low resistance rhodium (RH) leads
A method of making rhodium (Rh) lead layers for a read sensor comprises a first step of obliquely ion beam sputtering the rhodium (Rh) lead layer followed by a second step of annealing. This method...
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6403167 |
Method for surface modification of 3-dimensional bulk polymers
A method for surface modification of 3-dimensional bulk polymers is provided to improve surface properties and surface conductivity of 3-dimensional bulk polymers by using plasma source ion...
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6383554 |
Process for fabricating plasma with feedback control on plasma density
There is provided a process and its system for fabricating plasma with feedback control on plasma density. This process uses a heterodyne millimeter wave interferometer as a sensor to measure the...
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6375860 |
Controlled potential plasma source
The occurrence of internally-formed contaminants or negatively-charged particulates within a plasma is minimized by preventing such from becoming trapped in the plasma. The plasma is formed in a...
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6365495 |
Method for performing metallo-organic chemical vapor deposition of titanium nitride at reduced temperature
A process for chemical vapor deposition of titanium nitride film using thermal decomposition of a metal-organic compound is disclosed. In particular, the deposition of titanium nitride film from...
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6358569 |
Applying a film to a body
A method of applying a thin film to a body comprising exposing the body to pulsed-gas cold-plasma polymerization of an unsaturated-carboxylic acid monomer thereby forming a polymer film on a...
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6348237 |
Jet plasma process for deposition of coatings
The present invention provides a method for the formation of an organic coating on a substrate. The method includes: providing a substrate in a vacuum; providing at least one vaporized organic...
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6344419 |
Pulsed-mode RF bias for sidewall coverage improvement
The present invention provides a method and apparatus for achieving conformal step coverage of one or more materials on a substrate using sputtered ionized material. A target provides a source of...
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6340505 |
Process for producing a magnetic recording medium
A hydrogenated or fluorinated carbon protective film is formed on a disk through a plasma CVD method by use of a hydrocarbon-containing reaction gas as a raw material, where the disk comprises a...
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6316062 |
Magnetic recording medium and method of producing the same
The present invention provides a method for manufacturing a magnetic recording medium comprising the steps of forming a carbon protective film onto a disc, the non-magnetic substrate of which is...
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6241858 |
Methods and apparatus for producing enhanced interference pigments
Methods and apparatus are provided for uniformly depositing a coating material from a vaporization source onto a powdered substrate material to form a thin coalescence film of the coating material...
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6228228 |
Method of making a light-emitting fiber
A display as for images and/or information comprises a plurality of light-emitting fibers disposed in side-by-side arrangement to define a viewing surface. Each light-emitting fiber includes a...
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6221493 |
Post treated diamond coated body
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6218320 |
Method for improving the uniformity of wafer-to-wafer film thickness
A method for improving the uniformity of wafer-to-wafer film thicknesses. Before depositing films, shower heads in a PECVD system is heated to production temperature to make the entire system...
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6214479 |
Covered member and method of producing the same
This invention provides a covered member which possesses a high bond strength of a base material and a covering film, and has a smooth surface. The covered member comprises a base material and a...
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6203862 |
Processing systems with dual ion sources
A substrate processing system includes a processing chamber, a substrate holder positioned in the chamber, a gas source for supplying a process gas to the chamber, first and second ion sources...
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6200675 |
Diamond-like nanocomposite compositions
The invention relates to an improved diamond-like nanocomposite composition comprising networks of a-C:H and a-Si:O wherein the H-concentration is between 40% and 80% of the C-concentration and...
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6197386 |
Method for applying a coating by means of plasma spraying while simultaneously applying a continuous laser beam
The invention relates to a method for applying a coating by means of plasma spraying to a substrate, in which method the beam of a laser is additionally used, it being possible to coat a very wide...
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