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7615259 |
Method and apparatus for processing workpiece
The present invention is a processing method for applying predetermined processing to a workpiece with said workpiece mounted on a mounting stage arranged in a process chamber in a depressurized...
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7598503 |
Lithographic apparatus and cleaning method therefor
A lithographic apparatus is disclosed. The apparatus includes a source for supplying hydrogen radicals, a guide for use in conjunction with the source, for directing hydrogen radicals to an...
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7595096 |
Method of manufacturing vacuum plasma treated workpieces
A method of manufacturing vacuum plasma treated workpieces includes the steps of introducing at least one workpiece to be treated into a vacuum chamber; treating the workpiece in the vacuum...
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7579088 |
Increasing and maintaining the hydrophilic nature of an oxidized plastic surface
In at least one embodiment, the present invention relates to a increasing the hydrophilicity of an organic surface. One method in accordance with the present invention includes oxidizing at least a...
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7578889 |
Methodology for cleaning of surface metal contamination from electrode assemblies
Systematic and effective methodology to clean capacitively coupled plasma reactor electrodes and reduce surface roughness so that the cleaned electrodes meet surface contamination specifications...
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7504643 |
Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement
A cleaning arrangement for a lithographic apparatus module may be provided in a collector. The cleaning arrangement includes a hydrogen radical source configured to provide a hydrogen radical...
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7497963 |
Etching method
In this etching method, since an etching gas is introduced before introduction of free radicals into a processing chamber, the etching gas has been adsorbed on the surface of substrates when the...
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7465478 |
Plasma immersion ion implantation process
A method of processing a workpiece includes placing the workpiece on a workpiece support pedestal in a main chamber with a gas distribution showerhead, introducing a process gas into a remote...
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7462378 |
Method for coating metals
Disclosed herein are methods for coating metal substrates, systems therefore, and articles made therefrom. In one embodiment, the method of coating a metal substrate comprises: disposing a metallic...
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7374642 |
Treatment process for improving the mechanical, catalytic, chemical, and biological activity of surfaces and articles treated therewith
A continuous, uninterrupted two-step treatment process capable of forming nanometer scale physical structures on the surface of articles fabricated from metallic, ceramic, glass, or plastic...
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7368151 |
Antiscattering grid and a method of manufacturing such a grid
An antiscattering grid for an X-ray imaging apparatus of the type comprising a substrate having a plurality of metallized partitions that together define a plurality of cells distributed over the...
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7326442 |
Antireflective composition and process of making a lithographic structure
An antireflective composition and a lithographic structure comprising a silicon-metal oxide, antireflective material derived from the composition. The antireflective composition comprises a polymer...
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7309515 |
Method for fabricating an imprint mold structure
The present invention is related to a method for fabricating an imprint mold which can be used in the field of nano-imprint lithography. Firstly, a diamond film and a photoresist film are...
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7300684 |
Method and system for coating internal surfaces of prefabricated process piping in the field
The coating of internal surfaces of a workpiece is achieved by connecting a bias voltage such that the workpiece functions as a cathode and by connecting an anode at each opening of the workpiece....
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7273821 |
Method for producing a porous coating
The present invention relates to a process for producing a porous layer adhering to a substrate, which comprises the steps:
a. preparation of a composition comprising an organic polymer...
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7264850 |
Process for treating a substrate with a plasma
A process for depositing a diamond-like carbon film, which comprises providing a means for generating a sheet-like beam-type plasma region inside a vacuum vessel for depositing the diamond-like...
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7250197 |
Plasma treatment of contact lens and IOL
Intraocular lenses or contact lenses 20 are placed on a lower spindle 34 and held there by a vacuum in conduit 34 . Noble and reactive gases 56, 58 are introduced and a voltage is applied...
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7226869 |
Methods for protecting silicon or silicon carbide electrode surfaces from morphological modification during plasma etch processing
Methods for forming a protective polymeric coating on a silicon or silicon-carbide electrode of a plasma processing chamber are provided. The polymeric coating provides protection to the underlying...
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7223446 |
Plasma CVD apparatus and dry cleaning method of the same
In a parallel flat plate type plasma CVD apparatus, plasma damage of constituent parts in a reaction chamber due to irregularity of dry cleaning in the reaction chamber is reduced and the cost is...
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7220448 |
Glass molding die and renewing method thereof
A glass molding die and renewing method thereof. The molding die for molding glass includes a substrate, a first noble metal layer overlying the substrate, a second noble metal layer overlying the...
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7204912 |
Method and apparatus for an improved bellows shield in a plasma processing system
The present invention presents an improved bellows shield for a plasma processing system, wherein the design and fabrication of the bellows shield coupled to a substrate holder electrode...
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7175878 |
Cold antireflection layer deposition process
The invention concerns a method for making an antiglare stack by vacuum evaporation on an organic substrate ( 1 ) at a temperature lower than 150° C., comprising steps which consist in depositing...
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7169440 |
Method for removing photoresist and etch residues
A method is provided for plasma ashing to remove photoresist remnants and etch residues that are formed during preceding plasma etching of dielectric layers. The ashing method uses a two-step...
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7150849 |
Heat treatable coated article with diamond-like carbon (DLC) and/or zirconium in coating
In certain example embodiments, a coated article includes respective layers including diamond-like carbon (DLC) and zirconium nitride before heat treatment (HT). During HT, the hydrogenated DLC...
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7148156 |
Removable amorphous carbon CMP stop
A method is provided for processing a substrate including removing amorphous carbon material disposed on a low k dielectric material with minimal or reduced defect formation and minimal dielectric...
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7147795 |
Method for surface treatment
A method for surface treatment includes: a first step in which a surface treatment apparatus 1 and a substrate 10 in a state where a front surface 102 of the substrate 10 faces the surface...
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7144606 |
Plasma treatment to enhance adhesion and to minimize oxidation of carbon-containing layers
The present invention generally provides improved adhesion and oxidation resistance of carbon-containing layers without the need for an additional deposited layer. In one aspect, the invention...
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7144521 |
High aspect ratio etch using modulation of RF powers of various frequencies
A method for etching a high aspect ratio feature through a mask into a layer to be etched over a substrate is provided. The substrate is placed in a process chamber, which is able to provide RF...
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7141277 |
Self-generating inorganic passivation layers for polymer-layered silicate nanocomposites
A method for preparing high-use temperature, light-weight polymer/inorganic nanocomposite materials with enhanced thermal stability and performance characteristics, which comprises treating a...
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7125587 |
Ion beam for enhancing optical properties of materials
A system and method to expose a material to an ion beam during a continuous material production process may include a vacuum fixture to form the ion beam and a slit in the fixture to allow at least...
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7105199 |
Methods of adhering drugs to the surface of medical devices through ion beam surface modification
Methods of implanting, applying, or adhering various drug molecules directly into or onto the surface of medical devices through gas cluster ion beam (GCIB) and/or monomer ion beam surface...
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7022383 |
Exchange bias structure for abutted junction GMR sensor
Although it is known that exchange bias can be utilized in abutted junctions for longitudinal stabilization, a relatively large moment is needed to pin down the sensor edges effectively. Due to the...
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7014887 |
Sequential sputter and reactive precleans of vias and contacts
The present invention generally provides a method for improving fill and electrical performance of metals deposited on patterned dielectric layers. Apertures such as vias and trenches in the...
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6972071 |
High-speed symmetrical plasma treatment system
A plasma treatment system ( 10 ) and related methods for rapidly treating a workpiece ( 56 ) with ions from a plasma having an ion density that is reproducibly uniform and symmetrical. The...
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6967043 |
Method of manufacturing the densely fitted multi-layer carbon nano-tube
A method of manufacturing, with high purity and high efficiency, a multi-wall carbon nanotube ( 10 ) having layers densely fitted to the center part thereof, comprising the step of leading a...
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6936309 |
Hardness improvement of silicon carboxy films
A method for depositing a low dielectric constant film having an improved hardness and elastic modulus is provided. In one aspect, the method comprises depositing a low dielectric constant film...
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6929831 |
Methods of forming nitride films
A silicon nitride film, for example, is deposited by introducing into a plasma region of a chamber a silicon containing gas, molecular nitrogen and sufficient hydrogen to dissociate the nitrogen to...
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6929784 |
Chlorotrifuorine gas generator system
A ClF 3 gas generation system is provided with supply sources of chlorine ( 3 ) (for example a cylinder of compressed chlorine) and fluorine ( 4 ) (for example a fluorine generator) connected into...
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6926803 |
Confinement ring support assembly
A confinement ring support assembly for coupling together a plurality of confinement rings in a plasma processing chamber. The confinement ring support assembly includes a post having first end and...
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6917459 |
MEMS device and method of forming MEMS device
A method of forming a MEMS device includes providing a substructure including a base material and at least one conductive layer formed on a first side of the base material, forming a dielectric...
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6908638 |
Organic electroluminescent element and method of manufacturing same
The purpose of the invention is to provide an organic electroluminescent element having stable luminescent characteristics with a low luminescence starting voltage and without non-luminescing black...
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6890861 |
Semiconductor processing equipment having improved particle performance
A ceramic part having a surface exposed to the interior space, the surface having been shaped and plasma conditioned to reduce particles thereon by contacting the shaped surface with a high...
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6878418 |
Method for making zone-bonded lubricant layer for magnetic hard discs
A system and method for improving the durability and reliability of recording media used in hard drives is disclosed. A protective overcoat made by depositing a diamond like carbon (DLC) layer over...
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6866900 |
Deposition and chamber treatment methods
The invention encompasses a method for sequentially processing separate sets of wafers within a chamber. Each set is subjected to plasma-enhanced deposition of material within the chamber utilizing...
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6857433 |
Process for cleaning a glass-coating reactor using a reactive gas
A process for cleaning a glass-coating reactor includes: (a) providing the reactor to be cleaned, wherein the reactor contains a glass substrate within a chamber and the chamber has an internal...
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6827972 |
Container with a coating of barrier effect material, and method and apparatus for manufacturing the same
The invention provides a container such as a bottle or flask, made heterogeneously from a material with a barrier effect and a polymer material, characterized in that the material with a barrier...
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6824827 |
Method of making a polyimide film having a thin metal layer
A method of surface treating a polyimide film to impart improved adhesion to metal which comprises treating the surface of a polyimide film having a biphenyltetracarboxylic acid component by...
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6821570 |
Method for preparing a polymer for chemical mechanical polishing
The present invention is directed to a method for preparing a polymer for chemical mechanical polishing of a semiconductor substrate. The method comprises providing a thermoplastic foam substrate...
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6803309 |
Method for depositing an adhesion/barrier layer to improve adhesion and contact resistance
A method for forming an adhesion/barrier liner with reduced fluorine contamination to improve adhesion and a specific contact resistance of metal interconnects including providing a semiconductor...
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6802944 |
High density plasma CVD process for gapfill into high aspect ratio features
A method of depositing a film on a substrate. In one embodiment, the method includes depositing a first portion of the film using a high density plasma to partially fill a gap formed between...
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