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7608151 |
Method and system for coating sections of internal surfaces
A method and system for coating the internal surfaces of a localized area or section of a workpiece is presented. Conductive structures are inserted into one or more openings of a workpiece to...
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7604846 |
Manufacturing method of colored diamond by ion implantation and heat treatment
The present invention relates to a manufacturing method of colored diamond and, more particularly, to a manufacturing method of colored diamond by ion implantation and heat treatment. The...
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7601619 |
Method and apparatus for plasma processing
A method and an apparatus for plasma processing which can accurately monitor an ion current applied to the surface of a sample. Predetermined gas is exhausted via an exhaust port by a...
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7601216 |
Gas diffusion electrodes, membrane-electrode assemblies and method for the production thereof
A method for forming a patterned noble metal coating on a gas diffusion medium substantially free of ionomeric components comprising subjecting an electrically conductive web with a patterned mask...
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7585396 |
Coated article with ion treated overcoat layer and corresponding method
A coated article is provided that may be used as a vehicle windshield, insulating glass (IG) window unit, or the like. Ion beam treatment is performed on a layer(s) of the coating. For example, an...
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7579604 |
Beam stop and beam tuning methods
A system, method, and apparatus for mitigating contamination associated with ion implantation are provided. An ion source, end station, and mass analyzer positioned between the ion source and the...
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7578889 |
Methodology for cleaning of surface metal contamination from electrode assemblies
Systematic and effective methodology to clean capacitively coupled plasma reactor electrodes and reduce surface roughness so that the cleaned electrodes meet surface contamination specifications...
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7576337 |
Power supply for an ion implantation system
A power supply system for an ion implantation system. In one particular exemplary embodiment, the system may be realized as a power supply system that includes a low frequency power inverter, a...
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7566888 |
Method and system for treating an interior surface of a workpiece using a charged particle beam
A method and system of treating an interior surface on an internal cavity of a workpiece using a charged particle beam. A beam deflector surface of a beam deflector is placed within the internal...
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7547899 |
Charged beam dump and particle attractor
A system, method, and apparatus for mitigating contamination during ion implantation are provided. An ion source, end station, and mass analyzer positioned between the ion source and the end...
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7547898 |
Particulate prevention in ion implantation
A system and method for mitigating contamination in an ion implantation system is provided. The system comprises an ion source, a power supply operable to supply power to a filament and mirror...
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7547460 |
Ion implanter optimizer scan waveform retention and recovery
Methods and apparatus are provided for controlling dose uniformity in an ion implantation system. According to one embodiment of the invention, an initial scan waveform is adjusted to obtain a...
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7544957 |
Non-uniform ion implantation
A method includes receiving an input signal representative of a desired two-dimensional non-uniform dose pattern for a front surface of a workpiece, driving the workpiece relative to an ion beam to...
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7531469 |
Dosimetry using optical emission spectroscopy/residual gas analyzer in conjunction with ion current
The present invention generally provides methods and apparatus for controlling ion dosage in real time during plasma processes. In one embodiment, ion dosages may be controlled using in-situ...
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7531205 |
High throughput ion beam assisted deposition (IBAD)
A method of continuously coating at least one substrate with a buffer layer as a support for a ceramic superconducting material is disclosed. The method includes loading the at least one substrate...
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7518124 |
Monatomic dopant ion source and method
Monotomic dopant ions for ion implantation are supplied from vapour of a species containing plural atoms of the desired dopant. The vapour is fed to a plasma chamber and a plasma produced in the...
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7511288 |
Ion implantation device
To provide an ion implantation device which suppresses diffusion of an ion beam, can finely control a scanning waveform and can obtain a large scanning angle of about 10°. In the ion implantation...
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7510786 |
Coated article including titanium oxycarbide and method of making same
A coated article is provided which includes a layer including titanium oxycarbide. In order to form the coated article, a layer of titanium oxide is deposited on a substrate by sputtering or the...
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7465478 |
Plasma immersion ion implantation process
A method of processing a workpiece includes placing the workpiece on a workpiece support pedestal in a main chamber with a gas distribution showerhead, introducing a process gas into a remote...
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7453070 |
Methods and apparatus for beam density measurement in two dimensions
A beam density measurement system includes a shield, a beam sensor, and an actuator. The beam sensor is positioned downstream from the shield in a direction of travel of a beam. The beam sensor is...
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7425353 |
Enhancement of magnetic media recording performance using ion irradiation to tailor exchange coupling
Magnetic medium recording performance can be enhanced by irradiating a magnetic medium with ions having an acceleration voltage of between 10 keV and 100 keV to induce exchange coupling between...
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7419546 |
Gas diffusion electrodes, membrane-electrode assemblies and method for the production thereof
A method for forming a noble metal coating on a gas diffusion medium substantially free of ionomeric components comprising subjecting an electrically conductive web to a first ion beam having an...
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7417241 |
Ion implantation method and method for manufacturing semiconductor device
An object of the present invention is to provide an ion implantation method for shortening a down time of an ion implantation apparatus after exposure of a chamber and for improving throughput and...
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7410890 |
Formation of doped regions and/or ultra-shallow junctions in semiconductor materials by gas-cluster ion irradiation
Method of forming one or more doped regions in a semiconductor substrate and semiconductor junctions formed thereby, using gas cluster ion beams.
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7404981 |
Printing electronic and opto-electronic circuits
A method is provided for printing electronic and opto-electronic circuits. The method comprises: (a) providing a substrate; (b) providing a film-forming precursor species; (c) forming a...
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7390527 |
Method for manufacturing a nanostructure at a predetermined point on supporting carrier
A method is for manufacturing a nanostructure in-situ, at least one predetermined point on a supporting carrier. The method includes choosing a suitable material for a substrate in the carrier,...
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7389580 |
Method and apparatus for thin-film battery having ultra-thin electrolyte
A method and system for fabricating solid-state energy-storage devices including fabrication films for devices without an anneal step. A film of an energy-storage device is fabricated by depositing...
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7344760 |
Wear-resistant electrically conductive body
A method for making a wear-resistant electrically conductive body having an electrically conductive diamond-like carbon coating, by ion-accelerating copper ions from a copper ion source onto a...
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7338683 |
Superconductor fabrication processes
A method of forming a superconductive device is provided, including providing a substrate having a dimension ratio of not less than about 10 2 , depositing a buffer film to overlie the substrate by...
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7323401 |
Semiconductor substrate process using a low temperature deposited carbon-containing hard mask
A method of processing a thin film structure on a semiconductor substrate using an optically writable mask includes placing the substrate in a reactor chamber, the substrate having on its surface a...
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7323228 |
Method of vaporizing and ionizing metals for use in semiconductor processing
Techniques for vaporizing and handling a vaporized metallic element or metallic element salt with a heated inert carrier gas for further processing. The vaporized metallic element or salt is...
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7320815 |
Method for forming oriented film, oriented film, substrate for electronic device, liquid crystal panel, and electronic device
A method for forming an oriented film is provided for forming an oriented film on a base material by irradiating the surface of the base material where the oriented film will be formed with an ion...
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7300684 |
Method and system for coating internal surfaces of prefabricated process piping in the field
The coating of internal surfaces of a workpiece is achieved by connecting a bias voltage such that the workpiece functions as a cathode and by connecting an anode at each opening of the workpiece....
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7270854 |
Method for forming a head having improved spin valve properties
A method for forming a magnetic head having an improved PtMn layer, including forming a PtMn layer by ion beam deposition, forming an antiparallel (AP) pinned layer structure above the PtMn layer,...
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7264850 |
Process for treating a substrate with a plasma
A process for depositing a diamond-like carbon film, which comprises providing a means for generating a sheet-like beam-type plasma region inside a vacuum vessel for depositing the diamond-like...
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7250196 |
System and method for plasma plating
An exemplary system and method for plasma plating are provided to generate a deposition layer on a substrate. The method for plasma plating includes positioning a substrate within a vacuum chamber,...
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7235801 |
Grazing incidence mirror, lithographic apparatus including a grazing incidence mirror, method for providing a grazing incidence mirror, method for enhancing EUV reflection of a grazing incidence mirror, device manufacturing method and device manufactured thereby
A grazing incidence mirror includes a mirror substrate and a mirror surface layer, the mirror surface layer including a first layer and a second layer, the first layer being positioned between the...
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7204013 |
Method of manufacturing a magnetoresistive sensor
In a method of forming a magnetoresistive sensor, first and second magnetic leads are formed. Next, a junction of magnetic and electrically conductive material is formed between the first and...
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7195797 |
High throughput high-yield vacuum deposition system
A vacuum deposition system has been designed to produce thin film based demultiplexers with high throughput and production yields of greater than 25% for use in Dense Wavelength Division...
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7189437 |
Mobile plating system and method
An exemplary method for using a mobile plating system is provided that includes locating the mobile plating system at a desired location for plating, positioning an external vacuum pump from an...
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7186992 |
Method of fabricating a polarizing layer on an interface
A method of fabricating a polarizing layer using a gas cluster ion beam apparatus (GCIB) is disclosed. The method includes generating a metal-organic gas that includes a metal-organic compound. The...
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7156960 |
Method and device for continuous cold plasma deposition of metal coatings
A method for the deposition of a metal layer on a substrate ( 1 ) uses a cold plasma inside an enclosure ( 7 ) heated to avoid the formation of a metal deposit at its surface. The enclosure has an...
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7105199 |
Methods of adhering drugs to the surface of medical devices through ion beam surface modification
Methods of implanting, applying, or adhering various drug molecules directly into or onto the surface of medical devices through gas cluster ion beam (GCIB) and/or monomer ion beam surface...
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7097884 |
Stability of ion beam generated alignment layers by surface modification
A method for preparing an alignment layer surface provides a surface on the alignment layer. The surface is bombarded with ions, and reactive gas is introduced to the ion beam to saturate dangling...
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7097745 |
Method of forming a tunneling magnetoresistive head
A method of forming a tunneling magnetoresistive head begins by forming a tunneling magnetoresistive stack having a tunnel barrier. An air bearing surface is formed of the tunneling...
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7052736 |
Method for depositing coatings on the interior surfaces of tubular structures
A method is disclosed for substantially uniformly coating an interior surface of a ferromagnetic tubular structure such as a ferromagnetic tube having a high aspect ratio. The method entails...
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7052585 |
Coated article including titanium oxycarbide and method of making same
A coated article is provided which includes a layer including titanium oxycarbide. In order to form the coated article, a layer of titanium oxide is deposited on a substrate by sputtering or the...
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7045175 |
Magnetic recording medium and method for manufacturing the same
A method for manufacturing a magnetic recording medium includes forming a first protective layer of first material over a magnetic film provided on a substrate. The first protective layer has a...
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7010837 |
Method for manufacturing an electronic component
A method for manufacturing an electronic component includes the steps of forming an electrode layer including α-tungsten on a substrate at a substrate temperature of about 100° C. to about 300°...
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6982071 |
Thin-film magnetic recording media with dual intermediate layer structure for increased coercivity
Ion beam-deposited, nitrogen-doped C:H films having substantially lower resistivities than undoped ion beam-deposited C:H films and suitable for use as hard, abrasion-resistant overcoat layers for...
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