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7010837 |
Method for manufacturing an electronic component
A method for manufacturing an electronic component includes the steps of forming an electrode layer including α-tungsten on a substrate at a substrate temperature of about 100° C. to about 300°...
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6982071 |
Thin-film magnetic recording media with dual intermediate layer structure for increased coercivity
Ion beam-deposited, nitrogen-doped C:H films having substantially lower resistivities than undoped ion beam-deposited C:H films and suitable for use as hard, abrasion-resistant overcoat layers for...
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6969672 |
Method and apparatus for controlling a thickness of a conductive layer in a semiconductor manufacturing operation
A method of controlling a conductive layer deposition process includes depositing a conductive layer onto a semiconductor wafer based upon a deposition recipe, measuring a thickness of the...
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6964087 |
Method for manufacturing dielectric ceramic layer and internal polar layer of multiple layer ceramic capacitors (MLCC) by vacuum sputtering
A method for manufacturing the dielectric ceramic layer and the internal polar layer of the multiple layer ceramic capacitor by the vacuum sputtering process in which the dielectric ceramic layer...
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6962613 |
Low-temperature fabrication of thin-film energy-storage devices
A method and system for fabricating solid-state energy-storage devices including fabrication films for devices without an anneal step, especially a cathode anneal of thin-film batteries. A film of...
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6953519 |
Method of manufacturing the multi-tip probe, a multi-tip probe, and surface characteristic analysis apparatus
In order to establish processing techniques capable of making multi-tip probes with sub-micron intervals and provide such microscopic multi-tip probes, there is provided an outermost surface...
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6905725 |
Method for creating and visualizing an optically invisible mark
This invention relates to methods of writing and reading information hidden from visual observation and may be used for visualizing hidden images (marks) identifying an object, which provide...
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6899928 |
Dual ion beam assisted deposition of biaxially textured template layers
The present invention is directed towards a process and apparatus for epitaxial deposition of a material, e.g., a layer of MgO, onto a substrate such as a flexible metal substrate, using dual ion...
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6893543 |
Information carrier and method for producing the same
A method and apparatus for producing an information carrier which has at least two solid material interfaces at which information is, or may be applied and where the information is stored by local...
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6864042 |
Patterning longitudinal magnetic recording media with ion implantation
A magnetic recording medium is formed with a distribution of low coercivity regions functioning as a transition pattern for servo information capable of being sensed by a read/write head by...
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6855232 |
Magnetic disk comprising a first carbon overcoat having a high SP3 content and a second carbon overcoat having a low SP3 content
A method for making a magnetic disk comprises forming first and second protective carbon layers on a magnetic layer. The first protective carbon layer is predominantly SP3 carbon. The second...
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6844031 |
Method & apparatus for multilayer deposition utilizing a common ion beam source
A single, or common, ion beam source is utilized for ion beam deposition (IBD) of defect-free multilayer coatings, e.g., multilayer, carbon-based protective overcoats for magnetic and/or...
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6818257 |
Method of providing a material processing ion beam
Systems to achieve both more uniform and particle free DLC deposition is disclosed which automatically cycles between modes to effect automatic removal of carbon-based buildups or which provides...
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6808606 |
Method of manufacturing window using ion beam milling of glass substrate(s)
This invention relates to a method of making a window (e.g., vehicle windshield, architectural window, etc.), and the resulting window product. At least one glass substrate of the window is ion...
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6797334 |
Method for forming gas cluster and method for forming thin film
In order to deopsit a high-grade and extra-thin film without causing damage to the substrate at a relatively low temperature, the present invention provides a method for forming a cluster which is...
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6787198 |
Hydrothermal treatment of nanostructured films
The present invention involves the hydrothermal treatment of nanostructured films to form high k PMOD™ films for use in applications that are temperature sensitive, such as applications using a...
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6783644 |
Film deposition method
A film deposition method, which can form a high quality functional thin film excellent in various physical properties on a surface such as a plastic substrate, is provided. A carbon precursor film...
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6773556 |
Method for energy barrier equalization of magnetic recording media and media obtained thereby
A thin film magnetic recording medium, comprising: at least one ferromagnetic thin film recording layer comprising magnetic particles with substantially uniform barriers to magnetization reversal,...
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6767830 |
Br2SbCH3 a solid source ion implant and CVD precursor
A volatile solid-source novel antimony precursor, Br 2 SbCH 3 , that may be utilized in semiconductor processing chambers for depositing antimony on a substrate by deposition methods, e.g.,...
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6767592 |
Method for thin film protective overcoat
A system and method for improving the durability and reliability of recording media used in hard drives is disclosed. A protective overcoat made by depositing a diamond like carbon (DLC) layer over...
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6767658 |
Hard wear resistant film, process for forming hard film, and target used to form hard film
Disclosed is a hard film exhibiting high wear resistance, with composition of (Al b ,[Cr 1−α V α ] c (C 1−d N d ), satisfying the condition of 0.5≦b≦0.8, 0.2≦c≦0.5, b+c=1,...
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6764714 |
Method for depositing coatings on the interior surfaces of tubular walls
Methods for coating the interior surface of tubular structures having high aspect ratios and tubular structures produced by such methods. The interior surface of the tubular structure is coated by...
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6756086 |
Method for the fabrication of a diamond semiconductor
A diamond semiconductor includes a high-quality thin diamond film layer with few crystal defects and few impurities, implanted with ions of dopant elements and controllable in conductivity...
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6753042 |
Diamond-like carbon thin film coating process
Wear-resistant and low-friction hard amorphous, diamond-like carbon coating (DLC) is formed directly on an eternal surface of a magnetic recording media sensor (MRMS). The coating demonstrates a...
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6740208 |
Photo mask blank and method of manufacturing the same
In a method of manufacturing a photo mask blank by forming an opaque film or a semi-transmission film on a transparent substrate, the film is subjected to irradiation of an ion generated by an ion...
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6737643 |
Detector and method for cluster ion beam diagnostics
A detector apparatus and its use for cluster ion beam diagnostics are described. The detector has a Faraday cup with a conductance path to a gas pressure detector and a conductance to the detector...
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6689256 |
Frequency selective plate and method for producing same
A frequency selective plate which is produced by coating an Ag layer dispersed with Ag particles on a transparent substrate. The Ag layer is formed by depositing an Ag continuous layer on the...
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6660340 |
Diamond-like carbon film with enhanced adhesion
A method and apparatus for enhancing the adhesion of a diamond-like carbon (DLC) film to a substrate and for producing a strongly adhered DLC film on a substrate. The adhesion is enhanced by ion...
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6632482 |
Plasma immersion ion implantation process
Implantation process for cold cathode plasma immersion ion implantation (C 2 PI 3 ) without a continuous plasma using very short high voltage, low duty cycle ionization pulses, in conjunction with...
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6627320 |
Method for producing composition for vapor deposition, composition for vapor deposition, and method for producing optical element with antireflection film
A method for producing a composition for vapor deposition comprising sintering a vapor source mixture prepared by mixing vapor sources that contain titanium dioxide and niobium pentoxide. The...
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6605321 |
Method of treating materials by irradiation
The invention provides a method of treating a material to cause the material to evolve from one phase to a more ordered phase, the method comprising an operation of irradiating the material in...
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6579420 |
Apparatus and method for uniformly depositing thin films over substrates
A thin film deposition apparatus and method are disclosed in this invention. The apparatus includes a depositing thin-film particle source, a beam-defining aperture between the particle source and...
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6575552 |
Printer head
A surface processing method for processing the surface of an insulating article in which an ion-implanted surface-modified layer is effectively formed on the article 2. In surface processing the...
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6572933 |
Forming adherent coatings using plasma processing
Process for forming adherent coatings using plasma processing. Plasma Immersion Ion Processing (PIIP) is a process where energetic (hundreds of eV to many tens of keV) metallic and metalloid ions...
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6565929 |
Method for producing magnetic information carrier
The method of manufacturing the magnetic medium for data storage comprising magnetic segments ( 5 ) for data storage which alternate regularly with nonmagnetic segments, which method comprises...
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6527918 |
Method and apparatus for low voltage plasma doping using dual pulses
A pulsed plasma doping system separates the plasma ignition function from the ion implantation function. An ignition voltage pulse is supplied to an ionizable gas and an implantation voltage pulse...
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6518182 |
Via-filling process
A process of performing via-filling efficiently and by a simple procedure is disclosed. The via-filling process comprises providing a substrate having blind via-holes, making the substrate...
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6517688 |
Method of smoothing diamond coating, and method of manufacturing diamond-coated body
A method of smoothing a surface of a diamond coating of a diamond-coated body, by using an arc-type ion plating device in which at least one target is disposed. The method includes: (a) a step of...
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6516233 |
Pulse plating rectifiers and methods, systems and computer program products for controlling pulse plating rectifiers in master/slave mode
Methods, systems and computer program products for controlling plating pulse rectifiers are provided by identifying one of the plurality of plating pulse rectifiers as a master plating pulse...
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6500496 |
Hollow cathode for plasma doping system
A plasma doping apparatus includes a hollow cathode to increase throughput and uniformity of ion implantations in a target. The hollow cathode is located adjacent an anode and a target cathode on...
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6500498 |
Method for fabricating a magneto-optic modulator
A method for fabricating a magneto-optic modulator, such as for use with a solid state ring resonator gyroscope. The method includes inducing a magnetic field at a substrate holder as a layer of...
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6491987 |
Process for depositing DLC inclusive coating with surface roughness on substrate
A process for depositing a diamond-like carbon (DOC) inclusive layer having surface roughness on a substrate is provided. The surface roughness of the DOC inclusive layer improves hydrophobicity,...
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6475573 |
Method of depositing DLC inclusive coating on substrate
A substrate is coated with a coating system including at least one diamond-like carbon (DLC) inclusive layer(s) using an ion beam deposition technique. Prior and/or during the ion beam deposition...
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6460243 |
Method of making low stress and low resistance rhodium (RH) leads
A method of making rhodium (Rh) lead layers for a read sensor comprises a first step of obliquely ion beam sputtering the rhodium (Rh) lead layer followed by a second step of annealing. This method...
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6428659 |
Process of coating super fine particles of multi-element thin film
A process for coating super fine ion particles of multiple elements on the surface of a micro route substrate includes a coating step operated under low temperatures and vacuums. First, raw micro...
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6419998 |
Method for deposition of metal catalysts on inert supports
The present invention provides a method for depositing a catalyst onto a substrate through the use of pulsed laser radiation. A solution is prepared containing the catalyst and the support. The...
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RE37718 |
Ion beam modification of bioactive ceramics to accelerate biointegration of said ceramics
The present invention provides for faster and stronger tissue-implant bonding by treating a ceramic implant with an ion beam to modify the surface of the ceramic. The surface modification can give...
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6392244 |
Ion beam deposition of diamond-like carbon overcoats by hydrocarbon source gas pulsing
Stable operation of an ion beam deposition (IBD) station forming part of a multi-station apparatus and formation therein of a tribologically robust DLC-type i-C:H ultra-thin protective overcoat for...
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6372369 |
Hard film, sliding member covered with hard film, and manufacturing method thereof
A nitrided layer is formed on a piston ring and a hard film is formed by arc ion plating on the nitrided layer at the outer circumferential surface. The hard film has a crystal structure comprised...
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6368658 |
Coating medical devices using air suspension
Methods and apparatuses for coating medical devices and the devices thereby produced are disclosed. In one embodiment, the invention includes a method comprising the steps of suspending the medical...
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