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7585550 |
Process for modifying polymeric surfaces using deep UV irradiation
A process is described for modifying polymeric surfaces. The process is particularly useful for modification of polyesters, and can be used to impart surface functionality that confers...
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7553772 |
Process and apparatus for simultaneous light and radical surface treatment of integrated circuit structure
Process and apparatus provide reactive radicals generated from a remote plasma source which contact a portion of a substrate surface simultaneous with a contact of the same substrate surface with a...
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7470454 |
Non-thermal process for forming porous low dielectric constant films
Low dielectric materials and films comprising same have been identified for improved performance when used as interlevel dielectrics in integrated circuits as well as methods for making same. In...
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7387813 |
Methods of preparation of hollow microstructures and nanostructures
Structures in the nanoscale and mesoscale domain are provided. The structures typically have a shell which can be comprised of a porous polymeric material such as parylene. The surfaces of the...
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7112351 |
Methods and apparatus for vacuum thin film deposition
The present invention provides a polymer coating method. In the method, in a vacuum chamber, a low temperature monomer evaporation chamber is used to heat a liquid monomer and a cooled substrate at...
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6982206 |
Mechanism for improving the structural integrity of low-k films
According to one embodiment, a method of forming a low-k dielectric composite film is provided. A low-k interconnect dielectric layer is strengthened by forming whiskers in the low-k film. The...
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6977138 |
Reactive polymer coatings
A method for coating of variable substrates with highly reactive polymers. Its combination with microcontact printing is used for generating several devices such as patterned arrays of ligands for...
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6929864 |
Extensible, visible light-transmissive and infrared-reflective film and methods of making and using the film
A film contains first and second metal or metal alloy layers separated by a crosslinked polymeric spacing layer whose thicknesses are such that the film is extensible visible light-transmissive and...
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6903161 |
Low-acid ethylene copolymers for improving the adhesion of LDPE to aluminum foil in extrusion coating
This invention relates to a low-density polyethylene composition useful for coating polar substrates. This invention particularly relates to a low-density polyethylene composition useful for...
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6811829 |
Method of making a coating of a microtextured surface
A method for conformally coating a microtextured surface. The method includes flash evaporating a polymer precursor forming an evaporate, passing the evaporate to a glow discharge electrode...
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6803073 |
Particle forming method
A submicron particle forming method includes feeding a first set of precursors to a first energy application zone. Energy is applied to the first set of precursors in the first energy application...
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6793978 |
Method and device for coating at least one wiper-blade element
The invention is based on a method for coating at least one wiper blade element ( 10 ) made of an elastomer material, in which first, the surface of the wiper blade element ( 10 ) is cleaned and...
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6767590 |
Poled plasma deposition
A poled polymer material is formed on the surface of a substrate by poling a nonlinear optical reactant during a plasma polymerizing deposition of the reactant onto the surface. The substrate is...
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6756074 |
Methods for the deposition and curing of coating compositions
Systems and methods for creating a combinatorial coating library including a coating system operatively coupled to at least one of a plurality of materials suitable for forming at least one coating...
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6703296 |
Method for forming metal salicide
A method for forming a metal salicide layer on a shallow junction is described. A substrate having a gate structure thereon and a shallow junction therein is provided. An atomic layer deposition...
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6682782 |
Organic compound having an acetylene group, vacuum deposition polymerization thereof, deposited polymerized thin film, and electroluminescence device containing same
The present invention relates to an organic compound having acetylene group(s), a thin film formed by vacuum deposition polymerization using said organic compound, vacuum deposition polymerization...
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6660339 |
Process for hydrophobic treatment of water vapor permeable substrates
The present invention relates to a process, preferably a continuous process, of coating a substrate, which allows water vapor and preferably air permeation, with a hydrophobic coating. The process...
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6656537 |
Plasma enhanced chemical deposition with low vapor pressure compounds
A method for plasma enhanced chemical vapor deposition of low vapor monomeric materials. The method includes flash evaporating a polymer precursor forming an evaporate, passing the evaporate to a...
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6613393 |
Method for applying a wear protection layer system having optical properties onto surfaces
A method for applying wear protection layers including the steps of depositing a wear protection matrix with the aid of a PECVD method, and incorporating optically functional inclusions in the form...
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6569534 |
Optical material and optical element using the same
An optical material including a crystalline silicon and Fe x Si 2 in the form of dots, islands, or a film is provided. The Fe x Si 2 has a symmetrical monoclinic crystalline structure belonging...
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6548121 |
Method for producing adhesive surface coatings
The invention relates to a process for the production of strongly adherent coatings on an inorganic or organic substrate that comprises, in a first step a) subjecting the inorganic or organic...
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6544600 |
Plasma enhanced chemical deposition of conjugated polymer
A method for making conjugated polymers. The method includes flash evaporating a conjugated material forming an evaporate, passing the evaporate to a glow discharge electrode creating a glow...
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6497924 |
Method of making non-linear optical polymer
A method for making a non-linear optical polymer layer. The method includes flash evaporating a liquid polymer precursor mixture containing a plurality of non-linear optical molecules forming an...
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6475571 |
Method of producing thin resin films
A method for manufacturing a resin thin film of the present invention includes supplying a liquid resin material and a gas to a two-fluid nozzle by pressure; ejecting the resin material in the form...
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6468595 |
Vaccum deposition of cationic polymer systems
A thermally-stable cationic photoinitiator capable of flash vaporization under vacuum and temperature conditions of an available flash-evaporation chamber is selected. The photoinitiator is mixed...
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6287642 |
Method for coating a rubber wiper blade
In the process for coating the elastomeric rubber wiper a vaporous coating material is generated and activated by a plasma and/or laser; a protective coating is formed on a rubber wiper surface by...
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6284050 |
UV exposure for improving properties and adhesion of dielectric polymer films formed by chemical vapor deposition
An ultraviolet-assisted chemical vapor deposition system for improving the adhesion, hardness, and thermal stability of organic polymer films deposited on semiconductor wafers is provided. The...
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6232364 |
Ultraviolet curable coating compositions for cationic electrodeposition applicable to metallic materials and electrically conductive plastic materials
An ultraviolet curable coating composition for cationic electrodeposition applicable to metal plated materials which composition comprises 100 weight parts of acrylic resin containing 10 to 70% by...
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6231930 |
Process for producing radiation-induced self-terminating protective coatings on a substrate
A gas and radiation are used to produce a protective coating that is substantially void-free on the molecular scale, self-terminating, and degradation resistant. The process can be used to deposit...
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6228434 |
Method of making a conformal coating of a microtextured surface
The method of the present invention for conformally coating a microtextured surface has the steps of (a) flash evaporating a coating material monomer in an evaporate outlet forming an evaporate;...
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6214422 |
Method of forming a hybrid polymer film
A hybrid film, comprising a first polymer film having a plasma-treated surface and a second polymer film having first and second surfaces, with the first surface of the second polymer film being...
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6180185 |
Method of forming a film on a substrate
An apparatus for forming a film on a substrate includes a gas inlet and an insert attached to the gas inlet, the insert including a deposition source material such as lithium. To form the film on...
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6165875 |
Methods for modifying solid phase crystallization kinetics for A-Si films
This invention is directed toward methods for fabricating polycrystalline thin films. More particularly, the invention is directed toward optimized solid phase crystallization of plasma enhanced...
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6114032 |
Films for use in microelectronic devices and methods of producing same
The present invention provides thin films for use in microelectronic devices. In one aspect, the present invention provides a copper diffusion barrier. In another aspect, the present invention...
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6093448 |
Process for gradient refractive index optical objects
An improved process, preferably continuous, for the manufacture of gradient refractive index optical objects, wherein a core polymer, which itself may be prepared by a continuous and incorporated...
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6057004 |
Method of treating surfaces
The invention concerns a method of treating surfaces and surface-adjacent layers of dental components in particular. A series of several different plasma treatments produces high adhesion between...
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6045864 |
Vapor coating method
Coating system and method that allows coatings to be formed from a wide variety of coatable compositions that are entirely free of any solvents or, alternatively, have relatively little solvent in...
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6040017 |
Formation of multilayered photonic polymer composites
The fabrication of linear and non-linear optical materials including photoconductive, photorefractive, and optical limiting polymer composite films from radiation curable homogeneous solutions or...
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6025036 |
Method of producing a film coating by matrix assisted pulsed laser deposition
A film of a coating material is produced on a substrate by a pulsed laser deposition method in which the material that forms the coating material is first combined with a matrix material to form a...
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6022595 |
Increase of deposition rate of vapor deposited polymer by electric field
A method of depositing a polymer film onto a semiconductor wafer is provided which includes the steps of connecting the wafer to one terminal of a voltage source, connecting an electrode to an...
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6001414 |
Dual damascene processing method
A dual damascene processing method comprising the steps depositing sequentially a first oxide layer, a SRO layer and a second oxide layer over a substrate. Then, photolithographic and etching...
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5958523 |
Coating and lubricant compositions containing polyfluorfullerenes and methods of use
The invention relates coating and lubricating compositions comprising polyfluorfullerene and method for using same. The surface to be coated can also be the surface of granulated or powdery...
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5945174 |
Acrylate polymer release coated sheet materials and method of production thereof
Sheet materials according to the present invention comprise a sheet material substrate, such as for example a film or paper sheet, with a polymer release coating overlying and adhered to a surface...
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5939150 |
Method for treating a substrate surface
The present invention relates to a method for treating a substrate surface. The substrate surface is coated with a thin film of a treating agent, which is capable of enhancing or reducing its...
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5925420 |
Method for preparing crosslinked aromatic polymers as low κ dielectrics
Amorphously crosslinked aromatic polymeric low κ materials and methods for their fabrication are provided. The subject materials are prepared by a modified transport polymerization process, in...
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5853817 |
Method for producing a thin film resin matrix
The present invention provides a method for producing a a high-performance black matrix taking the palce of a Cr film black matrix and a high-performance color display thin film, which is comprises...
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5830587 |
Magnetic devices with enhanced poles
A process resulting in enhanced pole performance, relative to permalloy poles, in narrow track magnetic devices. A preferred process includes increasing the anisotropy field of the pole material...
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5629245 |
Method for forming a multi-layer planarization structure
An improved CVD apparatus for depositing a uniform film is shown. The apparatus comprises a reaction chamber, a substrate holder and a plurality of light sources for photo CVD or a pair of...
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5542373 |
Method of manufacturing GaAs single crystals
A method of manufacturing GaAs single crystals in which gas in the vicinity of the surface of a substrate crystal is irradiated with light so as to an epitaxial growth of GaAs single crystals may...
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5510151 |
Continuous film-forming process using microwave energy in a moving substrate web functioning as a substrate and plasma generating space
A microwave plasma CVD method for continuously forming a large area and length functional deposited film, the method comprises: continuously moving a substrate web in the longitudinal direction by...
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