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7977611 |
Systems and methods for providing localized heat treatment of metal components
Systems and methods for providing localized heat treatment of metal components are provided. In this regard, a representative method includes: identifying a portion of a metal component to which...
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7955569 |
Metal halide reactor for CVD and method
A reaction vessel (reactor) is shown that, filled with metal and placed either within a CVD type furnace or in a housing in fluid communication with the CVD type furnace can produce commercial...
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7901739 |
Gas turbine engine components with aluminide coatings and method of forming such aluminide coatings on gas turbine engine components
A turbine engine component (10) with a protective aluminide coating (14) that include additions of silicon and a dopant, such as yttrium and/or hafnium, in an amount effective to reduce sulfidation...
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7879396 |
High aspect ratio performance coatings for biological microfluidics
We have developed an improved vapor-phase deposition method and apparatus for the application of layers and coatings on various substrates. The method and apparatus are useful in the fabrication of...
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7833909 |
Method of manufacturing semiconductor device, and etching apparatus
Aimed at suppressing roughening in a circumferential portion of a layer to be etched in the process of removing a hard mask formed thereon, an etching apparatus of the present invention has a...
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7736704 |
Process for applying a protective layer
To protect a base metal layer (1) against high-temperature corrosion and high-temperature erosion, an adhesive layer (3) based on MCrAlY is applied to the base metal layer (1). The adhesive layer...
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7498059 |
Method for growing thin films
The invention relates to a method and apparatus for growing a thin film onto a substrate, in which method a substrate placed in a reaction space (21) is subjected to alternately repeated surface...
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7429403 |
Gas distributor for vapor coating method and container
A method for introducing an inert carrier gas into a coating container used to provide a metallic coating on articles. The method includes introducing the inert carrier gas into the coating...
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7422769 |
Protective coating for application to a substrate and method for manufacturing a protective coating
A refractory, oxidation-resistant, and corrosion-resistant protective coating for application to a substrate, in particular for application to parts of turbines or aircraft propulsion engines, is...
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7390535 |
Simple chemical vapor deposition system and methods for depositing multiple-metal aluminide coatings
A chemical vapor deposition (CVD) system and method for applying an aluminide coating constituted by two or more extrinsic metal components on a jet engine component. The aluminide coating is...
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7344757 |
Method for treating or pretreating containers
A process for the treatment or pretreatment of containers made of aluminum, aluminum-containing alloys, magnesium-containing alloys, iron-containing materials such as steel, coated iron-containing...
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7311942 |
Method for binding halide-based contaminants during formation of a titanium-based film
A method and apparatus are presented for reducing halide-based contamination within deposited titanium-based thin films. Halide adsorbing materials are utilized within the deposition chamber to...
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7294361 |
Method and device for gas phase diffusion coating of metal components
A process for gas diffusion coating of metallic components; in which a component surface which is to be coated is brought into contact with a metal halide as coating gas, to form a diffusion layer...
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7273635 |
Method of forming aluminide diffusion coatings
Method of forming an outwardly grown aluminide diffusion coating on a superalloy substrate disposed in a coating retort including the steps of heating the substrate to a temperature of 900 to 1200...
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7163718 |
Method of selective region vapor phase aluminizing
A process for forming diffusion aluminide coatings on an uncoated surface of a substrate, without interdiffusing a sufficient amount of aluminum into a coating layer to adversely affect the coating...
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7144809 |
Production of elemental films using a boron-containing reducing agent
The present invention relates generally to depositing elemental thin films. In particular, the invention concerns a method of growing elemental metal thin films by Atomic Layer Deposition (ALD)...
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7115304 |
High throughput surface treatment on coiled flexible substrates
One or more substrates may be coiled into one or more coils in such a way that adjacent turns of the coils do not touch one another. The one or more coiled substrates are placed in a treatment...
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7083827 |
Nickel-base superalloy having an optimized platinum-aluminide coating
A nickel-base superalloy substrate includes a surface region having an integrated aluminum content of from about 18 to about 24 percent by weight and an integrated platinum content of from about 18...
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7063740 |
Process for strengthen grain boundaries of an article made from a Ni based superalloy
It is disclosed a method for strengthen the grain boundaries of an article (1) made from a Ni based superalloy while the article (1) is in the solid state and containing at least one grain...
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7048973 |
Metal film vapor phase deposition method and vapor phase deposition apparatus
A copper film vapor phase deposition method includes the steps of exposing high-purity copper to a plasma of a gas containing chlorine gas to etch the high-purity copper, thereby generating active...
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7026011 |
Aluminide coating of gas turbine engine blade
A method for applying an aluminide coating on a gas turbine engine blade having an external surface and an internal cooling cavity having an internal surface that is connected to the external...
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6964790 |
Method for forming metallic tungsten film
A deposition method for supplying process gases into an evacuated processing vessel to deposit a metal tungsten film on the surface of an object to be processed. The processing gases include...
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6958174 |
Solid material comprising a thin metal film on its surface and methods for producing the same
The present invention provides a solid material comprising a solid substrate having a thin metal film and methods for producing the same. The method generally involves using a plurality...
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6933012 |
Method for protecting a surface with a silicon-containing diffusion coating
A surface of an article is protected by coating the surface with a silicon-containing coating by preparing a coating mixture of silicon, a halide activator, and an oxide powder, positioning the...
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6913788 |
Process and apparatus for chroming an inner surface of a component
A process for chroming an inner surface of a component, in which the inner surface which is to be coated is not brought into contact with a powder which forms the coating gas, includes: providing a...
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6911234 |
Chemical vapor deposition apparatus and method
Chemical vapor deposition apparatus and method are provided with coating gas distribution and exhaust systems that provide more uniform coating gas temperature and coating gas flow distribution...
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6905543 |
Methods of forming tungsten nucleation layer
The nucleation delay in the formation of a tungsten layer on a substrate is reduced or eliminated by alternative processes. In one process the substrate is exposed to atomic hydrogen before the...
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6900129 |
CVD of tantalum and tantalum nitride films from tantalum halide precursors
A chemical vapor deposition (CVD) method for depositing high quality conformal tantalum (Ta) and tantalum nitride (TaNx) films from inorganic tantalum pentahalide (TaX5) precursors is described....
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6887519 |
Method for coating hollow bodies
A process for coating hollow bodies, in which a powder mixture including a metal donor powder, an inert filler powder and an activator powder including a metal halide is provided, the powder...
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6881452 |
Method for improving the TBC life of a single phase platinum aluminide bond coat by preoxidation heat treatment
A thermal barrier coating system having an improved life as a result of a preoxidation treatment applied to a single phase platinum aluminide bond coat. After coating the substrate to form a...
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6863927 |
Method for vapor phase aluminiding of a gas turbine blade partially masked with a masking enclosure
A gas turbine blade to be protected by an aluminide coating is placed within a masking enclosure including an airfoil enclosure that prevents deposition on the airfoil of the gas turbine blade, and...
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6863925 |
Method for vapor phase aluminiding including a modifying element
An article is coasted by preparing a coating source having an aluminum halide, a fluoride or an iodide of a modifying element as a source of the modifying element, and a carrier gas. The modifying...
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6838125 |
Method of film deposition using activated precursor gases
A method for depositing a film on a substrate is provided. In one aspect, the method includes providing a metal-containing precursor to an activation zone, and activating the metal-containing...
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6821889 |
Production of elemental thin films using a boron-containing reducing agent
The present invention relates generally to depositing elemental thin films. In particular, the invention concerns a method of growing elemental metal thin films by Atomic Layer Deposition (ALD)...
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6797337 |
Method for delivering precursors
A method and apparatus for delivering precursors to a chemical vapor deposition or atomic layer deposition chamber is provided. The apparatus includes a temperature-controlled vessel containing a...
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6767582 |
Method of modifying source chemicals in an ald process
This invention concerns a method for modifying a source material used in an ALD process, a method for depositing transition metal nitride thin films by an ALD process and apparatus for use in such...
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6759081 |
Method of depositing thin films for magnetic heads
A structure and method of fabricating a magnetic read head, comprises forming a fill layer for a magnetic read head gap using atomic layer deposition (ALD). The fill layer comprises an insulator,...
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6730179 |
Method for producing local aluminide coating
Method for localized aluminide coating applied for the first time or as repair includes creating a contained space by disposing coating material comprising an aluminum source and a halide activator...
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6669870 |
Substituted phenylethylene precursor synthesis method
A Cu(hfac) precursor with a substituted phenylethylene ligand has been provided. The substituted phenylethylene ligand includes bonds to molecules selected from the group consisting of C1 to C6...
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6656540 |
Method for forming metallic film and apparatus for forming the same
The present invention provides methods and apparatus for the formation of a thin noble metal film which can achieve a high rate of film growth, can use inexpensive raw materials, and do not allow...
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6626186 |
Method for stabilizing the internal surface of a PECVD process chamber
Apparatus and method of processing a substrate comprises positioning a substrate within a processing space of a processing chamber, and depositing a material layer, such as a titanium-containing...
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6623790 |
Method of adjusting the size of cooling holes of a gas turbine component
A method for adjusting the size of cooling holes of a gas turbine component is disclosed in which the component is shielded with an easily removable and non- conductive shielding material without...
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6616969 |
Apparatus and method for selectively coating internal and external surfaces of an airfoil
A gas turbine airfoil has an external surface and an internal passage therethrough. The internal passage is selectively coated by providing a source of a flowable precursor coating material in...
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6602356 |
CVD aluminiding process for producing a modified platinum aluminide bond coat for improved high temperature performance
A method of depositing by chemical vapor deposition a modified platinum aluminide diffusion coating onto a superalloy substrate comprising the steps of applying a layer of a platinum group metal to...
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6602550 |
Method for localized surface treatment of metal component by diffusion alloying
A method for treating a portion of a metal component by diffusion alloying includes providing a container having at least one open end. The container has a width that is greater than the width of...
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6592941 |
Aluminum and silicon diffusion coating
A method of forming an aluminum silicon diffusion coating on a surface of an alloy product utilizes a diffusion mixture containing by weight 1% to 5% aluminum, 0.5% to 5% silicon, 0.5% to 3%...
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6589668 |
Graded platinum diffusion aluminide coating
Method for forming on a superalloy or other metallic substrate a platinum graded, outward single phase diffusion aluminide coating on a surface of the substrate by depositing a layer comprising Pt...
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6589329 |
Composition and process for production of copper circuitry in microelectronic device structures
Compositions useful for chemical vapor delivery (CVD) formation of copper layers in semiconductor integrated circuits, e.g., interconnect metallization in semiconductor device structures, as an...
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6582765 |
Carbide coated steel articles and method of making them
Chain parts and other steel articles are provided with hard, wear-resistant carbide coatings by tumbling them in a heated retort with a particulate mix which includes a source of vanadium and/or...
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6569496 |
CVD of metals capable of receiving nickel or alloys thereof using inert contact
The present invention discloses a CVD (Chemical Vapor Deposition) process where nickel or alloys thereof, such as, Ni/Cu, Ni/Co, are deposited on metal surfaces which are capable of receiving...
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