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7387814 |
Process for in situ coating of turbo-machine components
A method for coating a component of a turbo-machine. The method allows arranging a turbine rotor in the turbo-machine and introducing a coating material into the interior of the turbo-machine such...
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7384668 |
CCVD method for producing tubular carbon nanofibers
The invention relates to a CCVD method for producing tubular carbon nanofibers on a support by catalytically depositing carbon out of the vapor phase. The inventive method is characterized in that...
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7384665 |
Formation of protective coatings for color filters
A structure and method for producing color filters with a protective silation layer is described. In one embodiment, each filter is coated with a silation layer to prevent bleeding of material...
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7378133 |
Fabrication system, light-emitting device and fabricating method of organic compound-containing layer
The present invention provides a vapor deposition system for a film forming systems that promote an efficiency of utilizing an EL material and is excellent in uniformity or throughput of forming an...
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7378127 |
Chemical vapor deposition methods
A chemical vapor deposition apparatus includes a deposition chamber defined at least in part by chamber walls, a substrate holder inside the chamber, and at least one process chemical inlet to the...
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7374941 |
Active reactant vapor pulse monitoring in a chemical reactor
A method and apparatus for determining changes in a supply system, designed to supply repeated pulses of a vapor phase reactant to a reaction chamber is disclosed. One embodiment involves providing...
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7374793 |
Methods and structures for promoting stable synthesis of carbon nanotubes
A method for synthesizing carbon nanotubes and structure formed thereby. The method includes forming carbon nanotubes on a plurality of synthesis sites supported by a first substrate, interrupting...
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7357958 |
Methods for depositing gamma-prime nickel aluminide coatings
Methods for depositing an overlay coating on articles intended for use in hostile thermal environments. The coating has a predominantly gamma prime-phase nickel aluminide (Ni 3 Al) composition...
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7354631 |
Chemical vapor deposition apparatus and methods
This invention includes chemical vapor deposition apparatus, methods of chemical vapor depositing an amorphous carbon comprising layer on a substrate, and methods of chemical vapor depositing at...
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7354622 |
Method for forming thin film and apparatus for forming thin film
A shower head having a plurality of ejection holes for supplying an organic metal gas at uniform density to the surface of a substrate and a plurality of ejection holes for supplying an oxidizing...
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7354617 |
Fixing belt and method for evaluating it
A method for evaluating a fixing belt includes forming a fixing belt which includes a substrate, an elastic layer laminated on the substrate, and a mold releasing layer laminated on the elastic...
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7351449 |
Chemical vapor deposition methods for making powders and coatings, and coatings made using these methods
Flame produced vapors for combustion chemical vapor deposition are redirected from the direction of the flame by differential atmospheric pressure, such as positive pressure provided by a blower or...
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7351285 |
Method and system for forming a variable thickness seed layer
A method and system for forming a variable thickness seed layer on a substrate for a subsequent metal electrochemical plating process, where the seed layer thickness profile improves uniformity of...
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7348445 |
Organoaluminum precursor compounds
This invention relates to organoaluminum precursor compounds represented by the formula:
wherein R 1 , R 2 , R 3 and R 4 are the same or different and each represents hydrogen or an alkyl...
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7348274 |
Method of aligning carbon nanotubes and method of manufacturing field emission device using the same
A method of aligning carbon nanotubes (CNTs) and a method of manufacturing a field emission device (FED) using the same, wherein a mold having an intaglio pattern is prepared, an aqueous solution...
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7344755 |
Methods and apparatus for processing microfeature workpieces; methods for conditioning ALD reaction chambers
The present disclosure provides methods and apparatus that may be used to process microfeature workpieces, e.g., semiconductor wafers. Some aspects have particular utility in depositing TiN in a...
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7344753 |
Nanostructures including a metal
One embodiment includes noncatalytically forming a nanowire on a substrate from an organometallic vapor without application of any type of reduction agent. The nanowire is grown during this...
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7341944 |
Methods for synthesis of metal nanowires
Methods for synthesizing metal nanowires are provided. A metalorganic layer is deposited on a substrate as a thin film. The thermal decomposition of the metalorganic thin film in the presence of...
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7339139 |
Multi-layered radiant thermal evaporator and method of use
The present invention provides a system and method for uniform coating of a substrate at high deposition rates by evaporating a coating material in a vacuum chamber. The system includes an...
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7335398 |
Method to modify the spatial response of a pattern generator
Systems and methods are used to modify a layer on a substrate that is used to form a pattern generator, so that light reflecting from the modified substrate has a trapezoidal or other custom...
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7335397 |
Pressure gradient CVI/CVD apparatus and method
An apparatus and method for densifying porous structures inside a furnace using pressure gradient CVI/CVD. The apparatus includes a stack of porous structures where each porous structure has an...
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7335396 |
Methods for controlling mass flow rates and pressures in passageways coupled to reaction chambers and systems for depositing material onto microfeature workpieces in reaction chambers
Methods, apparatuses, and systems for controlling mass flow rates and pressures in passageways coupled to reaction chambers are disclosed herein. In one embodiment, a method includes controlling a...
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7323231 |
Apparatus and methods for plasma vapor deposition processes
One aspect of the invention is directed toward a method of forming a conductive layer on a microfeature workpiece. In one embodiment, the method comprises placing a microfeature workpiece in a...
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7323207 |
Method and apparatus for fingerprint detection
A portable apparatus for detecting latent fingerprints that discharges a vapor of a cyanoacrylate-containing solution. The apparatus comprises a reservoir for holding a liquid solution comprising...
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7316967 |
Flow method and reactor for manufacturing noncrystals
A population of nanocrystals having a narrow and controllable size distribution and can be prepared by a segmented-flow method.
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7311976 |
Glazing coated with at least one layer having thermochromic properties
A glazing coated with at least one layer having thermochromic properties comprising vanadium oxide, and also with at least one other layer having thermal properties, such as an infrared reflecting...
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7309514 |
Electron beam modification of CVD deposited films, forming low dielectric constant materials
A process for forming low dielectric constant dielectric films for the production of microelectronic devices. A dielectric layer is formed on a substrate by chemical vapor depositing a monomeric or...
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7300558 |
Rapid cycle time gas burster
An apparatus for rapidly establishing at least one preselected gas pressure in a process chamber comprising:
(a) a chamber defining an interior space adapted to be maintained at a reduced...
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7297361 |
In-line deposition processes for circuit fabrication
A method for circuit fabrication includes positioning first and second webs of film in proximity to each other, wherein the second web of film defines a deposition mask, and deposition material on...
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7294361 |
Method and device for gas phase diffusion coating of metal components
A process for gas diffusion coating of metallic components; in which a component surface which is to be coated is brought into contact with a metal halide as coating gas, to form a diffusion layer...
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7294360 |
Conformal coatings for micro-optical elements, and method for making the same
A micro-optical element is produced through vapor deposition techniques, such as atomic layer deposition. An optical structure having a surface with uneven structures is exposed to one or more...
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7291360 |
Chemical vapor deposition plasma process using plural ion shower grids
A chemical vapor deposition process is carried out in a reactor chamber having a set of plural parallel ion shower grids that divide the chamber into an upper ion generation region and a lower...
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7288286 |
Delivering organic powder to a vaporization zone
A method for vaporizing organic material and condensing it onto a surface to form a layer, comprising: providing a quantity of first organic material in a powdered form in a first container and a...
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7285308 |
Chemical vapor deposition of high conductivity, adherent thin films of ruthenium
A multi-step method for depositing ruthenium thin films having high conductivity and superior adherence to the substrate is described. The method includes the deposition of a ruthenium nucleation...
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7283677 |
Measuring sub-wavelength displacements
Measurement systems and methods extend the use of optical navigation to measure displacements smaller than a wavelength of the light used to capture images of an object measured. Nanometer-scale...
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7282271 |
Durable thermal barrier coatings
A durable protective coating may be formed by applying a thin layer of metastable alumina to a bond coating on a substrate. A thermal barrier coating may then be applied to the metastable alumina...
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7282239 |
Systems and methods for depositing material onto microfeature workpieces in reaction chambers
In one embodiment, the system includes a gas supply assembly having a first gas source, a first gas conduit coupled to the first gas source, a first valve assembly, a reaction chamber, and a gas...
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7279078 |
Thin-film coating for wheel rims
A process for coating a non-uniform, thin-film, dichroic pattern to a wheel rim or motorcycle part. The thin-film coating adds a colored or iridescent pattern to the wheel rim or motorcycle part,...
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7267843 |
Textile fabric and yarn composed of synthetic fibers, preparation thereof and use thereof
Textile fabric composed of synthetic fibers is subjected to a gas phase fluorination in a fluorine/inert gas atmosphere having a fluorine concentration in the range from 0.1 to 10% in order that...
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7267842 |
Method for removing titanium dioxide deposits from a reactor
A process for the selective removal of a TiO 2 -containing substance from an article for cleaning applications is disclosed herein. In one embodiment, there is provided a process for removing a TiO...
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7264846 |
Ruthenium layer formation for copper film deposition
A method of ruthenium layer formation for high aspect ratios, interconnect features is described. The ruthenium layer is formed using a cyclical deposition process. The cyclical deposition process...
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7259055 |
Method of forming high-luminescence silicon electroluminescence device
A method for forming a high-luminescence Si electroluminescence (EL) phosphor is provided, with an EL device made from the Si phosphor. The method comprises: depositing a silicon-rich oxide (SRO)...
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7258934 |
Thermal barrier coating and a method of applying such a coating
Method and arrangement for providing a ceramic thermal barrier coating, TBC, deposited and attached directly to a metallic substrate ( 2 ), or an intermediate bond coating ( 3 ) deposited on such a...
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7258892 |
Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition
The present disclosure provides methods and systems for controlling temperature. The method has particular utility in connection with controlling temperature in a deposition process, e.g., in...
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7255906 |
Information recording medium and method for producing the same
In an information recording medium of the present invention, a recording layer and first and second dielectric layers are formed on a surface of a substrate. In the recording layer, at least one of...
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7253084 |
Deposition from liquid sources
A liquid injector is used to vaporize and inject a silicon precursor into a process chamber to form silicon-containing layers during a semiconductor fabrication process. The injector is connected...
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7252859 |
Organic materials for an evaporation source
A method of using a compacted pellet having uniform blended mixture with at least first and second different organic components that sublime at temperatures T 1 and T 2 respectively, wherein T 1 ...
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7252858 |
System and method for abating the simultaneous flow of silane and arsine
A system and method for abating a simultaneous flow of silane and arsine contained in an exhaust gas of DRAM processing chamber ( 12 ). The system includes a CVD abatement apparatus ( 20 ) and a...
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7244467 |
Process for a beta-phase nickel aluminide overlay coating
A process for forming a beta-phase nickel aluminide (NiAl) overlay coating that is suitable for use as a bond coat for a thermal barrier coating (TBC). The overlay coating is deposited by a method...
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7241479 |
Thermal CVD synthesis of nanostructures
The present invention is generally directed to a novel process for the production of nanowires and nanobelts and the novel nanostructures which can be produced according to the disclosed processes....
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